摘要:
Disclosed are cooling apparatus and methods of cooling a template. The cooling apparatus includes a reticle and an optical cooling material. The reticle includes patterning for at least partially reflecting patterning radiation incident on a first side of the reticle. The optical cooling material is in thermally-conductive coupling with the reticle mount and is configured to produce cooling when exposed to a laser radiation. More particularly, the optical cooling material includes a glass material that exhibits anti-Stokes fluorescence that produces cooling of the glass material when exposed to an infrared laser beam. In some embodiments, the cooling apparatus may be incorporated with a reticle mount. The reticle mount is in thermally-conductive coupling with a second side of the reticle.
摘要:
A method for reducing the effects of lens heating of a lens in an imaging process includes determining heat load locations on the lens according to an illumination source and a reticle design, obtaining a lens response characterization according to the heat load locations, and utilizing the heat load locations and the lens response characterization to generate a lens heating sensitivity map.
摘要:
An imaging device comprising at least one array pattern region and at least one attenuation region. A plurality of imaging features in the at least one array pattern region and a plurality of assist features in the at least one attenuation region are substantially the same size as one another and are formed substantially on pitch. Methods of forming an imaging device and methods of forming a semiconductor device structure are also disclosed.
摘要:
A data storing system and data processing method of the informational household appliance are provided. The system includes: one or plurality of home database server of informational household appliance which connected with each other, one or plurality of household gateway server, and one or plurality of data managing server of informational household appliance. The data processing method includes: the data processing method of the informational household appliance on-lining, off-lining and status data updating thereof, and the current status of informational household appliance in real-time reflects to the data managing server of informational household appliance through the household gateway server by this data processing method. The data of the informational household appliance can be stored separately from the informational household appliance, and the data of the informational household appliance can be unitedly managed by the system and method.
摘要:
A household gateway subsystem, the subsystem includes: a host device, for connecting an external network with the interior of the household, and controlling various information appliances in the household based on a digital bus; a user operating device, for communicating with the host device via a digital bus interface, and providing various user operating interfaces and control units. A digital household system is also provided, the system includes: a household gateway subsystem, connected with an external communicating network by IP access; the household gateway subsystem includes: a host device; a user operating device, for communicating with the host device via a digital bus interface; a number of wireless signal transceivers, connected with the host device of the household gateway subsystem.
摘要:
A method of mitigating asymmetric lens heating in photolithographically patterning a photo-imagable material using a reticle includes determining where first hot spot locations are expected to occur on a lens when using a reticle to pattern a photo-imagable material. The reticle is then fabricated to include non-printing features within a non-printing region of the reticle which generate additional hot spot locations on the lens when using the reticle to pattern the photo-imagable material. Other implementations are contemplated, including reticles which may be independent of method of use or fabrication.
摘要:
The invention relates to a network communication processing apparatus including: a communication connection selection and configuration unit and an internal interface unit connected in sequence. The invention relates to a network communication processing system including: a network communication processing apparatus, an external communication module and multiple network devices connected to the network communication processing apparatus. The present invention also relates to a method for communication connection adaptation comprising: identifying, by a network communication processing apparatus, available communication connection modes of a network device when it is connected; configuring the network device into a communication connection mode based on the available communication connection modes; and when the connection mode is changed, selecting, by the network communication processing apparatus, another connection mode and configures the network device into the another connection mode.