公开(公告)号：US20240094633A1

公开(公告)日：2024-03-21

申请号：US18150012

申请日：2023-01-04

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jungha CHAE ,  Haengdeog KOH ,  Yoonhyun KWAK ,  Minsang KIM ,  Hana KIM ,  Hyeran KIM ,  Youngmin NAM ,  Changheon LEE ,  Kyuhyun IM

IPC: G03F7/004 ,  C07C65/30 ,  G03F7/20

CPC classification number: G03F7/0045 ,  C07C65/30 ,  G03F7/2006

Abstract: Provided are a carboxylate salt represented by Formula 1, a photoresist composition including the carboxylate salt represented by Formula 1, and a method of forming a pattern by using the photoresist composition






wherein, in Formula 1, A11, R11 to R15, b15, n11, n12, and M+ are described in the specification.

公开(公告)号：US20240043592A1

公开(公告)日：2024-02-08

申请号：US18068365

申请日：2022-12-19

Applicant: Samsung Electronics Co., Ltd.,

Inventor： Minsang KIM ,  Haengdeog KOH ,  Yoonhyun KWAK ,  Chanjae AHN ,  Jungha CHAE ,  Sungwon CHOI ,  Minyoung HA

IPC: C08F220/18 ,  C07C381/12 ,  G03F7/039 ,  G03F7/038 ,  C08F212/14

CPC classification number: C08F220/1807 ,  C07C381/12 ,  G03F7/039 ,  G03F7/038 ,  C08F212/24

Abstract: Provided are a polymer including a repeating unit represented by Formula 1, a photoresist composition including the polymer, and a method of forming a pattern by using the photoresist composition:




wherein the details of R11, L11, a11, A11−, and B11+in Formula 1 are provided in the present specification.

公开(公告)号：US20230128713A1

公开(公告)日：2023-04-27

申请号：US17936602

申请日：2022-09-29

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jungin LEE ,  Kyuyoung HWANG ,  Soyeon KIM ,  Aram JEON ,  Hyeonho CHOI ,  Hyun KOO ,  Sangdong KIM ,  Yoonhyun KWAK ,  Ohyun KWON ,  Byoungki CHOI

IPC: H01L51/00 ,  C07F15/00 ,  C09K11/06 ,  H01L51/50

Abstract: An organometallic compound represented by Formula 1A: wherein, in Formula 1A, groups and variables are the same as described in the specification.

公开(公告)号：US20220411450A1

公开(公告)日：2022-12-29

申请号：US17887757

申请日：2022-08-15

Applicant: Samsung Electronics Co., Ltd.

Inventor： Yoonhyun KWAK ,  Kum Hee LEE ,  Whail CHOI ,  Kyuyoung HWANG ,  Seungyeon KWAK ,  Sangdong KIM ,  Sunghun LEE ,  Kyuhyun IM ,  Yongsuk CHO ,  Jongwon CHOI

IPC: C07F15/00 ,  H01L51/00 ,  H01L51/50

Abstract: An organometallic compound represented by Formula 1: wherein, in Formula 1, R1 to R12 and R16 are the same as described in the specification.

公开(公告)号：US20210119153A1

公开(公告)日：2021-04-22

申请号：US17128400

申请日：2020-12-21

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jungin LEE ,  Kyuyoung HWANG ,  Soyeon KIM ,  Aram JEON ,  Hyeonho CHOI ,  Hyun KOO ,  Sangdong KIM ,  Yoonhyun KWAK ,  Ohyun KWON ,  Byoungki CHOI

IPC: H01L51/00 ,  C07F15/00 ,  C09K11/06

Abstract: An organometallic compound represented by Formula 1A: wherein, in Formula 1A, groups and variables are the same as described in the specification.

公开(公告)号：US20200295278A1

公开(公告)日：2020-09-17

申请号：US16885603

申请日：2020-05-28

Applicant: Samsung Electronics Co., Ltd.

Inventor： Kyuyoung HWANG ,  Ohyun KWON ,  Yoonhyun KWAK ,  Kum Hee LEE ,  Hyeonho CHOI ,  Whail CHOI ,  Byoungki CHOI

IPC: H01L51/00 ,  C07F15/00 ,  C09K11/06 ,  C09K11/02 ,  H05B33/14

Abstract: An organometallic compound represented by Formula 1: M(L1)n(L2)n2  Formula 1 wherein in Formula 1, M, L1, L2, n1, and n2 are the same as described in the specification.

公开(公告)号：US20200044166A1

公开(公告)日：2020-02-06

申请号：US16527093

申请日：2019-07-31

Applicant: Samsung Electronics Co., Ltd.

Inventor： Yongsuk CHO ,  Yoonhyun KWAK ,  Jongwon CHOI ,  Hyun KOO ,  Kyuhyun IM ,  Dmitry KRAVCHUK ,  Seokhwan HONG

IPC: H01L51/00 ,  C07F15/00 ,  C09K11/06

Abstract: An organometallic compound represented by Formula 1: wherein, Formula 1, R1 to R10 and A1 to A7 are the same as described in the detailed description of the specification.

公开(公告)号：US20190300557A1

公开(公告)日：2019-10-03

申请号：US16372836

申请日：2019-04-02

Applicant: Samsung Electronics Co., Ltd.

Inventor： Yoonhyun KWAK ,  Kum Hee LEE ,  Whail CHOI ,  Kyuyoung HWANG ,  Seungyeon KWAK ,  Sangdong KIM ,  Sunghun LEE ,  Kyuhyun IM ,  Yongsuk CHO ,  Jongwon CHOI

IPC: C07F15/00 ,  H01L51/50 ,  H01L51/00

Abstract: An organometallic compound represented by Formula 1: wherein, in Formula 1, R1 to R12 and R16 are the same as described in the specification.

公开(公告)号：US20190194237A1

公开(公告)日：2019-06-27

申请号：US16230529

申请日：2018-12-21

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jongwon Choi ,  Yongsuk CHO ,  Hyun KOO ,  Bumwoo PARK ,  Sunghun LEE ,  Shingo ISHIHARA ,  Yoonhyun KWAK ,  Ohyun KWON

IPC: C07F15/00 ,  C07F1/12 ,  H01L51/00 ,  H01L51/50

CPC classification number: C07F15/0086 ,  C07F1/12 ,  C07F15/006 ,  C09K11/06 ,  C09K2211/185 ,  H01L51/0081 ,  H01L51/0087 ,  H01L51/0091 ,  H01L51/5012 ,  H01L51/5016 ,  H01L51/5056 ,  H01L51/5072 ,  H01L51/5092 ,  H01L51/5096 ,  H01L2251/552

Abstract: An organometallic compound represented by Formula 1: wherein, in Formula 1, groups and variables are the same as described in the specification.

公开(公告)号：US20190074458A1

公开(公告)日：2019-03-07

申请号：US16120961

申请日：2018-09-04

Applicant: Samsung Electronics Co., Ltd.

Inventor： Sunyoung LEE ,  Hyun KOO ,  Soyeon KIM ,  Jungin LEE ,  Hyeonho CHOI ,  Kyuyoung HWANG ,  Yoonhyun KWAK ,  Ohyun KWON

IPC: H01L51/00 ,  C07F15/00 ,  C09K11/06

Abstract: An organometallic compound represented by Formula 1, wherein in Formula 1, groups and variables are the same as described in the specification.