公开(公告)号：US06204674B1

公开(公告)日：2001-03-20

申请号：US08962595

申请日：1997-10-31

Applicant: Krzysztof Dabrowiecki ,  January Kister

Inventor： Krzysztof Dabrowiecki ,  January Kister

IPC: G01R3102

CPC classification number: G01R3/00

Abstract: This disclosure proposes an assembly structure for building probe cards to test square integrated circuit chips. The test probe card assembly structure has one or more wings located at 90° angles to each other upon which probes are laid in a parallel manner for attachment to a probe card. This allows 10 construction of the probe card so that probes touch contacts directly. The probe tips do not touch the contacts at an angle &thgr;, called the fan out angle. The probes also do not differ in their inclination angles &bgr;. As a result, the force at which the many probe tips touch the contacts is relatively constant throughout. In addition, the probe tips are less likely to scrub past the surface of the contact onto the insulation surface of the chip and in doing so damage it. The test probe card assembly structure also contains an epoxy groove, which controls epoxy flow so that the position of the probes stays aligned in the correct plane. The epoxy groove also prevents variance in beam length. An alternative embodiment of the present invention can make probe cards for simultaneously testing multiple chips and includes a probe card for testing multiple chips.

Abstract translation: 本公开提出了一种用于构建探针卡以测试方形集成电路芯片的组装结构。 测试探针卡组件结构具有一个或多个彼此成90°角的翼，探针以平行的方式放置在其上，用于附接到探针卡。 这样可以构建探针卡，使探针直接接触触点。 探头尖端不会以一个角度θ接触触点，称为扇形角度。 探头的倾斜角度β也没有差别。 结果，许多探针尖端触摸触点的力在整个过程中相对恒定。 此外，探针尖端不太可能通过接触表面擦拭到芯片的绝缘表面上，并且损坏它。 测试探针卡组件结构还包含环氧树脂沟槽，其控制环氧树脂流动，使得探针的位置保持在正确的平面内对准。 环氧树脂槽也可以防止光束长度的变化。 本发明的替代实施例可以制造用于同时测试多个芯片的探针卡，并且包括用于测试多个芯片的探针卡。

公开(公告)号：US6064215A

公开(公告)日：2000-05-16

申请号：US057080

申请日：1998-04-08

Applicant: January Kister

Inventor： January Kister

IPC: G01R31/28 ,  G01R31/02

CPC classification number: G01R31/2886

Abstract: A probe card for testing integrated circuits which maintains rigidity and probe alignment at elevated temperatures. The probe card has a number of probes radially oriented on an insulating plate with a nonuniform radial distribution. The probes extend through an insulating ring. The nonuniform radial distribution of probes has gaps which allows for bolt or attachment to attach a rigid plate to the insulating ring. The insulating plate can be made of printed circuit board material, the insulating ring can be made of epoxy. The rigid plate can be made of stainless steel or any other material that maintains rigidity at elevated temperatures. Preferably, the insulating plate also has a stiffener ring located opposite the insulating ring on the top side. The bolts extend through the stiffener ring. The insulating plate has vias which allow the probes to be electrically connected to test electronics located above a top side of the insulating plate. The rigid plate maintains the rigidity of the apparatus and provides heat shielding for the insulating ring and insulating plate. Alternatively, the rigid plate is located above the insulating plate and bolted to the stiffener ring.

Abstract translation: 用于测试集成电路的探针卡，可在高温下保持刚性和探针对准。 探针卡具有径向定向在绝缘板上的多个探头，其具有不均匀的径向分布。 探头延伸穿过绝缘环。 探针的不均匀径向分布具有允许螺栓或连接将刚性板附接到绝缘环的间隙。 绝缘板可以由印刷电路板材料制成，绝缘环可以由环氧树脂制成。 刚性板可以由不锈钢或在升高的温度下保持刚性的任何其他材料制成。 优选地，绝缘板还具有位于顶侧上的绝缘环相对的加强环。 螺栓延伸穿过加强环。 绝缘板具有允许探针电连接到位于绝缘板上侧上方的测试电子装置的通孔。 刚性板保持设备的刚性，并为绝缘环和绝缘板提供热屏蔽。 或者，刚性板位于绝缘板上方并且螺栓连接到加强环上。

公开(公告)号：US5644249A

公开(公告)日：1997-07-01

申请号：US659861

申请日：1996-06-07

Applicant: January Kister

Inventor： January Kister

IPC: G01R1/073 ,  G01R1/06 ,  G01R31/02

CPC classification number: G01R1/07314

Abstract: This invention presents a method and a mechanism for contacting a set of vertical probes of a circuit testing mechanism with a set of pads or bumps of a circuit under test. The vertical probes have a circular cross section, a tip portion of length L1 and a beam portion of length L2, such that the beam portion extends at a right angle to the tip portion. The tip portion is guided through a guide hole to the pads of the circuit under test and the beam portion secured by its end. In this geometry the contact force between the probe and the pad is described by the relation: ##EQU1## where D.sub.v is a vertical deflection of the probe, I is an area moment of inertia of the probe about its axis, and E is a Young's modulus of the probe. The tip length L1 and beam length L2 are selected for each of the vertical probes in such a way the contact force F in this relation is kept constant thus ensuring that the contact force F between the vertical probes and pads remains substantially equal.

