公开(公告)号：US20210033395A1

公开(公告)日：2021-02-04

申请号：US16941655

申请日：2020-07-29

Applicant: Seiko Epson Corporation

Inventor： Seiichiro OGURA ,  Keiichi YAMAGUCHI ,  Ryuta NISHIZAWA

IPC: G01C19/5642 ,  B60R16/023

Abstract: A vibrator device includes a vibrator element, and a support substrate configured to support the vibrator element. The vibrator element includes a drive arm provided with a drive signal electrode and a drive constant-potential electrode, and a detection arm provided with a detection signal electrode and a detection constant-potential electrode. The support substrate includes a base, and a drive signal interconnection electrically coupled to the drive signal electrode, a drive constant-potential interconnection electrically coupled to the drive constant-potential electrode, and a detection signal interconnection electrically coupled to the detection signal electrode all provided to the base, and the drive arm includes a first surface located at the support substrate side, and a second surface located at an opposite side to the first surface. Further, the drive constant-potential electrode is disposed on the first surface, and the drive signal electrode is disposed on the second surface.

公开(公告)号：US20200149889A1

公开(公告)日：2020-05-14

申请号：US16744328

申请日：2020-01-16

Applicant: SEIKO EPSON CORPORATION

Inventor： Ryuta NISHIZAWA ,  Keiichi YAMAGUCHI ,  Keiji NAKAGAWA

IPC: G01C19/5621

Abstract: A gyro vibrating element includes a drive signal pattern including a drive signal electrode to which a drive signal is applied and a drive signal wire connected to the drive signal electrode, a first detection signal pattern including a first detection electrode that outputs a first detection signal and a first detection signal wire connected to the first detection electrode, the first detection signal pattern being capacitively coupled to the drive signal pattern, and a second detection signal pattern including a second detection electrode that outputs a second detection signal opposite in phase to the first detection signal and a second detection signal wire connected to the second detection electrode, the second detection signal pattern being capacitively coupled to the drive signal pattern. Any one of the first detection signal pattern, the second detection signal pattern, and the drive signal pattern includes an adjustment pattern for adjusting an area of the signal pattern.

公开(公告)号：US20190199315A1

公开(公告)日：2019-06-27

申请号：US16229618

申请日：2018-12-21

Applicant: SEIKO EPSON CORPORATION

Inventor： Shiro MURAKAMI ,  Atsushi MATSUO ,  Shinya AOKI ,  Masashi SHIMURA ,  Ryuta NISHIZAWA

IPC: H03H9/02 ,  H03H9/05 ,  H03H9/10 ,  H03H9/19 ,  H03B5/04

CPC classification number: H03H9/02102 ,  H03B5/04 ,  H03B5/326 ,  H03H9/02023 ,  H03H9/02133 ,  H03H9/0519 ,  H03H9/0552 ,  H03H9/1021 ,  H03H9/19

Abstract: A vibrator device includes a base; a circuit element attached to the base; a vibrator element attached to the circuit element; and a plurality of temperature sensors arranged in the circuit element, in which the circuit element includes a first connecting terminal connected to the base, a second connecting terminal connected to the vibrator element, and at least one circuit of an output buffer circuit, a power supply circuit, and a phase-locked loop circuit, and the shortest distance between each of the plurality of temperature sensors and the first connecting terminal or the second connecting terminal is shorter than the shortest distance between each of the temperature sensors and the at least one circuit.

公开(公告)号：US20190165760A1

公开(公告)日：2019-05-30

申请号：US16201213

申请日：2018-11-27

Applicant: SEIKO EPSON CORPORATION

Inventor： Masashi SHIMURA ,  Atsushi MATSUO ,  Shinya AOKI ,  Shiro MURAKAMI ,  Ryuta NISHIZAWA

IPC: H03H9/13 ,  H03H3/04 ,  H03H9/02 ,  H03H9/05 ,  H03H9/10 ,  H03H9/19

Abstract: A vibrator device includes abase, a circuit element that is attached to the base, and a vibrator element that is arranged at an active surface of the circuit element and is attached to the circuit element, and the circuit element includes a terminal for frequency adjustment that is used for frequency adjustment of the vibrator element and is disposed in a region that does not overlap the vibrator element when viewed in a plan view of the active surface.

