公开(公告)号：US20210367217A1

公开(公告)日：2021-11-25

申请号：US17394769

申请日：2021-08-05

Applicant: Universal Display Corporation

Inventor： William E. QUINN ,  Jason PAYNTER ,  Gregory MCGRAW ,  Matthew KING

IPC: H01L51/56 ,  H01L51/52 ,  H01L51/00

Abstract: Techniques and devices are provided for attaching a die to a metal manifold. A metal-containing ink is used to deposit a metal trace on the die and thereby to form a gasket, after which the die is compressed against the manifold to form a sealed connection between the two.

公开(公告)号：US20210268536A1

公开(公告)日：2021-09-02

申请号：US17322949

申请日：2021-05-18

Applicant: Universal Display Corporation

Inventor： Gregory MCGRAW ,  William E. QUINN ,  Matthew KING

IPC: B05C5/02 ,  G03F7/00 ,  H01L51/00 ,  B05B7/00

Abstract: Embodiments of the disclosed subject matter provide a device that may have a first depositor that includes one or more delivery apertures surrounded by one or more exhaust apertures, where the one or more delivery apertures and the one or more exhaust apertures are enclosed within a perimeter of a boss that protrudes from a substrate-facing side of the one or more delivery apertures. The delivery channels for the one or more delivery apertures and exhaust channels for the one or more exhaust apertures may be routed orthogonally to each other. The one or more delivery apertures may be configured to permit jets of delivery gas pass through a lower surface of the first depositor. The lower surface of the first depositor may include the one or more exhaust apertures to remove surplus vapor from a delivery zone. Embodiments may also provide a method of forming a print head.

公开(公告)号：US20190386256A1

公开(公告)日：2019-12-19

申请号：US16429745

申请日：2019-06-03

Applicant: Universal Display Corporation

Inventor： William E. QUINN ,  Julia J. BROWN ,  Gregory MCGRAW ,  Gregg KOTTAS ,  William T. MAYWEATHER, III

IPC: H01L51/56 ,  H01L51/00 ,  C23C14/22 ,  C23C14/12 ,  C23C14/54

Abstract: Systems and techniques for deposition such as via OVJP using multiple source ampules are provided. The source ampules are arranged and controlled such that carrier gas may be fed through each source ampule sequentially, thereby allowing for more continuous operation and use of materials that otherwise would be subject to thermal degradation.

公开(公告)号：US20190305224A1

公开(公告)日：2019-10-03

申请号：US16292422

申请日：2019-03-05

Applicant: Universal Display Corporation

Inventor： Michael HACK ,  William E. QUINN ,  Gregory MCGRAW ,  William T. MAYWEATHER, III ,  Julia J. BROWN

IPC: H01L51/00 ,  C23C16/30 ,  H01L51/50 ,  H01L51/52

Abstract: Embodiments of the disclosed subject matter provide systems and methods of depositing a film on a selective area of a substrate. A first jet of a first material may be ejected from a first nozzle assembly of a jet head having a plurality of nozzle assemblies to form a first portion of a film deposition on the substrate. A second jet of a second material may be ejected from a second nozzle assembly of the plurality of nozzle assemblies, the second nozzle assembly being aligned with the first nozzle assembly parallel to a direction of motion between the plurality of nozzle assemblies and the substrate, and the second material being different than the first material. The second material may react with the first portion of the film deposition to form a composite film deposition on the substrate when using reactive gas precursors.

公开(公告)号：US20190221740A1

公开(公告)日：2019-07-18

申请号：US16240814

申请日：2019-01-07

Applicant: Universal Display Corporation

Inventor： William E. QUINN ,  Gregory MCGRAW

IPC: H01L51/00 ,  H01L51/56 ,  H01L51/52 ,  B41J2/135

CPC classification number: H01L51/0005 ,  B41J2/135 ,  H01L51/0094 ,  H01L51/5253 ,  H01L51/56

Abstract: Embodiments of the disclosed subject matter provide a method of modifying the surface energy of a substrate is provided. A first hydrophobic material may be directly printed, using a vapor ejected from a first nozzle, onto a hydrophilic substrate to surround at least a first area of the substrate, where the first material has a vapor pressure of at least 1 Pa at 300° C. A second material may be deposited, from a second nozzle, onto the first area of the substrate.

