Stage apparatus, exposure apparatus, and method of manufacturing device
    41.
    发明授权
    Stage apparatus, exposure apparatus, and method of manufacturing device 失效
    舞台装置,曝光装置和制造装置的方法

    公开(公告)号:US08248582B2

    公开(公告)日:2012-08-21

    申请号:US12565164

    申请日:2009-09-23

    申请人: Yoshihiro Hirata

    发明人: Yoshihiro Hirata

    IPC分类号: G03B27/58 G03B27/42

    CPC分类号: G03B27/58 G03F7/70725

    摘要: A stage apparatus includes plural stages movable across plural areas, movable bodies which are provided in one-to-one correspondence with the plural stages and are movable across the plural areas, plural lines which connect each of the plural stages to a corresponding one of the plural movable bodies, a driving unit which drives the plural movable bodies, and a controller which controls the driving by the driving unit. The controller controls the driving unit with the movable body moving in synch with movement of the stage during inter-area movement in which the stage moves across two of the plural areas, and stops the driving of the movable body by the driving unit or controls the driving unit with the movable body remaining at a specific target position during intra-area movement in which a process is performed on the stage while the stage moves within one of the plural areas.

    摘要翻译: 舞台装置包括可跨越多个区域移动的多个舞台,可移动体,其与多个阶段一一对应地设置并且可跨越多个区域移动,多个线将多个级中的每一个连接到相应的一个 多个可移动体,驱动多个移动体的驱动单元,以及控制由驱动单元驱动的控制器。 所述控制器控制所述驱动单元,其中所述移动体在所述平台在所述多个区域中的两个区域移动的区域间移动期间与所述平台的运动同步地移动,并且通过所述驱动单元停止所述可移动体的驱动或控制所述驱动单元 驱动单元,其中可移动体在区域内运动期间保持在特定目标位置,其中在台架在多个区域中的一个区域内移动时在台架上进行处理。

    Method for producing ultrafine dispersion water of noble metal ultrafine particles
    42.
    发明授权
    Method for producing ultrafine dispersion water of noble metal ultrafine particles 有权
    贵金属超细颗粒超细分散水的制备方法

    公开(公告)号:US08128789B2

    公开(公告)日:2012-03-06

    申请号:US11862048

    申请日:2007-09-26

    IPC分类号: B22F9/14

    摘要: Efficiently produce micro-dispersion water of super-fine noble metal particles having a desired concentration by using a very safe, compact production apparatus comprising a power supply for high-voltage/current discharge, a high-voltage discharge generator equipped with a noble metal electrode and its counter electrode, a water tank, a water inlet to the water tank, and an outlet for micro-dispersion water of super-fine noble metal particles, by causing plasma discharge in water between the noble metal electrode and its counter electrode and then causing the generated noble metal ion vapor to contact, and micro-disperse in, water. The obtained water can be effectively used as drinking water.

    摘要翻译: 通过使用非常安全,紧凑的生产设备来有效地生产具有所需浓度的超细贵金属颗粒的微分散水,其包括用于高压/电流放电的电源,配备有贵金属电极的高压放电发生器 通过在贵金属电极与其对电极之间的水中引起等离子体放电,然后将其对置电极,水箱,水箱的进水口和超细贵金属颗粒的微分散水出口,然后 导致产生的贵金属离子蒸汽接触,并微分散在水中。 所得水可以有效地用作饮用水。

    METAL STRUCTURE AND FABRICATION METHOD THEREOF
    43.
    发明申请
    METAL STRUCTURE AND FABRICATION METHOD THEREOF 失效
    金属结构及其制造方法

    公开(公告)号:US20090176027A1

    公开(公告)日:2009-07-09

    申请号:US12399589

    申请日:2009-03-06

    IPC分类号: B05D3/02

    摘要: A metal structure according to the present invention is unlikely to become brittle and has excellent hardness and creep resistance, characterized in that annealing has been applied at a temperature not more than the temperature at which crystals of the metal material start to become larger. This metal structure includes at least two kinds of metal material, and annealing can be applied at a temperature not more than the temperature at which crystals of the metal material start to become larger. For example, the present invention is advantageous in the manner of a microstructure for a contact probe. A fabricating method according to the present invention is a method of fabricating a metal structure unlikely to become brittle and having excellent hardness and creep resistance, characterized in that the step of applying annealing at a temperature not more than the temperature at which crystals of the metal material start to become larger is included.

