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41.发明授权Stamper, method of manufacturing the stamper, and magnetic recording medium manufacturing method using the stamper 失效压模，制造压模的方法以及使用压模的磁记录介质制造方法公开(公告)号：US08308965B2
公开(公告)日：2012-11-13
申请号：US13093221
申请日：2011-04-25
申请人： Masatoshi Sakurai , Satoshi Shirotori , Seiji Morita , Shinobu Sugimura , Takuya Shimada , Yoshiyuki Kamata
发明人： Masatoshi Sakurai , Satoshi Shirotori , Seiji Morita , Shinobu Sugimura , Takuya Shimada , Yoshiyuki Kamata
摘要： According to one embodiment, a stamper manufacturing method includes forming a conductive material concentration gradient layer including the projections pattern, and a composition ratio of a buffering agent to a conductive material in the conductive material concentration gradient layer reducing in a thickness direction from a master side.
摘要翻译： 根据一个实施例，压模制造方法包括形成包括突起图案的导电材料浓度梯度层，并且导电材料浓度梯度层中的缓冲剂与导电材料的组成比在厚度方向上从主侧减小 。
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公开(公告)号：US07938978B2
公开(公告)日：2011-05-10
申请号：US12691491
申请日：2010-01-21
CPC分类号： G11B5/855
摘要： According to one embodiment, a method of manufacturing a stamper includes forming a first stamper from a master plate having lands and grooves through electroforming, forming a second stamper, a width of which is GW, from the first stamper through electroforming, forming a lamination film with a thickness of LLT on the second stamper, forming, on the lamination film, a second releasing layer, a transfer layer with a thickness of TLT and a third electroforming layer with a thickness of ELT, peeling off the transfer layer and the third electroforming layer from the second stamper to form a third stamper, and isotropically etching the transfer layer on the third stamper in an etching thickness of ET to reduce a width of lands of the third stamper, in which the following relations are satisfied: 10 nm≦ELT and ET≦TLT.
摘要翻译： 根据一个实施例，制造压模的方法包括通过电铸从具有焊盘和槽的母板形成第一压模，通过电铸从第一压模形成其宽度为GW的第二压模，形成层压膜 在第二压模上具有LLT的厚度，在层压膜上形成第二释放层，厚度为TLT的转印层和具有ELT厚度的第三电铸层，剥离转印层和第三电铸 从而形成第三压模，并且以蚀刻厚度的ET对第三压模上的转印层进行各向同性蚀刻，以减小第三压模的焊盘的宽度，其中满足以下关系：10nm＆nlE; ELT 和ET＆nlE; TLT。
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公开(公告)号：US20100072069A1
公开(公告)日：2010-03-25
申请号：US12585756
申请日：2009-09-24
IPC分类号： C25D1/10
摘要： A method for manufacturing an imprint stamper includes the steps of forming a first electroformed layer on a concavo-convex pattern of an original disk with the pattern, peeling off the first electroformed layer to provide a first stamper, forming a second electroformed layer on a concavo-convex pattern of the first stamper, peeling off the second electroformed layer to provide a second stamper, forming a third electroformed layer on a concavo-convex pattern of the second stamper, and peeling off the third electroformed layer to provide a third stamper. In addition, a conductive film is formed at least on one of a bottom of the concave portion and a top surface of the convex portion of the concavo-convex pattern at least in one of the first stamper and the second stamper.
摘要翻译： 压印模具的制造方法包括以下步骤：在具有图案的原盘的凹凸图案上形成第一电铸层，剥离第一电铸层以提供第一压模，在凹凸上形成第二电铸层 - 剥离第二电铸层以提供第二压模，在第二压模的凹凸图案上形成第三电铸层，以及剥离第三电铸层以提供第三压模。 此外，至少在第一压模和第二压模之一中，至少在凹部的底部和凹凸图案的凸部的顶表面中的至少一个上形成导电膜。
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公开(公告)号：US20100078143A1
公开(公告)日：2010-04-01
申请号：US12556278
申请日：2009-09-09
IPC分类号： B41C3/02
CPC分类号： B41C3/02
摘要： A method for manufacturing a duplicating stamper is provided. The method includes the steps of forming a metal film on a stamper, the metal film having an apertural area in a central area of the stamper, lifting up an innermost circular edge of the metal film in order to detach the metal film from the innermost circular edge to the outermost circular edge, and detaching the metal film to provide another stamper. Alternatively, for detaching the metal film, a gas is blown into the apertural area with lifting up the innermost circular edge of the metal film.
