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公开(公告)号：US20090253054A1
公开(公告)日：2009-10-08
申请号：US12416468
申请日：2009-04-01
IPC分类号： G03F1/00
CPC分类号： G03F1/32
摘要： Disclosed is a phase shift mask blank (11) that can prevent the occurrence of a loading effect. The phase shift mask blank (11) includes a phase shift film (5) containing silicon, a light-shielding film (2) made of a material resistant to etching of the phase shift film (5), and an etching mask film (3) made of an inorganic material resistant to etching of the light-shielding film (2), which are formed in this order on a substrate (1) transparent to exposure light. Assuming that the thickness of the phase shift film (5) is t1, the etching rate of the phase shift film (5) by dry etching with an etchant using the etching mask film (3) and the light-shielding film (2) as a mask is v1, the thickness of the etching mask film (3) is t2, and the etching rate of the etching mask film (3) by dry etching with the above etchant is v2, (t1/v1)≦(t2/v2) is satisfied.
摘要翻译： 公开了能够防止发生负载效应的相移掩模坯料（11）。 相移掩模空白（11）包括含有硅的相移膜（5），由耐相变膜（5）的蚀刻材料制成的遮光膜（2）和蚀刻掩模膜（3） ）由能够对透光的基板（1）上的遮光膜（2）的蚀刻的无机材料制成。 假设相移膜（5）的厚度为t1，通过使用蚀刻掩模膜（3）和遮光膜（2）的蚀刻剂进行干蚀刻的相移膜（5）的蚀刻速率为 掩模为v1，蚀刻掩模膜（3）的厚度为t2，用上述蚀刻剂通过干蚀刻蚀刻掩模膜（3）的蚀刻速率为v2，（t1 / v1）<=（t2 / v2）满足。
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42.发明申请Method for manufacturing cellulose ester film, and cellulose ester film, optical film, polarizing plate and liquid crystal display device using the same 审中-公开纤维素酯薄膜的制造方法，纤维素酯薄膜，光学薄膜，偏振片及使用其的液晶显示装置公开(公告)号：US20080213512A1
公开(公告)日：2008-09-04
申请号：US12075765
申请日：2008-03-13
CPC分类号： C08K5/13 , C08K5/0008 , C08K5/34 , Y10T428/1041 , Y10T428/31971 , C08L1/00
摘要： A method for manufacturing a cellulose ester film comprising the steps of 1) mixing a cellulose ester exhibiting a water content of not greater than 3.0 weight %, at least one plasticizer selected from the groups A and B in an amount of one to thirty weight % of the cellulose ester, and at least one additive selected from the groups of C and D in an amount of 0.01 to 5 weight % of the cellulose ester to obtain a mixture, group A: ester plasticizers formed from a polyhydric alcohol and a monohydric carboxylic acid; group B: ester plasticizers formed from a polyhydric carboxylic acid and a monohydric alcohol; group C: hindered phenol anti-oxidants; group D: hindered amine light stabilizers, 2) heating to melt the mixture at a temperature (Tm) of between 150 and 300° C., and 3) forming a cellulose ester film with a melt casting method employing the melted mixture.
摘要翻译： 一种纤维素酯薄膜的制造方法，其特征在于，包括以下步骤：1）将含水率为3.0重量％以下的纤维素酯与选自A，B组中的至少1种增塑剂混合1〜30重量％ 的纤维素酯和至少一种选自C和D组的添加剂，其量为纤维素酯的0.01至5重量％，以获得混合物，组A：由多元醇和一元羧酸形成的酯增塑剂 酸; B组：由多元羧酸和一元醇形成的酯增塑剂; C组：受阻酚抗氧化剂; D组：受阻胺光稳定剂，2）在150〜300℃的温度（Tm）下加热熔融混合物，和3）使用熔融混合物的熔融浇铸法形成纤维素酯薄膜。
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公开(公告)号：US07314690B2
公开(公告)日：2008-01-01
申请号：US10820785
申请日：2004-04-09
申请人： Yasushi Okubo , Mutsumi Hara
发明人： Yasushi Okubo , Mutsumi Hara
IPC分类号： G03F1/00
CPC分类号： G03F1/80
摘要： In a method of producing a photomask (10) in which a light-transmissive substrate (1) is formed thereon with a chromium pattern (21) having a global opening ratio difference in its plane on the light-transmissive substrate (1), use is made, as an etching mask for a chromium film (2), of an etching mask pattern (31) made of an inorganic-based material having a resistance against etching of the chromium film (2). Dry etching of the chromium film (2) is carried out under a condition selected from conditions that cause damage to a resist pattern (41) to a degree which is unallowable when etching the chromium film (2) using the resist pattern (41) as a mask.