    摘要翻译: 根据本发明的金属结构不可能变脆,并具有优异的硬度和抗蠕变性,其特征在于,在不高于金属材料的晶体开始变大的温度的温度下进行退火。 该金属结构包括至少两种金属材料,并且可以在不高于金属材料的晶体开始变大的温度的温度下进行退火。 例如,本发明对于接触探针的微结构的方式是有利的。 根据本发明的制造方法是一种制造不易脆性并且具有优异的硬度和抗蠕变性的金属结构的方法,其特征在于,在不高于金属晶体的温度的温度下进行退火的步骤 材料开始变大了。

    Health Jewelry Utilizing Silicone Elastomer and Process for Producing the Same
    44.
    发明申请
    Health Jewelry Utilizing Silicone Elastomer and Process for Producing the Same 审中-公开
    使用硅酮弹性体的健康珠宝及其生产方法

    公开(公告)号:US20080041099A1

    公开(公告)日:2008-02-21

    申请号:US11570676

    申请日:2005-06-09

    申请人: Yoshihiro Hirata

    发明人: Yoshihiro Hirata

    IPC分类号: A44C25/00 A44C5/00 A45D8/00

    CPC分类号: A44C5/0023 A44C27/00

    摘要: The present invention provides a body accessory which can formed into a ring shape, comprising a silicone elastomer body having a silicone elastomer layer mixed with fine titanium powder, which contains titanium powder obtained by burning a gaseous oxygen-hydrogen mixture in high-pressure water, fusing metallic titanium using the resultant burning gas and precipitating the product in water at least as a major component, on the skin contacting side and the silicone elastomer decorative continuous protrusion on the exterior side. The present invention also provides a process for manufacturing the body accessory, which comprises a silicone elastomer accessory body having a silicone elastomer layer mixed with fine titanium powder on the skin contacting side and a silicone elastomer decorative continuous protrusion on the exterior side and can be made into a ring, said process comprising the first step of forming a continuous concavity on a silicone elastomer accessory body; the next step of embedding a silicone elastomer layer containing fine titanium powder; the further step of separately forming a silicone elastomer decorative continuous protrusion; and the final step of placing the accessory body thus obtained on said decorative continuous protrusion and curing with heat for integration.

    摘要翻译: 本发明提供一种身体附件,其可以形成为环形,其包括具有与细钛粉末混合的硅氧烷弹性体层的硅氧烷弹性体,其含有通过在高压水中燃烧气态氢 - 氢混合物而获得的钛粉末, 使用所得到的燃烧气体熔融金属钛,并使产品在至少主要成分的水中沉淀在皮肤接触侧和外侧的硅氧烷弹性体装饰连续突起。 本发明还提供一种制造身体附件的方法,该方法包括:具有与皮肤接触侧上的细钛粉末混合的硅氧烷弹性体层和外侧上的有机硅弹性体装饰性连续突起的硅氧烷弹性体附件体,并且可以制成 所述方法包括在硅氧烷弹性体附件体上形成连续凹部的第一步骤; 嵌入含有细钛粉末的硅氧烷弹性体层的下一步骤; 单独形成硅橡胶装饰连续突起的另一步骤; 以及将由此获得的附属体放置在所述装饰性连续突起上并用热固化以进行一体化的最后步骤。

    Metal structure and method for production thereof
    46.
    发明申请
    Metal structure and method for production thereof 审中-公开
    金属结构及其制造方法

    公开(公告)号:US20060144485A1

    公开(公告)日:2006-07-06

    申请号:US10546824

    申请日:2004-04-12

    IPC分类号: C22C19/03 C22F1/10

    摘要: A metal structure according to the present invention is unlikely to become brittle and has excellent hardness and creep resistance, characterized in that annealing has been applied at a temperature not more than the temperature at which crystals of the metal material start to become larger. This metal structure includes at least two kinds of metal material, and annealing can be applied at a temperature not more than the temperature at which crystals of the metal material start to become larger. For example, the present invention is advantageous in the manner of a microstructure for a contact probe. A fabricating method according to the present invention is a method of fabricating a metal structure unlikely to become brittle and having excellent hardness and creep resistance, characterized in that the step of applying annealing at at a temperature not more than the temperature at which crystals of the metal material start to become larger is included.

