Dual function array feature for CMP process control and inspection
    41.
    发明授权
    Dual function array feature for CMP process control and inspection 失效
    用于CMP过程控制和检查的双功能阵列功能

    公开(公告)号:US06929961B2

    公开(公告)日:2005-08-16

    申请号:US10733980

    申请日:2003-12-10

    IPC分类号: H01L21/00 H01L23/544

    CPC分类号: H01L22/34

    摘要: CMP process control array groups are fabricated upon the surface of the wafer for viewing through an optical microscope. The array groups include a plurality of test arrays, where each array includes a plurality of projecting test features. Each of the projecting test features are formed with the same projecting height and have a hard upper surface layer, such as diamond-like-carbon (DLC). All of the projecting test features within an array are formed with the same diameter, and the diameter of projecting test features of a particular array differs from the diameter of projecting test features in another array. The diameters are chosen such that the DLC surface is removed in specifically designed time increments, such as 5 seconds, from array to array, where projecting test features with the DLC surface removed appear as bright white, while the arrays with test features that retain some DLC surface are significantly darker.

    摘要翻译: CMP工艺控制阵列组被制造在晶片的表面上,以通过光学显微镜观察。 阵列组包括多个测试阵列,其中每个阵列包括多个突出的测试特征。 每个突出的测试特征形成具有相同的突出高度并且具有硬的上表面层,例如类金刚石(DLC)。 阵列中的所有突出的测试特征形成为具有相同的直径,并且特定阵列的突出测试特征的直径与另一阵列中的突出测试特征的直径不同。 选择直径使得DLC表面以特定设计的时间增量(例如从阵列到阵列的5秒)去除,其中去除DLC表面的突出的测试特征显示为亮白色,而具有测试特征的阵列保留一些 DLC表面明显较暗。

    MAGNETIC SENSOR HAVING IMPROVED RESISTANCE TO THERMAL STRESS INDUCED INSTABILITY
    43.
    发明申请
    MAGNETIC SENSOR HAVING IMPROVED RESISTANCE TO THERMAL STRESS INDUCED INSTABILITY 有权
    具有改善耐热应力诱发不稳定性的磁传感器

    公开(公告)号:US20120106006A1

    公开(公告)日:2012-05-03

    申请号:US12914926

    申请日:2010-10-28

    IPC分类号: G11B5/48 G11B5/187

    摘要: A magnetic read sensor having improved robustness to withstand thermal variations resulting from thermal fly height heating. Improved thermal robustness comes as a result of improved pinned layer pinning. The read head includes an AFM layer having an increased thickness to provide a higher blocking temperature. The read head further includes a pinned layer structure that includes a first magnetic layer adjacent to and exchange coupled with the AFM layer. The first layer comprises a Co—Fe layer with an increased Fe content of 20-30 atomic percent. The pinned layer structure also includes a second magnetic layer that is antiparallel coupled with the AP1 layer. The AP2 layer can be a multi-layer structure that includes a layer of CoFe, a layer of Co—Fe—Hf formed on the layer of Co—Fe, a layer of Co—Fe—B formed on the layer of Co—Fe—Hf, and a second layer of Co—Fe formed on the layer of Co—Fe—B.

    摘要翻译: 磁读取传感器具有改进的鲁棒性,以承受由热飞高高度加热引起的热变化。 由于改进了固定层钉扎,提高了热稳定性。 读头包括具有增加的厚度以提供更高的阻挡温度的AFM层。 读取头还包括钉扎层结构,其包括与AFM层相邻并与AFM层交换耦合的第一磁性层。 第一层包括Fe含量高于20-30原子%的Co-Fe层。 钉扎层结构还包括与AP1层反平行耦合的第二磁性层。 AP2层可以是多层结构,其包括CoFe层,Co-Fe层上形成的Co-Fe-Hf层,Co-Fe层上形成的Co-Fe-B层 和在Co-Fe-B层上形成的第二层Co-Fe层。