摘要翻译： 提供了制造复印压模的方法。 该方法包括以下步骤：在压模上形成金属膜，金属膜在压模的中心区域具有开口区域，提升金属膜的最内圆周边缘，以将金属膜从最里面的圆形 边缘到最外面的圆形边缘，并且分离金属膜以提供另一个压模。 或者，为了分离金属膜，通过提起金属膜的最内圆形边缘，气体吹入开口区域。
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45.发明申请Patterned perpendicular magnetic recording medium and magnetic recording and reproducing apparatus 审中-公开图案垂直磁记录介质和磁记录和再现装置公开(公告)号：US20090201607A1
公开(公告)日：2009-08-13
申请号：US12320602
申请日：2009-01-29
摘要： It is made possible to provide a patterned perpendicular magnetic recording medium that has smaller write magnetic field and the variation of magnetic characteristics in the bit regions, generates fewer reversed magnetic domains in the position control information regions of the head, and has excellent thermal stability. A patterned perpendicular magnetic recording medium includes: a nonmagnetic substrate; a soft magnetic base layer formed on the nonmagnetic substrate; a nonmagnetic intermediate layer formed on the soft magnetic base layer; and a perpendicular magnetic recording layer formed on the nonmagnetic intermediate layer, and including a stacked structure of a CoPt-based crystalline film having a Pt content in the range of 5 atomic percent to 35 atomic percent and a rare-earth and transition metal alloy amorphous film formed on the CoPt-based crystalline film. The CoPt-based crystalline film and the rare-earth and transition metal alloy amorphous film are exchange-coupled.
摘要翻译： 可以提供具有较小写入磁场和位区域中的磁特性变化的图案化垂直磁记录介质，在头部的位置控制信息区域中产生较少的反向磁畴，并且具有优异的热稳定性。 图案化的垂直磁记录介质包括：非磁性基板; 形成在非磁性基板上的软磁性基层; 形成在软磁性基底层上的非磁性中间层; 以及形成在非磁性中间层上的垂直磁记录层，并且包括Pt含量在5原子％至35原子％范围内的CoPt基结晶膜的堆叠结构和稀土和过渡金属合金无定形 在基于CoPt的结晶膜上形成的膜。 基于CoPt的结晶膜和稀土和过渡金属合金非晶膜是交换耦合的。
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公开(公告)号：US08507116B2
公开(公告)日：2013-08-13
申请号：US13175485
申请日：2011-07-01
IPC分类号： G11B5/127
CPC分类号： G11B5/8404 , G11B5/746 , G11B5/82 , G11B5/855 , Y10T428/11
摘要： According to one embodiment, a magnetic recording medium includes a substrate, a soft magnetic layer, an underlayer, a magnetic recording layer, and a protective layer, wherein the magnetic recording layer is provided with a pattern including recording portions and non-recording portions, the non-recording portions have a composition that is equal to a composition obtained by demagnetizing the recording portions, the non-recording portions contain at least one metal element selected from the group consisting of vanadium and zirconium and at least one element selected from the group consisting of nitrogen, carbon, boron and oxygen, and the at least one element selected from the group consisting of nitrogen, carbon, boron and oxygen is contained in the non-recording portions at a higher content than the content of the at least one element selected from the group consisting of nitrogen, carbon, boron and oxygen in the recording portions.
摘要翻译： 根据一个实施例，磁记录介质包括衬底，软磁层，底层，磁记录层和保护层，其中磁记录层设置有包括记录部分和非记录部分的图案， 非记录部分的组成等于通过使记录部分退磁获得的组合物，非记录部分含有至少一种选自钒和锆的金属元素和至少一种选自组中的元素 由氮，碳，硼和氧组成，并且所述至少一种选自氮，碳，硼和氧的元素以比所述至少一种元素的含量更高的含量包含在非记录部分中 在记录部分中选自氮，碳，硼和氧。
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公开(公告)号：US08440091B2
公开(公告)日：2013-05-14
申请号：US12638841
申请日：2009-12-15
CPC分类号： G11B5/855
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium comprises forming a protective film on a ferromagnetic recording layer containing Cobalt (Co) on a substrate and forming a recess in both the protective film and the ferromagnetic recording layer at a part where a nonmagnetic layer is to be formed. The method further comprises removing Co from a part of the recess of the ferromagnetic recording layer to form the nonmagnetic layer that separates magnetic patterns made of the ferromagnetic recording layer containing Co. The nonmagnetic layer has an identical chemical composition as the ferromagnetic recording layer, except for the nonmagnetic layer having a lower Co concentration than the magnetic patterns.
