公开(公告)号：US06703252B2

公开(公告)日：2004-03-09

申请号：US10066149

申请日：2002-01-31

Applicant: Zhizhang Chen ,  Paul J Benning ,  Sriram Ramamoorthi ,  Thomas Novet

Inventor： Zhizhang Chen ,  Paul J Benning ,  Sriram Ramamoorthi ,  Thomas Novet

IPC: H01L2166

CPC classification number: B82Y10/00 ,  G11C11/23 ,  H01J1/312 ,  H01J9/025

Abstract: A method is disclosed for creating an emitter having a flat cathode emission surface: First a protective layer that is conductive is formed on the flat cathode emission surface. Then an electronic lens structure is created over the protective layer. Finally, the protective layer is etched to expose the flat cathode emission surface.

Abstract translation: 公开了一种用于产生具有平坦的阴极发射表面的发射体的方法：首先在平坦的阴极发射表面上形成导电的保护层。 然后在保护层上形成电子透镜结构。 最后，蚀刻保护层以暴露平坦的阴极发射表面。

公开(公告)号：US20040017160A1

公开(公告)日：2004-01-29

申请号：US10349995

申请日：2003-01-24

Inventor： Masakazu Sagawa ,  Mutsumi Suzuki ,  Toshiaki Kusunoki

IPC: G09G003/10

CPC classification number: B82Y10/00 ,  G09G3/22 ,  H01J1/312 ,  H01J9/022 ,  H01J9/241 ,  H01J2201/3125

Abstract: A display having hot electron type electron sources displaying an image by a line sequential scanning scheme can prevent poor brightness uniformity along scan lines. A top electrode bus line of a hot electron type electron source is a scan line and a bottom electrode thereof is a data line. The top electrode bus line has a sheet resistance lower than that of the bottom electrode. The wire sheet resistance of the scam line can be reduced to several m/square. When forming a 40 inch large screen FED using the hot electron type electron sources, a voltage drop amount produced in the scan line can be suppressed below an allowable range. A high quality image without poor brightness uniformity can be obtained.

Abstract translation: 具有通过行顺序扫描方式显示图像的热电子型电子源的显示器可以防止扫描线的亮度均匀性差。 热电子型电子源的顶部电极母线是扫描线，其底部电极是数据线。 顶部电极母线具有低于底部电极的薄层电阻。 欺诈线的电线电阻可以减小到几米/平方。 当使用热电子型电子源形成40英寸大屏幕FED时，可以将在扫描线上产生的电压降量抑制在允许范围以下。 可以获得不具有不均匀亮度的高质量图像。

公开(公告)号：US06624589B2

公开(公告)日：2003-09-23

申请号：US09865698

申请日：2001-05-29

Applicant: Shin Kitamura ,  Yoshiyuki Osada

Inventor： Shin Kitamura ,  Yoshiyuki Osada

IPC: H01J9227

CPC classification number: B82Y10/00 ,  H01J1/312 ,  H01J3/021 ,  Y10S977/939

Abstract: An electron emitting device includes a first electrode located on a substrate, an insulating layer located on the first electrode, and a second electrode located on the insulating layer. The second electrode has a first surface and a second surface, which are substantially vertical to a direction that the first electrode and the insulating layer are laminated. The first surface of the second electrode is in contact with the insulating layer. A higher potential than that applied to the second electrode is applied to the first electrode to emit an electron from the second surface.

公开(公告)号：US06614169B2

公开(公告)日：2003-09-02

申请号：US09791699

申请日：2001-02-26

Applicant: Toshiaki Kusunoki ,  Mutsumi Suzuki ,  Masakazu Sagawa

Inventor： Toshiaki Kusunoki ,  Mutsumi Suzuki ,  Masakazu Sagawa

IPC: H01J162

CPC classification number: B82Y10/00 ,  H01J1/312 ,  H01J2329/00

Abstract: Disclosed is a display device with improved brightness achieved by increasing electron emission efficiency of a thin film cathode. Phosphors are irradiated with electrons emitted to a vacuum through a flat thin film which is thinner than 5 nm and is disposed so as to face the phosphors. A top electrode for emitting the electrons is formed by stacking thin films of Ir, Pt, and Au, and performing a heat treatment so as to reconstruct the top electrode to have a structure in which thick island parts and a flat thin film part mixedly exist.