    摘要翻译: 根据本发明的金属结构不可能变脆,并具有优异的硬度和抗蠕变性,其特征在于,在不高于金属材料的晶体开始变大的温度的温度下进行退火。 该金属结构包括至少两种金属材料,并且可以在不高于金属材料的晶体开始变大的温度的温度下进行退火。 例如,本发明对于接触探针的微结构的方式是有利的。 根据本发明的制造方法是制造不易脆性并且具有优异的硬度和抗蠕变性的金属结构的方法,其特征在于,在不高于所述晶体的温度的温度下进行退火的步骤, 金属材料开始变大也包括在内。

    Positioning system, magnetic bearing, and method of controlling the same
    47.
    发明申请
    Positioning system, magnetic bearing, and method of controlling the same 有权
    定位系统,磁轴承及其控制方法

    公开(公告)号:US20060119190A1

    公开(公告)日:2006-06-08

    申请号:US11282713

    申请日:2005-11-21

    申请人: Yoshihiro Hirata

    发明人: Yoshihiro Hirata

    IPC分类号: H02K41/00

    摘要: Disclosed are a positioning system and a control method therefor. In one preferred form, the positioning system includes a stage which is going to be positioned, a magnetic material member provided on the stage, electromagnets disposed at opposite sides of the magnetic material plate, a detector for detecting an electric current value of a coil which is a component of the electromagnets, and a position detector for detecting a position of the stage. The center position of the magnetic material member between the electromagnets can be determined on the basis of a relation between the position of the stage and the electric current value of the coil as the magnetic material member is moved relative to the electromagnets.

    摘要翻译: 公开了一种定位系统及其控制方法。 在一个优选形式中,定位系统包括将被定位的台,设置在台上的磁性材料构件,设置在磁性材料板的相对侧的电磁体,用于检测线圈的电流值的检测器, 是电磁铁的部件,以及用于检测台的位置的位置检测器。 磁性材料构件在电磁体之间的中心位置可以基于磁体位置相对于电磁体移动的线圈的电流值之间的关系来确定。

    Method and apparatus for the production of metal powder
    48.
    发明申请
    Method and apparatus for the production of metal powder 有权
    用于生产金属粉末的方法和设备

    公开(公告)号:US20050092132A1

    公开(公告)日:2005-05-05

    申请号:US10493903

    申请日:2002-10-24

    IPC分类号: B22F9/14 C22B9/22

    摘要: Provide a method and apparatus for producing, in an economical manner, metal powder offering high purity and comprising uniform particle shape and size. Produce metal powder of titanium metal, etc., using an apparatus that comprises a power supply for high-voltage/current discharge, a feeder of metal electrode made of titanium metal, etc., a high-voltage discharge generator equipped with a metal electrode made of titanium, etc., and its counter electrode, a water tank, a water inlet, an outlet for produced metal dispersion solution containing titanium metal, etc., a discharge pump, and an adjunct device for separating/recovering metal powder of titanium metal, etc., from the metal dispersion solution containing titanium metal, etc.

    摘要翻译: 提供一种以经济的方式制造提供高纯度并且包含均匀的颗粒形状和尺寸的金属粉末的方法和装置。 使用包括用于高压/电流放电的电源的设备,由钛金属制成的金属电极的馈电器等来生产钛金属等的金属粉末;配备有金属电极的高压放电发生器 由钛等制成,其对电极,水箱,进水口,用于生产含钛金属的金属分散液的出口等,排出泵和用于分离/回收钛金属粉末的辅助装置 金属等,从含有金属分散液的钛金属等