公开(公告)号：US20210210550A1

公开(公告)日：2021-07-08

申请号：US17207728

申请日：2021-03-21

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Ting-Hsiang Huang ,  Yi-Chung Sheng ,  Sheng-Yuan Hsueh ,  Kuo-Hsing Lee ,  Chih-Kai Kang

IPC: H01L27/22 ,  H01L43/02 ,  H01L43/08

Abstract: A semiconductor device includes a substrate having a magnetic tunneling junction (MTJ) region and a logic region, a magnetic tunneling junction (MTJ) on the MTJ region, and a first metal interconnection on the MTJ. Preferably, a top view of the MTJ includes a circle, a top view of the first metal interconnection includes a flat oval overlapping the circle, and the MTJ includes a bottom electrode, a fixed layer, a free layer, a capping layer, and a top electrode.

公开(公告)号：US10700126B2

公开(公告)日：2020-06-30

申请号：US16167485

申请日：2018-10-22

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Ting-Hsiang Huang ,  Yi-Chung Sheng ,  Sheng-Yuan Hsueh ,  Kuo-Hsing Lee ,  Chih-Kai Kang

IPC: H01L27/22 ,  G11C11/16 ,  H01L43/08

Abstract: A magnetic random access memory (MRAM) includes device strings coupled in parallel, each comprising magnetic tunnel junctions (MTJs) coupled in serial, wherein a quantity of the MTJs of each of the device strings is equal to a quantity of the device strings, and an equivalent resistance (Req) of the MTJs is equal to an average of the sum of a high resistance of one of the MTJs and a low resistance of another MTJ.

公开(公告)号：US10580883B2

公开(公告)日：2020-03-03

申请号：US15912526

申请日：2018-03-05

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Kuo-Hsing Lee ,  Yi-Chung Sheng ,  Sheng-Yuan Hsueh ,  Chih-Kai Kang

IPC: H01L29/66 ,  H01L29/78 ,  H01L27/092 ,  H01L21/8238 ,  H01L21/8234 ,  H01L27/088 ,  H01L27/12 ,  H01L21/84

Abstract: A method of forming a fin forced stack inverter includes the following steps. A substrate including a first fin, a second fin and a third fin across a first active area along a first direction is provided, wherein the first fin, the second fin and the third fin are arranged side by side. A fin remove inside active process is performed to remove at least a part of the second fin in the first active area. A first gate is formed across the first fin and the third fin in the first active area along a second direction. The present invention also provides a 1-1 fin forced fin stack inverter formed by said method.

公开(公告)号：US10529707B2

公开(公告)日：2020-01-07

申请号：US15983096

申请日：2018-05-18

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Hsin-Hsien Chen ,  Sheng-Yuan Hsueh ,  Yi-Chung Sheng ,  Chih-Kai Kang ,  Wen-Kai Lin ,  Shu-Hung Yu

IPC: H01L27/06 ,  H01L21/768 ,  H01L29/06 ,  H01L49/02 ,  H01L23/528

Abstract: A method of forming a capacitor includes the following steps. First, a substrate is provided. A dielectric layer is formed over the substrate. A first patterning process is performed to form a first contact plug through the whole thickness of the dielectric layer and a second patterning process is performed to form a second contact plug in the dielectric layer and spaced apart from the first contact plug in a pre-determined distance, wherein the first contact plug and the second contact plug are capacitively coupled.

公开(公告)号：US10256155B1

公开(公告)日：2019-04-09

申请号：US15893709

申请日：2018-02-12

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Wen-Kai Lin ,  Yi-Chung Sheng ,  Sheng-Yuan Hsueh ,  Chih-Kai Kang

IPC: H01L29/78 ,  H01L21/762 ,  H01L23/528 ,  H01L27/088 ,  H01L21/8234

Abstract: A method for fabricating semiconductor device includes the steps of: forming a first active region and a second active region extending along a first direction on a substrate; forming a first single diffusion break (SDB) structure extending along a second direction between the first active region and the second active region; and forming a first gate line extending along the second direction intersecting the first active region and the second active region. Preferably, the first SDB structure is directly under the first gate line between the first active region and the second active region.

公开(公告)号：US20180156862A1

公开(公告)日：2018-06-07

申请号：US15369905

申请日：2016-12-06

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Hsin-Hsien Chen ,  Sheng-Yuan Hsueh ,  Yi-Chung Sheng ,  Wen-Kai Lin ,  Chih-Kai Kang

IPC: G01R31/28

CPC classification number: G01R31/2884 ,  H01L22/14 ,  H01L22/34

Abstract: The present invention provides a test key structure for measuring or simulating a target via array. The structure includes a substrate with a test region, a plurality of first conductive lines in the test region; a plurality of second conductive lines in the test region and on the first conductive lines, wherein the first conductive lines and the second conductive lines overlaps vertically in a plurality of target regions, and a plurality of vias disposed between the first conductive lines and the second conductive lines, wherein at least two vias vertically contact one of the first conductive lines and one of the second conductive lines. The present invention further provides a method of measuring resistance by using the testkey structure

公开(公告)号：US20180130753A1

公开(公告)日：2018-05-10

申请号：US15347757

申请日：2016-11-09

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Chih-Kai Kang ,  Sheng-Yuan Hsueh ,  Yi-Chung Sheng ,  Kuo-Yu Liao ,  Shu-Hung Yu ,  Hung-Hsu Lin ,  Hsiang-Hung Peng

IPC: H01L23/544 ,  H01L27/092 ,  H01L23/522

Abstract: A semiconductor device includes a substrate including a plurality of chip areas and a scribe line defined thereon, and a mark pattern disposed in the scribe line. The mark pattern includes a plurality of unit cells immediately adjacent to each other, and each unit cell includes a first active region, a second active region isolated from the first active region, a plurality of first gate structures extending along a first direction and arranged along a second direction perpendicular to the first direction, and a plurality of first conductive structures. The first gate structures straddle the first active region and the second active region. The first conductive structures are disposed on the first active region, the second active region, and two opposite sides of the first gate structures.