ZnO-based thin film transistor and method of manufacturing the same
    46.
    发明授权
    ZnO-based thin film transistor and method of manufacturing the same 有权
    ZnO系薄膜晶体管及其制造方法

    公开(公告)号:US07638360B2

    公开(公告)日:2009-12-29

    申请号:US11960567

    申请日:2007-12-19

    CPC classification number: H01L29/7869

    Abstract: A ZnO-based thin film transistor (TFT) is provided herein, as is a method of manufacturing the TFT. The ZnO-based TFT has a channel layer that comprises ZnO and ZnCl, wherein the ZnCl has a higher bonding energy than ZnO with respect to plasma. The ZnCl is formed through the entire channel layer, and specifically is formed in a region near THE surface of the channel layer. Since the ZnCl is strong enough not to be decomposed when exposed to plasma etching gas, an increase in the carrier concentration can be prevented. The distribution of ZnCl in the channel layer, may result from the inclusion of chlorine (Cl) in the plasma gas during the patterning of the channel layer.

    Abstract translation: 这里提供了一种ZnO基薄膜晶体管(TFT),以及TFT的制造方法。 ZnO基TFT具有包含ZnO和ZnCl的沟道层,其中ZnCl相对于等离子体具有比ZnO高的结合能。 ZnCl是通过整个沟道层形成的,具体地形成在沟道层表面附近的区域。 由于ZnCl强度足够暴露于等离子体蚀刻气体时不会分解,因此可以防止载流子浓度的增加。 ZnCl在沟道层中的分布可能是由于在沟道层图案化期间在等离子体气体中包含氯(Cl)。

    Video signal processor for radar system
    48.
    发明授权
    Video signal processor for radar system 失效
    视频信号处理器用于雷达系统

    公开(公告)号:US5254999A

    公开(公告)日:1993-10-19

    申请号:US8565

    申请日:1993-01-22

    Applicant: Sang-yoon Lee

    Inventor: Sang-yoon Lee

    CPC classification number: G01S7/2923

    Abstract: A video signal processor for a radar system includes A/D converters for receiving radar signals to digitize the signals at a predetermined speed, direct averagers for writing signals included in the predetermined size of azimuth among the digitized radar signals into different memories according to the azimuths and for averaging signals corresponding to the same range gates, cell average processors having a microcomputer and a RAM for cell-averaging the output of the direct averagers with the processing program down-loaded from a main controller, an extractor for extracting only target data from the output of one of the cell average processors, a radar video processor controller for generating various control signals, and a communication processor for performing the data transmission and reception between the main controller and the radar video processor controller of the radar system.

    Abstract translation: 用于雷达系统的视频信号处理器包括用于接收雷达信号以将数字化为预定速度的信号的A / D转换器,用于根据方位角将数字化雷达信号中包含在预定尺寸方位角的信号写入不同存储器的直接平均器 并且对于与相同范围门对应的平均信号,具有微计算机的单元平均处理器和用于从主控制器下载的处理程序对直接平均器的输出进行单元平均的RAM的单元平均处理器,用于从主控制器提取目标数据的提取器 小区平均处理器之一的输出,用于产生各种控制信号的雷达视频处理器控制器,以及用于在雷达系统的主控制器和雷达视频处理器控制器之间执行数据发送和接收的通信处理器。

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