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1.发明申请公开(公告)号：US20050035688A1
公开(公告)日：2005-02-17
申请号：US10898901
申请日：2004-07-26
IPC分类号： H01L41/047 , H01L41/083 , H01L41/09 , H01L41/24
CPC分类号： H01L41/0472 , H01L41/0831 , H01L41/0946 , H01L41/314
摘要： A piezoelectric/electrostrictive device includes a ceramic substrate and a piezoelectric/electrostrictive element formed on the ceramic substrate. The ceramic substrate includes fixed sections which have a large thickness, a pair of thin plate sections which are formed continuously from the fixed sections and which are thinner than the fixed sections, and movable sections which are provided at ends of the pair of thin plate sections. An additional member is used at least between the pair of thin plate sections and the movable sections. The additional member is a porous member or at least one columnar member.
摘要翻译： 压电/电致伸缩器件包括形成在陶瓷衬底上的陶瓷衬底和压电/电致伸缩元件。 陶瓷基板包括具有大厚度的固定部分，从固定部分连续地形成并且比固定部分更薄的一对薄板部分，以及设置在该对薄板部分的端部的可动部分 。 至少在一对薄板部分和可动部分之间使用附加部件。 附加构件是多孔构件或至少一个柱状构件。
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公开(公告)号：US20060038464A1
公开(公告)日：2006-02-23
申请号：US11245885
申请日：2005-10-07
IPC分类号： H01L41/08
CPC分类号： H01L41/273 , H01L41/0477 , H01L41/0831 , H01L41/0946 , H01L41/297
摘要： A pair of opposing thin plate sections, movable sections, and fixed sections for supporting the thin plate sections and the movable sections are provided on a ceramic substrate. After a wiring pattern and a gap or an insulating layer of cermet layer for filling the gap are formed on a ceramic substrate, these are sintered. After that, piezoelectric/electrostrictive layers and cermet electrode layers including a piezoelectric/electrostrictive material and a conductive material are alternately stacked in a comb like structure on the ceramic substrate. Accordingly, a piezoelectric/electrostrictive device having the piezoelectric/electrostrictive element in multilayer structure is obtained.
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公开(公告)号：US06992421B2
公开(公告)日：2006-01-31
申请号：US10866927
申请日：2004-06-14
IPC分类号： H01L41/04
CPC分类号： H01L41/273 , H01L41/0477 , H01L41/0831 , H01L41/0946 , H01L41/297
摘要： A pair of opposing thin plate sections, movable sections, and fixed sections for supporting the thin plate sections and the movable sections are provided on a ceramic substrate. After a wiring pattern and a gap or an insulating layer of cermet layer for filling the gap are formed on a ceramic substrate, these are sintered. After that, piezoelectric/electrostrictive layers and cermet electrode layers including a piezoelectric/electrostrictive material and a conductive material are alternately stacked in a comb like structure on the ceramic substrate. Accordingly, a piezoelectric/electrostrictive device having the piezoelectric/electrostrictive element in multilayer structure is obtained.
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公开(公告)号：US07336020B2
公开(公告)日：2008-02-26
申请号：US11245885
申请日：2005-10-07
IPC分类号： H01L41/04
CPC分类号： H01L41/273 , H01L41/0477 , H01L41/0831 , H01L41/0946 , H01L41/297
摘要： A pair of opposing thin plate sections, movable sections, and fixed sections for supporting the thin plate sections and the movable sections are provided on a ceramic substrate. After a wiring pattern and a gap or an insulating layer of cermet layer for filling the gap are formed on a ceramic substrate, these are sintered. After that, piezoelectric/electrostrictive layers and cermet electrode layers including a piezoelectric/electrostrictive material and a conductive material are alternately stacked in a comb like structure on the ceramic substrate. Accordingly, a piezoelectric/electrostrictive device having the piezoelectric/electrostrictive element in multilayer structure is obtained.
