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41.发明申请公开(公告)号：US20110030468A1
公开(公告)日：2011-02-10
申请号：US12538337
申请日：2009-08-10
申请人： Chih-Chang Chen , Gaofeng Wang , Liji Huang , Yahong Yao
发明人： Chih-Chang Chen , Gaofeng Wang , Liji Huang , Yahong Yao
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , G01F1/692
摘要： The present invention is generally related to a novel micromachining thermal mass flow sensor and, more particularly, to a device incorporated with high strength and robust characteristics, which therefore is capable of operating under harsh environments. The new disclosed sensor is made of essential material which can provide robust physical structure and superior thermal properties to support the flow measuring operation. The invented thermal mass flow sensor is featuring with the advantages of micro-fabricated devices in terms of compact size, low power consumption, high accuracy and repeatability, wide dynamic range and easiness for mass production, which could avoid the drawbacks of fragility and vulnerability.
摘要翻译： 本发明通常涉及一种新颖的微加工热质量流量传感器，更具体地说涉及具有高强度和鲁棒特性的装置，因此能够在恶劣环境下运行。 新公开的传感器由必需材料制成，其可以提供鲁棒的物理结构和优异的热性能来支持流量测量操作。 本发明的热质量流量传感器具有结构紧凑，功耗低，精度高，重复性好，动态范围广，批量生产容易的微型装置优点，可以避免脆弱性和脆弱性的缺点。
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42.发明授权Micromachined gas and liquid concentration sensor and method of making the same 有权微加工气体和液体浓度传感器及其制造方法公开(公告)号：US07780343B2
公开(公告)日：2010-08-24
申请号：US11774771
申请日：2007-07-09
申请人： Chih-Chang Chen , Yahong Yao , Gaofeng Wang , Liji Huang
发明人： Chih-Chang Chen , Yahong Yao , Gaofeng Wang , Liji Huang
CPC分类号： G01N25/20 , G01F1/6845 , G01F1/692
摘要： A device with micromachined (a.k.a. MEMS, Micro Electro Mechanical Systems) silicon sensor to measure gas or liquid concentration in a binary mixture formality is disclosed in the present invention. A process for fabricating the said MEMS silicon concentration sensor, which thereby can greatly reduce the sensor fabrication cost by a batch production, is revealed as well. This MEMS process can mass-produce the sensors on silicon substrate in the ways of small size, low power, and high reliability. In addition to the gas or liquid concentration measurement, the present invention further discloses that the said sensor can also readily measure gas or liquid mass flow rate while record the concentration data, which is not viable by other related working principle.
摘要翻译： 在本发明中公开了一种具有微加工（a.k.a. MEMS，Micro Electro Mechanical Systems）硅传感器的装置，用于测量二元混合物形式中的气体或液体浓度。 也可以揭示制造所述MEMS硅浓度传感器的方法，从而能够通过批量生产大大降低传感器制造成本。 该MEMS工艺可以以小尺寸，低功率和高可靠性的方式批量生产硅衬底上的传感器。 除了气体或液体浓度测量之外，本发明还公开了所述传感器还可以容易地测量气体或液体质量流量，同时记录其他相关工作原理不可行的浓度数据。
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43.发明授权Micromachined thermal mass flow sensors and insertion type flow meters and manufacture methods 有权微加工热质量流量传感器和插入式流量计及其制造方法公开(公告)号：US07536908B2
公开(公告)日：2009-05-26
申请号：US11157604
申请日：2005-06-21
申请人： Gaofeng Wang , Chih-Chang Chen , Yahong Yao , Liji Huang
发明人： Gaofeng Wang , Chih-Chang Chen , Yahong Yao , Liji Huang
IPC分类号： G01F1/68
CPC分类号： G01F1/6845
摘要： An integrated mass flow sensor is manufactured by a process of carrying out a micro-machining process on an N or P-type silicon substrate with orientation . This mass flow sensor comprises a central thin-film heater and a pair of thin-film heat sensing elements, and a thermally isolated membrane for supporting the heater and the sensors out of contact with the substrate base. The mass flow sensor is arranged for integration on a same silicon substrate to form a one-dimensional or two-dimensional array in order to expand the dynamic measurement range. For each sensor, the thermally isolated membrane is formed by a process that includes a step of first depositing dielectric thin-film layers over the substrate and then performing a backside etching process on a bulk silicon with TMAH or KOH or carrying out a dry plasma etch until the bottom dielectric thin-film layer is exposed. Before backside etching the bulk silicon, rectangular openings are formed on the dielectric thin-film layers by applying a plasma etching to separate the area of heater and sensing elements from the rest of the membrane. This mass flow sensor is operated with two sets of circuits, a first circuit for measuring a flow rate in a first range of flow rates and a second circuit for measuring a flow rate in a second range of flow rates, to significantly increase range of flow rate measurements, while maintains a high degree of measurement accuracy.