    Magnetoresistive sensor having biasing AFM layer in contact with free layer and a track width defined by a lead contact area
    44.
    发明授权
    Magnetoresistive sensor having biasing AFM layer in contact with free layer and a track width defined by a lead contact area 有权
    具有偏置AFM层与自由层接触的磁阻传感器和由引线接触区域限定的轨道宽度

    公开(公告)号:US07697246B2

    公开(公告)日:2010-04-13

    申请号:US11502955

    申请日:2006-08-10

    IPC分类号: G11B5/39

    摘要: A current perpendicular to plane (CPP) magnetoresistive sensor having a current path defined by first and second overlying insulation layers between which an electrically conductive lead makes content with a surface of the sensor stack. The current path being narrower than the width of the sensor stack allows the outer edges of the sensor stack to be moved outside of the active area of the sensor. This results in a sensor that is unaffected by damage at outer edges of the sensor layers. The sensor stack includes a free layer that is biased by direct exchange coupling with a layer of antiferromagnetic material (AFM layer). The strength of the exchange field can be controlled by adding Cr to the AFM material to ensure that the exchange field is sufficiently weak to avoid pinning the free layer.

    摘要翻译: 一种垂直于平面(CPP)磁阻传感器的电流,其具有由第一和第二上覆绝缘层限定的电流路径,导电引线与传感器堆叠的表面成为内容。 当前路径比传感器堆叠的宽度窄,允许传感器堆叠的外边缘移动到传感器的有效区域之外。 这导致传感器不受传感器层外边缘损坏的影响。 传感器堆叠包括通过与反铁磁材料层(AFM层)的直接交换耦合而偏置的自由层。 可以通过向AFM材料添加Cr来控制交换场的强度,以确保交换场足够弱以避免固定自由层。

    WAFER-LEVEL METHOD FOR FABRICATING AN OPTICAL CHANNEL AND APERTURE STRUCTURE IN MAGNETIC RECORDING HEAD SLIDERS FOR USE IN THERMALLY-ASSISTED RECORDING (TAR)
    45.
    发明申请
    WAFER-LEVEL METHOD FOR FABRICATING AN OPTICAL CHANNEL AND APERTURE STRUCTURE IN MAGNETIC RECORDING HEAD SLIDERS FOR USE IN THERMALLY-ASSISTED RECORDING (TAR) 审中-公开
    用于制作用于热辅助记录(TAR)的磁记录头滑块中的光通道和光孔结构的波形方法

    公开(公告)号:US20090258186A1

    公开(公告)日:2009-10-15

    申请号:US12101066

    申请日:2008-04-10

    IPC分类号: G03F7/00 B32B3/10

    摘要: A process for forming a plurality of sliders for use in thermally-assisted recording (TAR) disk drives includes a wafer-level process for forming a plurality of aperture structures, and optionally abutting optical channels, on a wafer surface prior to cutting the wafer into individual sliders. The wafer has a generally planar surface arranged into a plurality of rectangularly-shaped regions. In each rectangular region a first metal layer is deposited on the wafer surface, followed by a layer of radiation-transmissive aperture material, which is then lithographically patterned to define the width of the aperture, the aperture width being parallel to the length of the rectangularly-shaped region. A second metal layer is deposited over the patterned layer of aperture material. The resulting structure is then lithographically patterned to define an aperture structure comprising aperture material surrounded by metal and having parallel radiation entrance and exit faces orthogonal to the wafer surface.

    摘要翻译: 用于形成用于热辅助记录(TAR)盘驱动器中的多个滑动件的方法包括在将晶片切割成晶片之前在晶片表面上形成多个孔结构和可选地邻接的光通道的晶片级工艺 个人滑块 晶片具有布置成多个矩形区域的大致平坦的表面。 在每个矩形区域中,第一金属层沉积在晶片表面上,随后是一层辐射透射的孔隙材料,然后将其光刻图案化以限定孔的宽度,孔的宽度平行于矩形的长度 形状区域。 在孔材料的图案化层上沉积第二金属层。 然后将所得结构光刻图案化以限定孔结构,该孔结构包括由金属包围并具有与晶片表面正交的平行辐射入射面和出射面的孔隙材料。

    Transportation control method and transportation control system
    46.
    发明申请
    Transportation control method and transportation control system 审中-公开
    运输控制方法和运输控制系统