摘要翻译： 在陶瓷基板上设置有一对相对的薄板部分，可动部分和用于支撑薄板部分和可移动部分的固定部分。 在陶瓷基板上形成布线图案和用于填充间隙的金属陶瓷层的间隙或绝缘层之后，将其烧结。 此后，包括压电/电致伸缩材料和导电材料的压电/电致伸缩层和金属陶瓷电极层在陶瓷基板上以梳状结构交替堆叠。 因此，获得了具有多层结构的压电/电致伸缩元件的压电/电致伸缩器件。
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公开(公告)号：US06809459B2
公开(公告)日：2004-10-26
申请号：US10341543
申请日：2003-01-13
IPC分类号： H01L4108
CPC分类号： H01L41/273 , H01L41/0477 , H01L41/0831 , H01L41/0946 , H01L41/297
摘要： A pair of opposing thin plate sections, movable sections, and fixed sections for supporting the thin plate sections and the movable sections are provided on a ceramic substrate. After a wiring pattern and a gap or an insulating layer of cermet layer for filling the gap are formed on a ceramic substrate, these are sintered. After that, piezoelectric/electrostrictive layers and cermet electrode layers including a piezoelectric/electrostrictive material and a conductive material are alternately stacked in a comb like structure on the ceramic substrate. Accordingly, a piezoelectric/electrostrictive device having the piezoelectric/electrostrictive element in multilayer structure is obtained.
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公开(公告)号：US07089637B2
公开(公告)日：2006-08-15
申请号：US10832077
申请日：2004-04-26
CPC分类号： H01L41/43 , G11B5/483 , G11B5/4873 , H01L41/0946 , H01L41/273 , Y10T29/42 , Y10T29/43 , Y10T29/435 , Y10T29/49126 , Y10T29/49798
摘要： A method of producing a piezoelectric/electrostrictive device having a base including a pair of movable parts opposing each other, a fixing part that connects the movable parts with each other at one end thereof, and mounting parts that extend for a predetermined length while holding slit-shaped gaps of a predetermined width along inside surfaces of said movable parts by being turned around at the other end of said movable parts, said piezoelectric/electrostrictive device having a piezoelectric/electrostrictive element disposed on at least one outside surface of said movable parts of said base, wherein a base block obtained by laminating and calcining a large number of ceramic green sheets is adopted as a material for forming said base, and the base including said movable parts, said fixing part, and said mounting parts is formed by cutting said base block at a predetermined site along a lamination direction of said ceramic green sheets.
摘要翻译： 一种制造压电/电致伸缩器件的方法，该压电/电致伸缩器件具有包括彼此相对的一对可动部件的基部，一端连接可动部件的固定部件，同时保持狭缝而延伸规定长度的安装部件 所述压电/电致伸缩装置具有压电/电致伸缩元件，所述压电/电致伸缩元件设置在所述可移动部分的至少一个外表面上，所述压电/电致伸缩元件设置在所述可移动部分的至少一个外表面上， 所述基底，其中通过层压和煅烧大量陶瓷生片而获得的基底块被用作形成所述基底的材料，并且包括所述可移动部分，所述固定部分和所述安装部分的基底通过切割所述基部 基块沿着所述陶瓷生片的层叠方向在预定位置。
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公开(公告)号：US07069630B2
公开(公告)日：2006-07-04
申请号：US10236866
申请日：2002-09-06
CPC分类号： H01L41/0831 , H01L41/0472 , H01L41/0946 , H01L41/314 , Y10T29/42 , Y10T29/49005 , Y10T29/49798 , Y10T156/1043 , Y10T156/1044 , Y10T428/252
摘要： A mathod of manufacturing a piezoelectric/electrostrictive divice includes an additional member that is provided at a border between an inner wall surface of a thin plate section formed by a long ceramic plate and a side surface (cutout surface) formed by a short ceramic plate. Assuming that a surface of the additional member forms a curve C as viewed in vertical cross section, the curve C is a free curve having one inflection point. The additional member has a portion C2 which extends along the inner wall surface of the thin plate section with its surface extending substantially in parallel toward the border, and a curved portion C3 which is disposed at a part corresponding to the border.
摘要翻译： 制造压电/电致伸缩部分的方法包括设置在由长陶瓷板形成的薄板部分的内壁表面和由短陶瓷板形成的侧表面（切口表面）之间的边界处的附加部件。 假设附加构件的表面在垂直截面中观察到曲线C，曲线C是具有一个拐点的自由曲线。 附加构件具有沿着薄板部的内壁面延伸的部分C 2，其表面基本上平行于边界延伸，并且弯曲部分C 3设置在与边界对应的部分处。
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公开(公告)号：US07141916B2
公开(公告)日：2006-11-28
申请号：US11376859
申请日：2006-03-16
IPC分类号： H01L41/083 , H01L41/09 , H02N2/00
CPC分类号： H01L41/0831 , H01L41/0472 , H01L41/0946 , H01L41/314 , Y10T29/42 , Y10T29/49005 , Y10T29/49798 , Y10T156/1043 , Y10T156/1044 , Y10T428/252
摘要： A ceramic stack including a plurality of stacked ceramic plates having different lengths, the ceramic stack including an additional member having a curved surface, the additional member being disposed at a border between a first principal surface of the ceramic plate which is long and a side surface of the ceramic plate which is short. The short ceramic plate is stacked on the first principal surface, and the additional member has one or more inflection points on a surface thereof as viewed in a cross-sectional direction.