Abstract translation: 本发明提出了一种用于使电路测试机构的一组垂直探针与被测电路的一组焊盘或凸块接触的方法和机构。 垂直探针具有圆形横截面，长度为L1的尖端部分和长度为L2的梁部分，使得梁部分与尖端部分成直角地延伸。 尖端部分通过引导孔被引导到待测电路的焊盘，并且梁部分由其端部固定。 在这种几何形状中，探针和垫之间的接触力通过以下关系来描述：其中Dv是探头的垂直偏转，I是探头围绕其轴的面积惯性矩，E是Young 探针的模数。 针对每个垂直探针选择尖端长度L1和光束长度L2，使得该关系中的接触力F保持恒定，从而确保垂直探针和焊盘之间的接触力F保持基本相等。

公开(公告)号：US09476911B2

公开(公告)日：2016-10-25

申请号：US13424031

申请日：2012-03-19

Applicant: January Kister

Inventor： January Kister

IPC: G01R1/067 ,  G01R3/00 ,  G01R1/073

CPC classification number: G01R1/06716 ,  G01R1/06733 ,  G01R1/06738 ,  G01R1/06761 ,  G01R1/07357 ,  G01R3/00

Abstract: The present invention is a probe having a distal end made of one material, a tip and a portion disposed between the distal end and the tip that is a different second material. The probe is laser machined manufactured using a nanosecond or picosecond laser.

Abstract translation: 本发明是一种探头，其具有由一种材料制成的远端，尖端和设置在远端和尖端之间的不同第二材料的部分。 探头采用纳秒或皮秒激光器激光加工。

公开(公告)号：US08829937B2

公开(公告)日：2014-09-09

申请号：US12931260

申请日：2011-01-27

Applicant: January Kister

Inventor： January Kister

IPC: G01R31/00 ,  G01R31/20 ,  G01R31/26 ,  G01R1/06 ,  G01R1/073 ,  G01R1/067

CPC classification number: G01R1/07357 ,  G01R1/06716

Abstract: Probes suitable for use with densely packed fine-pitch 2-D contact arrays are provided by use of an electrically insulating guide plate in connection with vertical probes, where the vertical probes have probe flexures that are either vertically folded sections, or coils having a horizontal axis. Preferably, the probes are configured such that the probe flexures are inside the guide plate holes, and the parts of the probes extending past the guide plate are relatively rigid. This configuration alleviates problems associate with probe shorting, because the probe flexures are enclosed by the guide plate holes, and are therefore unable to come into contact with flexures from other probes during probing.

Abstract translation: 适用于密集包装的细间距2-D接触阵列的探针通过使用与垂直探针结合的电绝缘导板提供，其中垂直探针具有探针弯曲部，其为垂直折叠部分或具有水平的线圈 轴。 优选地，探针被构造成使得探针弯曲部位在引导板孔内部，并且延伸穿过引导板的探针部分是相对刚性的。 这种构造减轻了与探针短路相关的问题，因为探针弯曲被导板孔包围，因此在探测期间不能与其它探针的挠曲接触。

公开(公告)号：USRE43503E1

公开(公告)日：2012-07-10

申请号：US12903566

申请日：2010-10-13

Applicant: January Kister

Inventor： January Kister

IPC: G01R31/00 ,  G01R31/20

CPC classification number: G01R3/00 ,  G01R1/06733

Abstract: A probe for engaging a conductive pad is provided. The probe includes a probe contact end for receiving a test current, a probe retention portion below the contact end, a block for holding the probe retention portion, a probe arm below the retention portion, a probe contact tip below the arm, and a generally planar self-cleaning skate disposed perpendicular below the contact tip. The self-cleaning skate has a square front, a round back and a flat middle section. The conductive pad is of generally convex shape having a granular non-conductive surface of debris and moves to engage the skate, whereby an overdrive motion is applied to the pad causing the skate to move across and scrub non-conductive debris from the pad displacing the debris along the skate and around the skate round back end to a position on the skate that is away from the pad.

