摘要:
A piezoelectric/electrostrictive element including a substantially trapezoidal laminate having narrower and wider surfaces lying substantially in parallel to each other and first and second surfaces opposed to each other between the narrower and wider surfaces. The first and second surfaces are inclined at given angles to one of the narrower and wider surfaces. The laminate includes piezoelectric/electrostrictive layers and interposed internal electrodes, the internal electrodes being broken up into a first and a second group, each of the first group internal electrodes lying over one of the second group internal electrodes through one of the piezoelectric/electrostrictive layers. A first external electrode is formed on the first surface of the laminate and is coupled to the first group internal electrodes. A second external electrode is formed on the second surface of the laminate and is coupled to the second group internal electrodes.
摘要:
A piezoelectric/electrostrictive device includes a ceramic substrate and a piezoelectric/electrostrictive element formed on the ceramic substrate. The ceramic substrate includes fixed sections which have a large thickness, a pair of thin plate sections which are formed continuously from the fixed sections and which are thinner than the fixed sections, and movable sections which are provided at ends of the pair of thin plate sections. An additional member is used at least between the pair of thin plate sections and the movable sections. The additional member is a porous member or at least one columnar member.
摘要:
A force sensor includes: a supporting base having a hollow portion, a flexible plate having at least one detecting element and extending across over the hollow portion, and an operating member suspended over the hollow portion by the flexible plate. Inclined strength is given to the flexible plate so that it becomes stronger from an arbitrary position between the outer periphery of the operating member and the inner periphery of the supporting base toward the outer periphery of the operating member and/or toward the inner periphery of the supporting base. Another force sensor includes: a supporting base having a hollow portion, a flexible plate having at least one detecting element and extending across over the hollow portion, and an operating member suspended over the hollow portion by the flexible plate. A boundary between the flexible plate and the operating member and/or a boundary between the flexible plate and the supporting base have (has) a curvature.
摘要:
A laminate-type piezoelectric device includes: a piezoelectric layer (2); and an internal electrode layer (3) which is laminated on the piezoelectric layer (2), has a lower surface flat along a surface of the piezoelectric layer (2) and has an edge sidewall in its tip portion having an inclined surface (3A) making an acute angle with respect to the surface of the underlying piezoelectric layer (2). The piezoelectric layers (2) and the internal electrode layers (3) are alternately laminated on each other.
摘要:
A force sensor circuit has an operating member, a supporting base arranged in the vicinity of and surrounding the operating member, a flexible plate from which the operating member is suspended into a hollow space of the supporting base, a force sensor element having at least one piezoelectric element, a resistor having a resistance value not smaller than 10 M&OHgr;, and an operation amplifier. This force sensor element can be produced with reduced fluctuation of the frequency characteristics, thus achieving high degree of uniformity of the force sensor circuit products.
摘要:
A method of producing a piezoelectric/electrostrictive device in which a piezoelectric/electrostrictive element including a substantially trapezoidal laminate having narrower and wider surfaces lying substantially in parallel to each other and first and second surfaces opposed to each other between the narrower and wider surfaces. The first and second surfaces are inclined at given angles to one of the narrower and wider surfaces. The laminate includes piezoelectric/electrostrictive layers and interposed internal electrodes, the internal electrodes being broken up into a first and a second group, each of the first group internal electrodes lying over one of the second group internal electrodes through one of the piezoelectric/electrostrictive layers. A first external electrode is formed on the first surface of the laminate and is coupled to the first group internal electrodes. A second external electrode is formed on the second surface of the laminate and is coupled to the second group internal electrodes.
摘要:
An acceleration sensor element including a weight, a support having a hollow part which is disposed around the weight as a center, and a flexible plate having piezoelectric elements including a piezoelectric body sandwiched by at least one set of electrodes and disposed horizontally across the support to suspend the weight at the hollow part of the support. Acceleration applied from the prior is converted into deflection of the flexible plate based on movement of the weight corresponding to the acceleration, and the direction and rate of the acceleration are three-dimensionally detected by electric charges generated in the piezoelectric body corresponding to deflection of the flexible plate. The piezoelectric elements are disposed only at flexible parts of the flexible plate.
摘要:
A piezoelectric/electrostrictive element including a substantially trapezoidal laminate having narrower and wider surfaces lying substantially in parallel to each other and first and second surfaces opposed to each other between the narrower and wider surfaces. The first and second surfaces are inclined at given angles to one of the narrower and wider surfaces. The laminate includes piezoelectric/electrostrictive layers and interposed internal electrodes, the internal electrodes being broken up into a first and a second group, each of the first group internal electrodes lying over one of the second group internal electrodes through one of the piezoelectric/electrostrictive layers. A first external electrode is formed on the first surface of the laminate and is coupled to the first group internal electrodes. A second external electrode is formed on the second surface of the laminate and is coupled to the second group internal electrodes.
摘要:
A laminate-type piezoelectric device includes: a piezoelectric layer (2); and an internal electrode layer (3) which is laminated on the piezoelectric layer (2), has a lower surface flat along a surface of the piezoelectric layer (2) and has an edge sidewall in its tip portion having an inclined surface (3A) making an acute angle with respect to the surface of the underlying piezoelectric layer (2). The piezoelectric layers (2) and the internal electrode layers (3) are alternately laminated on each other.
摘要:
A piezoelectric/electrostrictive device is provided, including a pair of mutually confronting thin plate portions, a fixing portion for supporting the pair of thin plate portions, movable portions provided at tip end portions of the pair of thin plate portions and having mutually confronting end surfaces, and piezoelectric/electrostrictive elements disposed on respective thin plate portions 12a and 12b. At least both side surfaces of the thin plate portions and the piezoelectric/electrostrictive elements are covered with coating films made of a material with a low thermal expansion coefficient.