    公开(公告)号:US20090118850A1

    公开(公告)日:2009-05-07

    申请号:US12287220

    申请日:2008-10-06

    IPC分类号: G06F19/00

    摘要: Embodiments of the present invention provide a workpiece transportation control method and system that automatically processes a plurality of steps in a successive manner, thereby enhancing production efficiency. According to one embodiment, a transportation control method includes the steps of: monitoring the state of an automated manufacturing system to see if there is a request for transporting a workpiece; extracting the subsequent step path for the workpiece when a transportation request is issued; calculating a standard necessary period along the extracted step path; converting the subsequent standard necessary period into an evaluation value, issuing a transportation request, stacking tasks in response to other transportation requests; and selecting a workpiece with the shortest subsequent standard necessary period from the stacked transportation requests.

    摘要翻译: 本发明的实施例提供一种以连续的方式自动处理多个台阶的工件运输控制方法和系统,从而提高生产效率。 根据一个实施例,一种运输控制方法包括以下步骤:监测自动化制造系统的状态,以查看是否存在运输工件的请求; 当发出运输请求时,提取工件的后续步进路径; 沿所提取的步骤路径计算标准必要周期; 将随后的标准必要时段转换为评估值,发出运输请求,响应其他运输请求进行堆垛任务; 并从堆叠的运输请求中选择具有最短的后续标准必要周期的工件。

    PERPENDICULAR MAGNETIC RECORDING MEDIUM WITH GRANULAR STRUCTURED MAGNETIC RECORDING LAYER, METHOD FOR PRODUCING THE SAME, AND MAGNETIC RECORDING APPARATUS
    47.
    发明申请
    PERPENDICULAR MAGNETIC RECORDING MEDIUM WITH GRANULAR STRUCTURED MAGNETIC RECORDING LAYER, METHOD FOR PRODUCING THE SAME, AND MAGNETIC RECORDING APPARATUS 审中-公开
    具有颗粒结构的磁记录层的周期性磁记录介质,其制造方法和磁记录装置

    公开(公告)号:US20080186627A1

    公开(公告)日:2008-08-07

    申请号:US12061518

    申请日:2008-04-02

    IPC分类号: G11B5/33 G11B5/66 C23C14/34

    摘要: Embodiments of the invention provide a perpendicular magnetic recording medium having a granular structured magnetic recording layer including many columnar grains, and grain boundary layers containing oxide, wherein a high medium S/N ratio is obtained while securing head flyability and durability. In an embodiment, the perpendicular magnetic recording medium includes a granular structured magnetic recording layer having many columnar grains, as well as grain boundary layers including oxide respectively. Assuming that the columnar grains are divided equally in the film thickness direction into a protective layer side portion and an intermediate layer side portion, and the diameter of the protective layer side portion is larger than that of the intermediate layer side portion.

    摘要翻译: 本发明的实施例提供一种垂直磁记录介质,其具有包括许多柱状颗粒的粒状结构磁记录层和含有氧化物的晶界层,其中在确保磁头可飞行性和耐久性的同时获得高介质S / N比。 在一个实施例中,垂直磁记录介质包括具有许多柱状晶粒的颗粒结构磁记录层以及分别包括氧化物的晶界层。 假设柱状晶粒在膜厚度方向上被均等地分割成保护层侧部分和中间层侧部分,并且保护层侧部分的直径大于中间层侧部分的直径。

    Magnetic disk slider having improved inclination margins in a rolling direction
    48.
    发明授权
    Magnetic disk slider having improved inclination margins in a rolling direction 失效
    具有在轧制方向上具有改善的倾斜裕度的磁盘滑块

    公开(公告)号:US07408741B2

    公开(公告)日:2008-08-05

    申请号:US11193969

    申请日:2005-07-29

    IPC分类号: G11B5/60

    CPC分类号: G11B5/6005

    摘要: A magnetic head slider suitable for a disk drive measuring 1.8 inches or less in disk size incorporates preventive measures against the decreases in lifting force that occur in small sliders with a slider width of 0.8 mm or less. The present invention improves the inclination margins of the flying slider in a rolling direction at the lowest flying point, and achieves low flying height and stable flying. The slider is constructed with stepped surfaces on the slider's leading-side flying surface formed up of shallow-grooved surfaces and a deep-grooved surface so that a trailing-side width W2 between the stepped surfaces is smaller than a leading-side width W1.

