公开(公告)号：US06700663B1

公开(公告)日：2004-03-02

申请号：US10248442

申请日：2003-01-21

Applicant: Kun-chih Lin

Inventor： Kun-chih Lin

IPC: G01J400

CPC classification number: H01L21/02686 ,  B23K26/032 ,  G01N21/211 ,  H01L21/02532 ,  H01L21/0262 ,  H01L21/2026

Abstract: An amorphous silicon thin film is formed on a substrate first. Then the thin film is irradiated by a laser plus having an irradiation interval along a first direction to re-crystallize the thin film into a polysilicon thin film. A light source is thereafter focused into a micro spot having a diameter smaller than the irradiation interval, and the polysilicon thin film is irradiated by the micro spot moving along the first direction and having a relative moving distance to obtain a spectrum.

Abstract translation: 首先在基板上形成非晶硅薄膜。 然后，通过沿着第一方向具有照射间隔的激光加以照射薄膜，以使薄膜再结晶成多晶硅薄膜。 然后将光源聚焦成直径小于照射间隔的微点，并且通过沿着第一方向移动的微点照射多晶硅薄膜并具有相对移动距离以获得光谱。

公开(公告)号：US06646743B2

公开(公告)日：2003-11-11

申请号：US10092521

申请日：2002-03-08

Applicant: Petr Herman ,  Jaroslav Ve{haeck over (c)}e{haeck over (r)}

Inventor： Petr Herman ,  Jaroslav Ve{haeck over (c)}e{haeck over (r)}

IPC: G01J400

CPC classification number: G01J3/447

Abstract: The method utilizes the physical phenomenon known as dispersion of the optical rotation. After passage of linearly polarized electromagnetic radiation through the optically active environment (rotator), with the rotating power characterized by a parameter p, and then through the analyzing polarizer, the function R(p) can be measured. For the given active medium and the relative orientation of polarization planes of the input light beam and the analyzing polarizer, R(p) has an unambiguous relation with the spectrum I(&lgr;) of the analyzed radiation (&lgr; stands for wavelength) and allows its unambiguous determination by special mathematical methods. In devices based on the above mentioned principle a linearly polarized collimated beam of analyzed radiation propagates through the optical rotator then passes through the analyzer and strikes a single-channel or multi-channel detector which measures R(p) as a function of the parameter p. Finally the desired spectrum is calculated from the known functional relation between the measured rotogram R(p) and I(&lgr;).

Abstract translation: 该方法利用被称为旋光分散的物理现象。 线性极化电磁辐射通过光学活动环境（旋转器）后，旋转功率由参数p表征，然后通过分析偏振器，可以测量函数R（p）。 对于给定的有源介质和输入光束和分析偏振器的偏振平面的相对取向，R（p）与分析的辐射的光谱I（λ）具有明确的关系（λ代表波长），并允许其 通过特殊数学方法明确确定。 在基于上述原理的装置中，分析辐射的线性偏振准直光束通过光学旋转器传播，然后通过分析器并撞击单通道或多通道检测器，其测量R（p）作为参数p 。 最后，从测量的R（p）和I（λ）之间的已知功能关系计算所需的光谱。

公开(公告)号：US06621578B1

公开(公告)日：2003-09-16

申请号：US09707008

申请日：2000-11-06

Applicant: Iwao Mizoguchi

Inventor： Iwao Mizoguchi

IPC: G01J400

CPC classification number: G01B11/065

Abstract: An ellipsometer, which detects polarization of light successively reflected from a reference sample and an objective sample to study the objective sample, comprises first and second sample holder units for holding first and second samples, a beam projecting portion for projecting a beam of plane-polarized light toward the first sample, a polarizer, a turn-around prism for turning around the light beam reflected from the first sample to direct it to the second sample, an analyzer, a light detector for detecting light transmitted through the analyzer, and a sample positioning mechanism for arranging the first and second samples at appropriate positions and in appropriate orientations. The sample positioning mechanism includes one of the first and second sample holder units, which holds the objective sample, and comprises a height/inclination adjusting section for adjusting height and inclination of the objective sample.