摘要翻译： 通过在取向<100>的N型或P型硅衬底上进行微加工工艺的方法制造集成的质量流量传感器。 该质量流量传感器包括中央薄膜加热器和一对薄膜热敏元件，以及用于支撑加热器的热隔离膜和与基板基板接触的传感器。 质量流量传感器布置成集成在相同的硅衬底上以形成一维或二维阵列，以便扩大动态测量范围。 对于每个传感器，热隔离膜通过包括首先在衬底上沉积电介质薄膜层然后用TMAH或KOH对体硅进行背面蚀刻工艺或进行干等离子体蚀刻的步骤来形成 直到底部介电薄膜层暴露。 在背面蚀刻体硅之前，通过施加等离子体蚀刻在电介质薄膜层上形成矩形开口，以将加热器的区域和感测元件与膜的其余部分分开。 该质量流量传感器用两组电路操作，第一电路用于测量第一流量范围内的流量，以及用于测量在第二流量范围内的流量的第二电路，以显着增加流量范围 速率测量，同时保持高度的测量精度。
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公开(公告)号：US11512990B2
公开(公告)日：2022-11-29
申请号：US16918237
申请日：2020-07-01
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
摘要： An electronic utility gas meter using MEMS thermal time-of-flight flow sensor to meter gas custody transfer mass flowrate and an additional MEMS gas sensor to measure the combustion gas composition for the correlations to the acquisition of gas high heat value simultaneously is disclosed in the present invention. The meter is designed for the applications in the city utility gas consumption in compliance with the current tariff while metering the true thermal value of the delivered gases for future upgrades. Data safety, remote data communication, and other features with state-of-the-art electronics are also included in the design.
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公开(公告)号：US11428596B2
公开(公告)日：2022-08-30
申请号：US17022988
申请日：2020-09-16
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
IPC分类号： G01L21/12
摘要： The design of a vacuum gauge utilizing a micromachined silicon vacuum sensor to measure the extended vacuum range from ambient to ultrahigh vacuum by registering the gas thermal properties at each vacuum range is disclosed in the present invention. This single device is capable of measuring the pressure range from ambient and above to ultrahigh vacuum. This device applies to all types of vacuum measurement where no medium attack silicon is present. The disclosed vacuum gauge operates with thermistors and thermopile on a membrane of the thermal isolation diaphragm structure with a heat isolation cavity underneath.
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公开(公告)号：US11353336B2
公开(公告)日：2022-06-07
申请号：US16903825
申请日：2020-06-17
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
摘要： An electronic utility gas meter using MEMS thermal mass flow sensor to meter gas custody transfer and MEMS gas thermal property sensor to compensate the metering values due to gas composition variations is disclosed in the present invention. The meter is designed to have a MEMS mass flow sensor to meter the city utility gas consumption independent of environmental temperature and pressure while a MEMS gas thermal property or dual gas thermal property sensors to compensate the tariff due to the gas composition variations for compliance with the current regulation requirements of tariff and remove the major concerns for the wide deployment of the thermal mass MEMS utility gas meters.
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公开(公告)号：US20220003584A1
公开(公告)日：2022-01-06
申请号：US16918237
申请日：2020-07-01
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
摘要： An electronic utility gas meter using MEMS thermal time-of-flight flow sensor to meter gas custody transfer mass flowrate and an additional MEMS gas sensor to measure the combustion gas composition for the correlations to the acquisition of gas high heat value simultaneously is disclosed in the present invention. The meter is designed for the applications in the city utility gas consumption in compliance with the current tariff while metering the true thermal value of the delivered gases for future upgrades. Data safety, remote data communication, and other features with state-of-the-art electronics are also included in the design.
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公开(公告)号：US20210379323A1
公开(公告)日：2021-12-09
申请号：US16896643
申请日：2020-06-09
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
摘要： The design and structure of a fully automatic oxygen therapy apparatus is exhibited in this disclosure. The apparatus integrates a MEMS mass flow meter, an oximeter, a proportional valve and a smart liquid bottle. The control unit of the apparatus is embedded with a wireless communication device and powered by a battery pack. This apparatus is designed to replace the mechanical oxygen rotameter used in today's hospital or homecare oxygen therapy applications. With a set recipe or parameters locally or remotely, the disclosed apparatus can perform a fully automatic oxygen therapy for recovering the blood oxygen level of patient, without the frequent attention of the therapy administrator, and especially it significantly reduces the possibility of cross infection to the administrator during the attendance of the oxygen therapy process. The therapy process data are relayed to local users as well as a designated cloud or data center. This disclosure will be beneficial for both medical staffs and patient.
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公开(公告)号：US10480974B2
公开(公告)日：2019-11-19
申请号：US16017917
申请日：2018-06-25
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
摘要： The present invention disclosed a micromachined composite silicon flow sensor that is comprised of calorimetric flow sensing elements, time-of-flight sensing elements as well as independent temperature sensing element on a silicon-on-insulator device where the device layer is used for the thermal isolation membrane. The disclosed composite silicon flow sensor can measure mass flowrate, volumetric flowrate and flow medium temperature simultaneously, from which a full spectrum of flow parameters including flow pressure can be obtained. The sensor can be further used to alert any changes in physical properties of flow medium during operation. The disclosed manufacture process details the micromachining process of making such a sensor.
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公开(公告)号：US09752783B2
公开(公告)日：2017-09-05
申请号：US14621043
申请日：2015-02-12
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
CPC分类号： F24C3/126 , F23N5/242 , F23N2025/06 , F23N2031/00 , F23N2041/08 , F23N2900/01001
摘要： The design and assembly of a smart device constituent of a micro-machined (a.k.a. MEMS, Micro Electro Mechanical Systems) mass flow sensor and an electrically controllable valve for applications in safety enhancement and intermit connectivity for residential or commercial gas range is disclosed in the present invention. The said smart device detects the gas flow at the unattended situations and sends information to the destined mobile devices of the users via the network such that it enables the users to remotely execute actions of either shutting off the gas supply or call for relevant party's immediate attention. The said smart device shall also automatically shut off the gas supply should the transmitted signal to users failed to send feedback signal such that it can prevent the safety incidents due to leakage or overheating or even fires. The capability of the MEMS mass flow sensor shall also provide the thermal value measurement of the supplied gases and enable the user to program the gas range for making complete tasks of cooking substances in the unattended situation.
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