Geometrically-desensitized interferometer incorporating an optical
assembly with high stray-beam management capability
    44.
    发明授权
    Geometrically-desensitized interferometer incorporating an optical assembly with high stray-beam management capability 有权
    包含具有高杂散光束管理能力的光学组件的几何脱敏干涉仪

    公开(公告)号:US6072581A

    公开(公告)日:2000-06-06

    申请号:US183057

    申请日:1998-10-30

    CPC classification number: G01B11/2441 G01B11/306

    Abstract: The optical assembly of a GDI instrument is configured to deviate or steer stray beams away from the pupil of the instrument's imaging device and/or to suppress stray beams. Stray beam deviation is optimized by selecting particular wedge and/or tilt configurations that achieve the desired stray beam deviation while avoiding or at least minimizing phase offset at the optimum metrology plane. Stray beam suppression can be achieved by providing the diffractive groove profile of the instrument's optical assembly with smooth edges. The resultant profile facilitates effective diffraction order management as well as a reduction in back reflection. The invention is particularly well-suited for use with a GDI instrument in which the optical assembly comprises first and second diffraction gratings. In this case, any average phase offset that remains after setting wedge and/or tilt can be eliminated by inserting a suitable compensating plate between the first and second diffraction gratings or between the second diffraction grating and the object.

    Abstract translation: GDI仪器的光学组件被配置为偏离或引导杂散光束远离仪器的成像装置的光瞳和/或抑制杂散光束。 通过选择实现期望的杂散光束偏移的特定楔形和/或倾斜配置来优化杂散光束偏移,同时避免或至少最小化最佳计量平面处的相位偏移。 可以通过提供具有光滑边缘的仪器光学组件的衍射凹槽轮廓来实现杂散光束抑制。 所得到的轮廓有助于有效的衍射顺序管理以及减少背反射。 本发明特别适用于GDI仪器,其中光学组件包括第一和第二衍射光栅。 在这种情况下,通过在第一和第二衍射光栅之间或第二衍射光栅与物体之间插入合适的补偿板,可以消除在设置楔形和/或倾斜之后保留的任何平均相位偏移。

    Method and compositions for making refractory shapes having dense,
carbon free surfaces and shapes made therefrom
    45.
    发明授权
    Method and compositions for making refractory shapes having dense, carbon free surfaces and shapes made therefrom 失效
    用于制造具有致密,无碳表面和由其制成的形状的耐火形状的方法和组合物

    公开(公告)号:US5681499A

    公开(公告)日:1997-10-28

    申请号:US548764

    申请日:1995-10-26

    CPC classification number: C04B35/66 B22D41/18 B22D41/54

    Abstract: A dense carbon free surface is provided on a carbon bonded refractory shape which is particularly useful as a pouring tube liner to prevent the formation and build-up of alumina particles which may cause blockage of the tube. The carbon free, dense layer is also hard and erosion resistant making it ideal for use in other applications such as stopper rod noses. The material comprises a refractory mix having a major component of refractory oxides such as alumina and zirconia-mullite. Less than 10 wt. % carbon in the form of graphite and binder is in the mix plus about 2-5 wt. % of a metal such as silicon and an effective mount of sintering aids is also present. The pressed shape is preheated to a temperature of 1000.degree. -1400.degree. C. in air to oxidize the exposed surface of the shape and then to sinter the oxidized surface to form the desired dense, carbon free surface over the entire shape or on selected surface portions thereof.

    Abstract translation: 在碳粘合耐火形状上提供无碳的密实表面,其特别可用作浇注管衬套,以防止可能导致管堵塞的氧化铝颗粒的形成和积聚。 无碳,致密的层也是坚硬和耐腐蚀的,使其非常适用于其他应用,如塞杆鼻。 该材料包括具有耐火氧化物的主要组分如氧化铝和氧化锆 - 莫来石的耐火混合物。 小于10重量 石墨和粘合剂形式的%碳在混合物中加上约2-5wt。 还存在%的金属如硅和有效安装的烧结助剂。 将压制形状在空气中预热至1000-140℃,以氧化形状的暴露表面,然后烧结氧化表面,以在整个形状或选定表面上形成所需的致密,无碳的表面 部分。

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