公开(公告)号：US20240145270A1

公开(公告)日：2024-05-02

申请号：US17977417

申请日：2022-10-31

Applicant: Applied Materials, Inc.

Inventor： Jason M. Schaller ,  Michael Carrell ,  William T. Weaver ,  Charles T. Carlson

IPC: H01L21/67 ,  H01L21/677 ,  H01L21/687

CPC classification number: H01L21/67201 ,  H01L21/67718 ,  H01L21/68707

Abstract: A system for transferring semiconductor workpieces from a load lock to an orientation station and on to a platen is disclosed. The system comprises two load locks, two robots, and one orientation station. Each robot is associated with a respective load lock and follows a fixed sequence. The robot returns a processed workpiece to the load lock and also removes an unprocessed workpiece. The robot then moved to the orientation station, where it removes an aligned workpiece from the orientation station and deposits the unprocessed workpiece on the orientation station. Next, the robot moves to the platen, where it removes a processed workpiece and deposits the aligned workpiece. The robot then returns to the load lock and repeats this sequence.

公开(公告)号：US11895766B2

公开(公告)日：2024-02-06

申请号：US17502279

申请日：2021-10-15

Applicant: Applied Materials, Inc.

Inventor： David T. Blahnik ,  Charles T. Carlson ,  Robert B. Vopat ,  Frank Sinclair ,  Paul J. Murphy ,  Krag R. Senior

IPC: H05H7/22

CPC classification number: H05H7/22 ,  H05H2007/222

Abstract: Embodiments herein are directed to a linear accelerator assembly for an ion implanter. In some embodiments, a LINAC may include a coil resonator and a plurality of drift tubes coupled to the coil resonator by a set of flexible leads.

公开(公告)号：US11856685B2

公开(公告)日：2023-12-26

申请号：US17479313

申请日：2021-09-20

Applicant: Applied Materials, Inc.

Inventor： Charles T. Carlson ,  Aaron P. Webb ,  Paul J. Murphy ,  Frank Sinclair ,  David Blahnik

IPC: H05H7/22

CPC classification number: H05H7/22

Abstract: A coil inductor for use with a LINAC is disclosed. The coil inductor comprises one or more tubes, wherein each tube comprises an interior support structure to strengthen the tubes. By supporting the tube, the amount of vibration is reduced, allowing the coil to resonate at its natural frequency. In some embodiments, the interior structure comprises one or more interior walls. These interior walls may be used to create a plurality of fluid channels that allow the flow of coolant through the tubes. An end cap may be disposed on the second end of the tubes to allow fluid communication between the supply fluid channels and the return fluid channels. The first ends of the one or more tubes may be connected to a manifold that includes a supply port and a return port for the passage of coolant.

公开(公告)号：US20230170231A1

公开(公告)日：2023-06-01

申请号：US18161968

申请日：2023-01-31

Applicant: Applied Materials, Inc.

Inventor： Jason M. Schaller ,  Steve Hongkham ,  Charles T. Carlson ,  Tuan A. Nguyen ,  Swaminathan T. Srinivasan ,  Khokan Chandra Paul

IPC: H01L21/67 ,  H01L21/687

CPC classification number: H01L21/6719 ,  H01L21/68742 ,  H01L21/68707 ,  H01L21/67167

Abstract: Exemplary substrate processing systems may include a factory interface and a load lock coupled with the factory interface. The systems may include a transfer chamber coupled with the load lock. The transfer chamber may include a robot configured to retrieve substrates from the load lock. The systems may include a chamber system positioned adjacent and coupled with the transfer chamber. The chamber system may include a transfer region laterally accessible to the robot. The transfer region may include a plurality of substrate supports disposed about the transfer region. Each substrate support of the plurality of substrate supports may be vertically translatable. The transfer region may also include a transfer apparatus rotatable about a central axis and configured to engage substrates and transfer substrates among the plurality of substrate supports. The chamber system may also include a plurality of processing regions vertically offset and axially aligned with an associated substrate support.

公开(公告)号：US20230119010A1

公开(公告)日：2023-04-20

申请号：US17505977

申请日：2021-10-20

Applicant: Applied Materials, Inc.

Inventor： Robert B. Vopat ,  Charles T. Carlson

IPC: H01J37/317

Abstract: Embodiments herein are directed to a linear accelerator assembly for an ion implanter, wherein the linear accelerator includes a jacketed resonator coil. In some embodiments, a linear accelerator assembly may include a first fluid conduit and a coil resonator coupled to the first fluid conduit, wherein the coil resonator is operable to receive a first fluid via the first fluid conduit, wherein the coil resonator comprises a first coil conduit adjacent a second coil conduit, and wherein a first fluid channel defined by the first coil conduit is operable to receive the first fluid.