Abstract translation: 公开了通过增加薄膜阴极的电子发射效率而获得的亮度提高的显示装置。 用通过比5nm薄的扁平薄膜发射到真空的电子被荧光体照射，并且被设置为面对荧光体。 用于发射电子的顶部电极通过堆叠Ir，Pt和Au的薄膜而形成，并进行热处理，以便重建顶部电极以具有其中稠岛部分和平坦薄膜部分混合存在的结构 。

公开(公告)号：US20030160228A1

公开(公告)日：2003-08-28

申请号：US10085866

申请日：2002-02-27

Inventor： Zhizhang (John) Chen ,  Sriram Ramamoorthi

IPC: H01L029/06 ,  H01L029/12

CPC classification number: B82Y10/00 ,  H01J1/312 ,  H01J9/025

Abstract: An emitter has a rapid thermal process (RTP) formed emission layer of SiO2, SiOxNy or combinations thereof. The emission layer formed by rapid thermal processing does not require electroforming to stabilize the film. The RTP grown films are stable and exhibit uniform characteristics from device to device.

Abstract translation: 发射体具有形成SiO 2，SiO x N y或其组合的快速热处理（RTP）发射层。 通过快速热处理形成的发射层不需要电铸来稳定膜。 RTP生长的膜是稳定的并且从器件到器件表现出均匀的特性。

公开(公告)号：US20030141494A1

公开(公告)日：2003-07-31

申请号：US10066158

申请日：2002-01-31

Inventor： Alexander Govyadinov ,  Michael J. Regan

IPC: H01L029/06

CPC classification number: B82Y10/00 ,  H01J1/312 ,  H01J29/467 ,  H01J2201/304 ,  H01J2201/3125

Abstract: An emitter includes an electron source and a cathode. The cathode has an emissive surface. The emitter further includes a continuous anisotropic conductivity layer disposed between the electron source and the emissive surface of the cathode. The anisotropic conductivity layer has an anisotropic sheet resistivity profile and provides for substantially uniform emissions over the emissive surface of the emitter.

Abstract translation: 发射体包括电子源和阴极。 阴极具有发射表面。 发射极还包括设置在电子源和阴极的发射表面之间的连续各向异性导电层。 各向异性导电层具有各向异性的电阻率分布，并且在发射体的发射表面上提供基本均匀的发射。

公开(公告)号：US20030057825A1

公开(公告)日：2003-03-27

申请号：US10222635

申请日：2002-08-19

Applicant: Hitachi, Ltd.

Inventor： Toshiaki Kusunoki ,  Masakazu Sagawa ,  Mutsumi Suzuki

IPC: H01J001/62

CPC classification number: B82Y10/00 ,  H01J1/312 ,  H01J31/127

Abstract: The invention realizes a display device that uses thin film cathodes having no contamination of a top electrode and no damage of an electron acceleration layer due to photo process and having no contact failure of the top electrode of the thin film cathode array due to oxidation or breakage of the bus electrode in the frit glass process that is carried out when a panel is manufactured to bring about the high reliability of the wiring connection of the top electrode. To realize the display device, the invention provides a display device having a substrate comprising a base electrode, a top electrode, and an electron acceleration layer disposed between the base electrode and the top electrode, which substrate is formed of arrayed thin film cathodes that emit electrons from the top electrode side by applying a voltage between the base electrode and the top electrode, and a phosphor screen. The arrayed thin film cathodes have a top bus electrode served as a current feed line to the top electrode, which top bus electrode is tapered so that the film thickness decreases toward an electron emission portion side, and have an overhang structure that separates the top electrode into individual cathodes.

Abstract translation: 本发明实现了一种显示装置，其使用没有顶部电极污染的薄膜阴极，并且由于光刻工艺而不会损坏电子加速层，并且由于氧化或断裂而没有薄膜阴极阵列的顶部电极的接触不良 在制造面板时进行的玻璃料玻璃工艺中的总线电极，以实现顶部电极的布线连接的高可靠性。 为了实现显示装置，本发明提供了一种显示装置，其具有包括基极，顶电极和设置在基极和顶电极之间的电子加速层的基板，该基板由排列的薄膜阴极形成，该阴极发射 通过在基极和顶电极之间施加电压和荧光屏，从顶电极侧的电子。 排列的薄膜阴极具有作为到顶部电极的电流馈送线的顶部总线电极，顶部总线电极是锥形的，使得膜厚度朝向电子发射部分侧减小，并且具有分离顶部电极 变成单个阴极。

