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41.发明授权Method of forming microfabricated cantilever stylus with integrated pyramidal tip 失效形成集成金字塔尖端的微型悬臂式触控笔的方法
公开(公告)号：US5221415A
公开(公告)日：1993-06-22
申请号：US618054
申请日：1990-11-26
IPC分类号： B81C1/00 , G01Q70/10 , G01Q70/14 , G01Q70/16 , H01L21/306
摘要： A dielectric cantilever arm stylus with an integrally formed pyramidal tip is provided. The tip is molded in a pyramidal pit etched in a later-removed (100) silicon substrate. An integrally-formed cantilever arm is also formed as the tip is being formed. Various thin film materials form the cantilever arm and the tip. In one embodiment of the invention, the dielectric is silicon nitride. The cantilever arm is anodically bonded to a glass block.
摘要翻译： 提供具有整体形成的金字塔形末端的介电悬臂臂触针。 尖端被模制在蚀刻在稍后去除的（100）硅衬底中的金字塔形坑中。 当尖端正在形成时，也形成一体形成的悬臂。 各种薄膜材料形成悬臂和尖端。 在本发明的一个实施例中，电介质是氮化硅。 悬臂被阳极结合到玻璃块上。
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公开(公告)号：US5202803A
公开(公告)日：1993-04-13
申请号：US724646
申请日：1991-07-02
CPC分类号： G11B33/148 , G11B17/32 , G11B21/21 , G11B23/505 , G11B25/043
摘要： A disk file with substantially reduced head-disk spacing and corresponding improvement in recording performance uses a disk coated with a film of conventional high viscosity lubricant, a lubricant reservoir for replenishing the lubricant on the disk over the life of the file, and a transducer carrier with feet which ski on the high viscosity liquid film. The file does not include any means for recirculating the lubricant since the lubricant spins off the disk at a relatively low rate due to its high viscosity. The lubricant reservoir contains a very small amount of lubricant and thus may be maintained inside the substantially sealed disk file. In one embodiment of the invention, the sealed disk file is essentially evacuated. The operation of the disk file in a near vacuum environment is possible because, unlike conventional disk files, air is not required to support an air-bearing head-disk interface and the high vapor pressure of the relatively high molecular weight lubricant prevents its evaporation.
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公开(公告)号：US5200867A
公开(公告)日：1993-04-06
申请号：US724696
申请日：1991-07-02
CPC分类号： G11B21/21 , G11B25/043
摘要： A disk file with substantially reduced head-disk spacing and corresponding improvement in recording performance uses a disk coated with a film of conventional high viscosity lubricant, a lubricant reservoir for replenishing the lubricant on the disk over the life of the file, and a transducer carrier with feet which ski on the high viscosity liquid film. The file does not include any means for recirculating the lubricant since the lubricant spins off the disk at a relatively low rate due to its high viscosity. The lubricant reservoir contains a very small amount of lubricant and thus may be maintained inside the substantially sealed disk file. In one embodiment of the invention, the sealed disk file is essentially evacuated. The operation of the disk file in a near vacuum environment is possible because, unlike conventional disk files, air is not required to support an air-bearing head-disk interface and the high vapor pressure of the relatively high molecular weight lubricant prevents its evaporation.
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44.发明授权Write head designed for adjusting relative write phase between subtracks of a patterned media hypertrack 有权写头用于调整图案化媒体超曲线的子轨道之间的相对写入相位公开(公告)号：US08848314B2
公开(公告)日：2014-09-30
申请号：US13314029
申请日：2011-12-07
IPC分类号： G11B5/127
CPC分类号： G11B5/09 , B82Y10/00 , G11B5/012 , G11B5/11 , G11B5/3116 , G11B5/596 , G11B5/746 , G11B2005/0005
摘要： A magnetic recording system configured for recording to a bit patterned media using both hypertrack recording and shingled recording. The magnetic recording system includes a write pole with a notched trailing edge that results in a write bubble with a trailing edge that has two outer convex lobes separated by a centrally disposed concave region. By locating one of the lobes over first and second data tracks of a hypertrack, a proper alignment of the relative phase of the two tracks can be maintained. Further adjustment to the alignment can be achieved by adjusting the radial location of the write head.