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公开(公告)号：US07062825B2
公开(公告)日：2006-06-20
申请号：US10862596
申请日：2004-06-07
CPC分类号： H01L41/0831 , H01L41/0472 , H01L41/0946 , H01L41/314 , Y10T29/42 , Y10T29/49005 , Y10T29/49798 , Y10T156/1043 , Y10T156/1044 , Y10T428/252
摘要： A method of producing a ceramic stack is provided, including the steps of providing at least a first ceramic green sheet to be formed into a long ceramic plate and having a principal surface, providing at least a second ceramic green sheet to be formed into a short ceramic plate and having a length that is less than a length of the principal surface of the first ceramic green sheet, and laminating the second ceramic green sheet to the principal surface of the first ceramic green sheet to form a ceramic green sheet laminate having a lamination border defined between at least a side surface of the second ceramic green sheet and the principal surface of the first ceramic green sheet. The method also includes the steps of forming a member having a curved surface at the lamination border by applying a paste to the lamination border such that the curved surface includes at least one inflection point when viewed in cross-section, and sintering the laminate into an integral unit to form the ceramic stack.
摘要翻译： 提供一种生产陶瓷堆叠的方法，包括以下步骤：提供至少第一陶瓷生片，以形成长陶瓷板并具有主表面，至少提供形成短片的第二陶瓷生片 陶瓷板，其长度小于第一陶瓷生片的主表面的长度，并且将第二陶瓷生片层压到第一陶瓷生片的主表面，以形成具有层压的陶瓷生片叠层 边界限定在第二陶瓷生片的至少一个侧表面和第一陶瓷生片的主表面之间。 该方法还包括以下步骤：通过将糊料施加到层压边界来形成在层压边界处具有弯曲表面的构件，使得弯曲表面在横截面中观察时包括至少一个拐点，并将层压体烧结成 整体单元形成陶瓷叠层。
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公开(公告)号：US20060061240A1
公开(公告)日：2006-03-23
申请号：US11266434
申请日：2005-11-03
申请人： Koji Ikeda , Kazuyoshi Shibata , Tomoki Ito , Fumitake Takahashi
发明人： Koji Ikeda , Kazuyoshi Shibata , Tomoki Ito , Fumitake Takahashi
IPC分类号： H01L41/08
CPC分类号： H01L41/43 , H01L41/094 , H01L41/314 , H01L41/338 , Y10T29/42 , Y10T29/43 , Y10T29/49005 , Y10T29/49126 , Y10T29/49128
摘要： A piezoelectric/electrostrictive device includes a pair of thin plates confronting each other, a fixing member supporting the thin plates thereon, and movable portions disposed on end portions of the pair of thin plates. Protrusions are formed on principal surfaces of first ceramic green sheets according to at least a single thick film forming process. The protrusions will subsequently serve as the movable portions, and the first ceramic green sheets will subsequently serve as the thin plates. The first ceramic green sheets and a second ceramic green sheet which will subsequently serve as the fixing member are stacked into a ceramic green laminated body. The ceramic green laminated body is baked into an integral ceramic laminated body. Piezoelectric/electrostrictive elements are formed on the ceramic laminated body. After the piezoelectric/electrostrictive elements are baked, unnecessary-portions are removed from the piezoelectric/electrostrictive elements to fabricate the piezoelectric/electrostrictive device.
摘要翻译： 压电/电致伸缩器件包括彼此面对的一对薄板，支撑薄板的固定部件和设置在该对薄板的端部上的可动部。 根据至少一个厚膜形成方法，在第一陶瓷生片的主表面上形成突起。 这些突起随后将用作可动部分，并且第一陶瓷生片将随后用作薄板。 第一陶瓷生片和随后用作定影构件的第二陶瓷生片堆叠成陶瓷绿色层压体。 陶瓷绿色层压体被烘烤成一体的陶瓷层压体。 在陶瓷层叠体上形成压电/电致伸缩元件。 在压电/电致伸缩元件被烘烤之后，不必要的部分从压电/电致伸缩元件去除以制造压电/电致伸缩器件。
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