公开(公告)号：US20030020059A1

公开(公告)日：2003-01-30

申请号：US10048478

申请日：2002-07-22

Inventor： Takuya Komoda ,  Yoshiaki Honda ,  Koichi Aizawa ,  Tsutomu Ichihara ,  Yoshifumi Watabe ,  Takashi Hatai ,  Toru Baba

IPC: H01L029/06 ,  H01L029/12

CPC classification number: B82Y10/00 ,  H01J1/312 ,  H01J2329/00

Abstract: In a field emission-type electron source (10), lower electrodes (8) made of an electroconductive layer, a strong field drift layer (6) including drift portions (6a) made of an oxidized or nitrided porous semiconductor, and surface electrodes (7) made of a metal layer are provided on an upper side of a dielectric substrate (11) made of glass. When voltage is applied to cause the surface electrodes (7) to be anodic with respect to the lower electrodes (8), electrons injected from the lower electrodes (8) to the strong field drift layer (6) are led to drift through the strong field drift layer (6) and are emitted outside through the surface electrodes (7). A pn-junction semiconductor layer composed of an n-layer (21) and a p-layer (22) is provided between the lower electrode (8) and the strong field drift layer (6) to prevent a leakage current from flowing to the surface electrode (7) from the lower electrode (8), thereby reducing amount of power consumption.

Abstract translation: 在场致发射型电子源（10）中，由导电层制成的下电极（8）包括由氧化或氮化多孔半导体制成的漂移部分（6a）的强场漂移层（6）和表面电极 7）由金属层制成，设置在由玻璃制成的电介质基板（11）的上侧。 当施加电压以使表面电极（7）相对于下电极（8）呈阳极时，从下电极（8）注入的强电场漂移层（6）的电子通过强电场 场漂移层（6），并通过表面电极（7）发射到外部。 在下电极（8）和强场漂移层（6）之间设置由n层（21）和p层（22）构成的pn结半导体层，以防止漏电流流向 表面电极（7），从而减少功耗。

公开(公告)号：US20020167001A1

公开(公告)日：2002-11-14

申请号：US09846127

申请日：2001-04-30

Inventor： Zhizhang Chen ,  Michael J. Regan ,  Brian E. Bolf ,  Thomas Novet ,  Paul J. Benning ,  Mark Alan Johnstone ,  Sriram Ramamoorthi

IPC: H01L029/06 ,  H01L021/00 ,  H01L029/12

CPC classification number: B82Y10/00 ,  H01J1/312 ,  H01J9/022

Abstract: An emitter has an electron supply layer and a tunneling layer formed on the electron supply layer. Optionally, an insulator layer is formed on the electron supply layer and has openings defined within in which the tunneling layer is formed. A cathode layer is formed on the tunneling layer to provide a surface for energy emissions of electrons and/or photons. Preferably, the emitter is subjected to an annealing process thereby increasing the supply of electrons tunneled from the electron supply layer to the cathode layer.

Abstract translation: 发射体具有形成在电子供给层上的电子供给层和隧道层。 可选地，在电子供给层上形成绝缘体层，并且在其内形成有形成有隧道层的开口。 在隧道层上形成阴极层，以提供电子和/或光子能量发射的表面。 优选地，对发射极进行退火处理，从而增加从电子供给层隧穿到阴极层的电子的供应。

公开(公告)号：US20020047562A1

公开(公告)日：2002-04-25

申请号：US09865698

申请日：2001-05-29

Inventor： Shin Kitamura ,  Yoshiyuki Osada

IPC: G09G003/10

CPC classification number: B82Y10/00 ,  H01J1/312 ,  H01J3/021 ,  Y10S977/939

Abstract: An electron emitting device includes a first electrode located on a substrate, an insulating layer located on the first electrode, and a second electrode located on the insulating layer. The second electrode has a first surface and a second surface, which are substantially vertical to a direction that the first electrode and the insulating layer are laminated. The first surface of the second electrode is in contact with the insulating layer. A higher potential than that applied to the second electrode is applied to the first electrode to emit an electron from the second surface.

Abstract translation: 电子发射器件包括位于衬底上的第一电极，位于第一电极上的绝缘层和位于绝缘层上的第二电极。 第二电极具有与第一电极和绝缘层层叠的方向基本垂直的第一表面和第二表面。 第二电极的第一表面与绝缘层接触。 比施加到第二电极的电位高的电位被施加到第一电极以从第二表面发射电子。