公开(公告)号：US08177987B2

公开(公告)日：2012-05-15

申请号：US12637978

申请日：2009-12-15

申请人： Kyota Nozu ,  Kenichi Iwata ,  Tamaki Kobayashi ,  Shin Kitamura ,  Akira Shimazu

发明人： Kyota Nozu ,  Kenichi Iwata ,  Tamaki Kobayashi ,  Shin Kitamura ,  Akira Shimazu

IPC分类号： H01B13/00

CPC分类号： H01J9/025 ,  H01J1/3046 ,  H01J31/127 ,  H01J2201/30423 ,  H01J2329/0423

摘要： A method for producing an electron-emitting device includes forming a first conductive film on a side surface of an insulation layer including the side surface and a top surface connected to the side surface; forming a second conductive film from the top surface to the side surface and on the first conductive film; and etching the second electrically conductive film.

摘要翻译： 一种电子发射器件的制造方法，包括在包括侧面的绝缘层和与侧面连接的顶面的侧面上形成第一导电膜; 从所述顶表面到所述侧表面和所述第一导电膜上形成第二导电膜; 并蚀刻第二导电膜。

公开(公告)号：US20100159790A1

公开(公告)日：2010-06-24

申请号：US12421758

申请日：2009-04-10

申请人： Kenichi Iwata ,  Tamaki Kobayashi ,  Yusuke Miyamoto ,  Takuto Moriguchi ,  Eiji Takeuchi ,  Shin Kitamura

发明人： Kenichi Iwata ,  Tamaki Kobayashi ,  Yusuke Miyamoto ,  Takuto Moriguchi ,  Eiji Takeuchi ,  Shin Kitamura

IPC分类号： H01J9/04

CPC分类号： H01J31/127 ,  H01J1/3046 ,  H01J29/04 ,  H01J2201/30423 ,  H01J2329/0423

摘要： A method of manufacturing an electron-emitting device includes a first step of forming a conductive film on an insulating layer having an upper surface and a side surface connected to the upper surface via a corner portion so as to extend from the side surface to the upper surface and cover at least a part of the corner portion, and a second step of etching the conductive film. At the first step, the conductive film is formed so that film density of a portion on the side surface of the insulating layer becomes lower than film density of a portion on the corner portion of the insulating layer.

摘要翻译： 制造电子发射器件的方法包括：第一步骤，在具有上表面和侧表面的绝缘层上形成导电膜，所述绝缘层经由拐角部分从所述侧表面延伸到所述上表面 表面并覆盖角部的至少一部分，以及蚀刻导电膜的第二步骤。 在第一步骤中，形成导电膜，使得绝缘层的侧表面上的部分的膜密度变得低于绝缘层的角部上的部分的膜密度。

公开(公告)号：US07104859B2

公开(公告)日：2006-09-12

申请号：US10802854

申请日：2004-03-18

申请人： Takeo Tsukamoto ,  Shinichi Kawate ,  Kazunari Oyama ,  Takahiro Sato ,  Shin Kitamura ,  Kazuya Miyazaki ,  Takashi Iwaki ,  Akira Shimazu

发明人： Takeo Tsukamoto ,  Shinichi Kawate ,  Kazunari Oyama ,  Takahiro Sato ,  Shin Kitamura ,  Kazuya Miyazaki ,  Takashi Iwaki ,  Akira Shimazu

IPC分类号： H01J9/00

CPC分类号： B82Y30/00 ,  B82Y10/00 ,  B82Y40/00 ,  C01B32/162 ,  C23C16/0281 ,  C23C16/26 ,  D01F9/1275 ,  H01J2201/30469 ,  H01J2209/0223 ,  Y10T428/2913

摘要： In a method for manufacturing carbon fibers by means of a thermal CVD method through catalysts, the method capable of obtaining a uniform film thickness regardless of a growth position and a growth area on a substrate is provided. The substrate on which a catalyst layer is formed is disposed in a reaction container. An atmosphere in the reaction container is set to be a reduced pressure atmosphere including a carbon containing gas having a partial pressure of 10 Pa or less, and the substrate is heated in the atmosphere to grow carbon fibers on the catalyst layer.

