Spectral filter, and image sensor and electronic device including the spectral filter

    公开(公告)号:US11848343B2

    公开(公告)日:2023-12-19

    申请号:US17367759

    申请日:2021-07-06

    CPC classification number: H01L27/14621 G02B5/288 H01L27/14643

    Abstract: Provided are a spectral filter, a method of manufacturing the same, and an image sensor and an electronic device each including the spectral filter. The spectral filter includes a plurality of first reflective layers provided spaced apart from each other, and a plurality of cavities provided between the plurality of first reflective layers. The cavities have different thicknesses according to a center wavelength. Each of the cavities includes a plurality of etch stop layers having a constant total thickness according to the center wavelength, and at least one dielectric layer having a total thickness which changes according to the center wavelength, wherein the etch stop layers include materials having etch selectivities different than that of the dielectric layer.

    SPECTRAL FILTER, AND IMAGE SENSOR AND ELECTRONIC DEVICE INCLUDING THE SPECTRAL FILTER

    公开(公告)号:US20230093853A1

    公开(公告)日:2023-03-30

    申请号:US17880187

    申请日:2022-08-03

    Abstract: Provided are a spectral filter, and an image sensor and an electronic device including the spectral filter. The spectral filter includes: a first metal reflective layer; a second metal reflective layer provided above the first metal reflective layer; a plurality of cavities provided between the first and second metal reflective layers, the plurality of cavities including first patterns corresponding to different center wavelengths; and a plurality of lower pattern films provided below the first metal reflective layers, the plurality of lower pattern films including second patterns corresponding to the different center wavelengths.

    Image sensor and method of operating

    公开(公告)号:US11536607B2

    公开(公告)日:2022-12-27

    申请号:US16914256

    申请日:2020-06-26

    Abstract: Optical spectrometers may be used to determine the spectral components of electromagnetic waves. Spectrometers may be large, bulky devices and may require waves to enter at a nearly direct angle of incidence in order to record a measurement. What is disclosed is an ultra-compact spectrometer with nanophotonic components as light dispersion technology. Nanophotonic components may contain metasurfaces and Bragg filters. Each metasurface may contain light scattering nanostructures that may be randomized to create a large input angle, and the Bragg filter may result in the light dispersion independent of the input angle. The spectrometer may be capable of handling about 200 nm bandwidth. The ultra-compact spectrometer may be able to read image data in the visible (400-600 nm) and to read spectral data in the near-infrared (700-900 nm) wavelength range. The surface area of the spectrometer may be about 1 mm2, allowing it to fit on mobile devices.

    SPECTRAL FILTER, AND IMAGE SENSOR AND ELECTRONIC DEVICE INCLUDING SPECTRAL FILTER

    公开(公告)号:US20220342129A1

    公开(公告)日:2022-10-27

    申请号:US17727329

    申请日:2022-04-22

    Abstract: Provided is a spectral filter, and an image sensor and an electronic device each including the spectral filter. The spectral filter includes a first metal reflection layer and a second metal reflection layer spaced apart from each other, a plurality of cavities disposed between the first metal reflection layer and the second metal reflection layer, and a bandpass filter disposed between the plurality of cavities and selectively transmitting light of a certain wavelength region. Each of the plurality of cavities may have a multi-mode structure having a plurality of central wavelengths.

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