公开(公告)号：US20180100775A1

公开(公告)日：2018-04-12

申请号：US15839042

申请日：2017-12-12

Applicant: Seiko Epson Corporation

Inventor： Ryuta NISHIZAWA ,  Keiji NAKAGAWA ,  Keiichi YAMAGUCHI ,  Atsushi MATSUO ,  Fumio ICHIKAWA

IPC: G01L1/16 ,  G01L1/10 ,  G01C19/5607

CPC classification number: G01L1/162 ,  G01C19/5607 ,  G01C19/5614 ,  G01C19/5621 ,  G01L1/106 ,  H01L41/094

Abstract: A physical quantity detecting device includes a vibrating element and a charge amplifier. The vibrating element includes a first detection electrode, a second detection electrode, a third detection electrode, and a fourth detection electrode. The first and fourth detection electrodes have the same electrical polarity, the second and third detection electrodes have the same electrical polarity, and the first and second detection electrodes have opposite electrical polarities. The first and fourth detection electrodes are connected to the charge amplifier, and the second and third detection electrodes are connected to the charge amplifier.

公开(公告)号：US20160123736A1

公开(公告)日：2016-05-05

申请号：US14923621

申请日：2015-10-27

Applicant: Seiko Epson Corporation

Inventor： Keiji NAKAGAWA ,  Ryuta NISHIZAWA

IPC: G01C19/5705

CPC classification number: G01C19/5607

Abstract: An vibration element includes a drive vibration section and a detection vibration section, and the detection vibration section has a detection mode 1 and a detection mode 2 as an vibration mode for detection in which the detection vibration section resonates with Coriolis force produced in the drive vibration section and vibrates. A resonance frequency (vibration frequency) of the drive vibration section is higher than a resonance frequency (vibration frequency) in the detection mode 1 and a resonance frequency (vibration frequency) in the detection mode 2, or the vibration frequency of the drive vibration section is lower than the resonance frequency (vibration frequency) in the detection mode 1 and the resonance frequency (vibration frequency) in the detection mode 2.

Abstract translation: 振动元件包括驱动振动部和检测振动部，检测振动部具有作为检测振动模式的检测模式1和检测模式2，其中检测振动部与谐振的驱动振动中产生的科里奥利力 截面和振动。 驱动振动部的共振频率（振动频率）高于检测模式1的共振频率（振动频率）和检测模式2的共振频率（振动频率），或驱动振动部的振动频率 低于检测模式1中的共振频率（振动频率）和检测模式2中的共振频率（振动频率）。

公开(公告)号：US20150162522A1

公开(公告)日：2015-06-11

申请号：US14560402

申请日：2014-12-04

Applicant: Seiko Epson Corporation

Inventor： Seiichiro OGURA ,  Keiichi YAMAGUCHI ,  Ryuta NISHIZAWA ,  Takayuki KIKUCHI

IPC: H01L41/053 ,  H01L41/09

CPC classification number: G01C19/5621 ,  G01C19/5607

Abstract: A vibration element includes a vibrating portion, a support portion that supports the vibrating portion, and a suspension arm that couples the vibrating portion to the support portion. In addition, the suspension arm includes a meandering portion extending out the support portion and an inclination portion that couples the meandering portion to the vibrating portion.

Abstract translation: 振动元件包括振动部分，支撑振动部分的支撑部分和将振动部分连接到支撑部分的悬架臂。 此外，悬架臂包括延伸出支撑部的曲折部分和将曲折部分耦合到振动部分的倾斜部分。

公开(公告)号：US20140020503A1

公开(公告)日：2014-01-23

申请号：US13947468

申请日：2013-07-22

Applicant: Seiko Epson Corporation

Inventor： Keiichi YAMAGUCHI ,  Seiichiro OGURA ,  Takayuki KIKUCHI ,  Ryuta NISHIZAWA ,  Seiji OSAWA

IPC: G01C19/56

CPC classification number: G01C19/5607 ,  G01C19/5621 ,  G01C19/5628 ,  G01P9/04 ,  Y10T29/49 ,  Y10T74/12

Abstract: A vibrator element includes a pair of first and second drive vibrating arms that extend in opposite directions from a base portion; a first weight that is spaced from a tip of at least one of the first and second drive vibrating arms toward the base portion and is provided in a first region of the at least one of the drive vibrating arms; and a second weight that is provided in a second region that is a region between a tip of the first weight and the tip of the at least one of the drive vibrating arms. When an area of the first region is represented as A1, a mass of the first weight is represented as B1, an area of the second region is represented as A2, and a mass of the second weight is represented as B2, B1/A1>B2/A2 is established.

