SUBSTRATE HOLDING APPARATUS, SUBSTRATE TRANSFERRING ROBOT EQUIPPED WITH THE SAME, AND SEMICONDUCTOR PRODUCTION APPARATUS
    41.
    发明申请
    SUBSTRATE HOLDING APPARATUS, SUBSTRATE TRANSFERRING ROBOT EQUIPPED WITH THE SAME, AND SEMICONDUCTOR PRODUCTION APPARATUS 有权
    基板保持装置,与其相同的基板传送机器人和半导体生产装置

    公开(公告)号:US20090232631A1

    公开(公告)日:2009-09-17

    申请号:US12358902

    申请日:2009-01-23

    IPC分类号: H01L21/68

    CPC分类号: H01L21/68707

    摘要: A substrate holding apparatus includes a base plate with a two-pronged portion, a holding plate arranged above the base plate, a driving portion provided therebetween, a holding portion formed by a tip end of the two-pronged portion and a tip end of the holding plate, and a guide portion provided at the tip end of the two-pronged portion for guiding a part of the substrate. The driving portion includes an urging means for always urging a basal end side of the holding plate upward, an electric magnetic portion for drawing the holding plate toward the base plate, and a bearing portion arranged at on the tip end side of the base plate. The guide portion has a guide groove which comes into contact with a part of a periphery of the substrate.

    摘要翻译: 一种基板保持装置,包括:具有双管状部分的基板;布置在基板上方的保持板,设置在其间的驱动部分,由双管状部分的末端形成的保持部分, 保持板,以及设置在双头部的前端的引导部,用于引导基板的一部分。 驱动部包括用于总是将保持板的基端侧向上推压的推压机构,用于将保持板朝向基板拉出的电磁部,以及配置在基板的前端侧的轴承部。 引导部具有与基板的周边的一部分接触的引导槽。

    Semiconductor device having trench gate structure
    43.
    发明申请
    Semiconductor device having trench gate structure 失效
    具有沟槽栅结构的半导体器件

    公开(公告)号:US20090072300A1

    公开(公告)日:2009-03-19

    申请号:US12232074

    申请日:2008-09-10

    IPC分类号: H01L27/088

    摘要: The present invention provides a vertical MOSFET which has striped trench gate structure which can secure avalanche resistance without increasing Ron. A vertical MOSFET 100 comprises a plurality of gate trenches 7 which is arranged in stripes, an array which is sandwiched with the plurality of gate trenches 7 and includes N+ source regions 4N+ and P+ base contact regions 5P+, and a diode region (anode region 6P+) which is formed so as to contact with two gate trenches 7. The N+ source regions 4N+ and the base contact regions 5P+ are alternately arranged along a longitudinal direction of the gate trench 7. Size of the diode region (anode region 6P+) corresponds to at least one of the N+ source regions 4N+ and two of the P+ base contact regions 5P+.

    摘要翻译: 本发明提供了一种具有条纹沟槽栅极结构的垂直MOSFET,其可以在不增加Ron的情况下确保雪崩电阻。 垂直MOSFET100包括多个栅极沟槽7,栅极沟槽7被布置成阵列,该阵列夹在多个栅极沟槽7之间并包括N +源极区域4N +和P +基极接触区域5P +,二极管区域(阳极区域6P + )形成为与两个栅极沟槽7接触.N +源极区域4N +和基极接触区域5P +沿着栅极沟槽7的纵向方向交替排列。二极管区域(阳极区域6P +)的尺寸对应于 N +源极区域4N +和P +基极接触区域5P + +中的至少一个。

    Threaded joint for steel pipes
    44.
    发明授权
    Threaded joint for steel pipes 有权
    钢管螺纹接头

    公开(公告)号:US07360798B2

    公开(公告)日:2008-04-22

    申请号:US10765837

    申请日:2004-01-29

    IPC分类号: F16L15/00 C10M159/06

    摘要: A threaded joint for steel pipes comprising a pin 1 and a box 2 each having a contact surface comprising a threaded portion 3 or 4 and an unthreaded metal contact portion 8 is provided with improved anti-galling propertied by forming a lubricating coating on the contact surface of at least one of the pin and the box, the lubricating coating exhibiting a self-repairing function by liquid lubrication and having a decreased greasiness. The lubricating coating is (1) a coating which comprises a lower lubricant layer which is in liquid form in the temperature range of above 0° C. and below 40° C. and an upper lubricant layer which is in solid form at 40° C., or (2) a coating which is semi-solid or solid at 40° C. and is formed of a mixture comprising a lubricating oil which is in liquid form in the temperature range of above 0° C. and below 40° C. and a wax which is in solid form at 40° C., the mixture preferably having been heated so as to liquefy the wax and dissolve in each other the wax and lubricant oil.