摘要翻译： 磁记录系统，被配置为使用高跟踪记录和带状记录来记录到位图案化介质。 磁记录系统包括具有凹口后缘的写极，其导致具有后缘的写气泡，后缘具有由中心设置的凹区分开的两个外凸起凸起。 通过将一个波瓣定位在超曲线的第一和第二数据轨道上，可以保持两个轨道的相对相位的适当对准。 通过调整写入头的径向位置可以进一步调整对准。
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45.发明授权Servo patterning and writing compatible with planarization of patterned magnetic disks 有权伺服图案和写入与图案化磁盘的平面化兼容公开(公告)号：US08467143B2
公开(公告)日：2013-06-18
申请号：US12699501
申请日：2010-02-03
申请人： Thomas R. Albrecht , Kurt A. Rubin
发明人： Thomas R. Albrecht , Kurt A. Rubin
摘要： Embodiments herein illustrate patterned servo data that is used to facilitate subsequent servo writing to a magnetic disk while allowing the patterned disk to be planarized with a relatively simple planarization process. One disk drive system includes a magnetic disk that is patterned with magnetic lands and nonmagnetic grooves. The magnetic disk also includes bootstrap bands that may be configured at an inner diameter of the magnetic disk. The magnetic lands of the bootstrap bands have varying sizes and are patterned as servo data having a uniform polarity of magnetization. The bootstrap bands have a width that is sufficiently narrow to support an air bearing surface of a slider. The data tracks are circumferentially configured proximate to the bootstrap bands. The slider reads the patterned servo data to facilitate writing of additional servo data in the data tracks.
摘要翻译： 本文的实施例示出了图案化的伺服数据，其被用于有助于随后的伺服写入到磁盘，同时通过相对简单的平坦化处理平面化图案化的盘。 一个磁盘驱动器系统包括用磁性层和非磁性凹槽构图的磁盘。 磁盘还包括可以配置在磁盘的内径处的引导带。 自举带的磁性区域具有不同的尺寸，并且被图案化为具有均匀的磁化极性的伺服数据。 自举带具有足够窄的宽度以支撑滑块的空气支承表面。 数据轨道在引导带附近是周向配置的。 滑块读取图案化的伺服数据，以便于在数据轨道中写入附加的伺服数据。
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46.发明授权公开(公告)号：US08441758B2
公开(公告)日：2013-05-14
申请号：US13108515
申请日：2011-05-16
申请人： Thomas R. Albrecht , Xiao Z. Wu , Henry Hung Yang
发明人： Thomas R. Albrecht , Xiao Z. Wu , Henry Hung Yang
IPC分类号： G11B5/82
摘要： Methods of defining servo patterns and data patterns for forming patterned magnetic media are described. For one method, a lithographic process is performed to define a servo pattern in servo regions on a substrate. The lithographic process also defines a first data pattern in data regions of the substrate. The first data pattern is then transferred to (i.e., etched into) the data regions. Self-assembly structures are then formed on the data pattern in the data regions to define a second data pattern. The servo pattern is then transferred to the servo regions and the second data pattern is transferred to the data regions. Thus, the servo pattern is defined through lithographic processes while the data pattern is defined by a combination of lithographic processes and self-assembly.
摘要翻译： 描述了定义用于形成图案化磁性介质的伺服图案和数据图案的方法。 对于一种方法，执行光刻处理以在衬底上的伺服区域中定义伺服图案。 光刻工艺还定义了衬底的数据区域中的第一数据模式。 然后将第一数据模式转移到（即蚀刻）数据区。 然后在数据区域中的数据模式上形成自组装结构以定义第二数据模式。 然后将伺服模式传送到伺服区域，并将第二数据模式传送到数据区域。 因此，通过光刻工艺定义伺服图案，同时通过光刻工艺和自组装的组合来定义数据图案。
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47.发明申请METHOD USING BLOCK COPOLYMERS FOR MAKING A MASTER DISK WITH RADIAL NONDATA MARKS FOR NANOIMPRINTING PATTERNED MAGNETIC RECORDING DISKS 失效使用块状共聚物制备具有径向非标记标记的主磁盘的方法用于纳刻图形磁记录磁盘公开(公告)号：US20130105437A1
公开(公告)日：2013-05-02
申请号：US13287761
申请日：2011-11-02
摘要： A method for making a master disk for nanoimprinting patterned-media magnetic recording disks has patterns for both the data islands and the nondata regions. The method uses guided self-assembly of a block copolymer (BCP) to form patterns of generally radial lines and/or generally concentric rings as well as patterns of gap regions of one of the BCP components. The pattern of lines and/or rings have the BCP components aligned as lamellae perpendicular to the substrate, while the pattern of gap regions has the BCP components aligned as lamellae parallel to the substrate. One of the BCP components is removed, leaving the other BCP component as an etch mask to fabricate either the final master disk or two separate molds that are then used to fabricate the master disk.
