公开(公告)号：US6018383A

公开(公告)日：2000-01-25

申请号：US915130

申请日：1997-08-20

申请人： Thomas J. Dunn ,  Nestor O. Farmiga ,  Marc Zemel ,  Carl Weisbecker ,  Kanti Jain

发明人： Thomas J. Dunn ,  Nestor O. Farmiga ,  Marc Zemel ,  Carl Weisbecker ,  Kanti Jain

IPC分类号： G02F1/13 ,  G03B27/48 ,  G03B27/42 ,  G03B27/54

CPC分类号： G03F7/2035 ,  G02F1/13 ,  G03F1/60 ,  G03F7/703 ,  G03F7/70791

摘要： In the manufacturing of flexible, large-area electronic modules such as flat-panel displays (FPDs), the high cost and low yields of currently available patterning equipment represent a significant barrier to cost-effective production. This invention provides a projection imaging system that can pattern very large, flexible substrates at very high exposure speeds with almost any desired image resolution. The master pattern to be imprinted on the substrate is contained on a mask which, similar to the substrate, is made of a flexible material The mask and substrate are scanned by rollers through the object and the image field, respectively, of a 1:1 projection lens. All of the rollers are driven by identical drive systems linked to a common motor; therefore, the scanning of the mask and substrate is perfectly synchronized. Both the mask and the substrate, along with their rollers, are mounted on a linear translation stage. The translation stage scans continuously at a velocity which is chosen such that, for every complete rotation of the mask and substrate, the linear stage will move by the effective scan width. The entire substrate is patterned using one continuous helical scan. Suitable overlap between complementary intensity profiles produced by a hexagonal illumination configuration ensures seamless joining of the scans. The use of rollers significantly enhances the throughput and effectively reduces the payload and footprint of the scanning stage leading to substantial system cost savings.

摘要翻译： 在制造柔性的大面积电子模块如平板显示器（FPD）时，目前可用的图案设备的高成本和低产量是成本有效的生产的重要障碍。 本发明提供了一种投影成像系统，其可以以非常高的曝光速度以几乎任何所需的图像分辨率对非常大的柔性基板进行图案化。 要印在基板上的主图案被包含在与基板类似的由柔性材料制成的掩模上。掩模和基板分别通过对象和图像场的辊子被扫描1：1 投影镜头 所有的滚筒均由与普通马达相连的驱动系统驱动; 因此，掩模和基底的扫描完全同步。 掩模和基板以及它们的滚子都安装在线性平移台上。 平移阶段以选择的速度连续扫描，使得对于掩模和衬底的每次完全旋转，线性平台将移动有效扫描宽度。 使用一个连续的螺旋扫描对整个基板进行图案化。 通过六边形照明配置产生的互补强度分布之间的合适重叠确保了扫描的无缝连接。 滚筒的使用显着提高了产量，有效地减少了扫描阶段的有效载荷和占地面积，从而节省了大量的系统成本。

公开(公告)号：US5969870A

公开(公告)日：1999-10-19

申请号：US932687

申请日：1997-09-18

申请人： Kanti Jain ,  Marc Zemel ,  Teik-Meng Lee ,  Nestor O. Farmiga ,  Carl C. Kling

发明人： Kanti Jain ,  Marc Zemel ,  Teik-Meng Lee ,  Nestor O. Farmiga ,  Carl C. Kling

IPC分类号： B60R1/08 ,  G02B5/08 ,  G02B17/00

CPC分类号： B60R1/087

摘要： This single-actuator-and-cam, remotely adjustable, exterior vehicle rear-view mirror provides the driver with glare-free viewing toward the rear of the vehicle, by switching between a high-reflectivity position and a low-reflectivity position at the same view adjustment. The exterior rear-view mirrors are repositioned with only a single motor working with a rotary cam to scan all possible mirror positions. The single-motor mechanism increases the reliability of the mirror system. The single motor accomplishes both the directional alignment and the day/night reflectivity adjustment of the mirror by use of a cam which has positions for all predicted view positions, with two reflectivity positions for each view. This invention works equally well with flat wedge mirrors and wide-angle convex wedge mirrors. Since each position is unique, each directional/reflectivity position can be assigned a set of digital coordinates which can be stored for each vehicle driver and each glare condition, for an initial setting which can be easily, or even automatically, adjusted for changes as the driver desires. Customizing features include manual and vehicle driver identification controlled override, start-up reset, and glare threshold setting.

