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公开(公告)号：US20090232928A1
公开(公告)日：2009-09-17
申请号：US12473071
申请日：2009-05-27
CPC分类号： G11B7/261 , B29C33/424 , B29C2033/426 , B82Y10/00 , B82Y40/00 , C25D1/10 , G03F7/0002 , G11B7/263 , H01F41/34
摘要： According to one embodiment, a method of manufacturing a stamper includes forming a conductive layer on a surface of a master having patterns of protrusions and recesses, forming an electroforming layer on the conductive layer, separating the electroforming layer and the conductive layer from the master to form a stamper to which the patterns of protrusions and recesses of the master are transferred, removing a resist left on the surface of the stamper, and etching the surface of the stamper with an acidic solution having a pH value of less than 3.
摘要翻译： 根据一个实施例，制造压模的方法包括在具有突起和凹槽图案的母版表面上形成导电层，在导电层上形成电铸层，将电铸层和导电层与母模分离成 形成压模，母模的突起和凹部的图案被转印到其上，去除压模表面上的抗蚀剂，并用pH值小于3的酸性溶液蚀刻压模的表面。
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公开(公告)号：US20120251655A1
公开(公告)日：2012-10-04
申请号：US13492681
申请日：2012-06-08
IPC分类号： B29C59/02
CPC分类号： G11B7/261 , B29C33/424 , B29C2033/426 , B82Y10/00 , B82Y40/00 , C25D1/10 , G03F7/0002 , G11B7/263 , H01F41/34
摘要： According to one embodiment, a stamper is described with a surface that comprises patterns of protrusions and recessed. The arithmetic average roughness Ra of the surface is 1 nanometer (nm) or more and 5 nm or less.
摘要翻译： 根据一个实施例，用包括突起图案和凹陷的表面描述压模。 表面的算术平均粗糙度Ra为1nm以上且5nm以下。
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3.发明申请STAMPER, METHOD OF MANUFACTURING THE STAMPER, AND MAGNETIC RECORDING MEDIUM MANUFACTURING METHOD USING THE STAMPER 失效冲压器，制造冲压件的方法和使用冲压器的磁记录介质制造方法公开(公告)号：US20120000885A1
公开(公告)日：2012-01-05
申请号：US13093221
申请日：2011-04-25
申请人： Masatoshi Sakurai , Satoshi Shirotori , Seiji Morita , Shinobu Sugimura , Takuya Shimada , Yoshiyuki Kamata
发明人： Masatoshi Sakurai , Satoshi Shirotori , Seiji Morita , Shinobu Sugimura , Takuya Shimada , Yoshiyuki Kamata
摘要： According to one embodiment, a stamper manufacturing method includes forming a conductive material concentration gradient layer including the projections pattern, and a composition ratio of a buffering agent to a conductive material in the conductive material concentration gradient layer reducing in a thickness direction from a master side.
摘要翻译： 根据一个实施例，压模制造方法包括形成包括突起图案的导电材料浓度梯度层，并且导电材料浓度梯度层中的缓冲剂与导电材料的组成比在厚度方向上从主侧减小 。
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公开(公告)号：US08343362B2
公开(公告)日：2013-01-01
申请号：US12641135
申请日：2009-12-17
CPC分类号： G11B5/855 , C23C14/04 , C23C14/185 , C23C14/34
摘要： According to one embodiment, when forming first, second, and third stampers by transferring three-dimensional patterns of a master, a height adjusting layer having a film thickness greater on the upper surface of a projection than on the bottom surface of a recess is formed between the second stamper and a second release layer, and the surface of the third stamper is etched with an acidic solution having a pH of less than 3.
摘要翻译： 根据一个实施例，当通过传送主机的三维图案来形成第一，第二和第三压模时，形成在突起的上表面上比在凹部的底表面上具有更大的膜厚度的高度调节层 在第二压模和第二剥离层之间，并且用pH小于3的酸性溶液蚀刻第三压模的表面。
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5.发明授权Stamper, method of manufacturing the stamper, and magnetic recording medium manufacturing method using the stamper 失效压模，制造压模的方法以及使用压模的磁记录介质制造方法公开(公告)号：US08308965B2
公开(公告)日：2012-11-13
申请号：US13093221
申请日：2011-04-25
申请人： Masatoshi Sakurai , Satoshi Shirotori , Seiji Morita , Shinobu Sugimura , Takuya Shimada , Yoshiyuki Kamata
发明人： Masatoshi Sakurai , Satoshi Shirotori , Seiji Morita , Shinobu Sugimura , Takuya Shimada , Yoshiyuki Kamata
摘要： According to one embodiment, a stamper manufacturing method includes forming a conductive material concentration gradient layer including the projections pattern, and a composition ratio of a buffering agent to a conductive material in the conductive material concentration gradient layer reducing in a thickness direction from a master side.
摘要翻译： 根据一个实施例，压模制造方法包括形成包括突起图案的导电材料浓度梯度层，并且导电材料浓度梯度层中的缓冲剂与导电材料的组成比在厚度方向上从主侧减小 。
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公开(公告)号：US07938978B2
公开(公告)日：2011-05-10
申请号：US12691491
申请日：2010-01-21
CPC分类号： G11B5/855
摘要： According to one embodiment, a method of manufacturing a stamper includes forming a first stamper from a master plate having lands and grooves through electroforming, forming a second stamper, a width of which is GW, from the first stamper through electroforming, forming a lamination film with a thickness of LLT on the second stamper, forming, on the lamination film, a second releasing layer, a transfer layer with a thickness of TLT and a third electroforming layer with a thickness of ELT, peeling off the transfer layer and the third electroforming layer from the second stamper to form a third stamper, and isotropically etching the transfer layer on the third stamper in an etching thickness of ET to reduce a width of lands of the third stamper, in which the following relations are satisfied: 10 nm≦ELT and ET≦TLT.
