Hot reflow sputtering method and apparatus
    41.
    发明授权
    Hot reflow sputtering method and apparatus 有权
    热回流溅射法和设备

    公开(公告)号:US06030510A

    公开(公告)日:2000-02-29

    申请号:US151738

    申请日:1998-09-11

    摘要: A method and apparatus for facilitating high-quality hot reflow sputtering with no occurrence of voids while reducing the processing time by rapid heating of the substrate. The method comprises two steps. In the first step, a thin base film 81 of aluminum is formed on the side and bottom surfaces of a minute hole 90 formed in the surface of a substrate 9. Substrate 9 is heated to a first temperature of no more than 100.degree. C. at which it is possible to prevent gaps occurring in the base film 81. In the second step, the hole is filled in with aluminum by depositing a further film of aluminum 82 inside hole 90 and causing it to reflow. Substrate 9 is heated to a second temperature which is higher than the first temperature. The hot reflow sputtering apparatus is equipped with an electrostatic attraction mechanism 43, which uses static electricity to grip substrate 9 against a substrate holder 4 provided with an indentation 40 in the substrate mounting surface thereof, and a pressurizing gas introduction system 42 which introduces a pressurizing gas into the indentation 40. A control unit 47 controls the apparatus so that neither electrostatic attraction mechanism 43 nor pressurizing gas introduction system 42 are operated in the first step. In the second step the pressurizing gas introduction system 42 is operated after the electrostatic attraction mechanism 43 has been operated.

    摘要翻译: 一种用于在不发生空隙的情况下促进高质量热回流溅射的方法和装置,同时通过快速加热衬底减少处理时间。 该方法包括两个步骤。 在第一步骤中,在基板9的表面形成的微小孔90的侧面和底面上形成有薄的铝基底膜81.将基板9加热至不超过100℃的第一温度。 在此可以防止在基膜81中发生间隙。在第二步骤中,通过在孔90内沉积另外的铝82膜并使其回流,用铝填充孔。 将基板9加热到高于第一温度的第二温度。 热回流溅射装置配备有静电吸引机构43,该静电吸引机构43使用静电来将基板9抵靠在其基板安装表面中设置有凹口40的基板保持件4和加压气体导入系统42, 气体进入压痕40.控制单元47控制装置,使得静电吸引机构43和加压气体导入系统42都不在第一步骤中操作。 在第二步骤中,在静电吸引机构43被操作之后,加压气体引入系统42被操作。

    Keyboard system for an electric musical instrument in which each key is
provided with an independent output to a processor
    42.
    发明授权
    Keyboard system for an electric musical instrument in which each key is provided with an independent output to a processor 失效
    用于电子乐器的键盘系统,其中每个键都具有与处理器的独立输出

    公开(公告)号:US5883327A

    公开(公告)日:1999-03-16

    申请号:US988170

    申请日:1992-12-09

    摘要: A keyboard system for an electronic musical instrument includes: a keyboard having a number of keys; a keyboard central processing unit (CPU) coupled to the keyboard; a switch connected to each key on the keyboard; a pull-up resistor serially connected to each switch; a unit for applying voltage to a serial circuit of each switch and each pull-up resistor; and a unit for parallel supplying a signal at an intersection point between each switch and each pull-up resistor to the CPU. The operation states of a plurality of keys can be independently detected by sequentially detecting the potential at the interconnection points.

    摘要翻译: 一种用于电子乐器的键盘系统包括:具有多个键的键盘; 耦合到键盘的键盘中央处理单元(CPU); 连接到键盘上的每个键的开关; 串联连接到每个开关的上拉电阻; 用于向每个开关和每个上拉电阻器的串行电路施加电压的单元; 以及用于在每个开关和每个上拉电阻之间的交点处并行地提供信号到CPU的单元。 可以通过依次检测互连点的电位来独立地检测多个键的操作状态。

    Lens periphery processing apparatus, method for obtaining processing
data, and lens periphery processing method
    43.
    再颁专利
    Lens periphery processing apparatus, method for obtaining processing data, and lens periphery processing method 失效
    透镜周边处理装置,获取处理数据的方法以及透镜周边处理方法

    公开(公告)号:USRE35898E

    公开(公告)日:1998-09-15

    申请号:US700021

    申请日:1996-08-20

    摘要: An apparatus and a method for processing lens peripheries which allow lenses to be properly fitted in a frame, i.e., which processes lenses with high dimensional accuracy. For this purpose, the lens periphery processing apparatus and method are designed to comprise an input device for inputting the configuration of lens frame portions of the eyeglasses frame which is a result of three-dimensional measurement, a calculation device for deriving peripheral lengths of the lens frame portions from the three-dimensional lens frame portion configuration inputted by the input device, a tapered edge curve determining device for determining a curve .�.value.!. defined by the locus of the tapered edge of each lens, and a computing device for computing the locus of the tapered edge of each lens which substantially coincides with the peripheral length of the associated lens frame portion which is obtained by the calculation device.

