CLEANING APPARATUS AND METHOD FOR IMMERSION LIGHT EXPOSURE
    42.
    发明申请
    CLEANING APPARATUS AND METHOD FOR IMMERSION LIGHT EXPOSURE 有权
    清洗装置和浸入式曝光方法

    公开(公告)号:US20080133045A1

    公开(公告)日:2008-06-05

    申请号:US11949287

    申请日:2007-12-03

    IPC分类号: G06F17/00 B08B13/00 B08B7/04

    CPC分类号: H01L21/67051 H01L21/67225

    摘要: A cleaning apparatus for immersion light exposure includes a cleaning apparatus main body including a mechanism configured to perform a cleaning process on the substrate, and a control section configured to control respective components of the cleaning apparatus main body. The control section is arranged to fabricate a new process recipe in response to input of a surface state of a film formed on a substrate, such that the new process recipe contains hardware conditions and/or process conditions corresponding to the surface state, with reference to relationships stored therein between parameter values representing a surface state of a film formed on a substrate and hardware conditions and/or process conditions for performing suitable cleaning for the parameter values; and to control the cleaning apparatus main body to perform a cleaning process in accordance with the new process recipe.

    摘要翻译: 用于浸没式曝光的清洁装置包括:清洁装置主体,包括构造成对基板执行清洁处理的机构;以及控制部,其被配置为控制清洁装置主体的各个部件。 控制部分被布置成响应于在基板上形成的膜的表面状态的输入而制造新的工艺配方,使得新工艺配方包含与表面状态相对应的硬件条件和/或工艺条件,参考 存储在其中的表示在基板上形成的膜的表面状态的参数值与用于对参数值执行适当清洁的硬件条件和/或处理条件之间的关系; 并且控制清洁装置主体以根据新的处理配方执行清洁处理。

    Photoelectric conversion element, process for producing the same, light sensor and solar cell
    43.
    发明申请
    Photoelectric conversion element, process for producing the same, light sensor and solar cell 审中-公开
    光电转换元件,其制造方法,光传感器和太阳能电池

    公开(公告)号:US20060065300A1

    公开(公告)日:2006-03-30

    申请号:US10527474

    申请日:2003-09-12

    IPC分类号: H01L31/00

    摘要: An optical/electrical conversion element used for a photosensor or a solar battery. An optical/electrical conversion layer, composed of an assembly of a light-absorbing dendrimer structure (1), operating as an electron donor, and fine metal particles (2), operating as an electron receptor, are self-collectively formed by imparting chemical affinity to the dendrimer structure and to the fine metal particles. With the present optical/electrical conversion element, in which the light-absorbing substance has a dendrimer structure, the electrons, excited on light absorption, migrate over a long distance via molecular chain to get to the fine metal particles (2) operating as an electron receptor. The electrons are routed quickly to outside as current via contact among the fine metal particles and/or between the fine metal particles and an electrode.

    摘要翻译: 用于光电传感器或太阳能电池的光/电转换元件。 由作为电子给体操作的光吸收树枝状聚合物结构(1)的组件和作为电子受体起作用的金属微粒(2)组成的光/电转换层通过赋予化学物质 对树枝状聚合物结构和细金属颗粒的亲和力。 对于光吸收物质具有树枝状大分子结构的本发明的光/电转换元件,通过光吸收激发的电子通过分子链在长距离上移动,以得到作为 电子受体。 电子迅速地被引导到外部,作为细金属颗粒之间和/或细金属颗粒和电极之间的电流通路接触。