摘要翻译： 用于制造用于纳米压印图案化介质磁记录盘的母盘的方法具有用于数据岛和非数据区的图案。 该方法使用嵌段共聚物（BCP）的引导自组装形成大体上径向线和/或大致同心环的图案以及一种BCP组分的间隙区域的图案。 线和/或环的图案具有垂直于衬底的薄片对准的BCP组分，而间隙区域的图案将BCP组分排列成平行于衬底的薄片。 BCP组件中的一个被去除，另一个BCP组件作为蚀刻掩模来制造最终的主磁盘或两个单独的模具，然后用于制造主磁盘。
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公开(公告)号：US08257598B2
公开(公告)日：2012-09-04
申请号：US13351385
申请日：2012-01-17
申请人： Thomas R. Albrecht , Ricardo Ruiz
发明人： Thomas R. Albrecht , Ricardo Ruiz
IPC分类号： B44C1/22 , C03C15/00 , C03C25/68 , H01L21/302 , H01L21/461
CPC分类号： G11B5/855
摘要： The invention is a method for making a master mold to be used for nanoimprinting patterned-media magnetic recording disks. The method uses conventional optical or e-beam lithography to form a pattern of generally radial stripes on a substrate, with the stripes being grouped into annular zones or bands. A block copolymer material is deposited on the pattern, resulting in guided self-assembly of the block copolymer into its components to multiply the generally radial stripes into generally radial lines of alternating block copolymer components. The radial lines of one of the components are removed and the radial lines of the remaining component are used as an etch mask to etch the substrate. Conventional lithography is used to form concentric rings over the generally radial lines. After etching and resist removal, the master mold has pillars arranged in circular rings, with the rings grouped into annular bands.
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49.发明申请METHOD USING BLOCK COPOLYMERS FOR MAKING A MASTER MOLD WITH HIGH BIT-ASPECT-RATIO FOR NANOIMPRINTING PATTERNED MAGNETIC RECORDING DISKS 有权使用块状共聚物制备具有高比特比例的主模的纳米压印图形磁记录盘的方法公开(公告)号：US20120111827A1
公开(公告)日：2012-05-10
申请号：US13351385
申请日：2012-01-17
申请人： Thomas R. Albrecht , Ricardo Ruiz
发明人： Thomas R. Albrecht , Ricardo Ruiz
CPC分类号： G11B5/855
摘要： The invention is a method for making a master mold to be used for nanoimprinting patterned-media magnetic recording disks. The method uses conventional optical or e-beam lithography to form a pattern of generally radial stripes on a substrate, with the stripes being grouped into annular zones or bands. A block copolymer material is deposited on the pattern, resulting in guided self-assembly of the block copolymer into its components to multiply the generally radial stripes into generally radial lines of alternating block copolymer components. The radial lines of one of the components are removed and the radial lines of the remaining component are used as an etch mask to etch the substrate. Conventional lithography is used to form concentric rings over the generally radial lines. After etching and resist removal, the master mold has pillars arranged in circular rings, with the rings grouped into annular bands.
摘要翻译： 本发明是用于制造用于纳米压印图案化介质磁记录盘的母模的方法。 该方法使用常规光学或电子束光刻在基底上形成大致径向条纹的图案，其中条纹被分组成环形区域或条带。 嵌段共聚物材料沉积在图案上，导致嵌段共聚物引导自组装成其组分，以将大致径向的条带乘以交替的嵌段共聚物组分的大致径向线。 除去其中一个部件的径向线，并且将其余部件的径向线用作蚀刻掩模以蚀刻基板。 常规光刻用于在大致径向线上形成同心环。 在蚀刻和抗蚀剂去除之后，主模具有布置成圆形环的柱，其中环被分组成环形带。
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50.发明申请METHOD FOR MAKING A MASTER DISK FOR NANOIMPRINTING PATTERNED MAGNETIC RECORDING DISKS 有权用于制作用于印制图形磁记录盘的主磁盘的方法公开(公告)号：US20110226737A1
公开(公告)日：2011-09-22
申请号：US13151981
申请日：2011-06-02
申请人： Thomas R. Albrecht
发明人： Thomas R. Albrecht
摘要： A method for making a master disk to be used for nanoimprinting patterned-media magnetic recording disks uses sidewall lithography. In one implementation, the master disk substrate has a first pattern of concentric rings formed on it by sidewall lithography, followed by a second pattern of generally radially-directed pairs of parallel lines, also formed by sidewall lithography, with the pairs of parallel lines intersecting the rings. An etching process is then performed, using the upper pattern as an etch mask, to remove unprotected portions of the underlying concentric rings. This leaves a pattern of pillars on the substrate, which then serve as an etch mask for an etching process that etches unprotected portions of the master disk substrate. The resulting master disk then has pillars of substrate material arranged in a pattern of concentric rings and generally radially-directed pairs of parallel lines.
摘要翻译： 用于制造用于纳米压印图案化介质磁记录盘的母盘的方法使用侧壁光刻。 在一个实施方案中，母盘基板具有通过侧壁光刻在其上形成的同心环的第一图案，随后是也通过侧壁光刻形成的大体上径向指向的一对平行线的第二图案，并且所述平行线对相交 戒指。 然后使用上部图案作为蚀刻掩模进行蚀刻工艺，以去除下面的同心环的未受保护的部分。 这在衬底上留下了柱状图案，其然后用作用于蚀刻母盘衬底的未受保护部分的蚀刻工艺的蚀刻掩模。 所得到的母盘然后具有以同心环和大体上径向指向的平行线对图案布置的基底材料柱。
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