摘要翻译： 在其上形成透光性基板（1）的光掩模（10）的制造方法中，在透光性基板（1）上形成有在其透光性基板（1）的平面上具有全局开口率差的铬图案（21），使用 作为铬膜（2）的蚀刻掩模，制成由具有耐蚀刻铬膜（2）的无机基材料制成的蚀刻掩模图案（31）。 铬膜（2）的干法蚀刻在选自使用抗蚀图案（41）蚀刻铬膜（2）时对抗蚀剂图案（41）造成损伤的条件下至不能允许的程度的条件下进行， 一个面具
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44.发明申请Mask blank, mask blank manufacturing method, transfer mask manufacturing method, and semiconductor device manufacturing method 有权掩模坯料，掩模坯料制造方法，转印掩模制造方法和半导体器件制造方法公开(公告)号：US20070111490A1
公开(公告)日：2007-05-17
申请号：US10551136
申请日：2004-03-31
申请人： Yasushi Okubo , Yasunori Yokoya
发明人： Yasushi Okubo , Yasunori Yokoya
CPC分类号： G03F7/2028 , G03F1/50
摘要： In the photomask blank 100, which is an original plate of a transfer mask having a transfer pattern to be transferred to the body to be subjected to transfer on the substrate 10, the photomask blank 100 includes a light shielding film 20 becoming the transfer pattern and a resist film 30 on the substrate 10, and the resist film 30 formed on the peripheral edge of the main surface of the substrate 10 is removed in a predetermined region in a supported region 31 of the photomask blank 100 supported by the substrate holding member of the exposure device, so that a desired pattern positional accuracy and a desired focus accuracy are obtained, when the transfer mask having the transfer pattern obtained by patterning the light shielding film 20 is supported by the substrate holding member of the exposure device. With this structure, when a reticle is mounted on the substrate holding member of a stepper, the deformation of the reticle is suppressed, and lowering of a positional accuracy of the transfer pattern and the lowering of a focus accuracy can be suppressed to minimum.
摘要翻译： 在作为要传送到主体的转印图案的转印掩模的原始板的光掩模坯料100中，在基板10上进行转印，光掩模坯料100包括成为转印图案的遮光膜20和 基板10上的抗蚀剂膜30和形成在基板10的主表面的周缘上的抗蚀膜30在由基板保持构件支撑的光掩模坯料100的支撑区域31中的预定区域中被去除 当通过曝光装置的基板保持部件支撑具有通过图案化遮光膜20获得的转印图案的转印掩模时，获得期望的图案位置精度和期望的焦点精度。 利用这种结构，当将标线片安装在步进机的基板保持部件上时，可以抑制掩模版的变形，并且能够将转印图案的位置精度和聚焦精度的降低降低到最小。
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45.发明申请Transparent film for display substrate, display substrate using the film and method of manufacturing the same, liquid crystal display, organic electroluminescence display, and touch panel 有权用于显示基板的透明膜，使用该膜的显示基板及其制造方法，液晶显示器，有机电致发光显示器和触摸屏公开(公告)号：US20070009674A1
公开(公告)日：2007-01-11
申请号：US10558363
申请日：2004-05-12
申请人： Yasushi Okubo , Kazuto Kiyohara , Satomi Kawabe
发明人： Yasushi Okubo , Kazuto Kiyohara , Satomi Kawabe
IPC分类号： C09K19/00
CPC分类号： G02F1/1333 , G09F9/30 , Y10T428/10 , Y10T428/1055 , Y10T428/1086
摘要： A transparent film for display substrate containing a cellulose ester, a plasticizer content in an amount of less than 1 percent, the aformentioned film being drawn 3 through 100 percent both in the direction of conveyance and across the width.
摘要翻译： 含有纤维素酯的显示基材用透明膜，增塑剂含量少于1％，上述膜在输送方向和宽度上都被拉伸3〜100％。
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公开(公告)号：US07141304B2
公开(公告)日：2006-11-28
申请号：US10011447
申请日：2001-10-22
申请人： Taketoshi Yamada , Hiroshi Kita , Koichi Saito , Yasushi Okubo
发明人： Taketoshi Yamada , Hiroshi Kita , Koichi Saito , Yasushi Okubo
IPC分类号： B32B9/02
CPC分类号： C08L81/06 , C08B3/22 , C08B15/05 , C08J5/18 , C08L1/10 , C08L1/14 , C08L79/02 , H01L51/52 , Y10T428/31663 , Y10T428/31971 , C08L2666/02 , C08L2666/26
摘要： A film substrate of an electronic displaying element, an electronic optical element, a touch panel, or a solar battery is disclosed which is composed mainly of an organic polymer having water solubility of 0 to 5 g based on 100 g of 25° C. water and having acetone solubility of 25 to 100 g based on 100 g of 25° C. acetone and an inorganic condensation polymer of a reactive metal compound capable of being condensed.
