利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

261 条记录 (耗时 0.075 秒)

    MEASURING A PROCESS PARAMETER OF A SEMICONDUCTOR FABRICATION PROCESS USING OPTICAL METROLOGY
    41.
    发明申请
    MEASURING A PROCESS PARAMETER OF A SEMICONDUCTOR FABRICATION PROCESS USING OPTICAL METROLOGY 失效
    使用光学计量法测量半导体制造工艺的工艺参数

    公开(公告)号：US20080212080A1

    公开(公告)日：2008-09-04

    申请号：US12026485

    申请日：2008-02-05

    申请人： Hanyou Chu ,  Vi Vuong ,  Yan Chen

    发明人： Hanyou Chu ,  Vi Vuong ,  Yan Chen

    IPC分类号： G01N21/00

    CPC分类号： H01L22/20

    摘要： To measure a process parameter of a semiconductor fabrication process, the fabrication process is performed on a first area using a first value of the process parameter. The fabrication process is performed on a second area using a second value of the process parameter. A first measurement of the first area is obtained using an optical metrology tool. A second measurement of the second area is obtained using the optical metrology tool. One or more optical properties of the first area are determined based on the first measurement. One or more optical properties of the second area are determined based on the second measurement. The fabrication process is performed on a third area. A third measurement of the third area is obtained using the optical metrology tool. A third value of the process parameter is determined based on the third measurement and a relationship between the determined optical properties of the first and second areas.

    摘要翻译： 为了测量半导体制造工艺的工艺参数，使用工艺参数的第一值在第一区域上执行制造工艺。 使用过程参数的第二值在第二区域上执行制造过程。 使用光学测量工具获得第一区域的第一测量。 使用光学测量工具获得第二区域的第二测量。 基于第一测量确定第一区域的一个或多个光学性质。 基于第二测量来确定第二区域的一个或多个光学特性。 制造工艺在第三区域进行。 使用光学测量工具获得第三个区域的第三个测量值。 基于第三测量和所确定的第一和第二区域的光学特性之间的关系确定过程参数的第三值。

    Measuring a process parameter of a semiconductor fabrication process using optical metrology
    42.
    发明授权
    Measuring a process parameter of a semiconductor fabrication process using optical metrology 有权
    使用光学测量法测量半导体制造工艺的工艺参数

    公开(公告)号：US07327475B1

    公开(公告)日：2008-02-05

    申请号：US11639515

    申请日：2006-12-15

    申请人： Hanyou Chu ,  Vi Vuong ,  Yan Chen

    发明人： Hanyou Chu ,  Vi Vuong ,  Yan Chen

    IPC分类号： G06F19/00 ,  H01L21/66

    CPC分类号： H01L22/20

    摘要： To measure a process parameter of a semiconductor fabrication process, the fabrication process is performed on a first area using a first value of the process parameter. The fabrication process is performed on a second area using a second value of the process parameter. A first measurement of the first area is obtained using an optical metrology tool. A second measurement of the second area is obtained using the optical metrology tool. One or more optical properties of the first area are determined based on the first measurement. One or more optical properties of the second area are determined based on the second measurement. The fabrication process is performed on a third area. A third measurement of the third area is obtained using the optical metrology tool. A third value of the process parameter is determined based on the third measurement and a relationship between the determined optical properties of the first and second areas.

    摘要翻译： 为了测量半导体制造工艺的工艺参数，使用工艺参数的第一值在第一区域上执行制造工艺。 使用过程参数的第二值在第二区域上执行制造过程。 使用光学测量工具获得第一区域的第一测量。 使用光学测量工具获得第二区域的第二测量。 基于第一测量确定第一区域的一个或多个光学性质。 基于第二测量来确定第二区域的一个或多个光学特性。 制造工艺在第三区域进行。 使用光学测量工具获得第三个区域的第三个测量值。 基于第三测量和所确定的第一和第二区域的光学特性之间的关系确定过程参数的第三值。

    Guiding device for ball nut
    43.
    发明申请
    Guiding device for ball nut 有权
    滚珠螺母导向装置

    公开(公告)号：US20070295132A1

    公开(公告)日：2007-12-27

    申请号：US11403766

    申请日：2006-04-13

    申请人： Chung Lin ,  Yan Chen

    发明人： Chung Lin ,  Yan Chen

    IPC分类号： F16H1/24 ,  F16H55/02

    CPC分类号： F16H25/2223 ,  Y10T74/19744 ,  Y10T74/19767

    摘要： A ball nut includes a nut member having an inner thread formed in a bore for threading with a screw member, the nut member includes a recess and an opening communicating with the bore of the nut member for forming one or more anchoring surfaces. A guiding device includes a shank received in the recess of the nut member, and one or more return channels formed in the shank for aligning with the inner thread of the nut member, and an anchoring bar on one end of the shank and engaged in the opening of the nut member. The anchoring bar has one or more end portions for engaging with the anchoring surface of the nut member and for securing the guiding device to the nut member.

    摘要翻译： 滚珠螺母包括螺母构件，螺母构件具有形成在用于螺纹构件螺纹的孔中的内螺纹，螺母构件包括凹部和与螺母构件的孔连通以用于形成一个或多个锚固表面的开口。 引导装置包括容纳在螺母构件的凹部中的柄，以及形成在柄中的用于与螺母构件的内螺纹对准的一个或多个返回通道，以及在柄的一端上的锚定杆， 螺母构件的开口。 锚定杆具有一个或多个端部，用于与螺母构件的固定表面接合并用于将引导装置固定到螺母构件。

    Diphenylmethyl compounds useful as muscarinic receptor antagonists
    46.
    发明授权
    Diphenylmethyl compounds useful as muscarinic receptor antagonists 有权
    用作毒蕈碱受体拮抗剂的二苯甲基化合物

    公开(公告)号：US07250414B2

    公开(公告)日：2007-07-31

    申请号：US11077391

    申请日：2005-03-10

    申请人： Mathai Mammen ,  Yu-Hua Ji ,  Yan Chen ,  Craig Husfeld

    发明人： Mathai Mammen ,  Yu-Hua Ji ,  Yan Chen ,  Craig Husfeld

    IPC分类号： C07D207/08 ,  C07D413/14 ,  C07D403/14 ,  A61K31/4025 ,  A61K31/5377

    CPC分类号： C07D207/08 ,  C07D409/06

    摘要： This invention provides compounds of formula I: wherein a, b, c, e, m, n, Ar1, R1, R2, R3, R4a, R4b, R5 and R6 are as defined in the specification. The compounds of formula I are muscarinic receptor antagonists. The invention also provides pharmaceutical compositions containing such compounds, processes and intermediates for preparing such compounds and methods of using such compounds to treat pulmonary disorders.

    摘要翻译： 本发明提供式I化合物：其中a，b，c，e，m，n，Ar 1，R 1，R 2， R 3，R 4a，R 4b，R 5和R 6， 如说明书中所定义。 式I化合物是毒蕈碱受体拮抗剂。 本发明还提供含有这些化合物的药物组合物，用于制备这些化合物的方法和中间体以及使用这些化合物治疗肺部疾病的方法。