    摘要翻译: 一种用于处理透镜周边的装置和方法,其允许透镜适当地装配在框架中,即处理具有高尺寸精度的透镜。 为此,透镜周边处理装置和方法被设计为包括用于输入作为三维测量的结果的眼镜框的透镜框部分的配置的输入装置,用于导出透镜的周长的计算装置 由输入装置输入的三维透镜框部分构造的框架部分,用于确定由每个透镜的锥形边缘的轨迹定义的曲线[值]的锥形边缘曲线确定装置,以及用于计算该轨迹的计算装置 每个透镜的锥形边缘基本上与由计算装置获得的相关镜片框架部分的周长重合。

    Method for forming Ti-tin laminates
    47.
    发明授权
    Method for forming Ti-tin laminates 失效
    形成钛锡层压板的方法

    公开(公告)号:US5514257A

    公开(公告)日:1996-05-07

    申请号:US305837

    申请日:1994-09-14

    摘要: A method for forming Ti--TiN laminates adapted to reduce the formation of dust particles harmful to semiconductor devices without detriment to productivity, and a magnetron cathode for performing the method are provided. Ti films and TiN films are formed through sputtering of a Ti target using a multi-chamber system comprising at least two chambers each having a magnetron cathode in which a magnet can be moved to accommodate different films. The type of film being formed in each chamber is periodically alternated to prevent a buildup of TiN film adhered to the inner walls of the chambers which peels and causes dust particles.

    摘要翻译: 提供一种用于形成适于减少对半导体器件有害的灰尘颗粒的形成而不损害生产率的Ti-TiN层压体的方法,以及用于执行该方法的磁控阴极。 使用包括至少两个室的多腔室系统通过溅射Ti靶而形成Ti膜和TiN膜,每个室具有可以移动磁体以适应不同膜的磁控阴极。 在每个室中形成的膜的类型周期性地交替,以防止粘附到室的内壁上的TiN膜的积聚,其剥落并引起灰尘颗粒。

    Lens periphery processing apparatus, method for obtaining processing
data, and lens periphery processing method
    48.
    发明授权
    Lens periphery processing apparatus, method for obtaining processing data, and lens periphery processing method 失效
    透镜周边处理装置,获取处理数据的方法以及透镜周边处理方法

    公开(公告)号:US5347762A

    公开(公告)日:1994-09-20

    申请号:US11759

    申请日:1993-02-01

    摘要: An apparatus and a method for processing lens peripheries which allow lenses to be properly fitted in a frame, i.e., which processes lenses with high dimensional accuracy. For this purpose, the lens periphery processing apparatus and method are designed to comprise an input device for inputting the configuration of lens frame portions of the eyeglasses frame which is a result of three-dimensional measurement, a calculation device for deriving peripheral lengths of the lens frame portions from the three-dimensional lens frame portion configuration inputted by the input device, a tapered edge curve determining device for determining a curve value defined by the locus of the tapered edge of each lens, and a computing device for computing the locus of the tapered edge of each lens which substantially coincides with the peripheral length of the associated lens frame portion which is obtained by the calculation device.

    摘要翻译: 一种用于处理透镜周边的装置和方法,其允许透镜适当地装配在框架中,即处理具有高尺寸精度的透镜。 为此,透镜周边处理装置和方法被设计为包括用于输入作为三维测量的结果的眼镜框的透镜框部分的配置的输入装置,用于导出透镜的周长的计算装置 由输入装置输入的三维透镜框部分构造的框架部分,用于确定由每个透镜的锥形边缘的轨迹定义的曲线值的渐缩边缘曲线确定装置,以及用于计算每个透镜的轨迹的计算装置 每个透镜的锥形边缘基本上与由计算装置获得的相关联的透镜框部分的周长重合。

    IC socket
    49.
    发明授权
    IC socket 失效
    IC插座

    公开(公告)号:US5342213A

    公开(公告)日:1994-08-30

    申请号:US73932

    申请日:1993-06-08

    摘要: An IC socket, capable of being applied to an IC device having short lead pins and ensuring reliable contact with the lead pins used, comprises contacts each having a first contact element that is substantially fixed and a second contact element that is elastically deformable, and an actuator for moving the second contact elements of the contacts. The second contact elements have their centers formed as engaging means for engaging with the actuator, and their portions near the surface of a socket body are formed as contacting means to be brought into contact with lead pins of an IC device. The second contact elements are located close to the first contact elements. When an IC device is inserted, the actuator separates the second contact elements from the first contact elements.

    摘要翻译: 一种IC插座,其能够应用于具有短引脚并且确保与所使用的引脚的可靠接触的IC器件,包括各自具有基本固定的第一接触元件和可弹性变形的第二接触元件的触点,以及 用于移动接触件的第二接触元件的致动器。 第二接触元件的中心形成为用于与致动器接合的接合装置,并且它们在插座主体表面附近的部分形成为与IC器件的引脚接触的接触装置。 第二接触元件靠近第一接触元件。 当插入IC器件时,致动器将第二接触元件与第一接触元件分开。

    Sheet delivery mechanism
    50.
    发明授权
    Sheet delivery mechanism 失效
    送纸机制

    公开(公告)号:US5319432A

    公开(公告)日:1994-06-07

    申请号:US885967

    申请日:1992-05-20

    摘要: A sheet delivery mechanism includes a pair of delivery rollers which deliver a sheet along a sheet delivery passage of a sheet treatment apparatus for predeterminately treating the sheet, a sheet halting member for halting the sheet, and a pinching force adjusting member. The pinching force adjusting member adjusts the delivery rollers to place them into a first state where the sheet pinching force of the delivery rollers is relatively small so that the delivery rollers can slip on the halted sheet and into a second state where the sheet pinching force is relatively great so that the sheet can be delivered in the case where a sheet halt is released for delivery.

    摘要翻译: 片材输送机构包括一对输送辊,其沿片材处理装置的片材输送通道输送片材,用于预先处理片材,用于停止片材的片材停止部件和夹紧力调节部件。 夹持力调节构件调节输送辊以将它们置于第一状态,其中输送辊的片夹紧力相对较小,使得输送辊可以在停止的片材上滑动并进入第二状态,其中片材夹紧力为 相对较大,使得在片材停止释放用于输送的情况下可以输送片材。