公开(公告)号：US20230089170A1

公开(公告)日：2023-03-23

申请号：US17479313

申请日：2021-09-20

Applicant: Applied Materials, Inc.

Inventor： Charles T. Carlson ,  Aaron P. Webb ,  Paul J. Murphy ,  Frank Sinclair ,  David Blahnik

IPC: H05H7/22

Abstract: A coil inductor for use with a LINAC is disclosed. The coil inductor comprises one or more tubes, wherein each tube comprises an interior support structure to strengthen the tubes. By supporting the tube, the amount of vibration is reduced, allowing the coil to resonate at its natural frequency. In some embodiments, the interior structure comprises one or more interior walls. These interior walls may be used to create a plurality of fluid channels that allow the flow of coolant through the tubes. An end cap may be disposed on the second end of the tubes to allow fluid communication between the supply fluid channels and the return fluid channels. The first ends of the one or more tubes may be connected to a manifold that includes a supply port and a return port for the passage of coolant.

公开(公告)号：US20230083050A1

公开(公告)日：2023-03-16

申请号：US17473015

申请日：2021-09-13

Applicant: Applied Materials, Inc.

Inventor： William Davis Lee ,  Charles T. Carlson

IPC: H05H9/04 ,  H05H7/22 ,  H05H7/00

Abstract: A drift tube may include a middle portion, arranged as a hollow cylinder, and coupled to receive an RF voltage signal. The drift tube may include a first end portion, adjacent to and electrically connected to the middle portion. The middle portion and the first end portion may define a central opening to conduct an ion beam therethrough, along a direction of beam propagation. The first end portion may include a first focus assembly, and a second focus assembly, where the first focus assembly and the second focus assembly are movable with respect to one another along the direction of beam propagation, from a first configuration to a second configuration.

公开(公告)号：US11355367B2

公开(公告)日：2022-06-07

申请号：US16922536

申请日：2020-07-07

Applicant: Applied Materials, Inc.

Inventor： Jason M. Schaller ,  Charles T. Carlson ,  Luke Bonecutter ,  David Blahnik ,  Karuppasamy Muthukamatchi ,  Jeff Hudgens ,  Benjamin Riordon

IPC: H01L21/67 ,  B65G47/90 ,  H01L21/687 ,  H01L21/68

Abstract: Exemplary substrate processing systems may include a transfer region housing defining a transfer region, and including substrate supports and a transfer apparatus. The transfer apparatus may include a central hub having a housing, and including a first shaft and a second shaft. The housing may be coupled with the second shaft, and may define an internal housing volume. The transfer apparatus may include a plurality of arms equal to a number of substrate supports of the plurality of substrate supports. Each arm of the plurality of arms may be coupled about an exterior of the housing. The transfer apparatus may include a plurality of arm hubs disposed within the internal housing volume. Each arm hub of the plurality of arm hubs may be coupled with an arm of the plurality of arms through the housing. The arm hubs may be coupled with the first shaft of the central hub.

公开(公告)号：US11306824B2

公开(公告)日：2022-04-19

申请号：US16642827

申请日：2018-09-28

Applicant: Applied Materials, Inc.

Inventor： Benjamin B. Riordon ,  Charles T. Carlson ,  Aaron Webb ,  Gary Wyka

IPC: F16K1/20 ,  F16K49/00 ,  F16K51/02 ,  H01J37/32

Abstract: The present disclosure generally relates to an isolation device for use in processing systems. The isolation device has a body with an inlet opening disposed at a first end coupled to a processing system component such as a remote plasma source and outlet openings, for example two, disposed at a second end which are coupled to a processing system component such as a process chamber. Flaps disposed within the body are actuatable to an open position from a closed position or to a closed position from an open position, to selectively allow or prevent passage of a fluid from the processing system component coupled to the isolation device to the other processing system component coupled thereto.

公开(公告)号：USD938373S1

公开(公告)日：2021-12-14

申请号：US29710816

申请日：2019-10-25

Applicant: Applied Materials, Inc.

Designer： Jason M. Schaller ,  Benjamin Riordon ,  Mitchell DiSanto ,  Paul Forderhase ,  Gary Wyka ,  Jeffrey Hudgens ,  Paul Z. Wirth ,  Charles T. Carlson ,  Siva Chandrasekar ,  Michael Carrell ,  Venkata Raghavaiah Chowdhary Kode ,  Dmitry A. Dzilno ,  Juan Carlos Rocha-Alvarez