摘要翻译： 在通过热CVD法通过催化剂制造碳纤维的方法中，提供了能够获得与基板上的生长位置和生长面积无关的均匀膜厚度的方法。 其上形成有催化剂层的基板设置在反应容器中。 将反应容器的气氛设定为包含分压为10Pa以下的含碳气体的减压气氛，在大气中加热基板，在催化剂层上生长碳纤维。

公开(公告)号：US20050032255A1

公开(公告)日：2005-02-10

申请号：US10942901

申请日：2004-09-17

申请人： Shin Kitamura ,  Takeo Tsukamoto

发明人： Shin Kitamura ,  Takeo Tsukamoto

IPC分类号： H01J1/30 ,  H01J1/304 ,  H01J9/02 ,  H01L21/00

CPC分类号： B82Y10/00 ,  H01J1/304 ,  H01J1/316 ,  H01J9/025 ,  H01J31/127 ,  H01J2201/30469

摘要： A method for producing a durable electron-emitting device having a uniform electron emission characteristic, an electron source, and an image-forming apparatus having a uniform display characteristic for a long period are provided. The method for producing an electron-emitting device according to the present invention includes the steps of: disposing a cathode electrode on a surface of a substrate; providing an electrode opposite the cathode electrode; disposing plural pieces of fiber containing carbon as a main component on the cathode electrode; and applying potential higher than potential applied to the cathode electrode under depressurized condition to an electrode opposite the cathode electrode.

摘要翻译： 提供一种制造具有均匀的电子发射特性的耐用的电子发射器件的方法，电子源和长时间具有均匀的显示特性的图像形成装置。 根据本发明的电子发射器件的制造方法包括以下步骤：将阴极设置在衬底的表面上; 提供与阴极相对的电极; 在所述阴极上设置多个含有碳的纤维作为主要成分; 并且在减压条件下将施加到阴极上的电位的电位施加到与阴极相对的电极。

公开(公告)号：US20110305314A1

公开(公告)日：2011-12-15

申请号：US13156166

申请日：2011-06-08

申请人： Shin Kitamura ,  Naofumi Aoki ,  Yoichi Murakami ,  Kota Aoki ,  Takeo Tsukamoto

发明人： Shin Kitamura ,  Naofumi Aoki ,  Yoichi Murakami ,  Kota Aoki ,  Takeo Tsukamoto

IPC分类号： G01N23/04 ,  H01J29/10 ,  H01J9/02

CPC分类号： H01J31/127 ,  H01J1/3044 ,  H01J29/04 ,  H01J2201/30407 ,  H01J2329/0413

摘要： A field emission type electron emitting device includes a cathode including a mixture of a lanthanum oxide and a molybdenum oxide.

摘要翻译： 场发射型电子发射器件包括包含氧化镧和氧化钼的混合物的阴极。

公开(公告)号：US20100282710A1

公开(公告)日：2010-11-11

申请号：US12437150

申请日：2009-05-07

申请人： SHIN KITAMURA ,  MITSUTOSHI FUKADA

发明人： SHIN KITAMURA ,  MITSUTOSHI FUKADA

IPC分类号： F16K3/00 ,  C23F1/00 ,  C03C25/68

CPC分类号： H01L21/67126 ,  C23C16/4412 ,  F16K3/02 ,  F16K51/02 ,  H01L21/3065

摘要： Embodiments of gate valves and methods of using same are provided herein. In some embodiments, a gate valve for use in a process chamber may include a body having an opening disposed therethrough from a first surface to an opposing second surface of the body; a pocket extending into the body from a sidewall of the opening; a gate movably disposed within the pocket between a closed position that seals the opening and an open position that reveals the opening and disposes the gate completely within the pocket; and a shutter configured to selectively seal the pocket when the gate is disposed in the open position. In some embodiments, one or more heaters may be coupled to at least one of the body or the shutter.

摘要翻译： 闸阀及其使用方法的实施例在此提供。 在一些实施例中，用于处理室的闸阀可以包括具有从主体的第一表面到相对的第二表面穿过的开口的主体; 从开口的侧壁延伸到主体中的口袋; 可移动地设置在袋内的封闭位置之间的门，该关闭位置密封开口和露出开口的打开位置，并将门完全置于口袋内; 以及快门，其构造成当所述门设置在所述打开位置时选择性地密封所述口袋。 在一些实施例中，一个或多个加热器可以联接到主体或快门中的至少一个。

公开(公告)号：US20090180946A1

公开(公告)日：2009-07-16

申请号：US12406735

申请日：2009-03-18

申请人： Shin Kitamura ,  Takeo Tsukamoto

发明人： Shin Kitamura ,  Takeo Tsukamoto

IPC分类号： D01F9/12

CPC分类号： B82Y30/00 ,  D01F9/127 ,  D01F9/1271 ,  D01F9/1273 ,  D01F9/1275 ,  D01F9/1278 ,  D01F9/133 ,  H01J1/3042 ,  H01J9/025

摘要： The invention provides a fiber containing carbon which is less deteriorated in terms of electron emission characteristic, is excellent in terms of reproducibility, and can in addition be formed at a low cost, a substrate and electron emission device using the fiber containing carbon, an electron source using the electron emission device, a display panel using the electron source, and an information displaying/playing apparatus using the display panel, and a method of manufacturing these. The manufacturing method comprises a first step of preparing a substrate (substrate 1) equipped with a catalyst (catalyst layer 3) on its surface; and a second step of causing the fiber containing carbon (carbon fiber 4) to grow using the catalyst, whereby the second step comprises, in order to decrease, from a midway point of time in this step, the growth rate at which the fiber containing carbon grows, a sub-step of controlling the growth conditions for the fiber containing carbon.