摘要翻译： 根据一个实施例，制造磁记录介质的方法包括在包含钴（Co）的铁磁记录层上形成保护膜，并在保护膜和铁磁记录层中形成凹部， 将形成非磁性层。 该方法还包括从铁磁记录层的凹部的一部分去除Co以形成分离由含有Co的铁磁记录层制成的磁图案的非磁性层。非磁性层具有与铁磁记录层相同的化学成分， 对于具有比磁图案低的Co浓度的非磁性层。
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48.发明授权公开(公告)号：US08318331B2
公开(公告)日：2012-11-27
申请号：US11942904
申请日：2007-11-20
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/59688 , G11B5/743 , G11B5/855
摘要： According to one embodiment, a magnetic recording medium includes a substrate, and a magnetic recording layer formed on the substrate and having patterns of protrusions and recesses corresponding to a servo area and a recording area, in which the magnetic recording layer located in each of the recesses in the recording area has a thickness smaller than two thirds of a thickness of the magnetic recording layer corresponding to each of the protrusions, the magnetic recording layer remaining in each of the recesses in the recording area has a thickness of 1 nm or more, and a difference in height on a surface of the magnetic recording medium is 7 nm or less.
摘要翻译： 根据一个实施例，磁记录介质包括基板和形成在基板上并具有对应于伺服区域和记录区域的突起和凹槽的图案的磁记录层，其中磁记录层位于每个 记录区域中的凹部的厚度小于与每个突起相对应的磁记录层的厚度的三分之二，记录区域中每个凹槽中残留的磁记录层的厚度为1nm以上， 并且磁记录介质的表面上的高度差为7nm以下。
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公开(公告)号：US08153205B2
公开(公告)日：2012-04-10
申请号：US12713022
申请日：2010-02-25
IPC分类号： C08F2/48
CPC分类号： G11B5/855
摘要： According to one embodiment, a method of manufacturing a patterned medium includes depositing a magnetic recording layer and applying an ultraviolet curable resin on both surfaces of a medium substrate, pressing a first resin stamper and a second resin stamper each including patterns of recesses and protrusions, corresponding to a patterned medium, against both surfaces of the medium substrate in such a manner that a direction from a center of the medium substrate toward a center of the first resin stamper is off-oriented from a direction from the center of the medium substrate toward a center of the second resin stamper to imprint the patterns of recesses and protrusions on the ultraviolet curable resin, and irradiating the ultraviolet curable resin with an ultraviolet ray through each of the first and second resin stampers to cure the ultraviolet curable resin.
摘要翻译： 根据一个实施例，一种制造图案化介质的方法包括沉积磁记录层并在介质基板的两个表面上施加紫外线固化树脂，压制每个包括凹凸图案的第一树脂压模和第二树脂压模， 对应于图案化的介质，以介质基板的中心朝向第一树脂压模的中心的方向从介质基板的中心朝向 所述第二树脂压模的中心在所述紫外线固化树脂上印刷凹凸图案，并且通过所述第一和第二树脂印模机中的每一个照射所述紫外线固化树脂以固化所述紫外线固化树脂。
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公开(公告)号：US20120082800A1
公开(公告)日：2012-04-05
申请号：US13216555
申请日：2011-08-24
IPC分类号： C23C14/04
CPC分类号： C23C14/0605 , C23C14/0635 , C23C14/0658 , C23C14/5893 , G11B5/855
摘要： According to one embodiment, there is provided a method for manufacturing a magnetic recording medium, the method including: depositing a magnetic recording layer on a substrate; forming a mask on a region of the magnetic recording layer corresponding to a recording area; irradiating another region of the magnetic recording layer where the mask is not formed with an ion beam using a C-containing gas as a source gas to deactivate the another region and to thereby form a non-recording area; and forming a protective film over an entire surface of the substrate.
摘要翻译： 根据一个实施例，提供了一种用于制造磁记录介质的方法，所述方法包括：在基板上沉积磁记录层; 在对应于记录区域的磁记录层的区域上形成掩模; 使用含C气体作为源气体照射没有形成掩模的磁记录层的另一个区域，使离子束使其另一区域失活，从而形成非记录区域; 以及在所述基板的整个表面上形成保护膜。
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