摘要:
A polycrystalline silicon manufacturing apparatus efficiently produces high-quality polycrystalline silicon. There is provided a polycrystalline silicon manufacturing apparatus, in which a plurality of gas supplying ports 6A for ejecting raw gas upward in a reactor 1 and gas exhausting ports 7 for exhausting exhaust gas after a reaction are provided on an inner bottom of the reactor 1 in which a plurality of silicon seed rods 4 are stood, the silicon seed rods 4 are heated and the polycrystalline silicon is deposited from the raw gas on the surfaces. The apparatus includes gas distributing tubes 9 that are respectively connected to the gas supplying ports 6A and respectively supply the raw gas to the gas supplying ports 6A, valves 21 that are provided on at least the gas distributing tubes connected to the gas supplying ports 6A adjacent to a center of the reactor 1 and open or close conduit lines of the gas distributing tubes 9, and a valve controlling device 22 that is connected to the valves 21 and controls the conduit lines to be closed for a predetermined time at an early stage of the reaction.
摘要:
The reactor for polycrystalline silicon is a reactor for polycrystalline silicon in which a silicon seed rod installed inside the reactor is heated by supplying electricity, a raw material gas supplied inside the reactor is allowed to react, thereby producing polycrystalline silicon on the surface of the silicon seed rod, and specifically, the reactor for polycrystalline silicon is provided with a raw material gas supply port installed on the bottom of the reactor and a raw material gas supply nozzle attached to the raw material gas supply port so as to be communicatively connected and extending upward, in which the upper end of the raw material gas supply nozzle is set to a height in a range from −10 cm to +5 cm on the basis of the upper end of the electrode which retains the silicon seed rod.
摘要:
A polycrystalline silicon manufacturing apparatus is provided which supplies raw gas to the inside of a reaction furnace and supplies a current from an electrode to a silicon seed rod in a state where the vertically extending silicon seed rod is uprightly stood on each of the plural electrodes disposed in a bottom plate portion of the reaction furnace so as to heat the silicon seed rod and thus to deposit polycrystalline silicon on a surface of the silicon seed rod by means of the reaction of the raw gas.
摘要:
A polymer inactivation method for a polycrystalline silicon manufacturing device, wherein humidified gas such as water vapor and humidified nitrogen gas is supplied into a reacting furnace for manufacturing polycrystalline silicon to hydrolyze polymers adhered to an inner surface of the reacting furnace. It is preferable that a furnace wall of the reacting furnace is heated when the humidified gas is supplied.
摘要:
A polycrystalline silicon manufacturing apparatus is provided which supplies raw gas to the inside of a reaction furnace and supplies a current from an electrode to a silicon seed rod in a state where the vertically extending silicon seed rod is uprightly stood on each of the plural electrodes disposed in a bottom plate portion of the reaction furnace so as to heat the silicon seed rod and thus to deposit polycrystalline silicon on a surface of the silicon seed rod by means of the reaction of the raw gas.
摘要:
In a reactor cleaning apparatus 1 which cleans an inner wall surface 72 of a reactor 70 which generates polycrystalline silicon, a bell jar of the reactor 70 has a dual structure, a through hole 11 is formed along a vertical direction at a central portion of a substantially disc-like tray 10 placed in a horizontal state, a flange portion 13 in which an opening edge of the reactor 70 is placed is formed at an outer peripheral portion of the tray 10, a shaft 20 is provided through the through hole 11 of the tray 10 so as to be rotatable and movable in the vertical direction, a nozzle device 50 which sprays a cleaning water at high pressure in three-dimensional directions is provided at an upper end of the shaft 20, a drive mechanism 30 which rotates the shaft 20 and moves the shaft in the vertical direction is provided at a base end of the shaft 20, and steam piping 62 capable of supplying the steam within the bell jar of the reactor 70 is provided.
摘要:
An electrophotographic photoconductor and method for producing same, the electrophotographic photoconductor including an electroconductive substrate; and a photosensitive film laminated on said electroconductive substrate, wherein the electroconductive substrate comprises an aluminum substrate which has an anodic oxidation film on at least one surface thereof and which has been treated with a sealing agent mixture including an additive selected from the group consisting of a phosphate ester surfactant, a naphthalene sulfonate formaldehyde condensate, and a bisphenol A sulfonate formaldehyde condensate and a sealing agent.
摘要:
A lens-fitted photo film unit containing photo film having a pair of perforations per frame along through a limited length of frame recording portion available for photographing frames. The photo film is previously drawn from a cassette shell, its trailing end secured to a spool of the cassette shell, so as to be wound into the cassette shell one frame after each exposure. According to the invention, the photo film is drawn from the cassette shell as far as a frame of the frame recording portion that is the nearest to the trailing end, and is set in a position one frame or more farther than an exposure position of the film unit, when loading the photo film in the film unit. A slot is formed through the film unit, for permitting insertion of a tool to set a shutter device to its charged position, without the need for winding the photo film. Alternatively, the shutter device is designed to be charged by use of rotation of a film winding wheel, independently of the perforations.
摘要:
A method for making a composite aluminum article comprises the steps of electrochemically or chemically adsorbing fine particles of a polytetrafluoroethylene to the surface of a hard anodic oxide film of an aluminum material or an aluminum alloy material, and drying the aluminum material or the aluminum alloy material. Thereafter, the aluminum material or the aluminum alloy material and an opposite member which slides along the aluminum material or the aluminum alloy material are rubbed together, and a lubricating film is thereby formed.
摘要:
A method for making a composite aluminum article comprises the steps of electrochemically or chemically adsorbing fine particles of a polytetrafluoroethylene to the surface of a hard anodic oxide film of an aluminum material or an aluminum alloy material, and drying the aluminum material or the aluminum alloy material. Thereafter, the aluminum material or the aluminum alloy material and an opposite member which slides along the aluminum material or the aluminum alloy material are rubbed together, and a lubricating film is thereby formed.