    摘要翻译: 适用于磁盘尺寸为1.8英寸或更小的磁盘驱动器的磁头滑块包含防止在滑块宽度为0.8mm或更小的小滑块中发生的提升力降低的措施。 本发明提高飞行滑块在最低飞行点处的滚动方向上的倾斜度,并且实现低飞行高度和稳定飞行。 该滑动件由在浅槽表面和深槽表面上形成的滑块的前侧飞行表面上的台阶表面构成,使得阶梯表面之间的后侧宽度W 2小于前侧宽度W 1。

    Magnetic head and magnetic disk drive
    49.
    发明申请
    Magnetic head and magnetic disk drive 有权
    磁头和磁盘驱动器

    公开(公告)号:US20080024915A1

    公开(公告)日:2008-01-31

    申请号:US11880258

    申请日:2007-07-19

    IPC分类号: G11B5/187

    摘要: Embodiments of the present invention provide a magnetic head and a magnetic disk drive using the same, which is capable of increasing efficiency in changing the flying height of an element portion by heat generation of a heater in the magnetic head using the heater as well as capable of suppressing the change of the flying height of the element portion at the time of recording. In a magnetic head according to one embodiment of the invention, when a portion is defined as a “heater immobility line”, in which a position of the positive pressure generation surface does not vary when the electricity is distributed to a heater, and a portion is defined as a “write immobility line”, in which a position of the positive pressure generation surface does not vary at the time of recording, the area of the raised region surrounded by the heater immobility line is smaller than the area of the raised region surrounded by the write immobility line.

    摘要翻译: 本发明的实施例提供了使用该磁头和磁盘驱动器的磁头和磁盘驱动器,其能够通过使用加热器的磁头中的加热器的发热来提高元件部分的飞行高度的变化的效率,并且能够 抑制记录时的元件部的飞行高度的变化。 在根据本发明的一个实施例的磁头中,当将部分定义为“加热器不动线”时,其中正电压产生表面的位置在电分配给加热器时不变化,并且部分 被定义为“写入不动线”,其中正压产生表面的位置在记录时不变化,由加热器不动线包围的升高区域的面积小于凸起区域的面积 包围着写不动线。

    Predictive failure analysis of thermal flying height control system and method
    50.
    发明申请
    Predictive failure analysis of thermal flying height control system and method 有权
    热飞行高度控制系统和方法的预测故障分析

    公开(公告)号:US20070014041A1

    公开(公告)日:2007-01-18

    申请号:US11184366

    申请日:2005-07-18

    IPC分类号: G11B5/00

    摘要: A method for predicting the failure of a data storage device having a slider heater is disclosed. For slider heaters exhibiting a decreasing resistance aging characteristic, a failure warning is produced when heater resistance suddenly increases 2 to 5%, or dR/dt changes sign from negative to positive. For slider heaters exhibiting an increasing resistance aging characteristic, a failure warning is produced when the heater resistance suddenly drops 2 to 5%, or dR/dt changes sign from positive to negative. Additionally, random changes in heater resistance exceeding nominal measurement error may also be utilized to produce a failure warning. This method provides advance warning of potential data read/write errors well before the open circuit failure of the slider heater occurs.

    摘要翻译: 公开了一种用于预测具有滑块加热器的数据存储装置的故障的方法。 对于具有降低的电阻老化特性的滑块加热器,当加热器电阻突然增加2至5%或dR / dt从负变为正时,产生故障警告。 对于表现出增加的电阻老化特性的滑块加热器,当加热器电阻突然下降2〜5%,或dR / dt从正到负变化时产生故障警告。 此外,也可以利用加热器电阻超过标称测量误差的随机变化来产生故障警告。 该方法在滑块加热器的开路故障发生之前就提供潜在数据读/写错误的提前警告。