公开(公告)号：US20190181390A1

公开(公告)日：2019-06-13

申请号：US16184105

申请日：2018-11-08

Applicant: Universal Display Corporation

Inventor： William E. QUINN ,  Gregory MCGRAW

IPC: H01L51/56 ,  H01L51/00 ,  H01L51/50

Abstract: Implementations of the disclosed subject matter provide a print bar for organic vapor jet (OVJP) deposition is provided that includes a plurality of n print head segments, where each of the plurality of print head segments may have an OVJP print head. The print bar may include a plurality of distance sensors, where each of the plurality of distance sensors may be configured to measure a distance between a substrate disposed below the print bar and a portion of at least one of the print head segments. The print bar may include a plurality of not more than n+1 actuators configured to adjust at least one of a position and an orientation of one or more of the plurality of print head segments based upon one or more distances between the substrate and the print bar measured by one or more of the plurality of distance sensors.

公开(公告)号：US20180342675A1

公开(公告)日：2018-11-29

申请号：US15981482

申请日：2018-05-16

Applicant: Universal Display Corporation

Inventor： Xin XU ,  Gregory MCGRAW ,  William E. QUINN

IPC: H01L51/00 ,  H01L51/50 ,  H01L51/52 ,  H05B33/10 ,  H05B33/12 ,  H01L27/32 ,  B05B12/18 ,  C23C16/455 ,  B41J2/045

Abstract: OVJP depositors and techniques for using the same are provided, in which the in-substrate plane velocity of the delivery and confinement flows are both nonzero and parallel to each other across the boundary between the two. These configurations provide improved material utilization efficiency and relaxed fly height tolerances, while achieving acceptable printing resolution and feature uniformity.

公开(公告)号：US20180323373A1

公开(公告)日：2018-11-08

申请号：US15968166

申请日：2018-05-01

Applicant: Universal Display Corporation

Inventor： Bruno KERSSCHOT ,  Ronald STEVENS ,  Eric KOSTERS ,  Ron ASJES ,  William E. QUINN ,  Gregory MCGRAW

IPC: H01L51/00 ,  H01L51/56 ,  H01L21/66 ,  H01L27/32 ,  B41M3/00 ,  B05B1/00

CPC classification number: H01L51/0005 ,  B05B1/00 ,  B41J2/01 ,  B41M3/006 ,  C23C14/04 ,  C23C14/12 ,  C23C14/24 ,  H01L22/20 ,  H01L27/3211 ,  H01L51/001 ,  H01L51/0012 ,  H01L51/56 ,  H01L2251/5353

Abstract: Devices and techniques that include use of a capacitive sensor to permit an OVJP print head to orient itself relative to conductive or dielectric traces on a printing substrate are disclosed. Such a sensor enables real-time measurement and closed-loop control of print head position with respect to substrate traces. This enables, for example, micron scale resolution in a dimension transverse to printing while permitting both the substrate and movement of the OVJP tool to scale to larger sizes than are achievable using conventional techniques and systems.

公开(公告)号：US20180323372A1

公开(公告)日：2018-11-08

申请号：US15968009

申请日：2018-05-01

Applicant: Universal Display Corporation

Inventor： William E. QUINN ,  Gregory MCGRAW ,  Gregg KOTTAS

IPC: H01L51/00 ,  H01L51/56 ,  B05B1/00

Abstract: OVJP print bars are provided that include multiple print head segments, each of which includes a print head and which can be positioned relative to the substrate independently of each other print head segment. Accordingly, a more consistent head-to-substrate distance can be maintained even for substrates that are not uniformly planar.

公开(公告)号：US20170101711A1

公开(公告)日：2017-04-13

申请号：US15290101

申请日：2016-10-11

Applicant: Universal Display Corporation

Inventor： Gregory MCGRAW ,  William E. QUINN ,  Gregg KOTTAS ,  Siddharth HARIKRISHNA MOHAN ,  Matthew KING

IPC: C23C16/455 ,  C23C16/44

Abstract: Systems and techniques for depositing organic material on a substrate are provided, in which one or more shield gas flows prevents contamination of the substrate by the chamber ambient. Thus, multiple layers of the same or different materials may be deposited in a single deposition chamber, without the need for movement between different deposition chambers, and with reduced chance of cross-contamination between layers.