    摘要翻译: 一种用于钢管的螺纹接头,其包括销1和盒2,每个具有包括螺纹部分3或4的接触表面和无螺纹金属接触部分8的盒子2具有通过在接触表面上形成润滑涂层而具有改进的防磨损 的销和盒中的至少一个,润滑涂层通过液体润滑显示出自修复功能并且具有降低的油脂性。 润滑涂层是(1)涂层,其包括在0℃以上且低于40℃的温度范围内为液态的下润滑剂层,以及在40℃为固体形式的上润滑剂层 ,或(2)在40℃下为半固体或固体的涂层,并且由包含在0℃以上且低于40℃的温度范围内为液态的润滑油的混合物形成的涂层 和在40℃下为固体形式的蜡,所述混合物优选已被加热以使蜡液化并彼此溶解蜡和润滑油。

    Semiconductor device with a vertical MOSFET and method for manufacturing the same
    45.
    发明申请
    Semiconductor device with a vertical MOSFET and method for manufacturing the same 审中-公开
    具有垂直MOSFET的半导体器件及其制造方法

    公开(公告)号:US20080073710A1

    公开(公告)日:2008-03-27

    申请号:US11902243

    申请日:2007-09-20

    申请人: Hideo Yamamoto

    发明人: Hideo Yamamoto

    IPC分类号: H01L29/78 H01L21/336

    摘要: The size of a gate contact region is decreased by connecting a gate connection electrode embedded in a trench and a gate wiring formed over the gate connection electrode, without forming another conductive film different from the gate connection electrode or the gate wiring. The semiconductor body includes an active cell region and a gate contact region. The active cell region includes a vertical MOSFET with a gate electrode disposed in a first trench. The gate contact region includes the gate connection electrode disposed in a second trench and formed of a same conductive material with the gate electrode. The gate connection electrode includes an embedded part formed in the second trench and an extended part extended therefrom and formed outside the second trench. An interlayer insulation film formed on the gate connection electrode and having a via hole exposing at least a portion of the embedded part of the gate connection electrode.

    摘要翻译: 通过连接嵌入沟槽中的栅极连接电极和形成在栅极连接电极上的栅极布线而不形成与栅极连接电极或栅极布线不同的另一个导电膜来减小栅极接触区域的尺寸。 半导体本体包括有源电池区域和栅极接触区域。 有源单元区域包括垂直MOSFET,栅极设置在第一沟槽中。 栅极接触区域包括设置在第二沟槽中并由与栅电极相同的导电材料形成的栅极连接电极。 栅极连接电极包括形成在第二沟槽中的嵌入部分和从其延伸并形成在第二沟槽外部的延伸部分。 一种层间绝缘膜,形成在所述栅极连接电极上并且具有暴露所述栅极连接电极的嵌入部分的至少一部分的通孔。

    Threaded joint for an oil well pipe
    48.
    发明授权
    Threaded joint for an oil well pipe 有权
    油井管螺纹接头

    公开(公告)号:US06679526B2

    公开(公告)日:2004-01-20

    申请号:US10082212

    申请日:2002-02-26

    IPC分类号: F16L1504

    摘要: A threaded joint for an oil well pipe is provided which prevents the occurrence of galling at the time of repeated tightening and loosening and which provides a high degree of air tightness and has excellent galling resistance and air tightness without using a liquid lubricant such as a compound grease. 1. A lubricating film of an inorganic polymeric compound which has an M (metal element)—O (oxygen) backbone and has a solid lubricant dispersed therein is formed on a threaded portion or an unthreaded metal contact portion. 2. A phosphate film and the lubricating film of the inorganic polymeric compound is formed on the threaded portion or the unthreaded metal contact portion. 3. A Cu plating layer and the lubricating film of the inorganic polymeric compound or a lubricating film of a resin in which a solid lubricant is dispersed is formed on the threaded portion or the unthreaded metal contact portion. 4. A lubricating film of the inorganic polymeric compound or a lubricating film of the polymer and a rust preventing film containing an alkali metal salt of a carboxylic acid or an alkali earth metal salt of a carboxylic acid are formed on the threaded portion or the unthreaded metal contact portion.