摘要翻译： 根据一个实施例，制造压模的方法包括通过电铸从具有焊盘和槽的母板形成第一压模，通过电铸从第一压模形成其宽度为GW的第二压模，形成层压膜 在第二压模上具有LLT的厚度，在层压膜上形成第二释放层，厚度为TLT的转印层和具有ELT厚度的第三电铸层，剥离转印层和第三电铸 从而形成第三压模，并且以蚀刻厚度的ET对第三压模上的转印层进行各向同性蚀刻，以减小第三压模的焊盘的宽度，其中满足以下关系：10nm＆nlE; ELT 和ET＆nlE; TLT。
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公开(公告)号：US20060222897A1
公开(公告)日：2006-10-05
申请号：US11371901
申请日：2006-03-10
IPC分类号： G11B5/64
摘要： A discrete track media has a nonmagnetic substrate, and a magnetic recording layer provided on the nonmagnetic substrate and having a data region including a recording track and a servo region including a preamble zone, an address zone and a burst zone, the data region and the servo region include patterns of a ferromagnetic layer forming protrusions and a nonmagnetic material filled into recesses between the patterns of the ferromagnetic layer, in which a height of the nonmagnetic material filled into the recesses in the data region is lower than that in the burst zone.
摘要翻译： 离散轨道介质具有非磁性衬底和设置在非磁性衬底上并且具有包括记录轨道和包括前导码区域，地址区域和突发区域的伺服区域的数据区域的磁记录层，该数据区域和 伺服区域包括形成凸起的铁磁层的图案和填充到铁磁层的图案之间的凹部中的非磁性材料，其中填充到数据区域中的凹部中的非磁性材料的高度低于爆破区域中的凹部的高度。
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公开(公告)号：US20100072069A1
公开(公告)日：2010-03-25
申请号：US12585756
申请日：2009-09-24
IPC分类号： C25D1/10
摘要： A method for manufacturing an imprint stamper includes the steps of forming a first electroformed layer on a concavo-convex pattern of an original disk with the pattern, peeling off the first electroformed layer to provide a first stamper, forming a second electroformed layer on a concavo-convex pattern of the first stamper, peeling off the second electroformed layer to provide a second stamper, forming a third electroformed layer on a concavo-convex pattern of the second stamper, and peeling off the third electroformed layer to provide a third stamper. In addition, a conductive film is formed at least on one of a bottom of the concave portion and a top surface of the convex portion of the concavo-convex pattern at least in one of the first stamper and the second stamper.
摘要翻译： 压印模具的制造方法包括以下步骤：在具有图案的原盘的凹凸图案上形成第一电铸层，剥离第一电铸层以提供第一压模，在凹凸上形成第二电铸层 - 剥离第二电铸层以提供第二压模，在第二压模的凹凸图案上形成第三电铸层，以及剥离第三电铸层以提供第三压模。 此外，至少在第一压模和第二压模之一中，至少在凹部的底部和凹凸图案的凸部的顶表面中的至少一个上形成导电膜。
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公开(公告)号：US20100078143A1
公开(公告)日：2010-04-01
申请号：US12556278
申请日：2009-09-09
IPC分类号： B41C3/02
CPC分类号： B41C3/02
摘要： A method for manufacturing a duplicating stamper is provided. The method includes the steps of forming a metal film on a stamper, the metal film having an apertural area in a central area of the stamper, lifting up an innermost circular edge of the metal film in order to detach the metal film from the innermost circular edge to the outermost circular edge, and detaching the metal film to provide another stamper. Alternatively, for detaching the metal film, a gas is blown into the apertural area with lifting up the innermost circular edge of the metal film.
摘要翻译： 提供了制造复印压模的方法。 该方法包括以下步骤：在压模上形成金属膜，金属膜在压模的中心区域具有开口区域，提升金属膜的最内圆周边缘，以将金属膜从最里面的圆形 边缘到最外面的圆形边缘，并且分离金属膜以提供另一个压模。 或者，为了分离金属膜，通过提起金属膜的最内圆形边缘，气体吹入开口区域。
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公开(公告)号：US08778162B2
公开(公告)日：2014-07-15
申请号：US13077537
申请日：2011-03-31
摘要： According to one embodiment, a stamper manufacturing method comprises electroless plating by using a master includes a substrate, a conductive underlayer formed on the substrate and having catalytic activity, projecting patterns having no catalytic activity and partially formed on a surface of the conductive underlayer having catalytic activity, and regions in which the conductive underlayer having catalytic activity is exposed between the projecting patterns to deposit selectively an amorphous conductive layer between the projecting patterns and in the regions in which the conductive underlayer is exposed, and forming stamper projections, electroplating on the stamper projections includes the projecting patterns and the amorphous conductive layer by using the amorphous conductive layer and the conductive underlayer as electrodes to form a stamper main body made of a crystalline metal, and releasing a stamper includes the stamper projections and the stamper main body from the master.
摘要翻译： 根据一个实施例，压模制造方法包括使用主体的无电镀，其包括基板，形成在基板上的具有催化活性的导电底层，具有催化活性的突出图案，并部分地形成在具有催化作用的导电底层的表面上 活性以及其中具有催化活性的导电底层在突出图案之间暴露的区域，以选择性地沉积在突出图案之间的非晶导体层和导电底层暴露的区域中，并且形成压模突起，在压模上电镀 突起包括通过使用非晶导体层和导电底层作为电极形成由结晶金属制成的压模主体的突出图案和非晶导体层，并且释放压模包括压模主体和压模主体 。
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