Abstract translation: 检测从参考样品和物镜采样连续反射的光的偏振度的椭圆光度计包括用于保持第一和第二样品的第一和第二样品保持器单元，用于投影平面偏振光束的光束突出部分 朝向第一样品的光，偏振器，用于转动从第一样品反射的光束以将其引导到第二样品的转向棱镜，分析仪，用于检测透射通过分析器的光的光检测器，以及样品 定位机构，用于将第一和第二样品布置在适当的位置和适当的取向。 样品定位机构包括保持物体样品的第一和第二样品保持器单元中的一个，并且包括用于调节物体样品的高度和倾斜度的高度/倾斜调节部分。

公开(公告)号：US06618145B1

公开(公告)日：2003-09-09

申请号：US09679199

申请日：2000-10-05

Applicant: Dennis H. Goldstein ,  David B. Chenault ,  Monte Owens

Inventor： Dennis H. Goldstein ,  David B. Chenault ,  Monte Owens

IPC: G01J400

CPC classification number: G01N21/21 ,  G01N2021/213

Abstract: A spectropolarimetric reflectometer for measuring polarimetric reflection properties of materials over broad spectral wavelength regions is described wherein radiation from a Fourier transform spectrometer passes through a set of polarization elements that serve as a polarization state generator and is reflected off the sample and collected by optics that includes a polarization state analyzer, focusing mirror and detector.

Abstract translation: 描述了用于测量宽光谱波长区域上的材料的偏振反射特性的分光反射计，其中来自傅里叶变换光谱仪的辐射通过用作偏振状态发生器的一组偏振元件，并且被反射离开样品并被包括 偏振状态分析仪，聚焦镜和检测器。

公开(公告)号：US06611329B2

公开(公告)日：2003-08-26

申请号：US09437616

申请日：1999-11-10

Applicant: Glen W. Sachse

Inventor： Glen W. Sachse

IPC: G01J400

CPC classification number: G01J3/08 ,  G01N21/314 ,  G01N21/3518

Abstract: An optical path switch divides sample path radiation into a time series of alternating first polarized components and second polarized components. The first polarized components are transmitted along a first optical path and the second polarized components along a second optical path. A first gasless optical filter train filters the first polarized components to isolate at least a first wavelength band thereby generating first filtered radiation. A second gasless optical filter train filters the second polarized components to isolate at least a second wavelength band thereby generating second filtered radiation. A beam combiner combines the first and second filtered radiation to form a combined beam of radiation. A detector is disposed to monitor magnitude of at least a portion of the combined beam alternately at the first wavelength band and the second wavelength band as an indication of the concentration of the substance in the sample path.

Abstract translation: 光路开关将采样路径辐射分为交替的第一偏振分量和第二偏振分量的时间序列。 第一偏振分量沿着第一光路传播，第二偏振分量沿着第二光路传输。 第一无气体光学滤波器组对第一极化分量进行滤波以隔离至少第一波长带，从而产生第一滤波辐射。 第二无气体光学滤波器组对第二极化分量进行滤波以隔离至少第二波长带，从而产生第二滤波辐射。 光束组合器组合第一和第二滤波辐射以形成组合的辐射束。 检测器被设置为在第一波长带和第二波长带上交替地监测组合光束的至少一部分的大小作为样品路径中物质浓度的指示。

公开(公告)号：US06603113B2

公开(公告)日：2003-08-05

申请号：US09897932

申请日：2001-07-05

Applicant: Takahiro Numai

Inventor： Takahiro Numai

IPC: G01J400

CPC classification number: G01C19/661

Abstract: A gyro apparatus has a ring laser in which laser beams of different oscillation frequencies coexist and propagate in mutually opposite circulation directions in an optical resonator, a power source of driving for the ring laser, a device for measuring a difference between the oscillation frequencies of the laser beams, and a device for controlling the power source of driving according to the frequency difference.

Abstract translation: 陀螺仪装置具有环形激光器，其中不同振荡频率的激光束在光学谐振器中相互相反的循环方向共存并传播，环形激光器的驱动电源，用于测量振荡频率之间的差异的装置 激光束，以及根据频率差来控制驱动电源的装置。

公开(公告)号：US06590654B1

公开(公告)日：2003-07-08

申请号：US09788325

申请日：2001-02-16

Applicant: Gabriel Y. Sirat ,  Yaacov Zerem ,  Meny Shy ,  Valery Deich

Inventor： Gabriel Y. Sirat ,  Yaacov Zerem ,  Meny Shy ,  Valery Deich

IPC: G01J400

CPC classification number: G02B27/48 ,  G01B11/00 ,  G02B7/32 ,  G02B27/283

Abstract: An apparatus and method for enhancing the proportion of detected light that has been diffusely scattered by a surface light to light specularly reflected from the surface. A beam of light having a direction of predominant polarization is directed through a wedge module so as to illuminate the scene. The wedge module has two optically anisotropic wedges and an optical compensation plate. The polarization axes of the first and second wedges are substantially parallel to the direction of predominant polarization of the illuminating beam. Light scattered by the surface is detected through a polarizer.