Abstract translation: 振动元件包括从基部向相反方向延伸的一对第一和第二驱动振动臂; 所述第一重物与所述第一和第二驱动振动臂中的至少一个朝向所述基座部分的顶端间隔开并设置在所述至少一个所述驱动振动臂的第一区域中; 以及设置在作为所述第一配重的前端与所述至少一个所述驱动振动臂的前端之间的区域的第二区域中的第二配重。 当第一区域的区域表示为A1时，将第一重量的质量表示为B1，将第二区域的面积表示为A2，将第二重量的质量表示为B2，B1 / A1> B2 / A2建立。

公开(公告)号：US20130283910A1

公开(公告)日：2013-10-31

申请号：US13868472

申请日：2013-04-23

Applicant: SEIKO EPSON CORPORATION

Inventor： Ryuta NISHIZAWA ,  Keiji NAKAGAWA

IPC: H01L41/047 ,  G01C19/56

CPC classification number: H01L41/0475 ,  G01C19/56 ,  G01C19/5607 ,  G01C19/5621

Abstract: A vibrating reed includes a base part. A drive vibrating arm, a detection vibrating arm, and an adjustment vibrating arm extend from the base part. A first adjustment electrode and a second adjustment electrode are connected to the adjustment vibrating arm. The first adjustment electrode generates an electrical signal in first phase. The second adjustment electrode generates an electrical signal in second phase opposite to the first phase. The electrical signals of the adjustment electrodes are superimposed on the detection signal of the detection vibrating arm, and thereby, vibration leakage components are cancelled out. The adjustment vibrating arm is partially sandwiched between a first electrode piece and a second electrode piece, and the adjustment vibrating arm is partially sandwiched between a third electrode piece and a fourth electrode piece.

Abstract translation: 振动片包括基部。 驱动振动臂，检测振动臂和调节振动臂从基部延伸。 第一调整电极和第二调整电极连接到调节振动臂。 第一调整电极在第一相中产生电信号。 第二调整电极产生与第一相相反的第二相位的电信号。 调整电极的电信号叠加在检测振动臂的检测信号上，从而抵消振动泄漏成分。 调节振动臂部分地夹在第一电极片和第二电极片之间，并且调节振动臂部分地夹在第三电极片和第四电极片之间。

公开(公告)号：US20250030396A1

公开(公告)日：2025-01-23

申请号：US18777985

申请日：2024-07-19

Applicant: SEIKO EPSON CORPORATION

Inventor： Takayoshi KOGA ,  Yusuke YAMAMOTO ,  Ryuta NISHIZAWA ,  Atsushi MATSUO ,  Junichi TAKEUCHI

IPC: H03H9/02 ,  H03H9/05 ,  H03H9/10 ,  H03H9/19

Abstract: A vibrator device includes a vibrator element, a base to which the vibrator element is coupled, and a lid bonded to the base. The vibrator element is accommodated in an accommodation space between the lid and the base. At least one of the base or the lid includes a first semiconductor substrate connected to a ground potential and having a conductivity type that is p-type or n-type. The vibrator element includes a vibrator substrate, a first electrode disposed on a side of the vibrator substrate closer to the first semiconductor substrate, and a second electrode disposed on a side of the vibrator substrate farther from the first semiconductor substrate. L1≤0.2×10−3 and d1≥ε×S1×1012, wherein L1 [m] is the height of the accommodation space, d1 [m] is the distance between the first semiconductor substrate and the first electrode, S1 [m2] is the area of the first electrode, and ε [F/m] is the permittivity of the accommodation space.