    摘要翻译: 提供一种用于油井管的螺纹接头,其防止在反复拧紧和松动时发生磨损,并且提供高度的气密性并且在不使用液体润滑剂如化合物的情况下具有优异的耐磨损性和气密性 润滑脂1。 在螺纹部分或无螺纹金属接触部分上形成具有M(金属元素)-O(氧)主链且分散有固体润滑剂的无机聚合物的润滑膜。 磷酸盐膜和无机高分子化合物的润滑膜形成在螺纹部分或无螺纹金属接触部分上。 在螺纹部分或无螺纹金属接触部分上形成Cu镀层和无机聚合物的润滑膜或其中分散有固体润滑剂的树脂的润滑膜。 无机聚合物的润滑膜或聚合物的润滑膜和含有羧酸的碱金属盐或羧酸的碱土金属盐的防锈膜形成在螺纹部分或无螺纹金属接触件上 一部分。

    Efficient cylindrical linear motor
    49.
    发明授权
    Efficient cylindrical linear motor 失效
    高效的圆柱直线电机

    公开(公告)号:US06657326B1

    公开(公告)日:2003-12-02

    申请号:US09869268

    申请日:2001-06-27

    IPC分类号: H02K4100

    CPC分类号: H02K33/16

    摘要: The present invention provides a linear motor, which can improve motor efficiency and which can be manufactured by a simplified procedure. The linear motor of the present invention includes a movable unit of cylindrical shape and having the central axis at the intersection of the X-axis and the Y-axis. An inner yoke is arranged on an inner side of the movable unit with a given spacing in the radial direction of the movable unit and is formed by laminating a multiple of thin plates each in approximately rectangular in shape and having strong magnetic permeability arranged in the direction of the X-axis. An outer yoke is arranged on the outer side of the movable unit with a given spacing in a radial direction of the movable unit and is formed by laminating a multiple of thin plates, each approximately rectangularly shaped and arranged in the same direction as the thin plates of the inner yoke. A pair of permanent magnets are magnetized in a direction from the inner yoke to the outer yoke. The thrust force of the linear motor is stable and motor efficiency is improved.

    摘要翻译: 本发明提供一种线性电动机,其可以提高电动机效率,并且可以通过简化的程序来制造。 本发明的线性电动机包括圆柱形的可移动单元,其中心轴在X轴和Y轴的交点处。 内轭在可动单元的内侧以可移动单元的径向方向以给定的间隔设置,并且通过层叠多个薄板,形成为大致矩形形状,并且具有强磁导率 的X轴。 外轭铁在可移动单元的外侧上以可移动单元的径向方向以给定的间隔布置,并且通过层叠多个薄板而形成,每个薄板近似矩形并且沿与薄板相同的方向布置 的内轭。 一对永磁体在从内磁轭到外磁轭的方向上被磁化。 线性电机的推力稳定,电机效率提高。

    Vibrating compressor
    50.
    发明授权
    Vibrating compressor 失效
    振动压缩机

    公开(公告)号:US5897296A

    公开(公告)日:1999-04-27

    申请号:US710204

    申请日:1996-09-13

    IPC分类号: F04B49/06 F04B17/04 F04B35/04

    摘要: A vibrating compressor of the present invention, which comprises a piston driving section for driving a piston by supplying a piston driving force, a displacement detecting section connected in an axial direction of the piston, an upper dead point position detecting section for detecting an upper dead point position based on a piston position signal from the displacement detecting section, and a driving force control section for changing the driving force supplied to the piston by the piston driving section according to a difference between the upper dead point position and a preset upper dead point position reference value immediately after the upper dead point position detecting section detects the upper dead point position, prevents its compression efficiency from decreasing due to stabilization and prevents a device from being damaged. In the vibrating compressor, it is also possible to calculate a stroke based on a detected piston position or to control the driving force based on a detected frequency.

    摘要翻译: 本发明的振动压缩机包括通过提供活塞驱动力来驱动活塞的活塞驱动部,沿活塞的轴向连接的位移检测部,上死点位置检测部,用于检测上死点 基于来自位移检测部的活塞位置信号的点位置,以及驱动力控制部,其根据上死点位置和预设上死点之间的差来改变由活塞驱动部提供给活塞的驱动力 在上死点位置检测部分检测到上死点位置之后的位置参考值,防止其压缩效率由于稳定而降低,并且防止装置损坏。 在振动压缩机中,还可以基于检测到的活塞位置计算行程或者基于检测到的频率来控制驱动力。