摘要翻译： 本发明提供了一种在电子发射特性方面劣化较少的碳的纤维，在再现性方面是优异的，并且还可以以低成本形成，使用含碳纤维的基板和电子发射装置，电子 使用电子发射器件的源，使用该电子源的显示面板，以及使用该显示面板的信息显示/播放装置及其制造方法。 该制造方法包括：在其表面上准备装备有催化剂（催化剂层3）的基板（基板1）的第一工序; 以及使用所述催化剂使含有碳（碳纤维4）的纤维生长的第二工序，从而第二工序为了从该步骤的中途时间点减少含有纤维的纤维的生长速度 碳生长，控制含碳纤维的生长条件的子步骤。

公开(公告)号：US07131886B2

公开(公告)日：2006-11-07

申请号：US10879048

申请日：2004-06-30

申请人： Shin Kitamura ,  Takeo Tsukamoto ,  Junri Ishikura

发明人： Shin Kitamura ,  Takeo Tsukamoto ,  Junri Ishikura

IPC分类号： H01J9/04 ,  H01J9/12

CPC分类号： B82Y30/00 ,  B82Y10/00 ,  B82Y40/00 ,  C01B32/162 ,  D01F9/127 ,  H01J1/3048 ,  H01J9/022 ,  H01J2201/30469

摘要： A method of producing a fiber, comprising the steps of introducing catalytic particles originally formed in a particle-forming chamber into an arraying chamber together with a carrier gas, to cause the catalytic particles to become arranged on a substrate disposed in the arraying chamber. A next step includes growing fibers, each including carbon as a major component, based on the catalytic particles arranged on the substrate. The fibers grow by heating the catalytic particles arranged on the substrate in an atmosphere containing carbon.

公开(公告)号：US06933664B2

公开(公告)日：2005-08-23

申请号：US10464760

申请日：2003-06-19

申请人： Shin Kitamura ,  Yoshiyuki Osada

发明人： Shin Kitamura ,  Yoshiyuki Osada

IPC分类号： H01J29/04 ,  H01J1/304 ,  H01J1/312 ,  H01J3/02 ,  H01J31/12 ,  H01J1/02

CPC分类号： B82Y10/00 ,  H01J1/312 ,  H01J3/021 ,  Y10S977/939

摘要： An electron emitting device includes a first electrode located on a substrate, an insulating layer located on the first electrode, and a second electrode located on the insulating layer. The second electrode has a first surface and a second surface, which are substantially vertical to a direction that the first electrode and the insulating layer are laminated. The first surface of the second electrode is in contact with the insulating layer. A higher potential than that applied to the second electrode is applied to the first electrode to emit an electron from the second surface.

摘要翻译： 电子发射器件包括位于衬底上的第一电极，位于第一电极上的绝缘层和位于绝缘层上的第二电极。 第二电极具有与第一电极和绝缘层层叠的方向基本垂直的第一表面和第二表面。 第二电极的第一表面与绝缘层接触。 比施加到第二电极的电位高的电位被施加到第一电极以从第二表面发射电子。

公开(公告)号：US06843696B2

公开(公告)日：2005-01-18

申请号：US10234368

申请日：2002-09-05

申请人： Shin Kitamura ,  Takeo Tsukamoto ,  Junri Ishikura

发明人： Shin Kitamura ,  Takeo Tsukamoto ,  Junri Ishikura

IPC分类号： B82B3/00 ,  C01B31/02 ,  C01B31/04 ,  D01F9/127 ,  H01J1/30 ,  H01J1/304 ,  H01J9/02 ,  H01J29/04 ,  H01J31/12

CPC分类号： B82Y30/00 ,  B82Y10/00 ,  B82Y40/00 ,  C01B32/162 ,  D01F9/127 ,  H01J1/3048 ,  H01J9/022 ,  H01J2201/30469

摘要： A method of producing a fiber, comprising the steps of introducing catalytic particles originally formed in a particle-forming chamber into an arraying chamber together with a carrier gas, to cause the catalytic particles to become arranged on a substrate disposed in the arraying chamber. A next step includes growing fibers, each including carbon as a major component, based on the catalytic particles arranged on the substrate. The fibers grow by heating the catalytic particles arranged on the substrate in an atmosphere containing carbon.

摘要翻译： 一种纤维的制造方法，其特征在于，包括以下步骤：将原来形成在颗粒形成室中的催化剂粒子与载气一起引入排列室，使催化剂粒子排列在配置在排列室内的基板上。 下一个步骤包括基于布置在基底上的催化颗粒，生长纤维，每个纤维包括碳作为主要成分。 通过在包含碳的气氛中加热布置在基板上的催化颗粒来生长纤维。