摘要翻译： 公开了一种电子显示元件，电子光学元件，触摸屏或太阳能电池的薄膜基片，其主要由水溶性为0-5g的有机聚合物组成，基于100g的25℃的水 并且丙酮溶解度为25-100克，基于100g丙酮和能够缩合的活性金属化合物的无机缩聚物。
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47.发明申请Plasticizer, cellulose ester film, polarizing plate, and liquid crystal display 有权增塑剂，纤维素酯膜，偏光板和液晶显示器公开(公告)号：US20060127607A1
公开(公告)日：2006-06-15
申请号：US11294493
申请日：2005-12-06
申请人： Yasushi Okubo , Kazuto Kiyohara , Satomi Kawabe , Akihiko Takeda , Takayuki Suzuki , Kazuaki Nakamura
发明人： Yasushi Okubo , Kazuto Kiyohara , Satomi Kawabe , Akihiko Takeda , Takayuki Suzuki , Kazuaki Nakamura
IPC分类号： C09K19/00
CPC分类号： C07C69/88 , C07C69/82 , C07C69/92 , C08K5/103 , Y10T428/10 , Y10T428/1036 , Y10T428/105 , Y10T428/1077 , C08L1/14
摘要： A plasticizer comprising an ester compound produced by a condensation reaction of an organic acid represented by Formula (1) with a polyhydric alcohol having at least 3 hydroxyl groups in the molecule.
摘要翻译： 一种增塑剂，其包含通过式（1）表示的有机酸与分子中具有至少3个羟基的多元醇的缩合反应产生的酯化合物。
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48.发明申请Method for manufacturing cellulose ester film, and cellulose ester film, optical film, polarizing plate and liquid crystal display device using the same 审中-公开纤维素酯薄膜的制造方法，纤维素酯薄膜，光学薄膜，偏振片及使用其的液晶显示装置公开(公告)号：US20060069192A1
公开(公告)日：2006-03-30
申请号：US11227782
申请日：2005-09-15
CPC分类号： C08K5/13 , C08K5/0008 , C08K5/34 , Y10T428/1041 , Y10T428/31971 , C08L1/00
摘要： A method for manufacturing a cellulose ester film comprising the steps of 1) mixing a cellulose ester exhibiting a water content of not greater than 3.0 weight %, at least one plasticizer selected from the groups A and B in an amount of one to thirty weight % of the cellulose ester, and at least one additive selected from the groups of C and D in an amount of 0.01 to 5 weight % of the cellulose ester to obtain a mixture, group A: ester plasticizers formed from a polyhydric alcohol and a monohydric carboxylic acid; group B: ester plasicizers formed from a polyhydlic carboxylic acid and a monohydric alcohol; group C: hindered phenol anti-oxidants; group D: hindered amine light stabilizers, 2) heating to melt the mixture at a temperature (Tm) of between 150 and 300° C., and 3) forming a cellulose ester film with a melt casting method employing the melted mixture.
摘要翻译： 一种纤维素酯薄膜的制造方法，其特征在于，包括以下步骤：1）将含水率为3.0重量％以下的纤维素酯与选自A，B组中的至少1种增塑剂混合1〜30重量％ 的纤维素酯和至少一种选自C和D组的添加剂，其量为纤维素酯的0.01至5重量％，以获得混合物，组A：由多元醇和一元羧酸形成的酯增塑剂 酸; B组：由多羟基羧酸和一元醇形成的酯类改性剂; C组：受阻酚抗氧化剂; D组：受阻胺光稳定剂，2）在150〜300℃的温度（Tm）下加热熔融混合物，和3）使用熔融混合物的熔融浇铸法形成纤维素酯薄膜。
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49.发明授权Organic-inorganic hybrid film, its manufacturing method, optical film, and polarizing film 失效有机 - 无机杂化膜，其制造方法，光学膜和偏光膜公开(公告)号：US06946519B2
公开(公告)日：2005-09-20
申请号：US10640616
申请日：2003-08-13
申请人： Yasushi Okubo , Takahiro Takagi , Yasuo Kurachi , Kaori Ono
发明人： Yasushi Okubo , Takahiro Takagi , Yasuo Kurachi , Kaori Ono
IPC分类号： C08L1/20 , C08B37/00 , C08G63/00 , C08J5/18 , C08K3/22 , C08K5/10 , C08L1/08 , C09D1/00 , G02B1/04 , G02B1/11 , G02B5/30
摘要： Disclosed are an organic-inorganic hybrid film comprising a cellulose derivative and a polycondensation product of a condensation polymerizable reactive metal compound, wherein the film contains a plasticizer in an amount of 1 to 20% by weight and its manufacturing method.
摘要翻译： 公开了包含纤维素衍生物和缩聚反应性金属化合物缩聚产物的有机 - 无机杂化膜，其中该膜含有1至20重量％的增塑剂及其制备方法。
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公开(公告)号：US09634261B2
公开(公告)日：2017-04-25
申请号：US13805832
申请日：2011-06-23
申请人： Yasushi Okubo , Kunio Tani
发明人： Yasushi Okubo , Kunio Tani
CPC分类号： H01L51/0072 , B82Y10/00 , H01L51/002 , H01L51/0036 , H01L51/0043 , H01L51/0047 , H01L51/0094 , H01L51/4253 , Y02E10/549
摘要： Disclosed is an organic photoelectric conversion element which has a reverse layer structure wherein at least a first electrode, a photoelectric conversion layer and a second electrode are arranged on a substrate in this order. The organic photoelectric conversion element is characterized in that: the photoelectric conversion layer is a bulk heterojunction layer that is composed of a p-type organic semiconductor material and an n-type organic semiconductor material; and a compound that has a linear or branched fluorinated alkyl group having 6-20 carbon atoms is contained as the p-type organic semiconductor material.
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