公开(公告)号：US5933216A

公开(公告)日：1999-08-03

申请号：US951864

申请日：1997-10-16

申请人： Thomas J. Dunn

发明人： Thomas J. Dunn

IPC分类号： G03F7/20 ,  G03D27/52

CPC分类号： G03F7/70425

摘要： A high-performance projection optical system uses the multiple spectral peaks of an excimer laser system by using an optical dispersive system to physically separate the broadband laser output into separate narrowband beams which can be used for imaging different substrate surfaces simultaneously. The separated narrowband beams are directed along different optical paths and used to illuminate the object planes of different, identical projection lenses. The projection lenses are designed for the narrowed bandwidth corresponding to one spectral peak of the excimer laser rather than the broadband, multiple-peak laser output This dramatically simplifies both the design and the construction of the projection lens, leading to substantial cost-savings. The conversion of the single-beam, broadband spectral output into a multiple-beam, narrowband source is accomplished by optical dispersion means consisting of either several prisms in series, one or more prisms followed by a mirror reflecting back through the prisms, or one or more reflective gratings. The separated narrowband beams are useful for imaging top and bottom of a single substrate with exact registration useful for via-hole connections. Other uses include simultaneous imaging of multiple substrates, using one or more stages.

摘要翻译： 高性能投影光学系统使用准分子激光系统的多个光谱峰值，通过使用光学色散系统将宽带激光器输出物理分离成单独的窄带束，其可以同时用于成像不同的衬底表面。 分离的窄带光束沿着不同的光路被引导，并用于照亮不同的相同投影透镜的物平面。 投影镜头设计用于对应于准分子激光器的一个光谱峰值的窄带宽，而不是宽带多峰激光输出。这极大地简化了投影镜头的设计和构造，从而节省了大量成本。 将单光束宽带光谱输出转换为多光束窄带光源的光学色散装置由串联的多个棱镜组成，一个或多个棱镜随后是通过棱镜反射的镜子，或者一个或多个 更多的反光栅。 分离的窄带束可用于单个基板的顶部和底部成像，具有用于通孔连接的精确配准。 其他用途包括使用一个或多个阶段同时成像多个底物。

公开(公告)号：US5710619A

公开(公告)日：1998-01-20

申请号：US551134

申请日：1995-10-31

申请人： Kanti Jain ,  Jeffrey M. Hoffman

发明人： Kanti Jain ,  Jeffrey M. Hoffman

IPC分类号： G03F7/20 ,  H01L21/30 ,  G03B27/52

CPC分类号： G03F7/70241 ,  G03F7/70358 ,  G03F7/70791

摘要： In numerous applications of large-area patterning systems, the preferred image magnification is unity. However, in some applications, the size of the substrate may change slightly due to various thermal and/or chemical processing steps. To compensate for scale changes of the substrate, the magnification of the imaging system must vary slightly from unit magnification (typically by a fraction of a percentage) so that a layer already patterned on the substrate will have, after processing, proper image registration with the subsequent layer. This disclosure describes a lithography system for exposing large substrates at high imaging resolution and high exposure throughput, and specifically relates to a scan-and-repeat patterning system that employs a unitary mask-substrate stage and enables projection imaging of a substrate with capability to control the image magnification to compensate for changes of substrate dimensions occurring as a result of previous process steps. A combination of optical and mechanical compensation is used to provide the necessary magnification control, including anamorphic magnification variation in which the fine adjustment is of different magnitudes in x and y dimensions. The optical control is provided by a projection lens with anamorphic magnification adjustment capability. The mechanical compensation is performed by providing a differential relative velocity between the mask and substrate during scanning.