Abstract translation: 提供用于接合导电焊盘的探针。 探头包括用于接收测试电流的探针接触端，接触端下方的探针保持部分，用于保持探针保持部分的块，在保持部分下方的探针臂，臂下方的探针接触尖端，以及通常 平面自清洁溜冰板垂直设置在接触尖端下方。 自洁滑冰鞋有一个正方形的前面，一个圆形的背部和一个平的中间部分。 导电垫具有大致凸形的形状，具有颗粒状非导电表面的碎屑并且移动以接合滑冰板，由此将过载驱动运动施加到垫上，从而使滑冰板移动并且擦去来自垫的非导电碎片， 沿着溜冰鞋和溜冰鞋周围的碎屑回到位于远离垫子的溜冰鞋上的位置。

公开(公告)号：US08111080B2

公开(公告)日：2012-02-07

申请号：US12699257

申请日：2010-02-03

Applicant: January Kister

Inventor： January Kister

IPC: G01R1/067

CPC classification number: G01R1/06733 ,  G01R1/07357

Abstract: An improved knee probe for probing electrical devices and circuits is provided. The improved knee probe has a reduced thickness section to alter the mechanical behavior of the probe when contact is made. The reduced thickness section of the probe makes it easier to deflect the probe vertically when contact is made. This increased ease of vertical deflection tends to reduce the horizontal contact force component responsible for the scrub motion, thereby decreasing scrub length. Here “thickness” is the probe thickness in the deflection plane of the probe (i.e., the plane in which the probe knee lies). The reduced thickness probe section provides increased design flexibility for controlling scrub motion, especially in combination with other probe parameters affecting the scrub motion.

Abstract translation: 提供了一种用于探测电气设备和电路的改进的膝部探针。 改进的膝关节探针具有减小的厚度部分，以在接触时改变探针的机械性能。 探头的厚度减小部分使接触时更容易使探针垂直偏转。 这种增加的垂直偏转的容易性倾向于减少负责擦洗运动的水平接触力分量，从而减少擦洗长度。 这里，“厚度”是探针的偏转平面中的探针厚度（即探针膝盖所在的平面）。 减小厚度的探针部分提供增加的设计灵活性，用于控制擦洗运动，特别是与影响擦洗运动的其他探头参数组合。

公开(公告)号：US20110062978A1

公开(公告)日：2011-03-17

申请号：US12880808

申请日：2010-09-13

Applicant: January Kister

Inventor： January Kister

IPC: G01R1/067

CPC classification number: G01R1/073 ,  G01R1/06716 ,  G01R1/06733 ,  G01R1/06761 ,  G01R1/07357

Abstract: The present invention is a probe array for testing an electrical device under test comprising one or more ground/power probes and one or more signal probes and optionally a gas flow apparatus.

Abstract translation: 本发明是用于测试包括一个或多个接地/功率探针和一个或多个信号探针以及任选的气流装置的被测电气装置的探针阵列。

公开(公告)号：US20110006796A1

公开(公告)日：2011-01-13

申请号：US12871420

申请日：2010-08-30

Applicant: January Kister ,  Alex Shtarker

Inventor： January Kister ,  Alex Shtarker

IPC: G01R31/00 ,  B23P11/00

CPC classification number: G01R31/2887 ,  G01R1/0408 ,  G01R1/07314 ,  G01R1/07342 ,  G01R1/07357 ,  G01R1/07371 ,  G01R3/00 ,  Y10T29/49826

Abstract: A retention arrangement that includes one or more templates for securing and aligning probes for testing a device under test.

Abstract translation: 一种保留装置，包括一个或多个模板，用于固定和对准探头以测试被测设备。

公开(公告)号：US07786740B2

公开(公告)日：2010-08-31

申请号：US11580204

申请日：2006-10-11

Applicant: January Kister

Inventor： January Kister

IPC: G01R31/02

CPC classification number: G01R1/07314 ,  G01R1/07357 ,  G01R1/07371

Abstract: Method and apparatus using a retention arrangement for probes used for electrical testing of a device under test (DUT). The apparatus has a number of probes each of which has a connect end for applying a test signal, a retaining portion, at least one arm portion and a contact tip for making an electrical contact with the DUT. A retention arrangement has a tip holder for holding each of the probes by its contacting tip and a plate with openings for holding each of the probes below the retaining portion. The retaining portion of each of the probes is potted in a potting region defined above the plate with the aid of a potting agent. The apparatus can be used with space transformers, a variety of probes of different geometries and scrub motion characteristics and is well-suited for use in probe card apparatus under tight pitch and small tolerance requirements.

Abstract translation: 使用用于被测设备（DUT）的电气测试的探针的保持装置的方法和装置。 该装置具有多个探针，每个探针具有用于施加测试信号的连接端，保持部分，至少一个臂部分和用于与DUT电接触的接触末端。 保持装置具有用于通过其接触尖端保持每个探针的尖端保持器和具有用于将每个探针保持在保持部分下方的开口的板。 每个探针的保持部分都借助于灌封剂封装在位于板上方的灌封区域中。 该装置可以与空间变压器，各种不同几何形状的探针和擦洗运动特性一起使用，并且非常适用于在紧密间距和小公差要求下的探针卡装置。