Abstract translation: 一种用于增强被表面光漫反射的检测光的比例的表面上镜面反射的光的装置和方法。 具有主要极化方向的光束被引导通过楔形模块以照亮场景。 楔形模块具有两个光学各向异性楔块和光学补偿板。 第一和第二楔形物的偏振轴基本上平行于照明光束的主要偏振方向。 通过偏振器检测由表面散射的光。

公开(公告)号：US06577393B1

公开(公告)日：2003-06-10

申请号：US09719388

申请日：2001-03-23

Applicant: Harald Pötzschke ,  Wolfgang Barnikol ,  Kai Zirk

Inventor： Harald Pötzschke ,  Wolfgang Barnikol ,  Kai Zirk

IPC: G01J400

CPC classification number: G01J4/04

Abstract: In a process or device for very accurate determination of the plane of polarization of polarized light, the light from a light source (1) is polarized by means of a polarizing filter (2) which has a certain setting angle &thgr;0 with respect to the first reference plane, the plane of incidence on the reflecting surface (4). The polarized beam (12) passes through the sample in the measurement chamber (3), in which the angle of rotation is changed by the small angle &thgr;MG. The sum of &thgr;0 and &thgr;MG gives the angle of rotation &thgr;e , at which the beam (13) emerging from the measurement chamber is partially reflected at the surface of a medium of higher refractive index (4). The reflected beam is then separated into two partial beams (15a: extraordinary beam; 15b: ordinary beam), with vibration directions exactly perpendicular to each other, in a polarizing prism (5), the reference plane of which, the plane of vibration of the ordinary beam, has a certain setting angle (&thgr;*) with respect to the first reference plane. The intensities Io and Ia of the two partial beams are determined photometrically by detectors (6a,b) and the ratio (Q) of the measured intensities is determined (quotient determiner 8).

Abstract translation: 在用于非常准确地确定偏振光的偏振平面的过程或装置中，来自光源（1）的光通过偏振滤光器（2）进行偏振，偏振滤光器（2）相对于第一 参考平面，反射面上的入射平面（4）。 偏振光束（12）通过测量室（3）中的样品，其中旋转角度以小角度θMG改变。 θ0和θMG的和给出了旋转角θe，在该角度处，从测量室出射的光束（13）在较高折射率（4）的介质的表面部分反射。 然后，在偏振棱镜（5）中，将反射光束分离为具有彼此精确垂直的振动方向的两个部分光束（15a：非常光束; 15b：普通光束），其参考平面是 普通光束相对于第一参考平面具有一定的设定角度（θ*）。 两个部分光束的强度Io和Ia由检测器（6a，b）由光度计确定，并且确定测量的强度的比率（Q）（商确定器8）。

公开(公告)号：US06567167B1

公开(公告)日：2003-05-20

申请号：US09505313

申请日：2000-02-16

Applicant: Patrick C. Chou ,  Hermann A. Haus

Inventor： Patrick C. Chou ,  Hermann A. Haus

IPC: G01J400

CPC classification number: G02B6/278 ,  G02B6/272 ,  H04B10/2569

Abstract: A real-time optical compensating apparatus reduces the PMD in an optical fiber by determining the principal states of polarization of the optical fiber and delaying one principal state of polarization with respect to the other.

Abstract translation: 实时光学补偿装置通过确定光纤的主要极化状态并延迟一个主要的极化状态相对于另一个来减少光纤中的PMD。

公开(公告)号：US06535285B1

公开(公告)日：2003-03-18

申请号：US09499974

申请日：2000-02-08

Applicant: Jon Opsal ,  Minna Hovinen

Inventor： Jon Opsal ,  Minna Hovinen

IPC: G01J400

CPC classification number: G01N21/1717 ,  G01N21/211

Abstract: A combination metrology tool is disclosed which is capable of obtaining both thermal wave and optical spectroscopy measurements on a semiconductor wafer. In a preferred embodiment, the principal combination includes a thermal wave measurement and a spectroscopic ellipsometric measurement. These measurements are used to characterize ion implantation processes in semiconductors over a large dosage range.

Abstract translation: 公开了一种能够在半导体晶片上获得热波和光谱测量的组合计量工具。 在优选实施例中，主要组合包括热波测量和光谱椭偏测量。 这些测量用于表征在大剂量范围内的半导体中的离子注入过程。