摘要翻译： 在大面积图案化系统的许多应用中，优选的图像放大率是一致的。 然而，在一些应用中，由于各种热和/或化学处理步骤，衬底的尺寸可能略有变化。 为了补偿基板的尺度变化，成像系统的放大率必须从单位放大率（通常为百分比的百分比）稍微变化，使得已经在基板上图案化的层将在处理之后具有适当的图像配准 后续层。 本公开描述了一种用于以高成像分辨率和高曝光生产量暴露大型衬底的光刻系统，具体涉及采用单一掩模衬底级并且能够对具有控制能力的衬底进行投影成像的扫描和重复图案形成系统 图像放大率以补偿由于先前的工艺步骤而发生的衬底尺寸的变化。 使用光学和机械补偿的组合来提供必要的放大率控制，包括在x和y尺寸上精细调节具有不同幅度的变形放大变化。 光学控制由具有变形放大调节能力的投影透镜提供。 通过在扫描期间在掩模和衬底之间提供差分相对速度来执行机械补偿。

公开(公告)号：US5696631A

公开(公告)日：1997-12-09

申请号：US605426

申请日：1996-02-22

申请人： Jeffrey M. Hoffman

发明人： Jeffrey M. Hoffman

IPC分类号： G02B13/14 ,  G02B13/22 ,  G02B13/26 ,  G03F7/20 ,  G02B3/00

CPC分类号： G03F7/70216 ,  G02B13/143 ,  G02B13/22 ,  G02B13/26

摘要： A unit magnification lens system suitable for imaging of features in photoresist designed for exposure at a wavelength of 248.4 nm using a krypton fluoride excimer laser. This lens system is characterized by a very long working distance in the object and image spaces to allow incorporation of minors in the imaging path. The optical system is refractive, telecentric, and symmetrical about the central aperture stop.

摘要翻译： 适用于使用氪氟化物准分子激光器设计用于在248.4nm的波长下曝光的光致抗蚀剂中的特征成像的单位放大透镜系统。 该透镜系统的特征在于在物体和图像空间中具有非常长的工作距离，以允许将未成年人并入成像路径。 光学系统是围绕中心孔径光阑的折射，远心和对称的。

公开(公告)号：US5284364A

公开(公告)日：1994-02-08

申请号：US897199

申请日：1992-06-10

申请人： Kanti Jain

发明人： Kanti Jain

IPC分类号： B42D15/10 ,  G06K1/12 ,  G06K19/08 ,  G06K19/14 ,  B42D15/00

CPC分类号： B42D25/23 ,  B42D25/00 ,  B42D25/391 ,  G06K1/12 ,  G06K19/083 ,  G06K19/14 ,  B42D2033/04 ,  B42D2035/08 ,  B42D2035/16 ,  B42D25/309 ,  B42D25/41 ,  B42D25/415 ,  B42D25/45

摘要： The invention is a document security system characterized by a data substrate having photographic or printed information on a base print, and also having a personalized polarization-altering overlay sealed to the base print and encoded with additional coded information readable under the influence of a polarizing viewer. The low-security information, such as name, social security, account number and photograph, are printed on a card to form the base print. Additional information of greater security, which may be a bar code or alphanumeric characters, is imprinted in the polarization-altering overlay by an appropriate physical process, such as radiation exposure or thermal, chemical or mechanical treatment, which optically modifies localized regions of the overlay. Tampering with the card, which will require removing and physically modifying the overlay, altering the base print information, and resealing the overlay, will create optical errors which become evident when the tampered document is viewed through the polarizing viewer. The invention provides an security document system with tamper-resistant and tamper-evident features that are easy to detect and difficult to imitate, the document also being long-lasting and cost-effective to produce and use. The invention is applicable to identification documents such as drivers' licenses, passports and immigration cards, and also to monetary instruments such as credit cards, stock and bond certificates, and currency notes.

摘要翻译： 本发明是一种文件安全系统，其特征在于具有在基本打印上的照相或打印信息的数据基板，并且还具有密封到基本打印件的个性化偏振改变覆盖层，并且在受极化观察者影响下可读取的附加编码信息进行编码 。 低安全性信息，如姓名，社会保障，帐号和照片，印在卡片上，形成基本印刷品。 通过适当的物理过程（例如辐射照射或热，化学或机械处理）将更大的安全性的附加信息（可以是条形码或字母数字字符）印刷在偏振改变的覆盖物中，光学修改覆盖物的局部区域 。 篡改卡片，这将需要删除和物理修改覆盖层，改变基本打印信息和重新密封覆盖层，将产生光学错误，当通过偏光观察者观看篡改的文档时，会出现光学错误。 本发明提供了具有易于检测和难以模仿的防篡改和防篡改特征的安全文件系统，该文件也是生产和使用的持久且具有成本效益的。 本发明适用于驾驶执照，护照和移民卡等身份证件，还适用于信用卡，股票，债券，纸币等货币工具。