摘要:
A method and apparatus for facilitating high-quality hot reflow sputtering with no occurrence of voids while reducing the processing time by rapid heating of the substrate. The method comprises two steps. In the first step, a thin base film 81 of aluminum is formed on the side and bottom surfaces of a minute hole 90 formed in the surface of a substrate 9. Substrate 9 is heated to a first temperature of no more than 100.degree. C. at which it is possible to prevent gaps occurring in the base film 81. In the second step, the hole is filled in with aluminum by depositing a further film of aluminum 82 inside hole 90 and causing it to reflow. Substrate 9 is heated to a second temperature which is higher than the first temperature. The hot reflow sputtering apparatus is equipped with an electrostatic attraction mechanism 43, which uses static electricity to grip substrate 9 against a substrate holder 4 provided with an indentation 40 in the substrate mounting surface thereof, and a pressurizing gas introduction system 42 which introduces a pressurizing gas into the indentation 40. A control unit 47 controls the apparatus so that neither electrostatic attraction mechanism 43 nor pressurizing gas introduction system 42 are operated in the first step. In the second step the pressurizing gas introduction system 42 is operated after the electrostatic attraction mechanism 43 has been operated.
摘要:
A keyboard system for an electronic musical instrument includes: a keyboard having a number of keys; a keyboard central processing unit (CPU) coupled to the keyboard; a switch connected to each key on the keyboard; a pull-up resistor serially connected to each switch; a unit for applying voltage to a serial circuit of each switch and each pull-up resistor; and a unit for parallel supplying a signal at an intersection point between each switch and each pull-up resistor to the CPU. The operation states of a plurality of keys can be independently detected by sequentially detecting the potential at the interconnection points.
摘要:
An apparatus and a method for processing lens peripheries which allow lenses to be properly fitted in a frame, i.e., which processes lenses with high dimensional accuracy. For this purpose, the lens periphery processing apparatus and method are designed to comprise an input device for inputting the configuration of lens frame portions of the eyeglasses frame which is a result of three-dimensional measurement, a calculation device for deriving peripheral lengths of the lens frame portions from the three-dimensional lens frame portion configuration inputted by the input device, a tapered edge curve determining device for determining a curve .�.value.!. defined by the locus of the tapered edge of each lens, and a computing device for computing the locus of the tapered edge of each lens which substantially coincides with the peripheral length of the associated lens frame portion which is obtained by the calculation device.
摘要:
A subject lens is held by two chuck shafts, which are rotated synchronously by pulse motors during a grinding operation. A group of grinding wheels are mounted on each of rotary shafts of right and left lens grinding parts. The rotary shafts are disposed on opposite sides of the chuck shafts. A desired grinding wheel for each processing is selected by moving the rotary shaft vertically. To grind the subject lens, the rotary shafts are moved independently by pulse motors toward the rotation axis of the chuck shafts based on lens frame shape data in the case of rough processing.
摘要:
A method for forming Ti--TiN laminates adapted to reduce the formation of dust particles harmful to semiconductor devices without detriment to productivity, and a magnetron cathode for performing the method are provided. Ti films and TiN films are formed through sputtering of a Ti target using a multi-chamber system comprising at least two chambers each having a magnetron cathode in which a magnet can be moved to accommodate different films. The type of film being formed in each chamber is periodically alternated to prevent a buildup of TiN film adhered to the inner walls of the chambers which peels and causes dust particles.
摘要:
An apparatus and a method for processing lens peripheries which allow lenses to be properly fitted in a frame, i.e., which processes lenses with high dimensional accuracy. For this purpose, the lens periphery processing apparatus and method are designed to comprise an input device for inputting the configuration of lens frame portions of the eyeglasses frame which is a result of three-dimensional measurement, a calculation device for deriving peripheral lengths of the lens frame portions from the three-dimensional lens frame portion configuration inputted by the input device, a tapered edge curve determining device for determining a curve value defined by the locus of the tapered edge of each lens, and a computing device for computing the locus of the tapered edge of each lens which substantially coincides with the peripheral length of the associated lens frame portion which is obtained by the calculation device.
摘要:
An IC socket, capable of being applied to an IC device having short lead pins and ensuring reliable contact with the lead pins used, comprises contacts each having a first contact element that is substantially fixed and a second contact element that is elastically deformable, and an actuator for moving the second contact elements of the contacts. The second contact elements have their centers formed as engaging means for engaging with the actuator, and their portions near the surface of a socket body are formed as contacting means to be brought into contact with lead pins of an IC device. The second contact elements are located close to the first contact elements. When an IC device is inserted, the actuator separates the second contact elements from the first contact elements.
摘要:
A sheet delivery mechanism includes a pair of delivery rollers which deliver a sheet along a sheet delivery passage of a sheet treatment apparatus for predeterminately treating the sheet, a sheet halting member for halting the sheet, and a pinching force adjusting member. The pinching force adjusting member adjusts the delivery rollers to place them into a first state where the sheet pinching force of the delivery rollers is relatively small so that the delivery rollers can slip on the halted sheet and into a second state where the sheet pinching force is relatively great so that the sheet can be delivered in the case where a sheet halt is released for delivery.