公开(公告)号：US20220173302A1

公开(公告)日：2022-06-02

申请号：US17672283

申请日：2022-02-15

申请人： ROHM CO., LTD.

发明人： Koji NOMURA ,  Nobufumi MATSUO ,  Tomohiro DATE

IPC分类号： H01L41/08 ,  H01L41/047 ,  H01L41/187 ,  H01L41/319

摘要： A piezoelectric element 10 includes a lower electrode, constituted of a Pt/Ti laminated film, a PLT seed layer, formed on the lower electrode, a PZT piezoelectric film, formed on the PLT seed layer, and an upper electrode, formed on the PZT piezoelectric film. A curve Q1 is a curve drawn such as to pass through a plurality of plotted points, each expressing a PLT (100) peak intensity with respect to a Pt (111) peak intensity according to a substrate setting temperature during forming of the Pt/Ti laminated film. A relationship of the PLT (100) peak intensity with respect to the Pt (111) peak intensity is within a range in the curve Q1 until the PLT (100) peak intensity decreases by 5% from a peak point P, at which the PLT (100) peak intensity is the maximum, and a (100) orientation rate of PLT constituting the seed layer is not less than 85%.

公开(公告)号：US11349065B2

公开(公告)日：2022-05-31

申请号：US15769690

申请日：2016-10-17

申请人： Soitec

发明人： Didier Landru

IPC分类号： H01L41/313 ,  H03H9/02 ,  H01L41/083 ,  H01L41/053 ,  H01L41/08

摘要： A method for manufacturing a hybrid structure comprising an effective layer of piezoelectric material having an effective thickness and disposed on a supporting substrate having a substrate thickness and a thermal expansion coefficient lower than that of the effective layer includes: a) a step of providing a bonded structure comprising a piezoelectric material donor substrate and the supporting substrate, b) a first step of thinning the donor substrate to form a thinned layer having an intermediate thickness and disposed on the supporting substrate, the assembly forming a thinned structure; c) a step of heat treating the thinned structure at an annealing temperature; and d) a second step, after step c), of thinning the thinned layer to form the effective layer. The method also comprises, prior to step b), a step a′) of determining a range of intermediate thicknesses that prevent the thinned structure from being damaged during step c).

公开(公告)号：US11338325B2

公开(公告)日：2022-05-24

申请号：US16509609

申请日：2019-07-12

申请人： Interface Technology (ChengDu) Co., Ltd. ,  INTERFACE OPTOELECTRONICS (SHENZHEN) CO., LTD. ,  GENERAL INTERFACE SOLUTION LIMITED

发明人： Ming-Ta Chiang ,  Min-Yu Kan ,  Meng-Zhu Ma ,  Huan Ding ,  Yu-Ju Chen

IPC分类号： B06B1/06 ,  H01L41/18 ,  G01L1/22 ,  G06F3/01 ,  H01L41/047 ,  H01L41/08 ,  H01L41/187

摘要： A touch feedback and sensing device includes a circuit board, a piezoelectric ceramic actuator on the circuit board; and at least one strain sensor on the circuit board. The piezoelectric ceramic actuator includes a piezoelectric ceramic block, a cathode and an anode on the piezoelectric ceramic block. Different voltages are applied to the cathode and the anode to vibrate the piezoelectric ceramic block. The circuit board vibrates with vibration of the piezoelectric ceramic block. The at least one strain sensor is configured to detect and monitor vibration of the circuit board.

公开(公告)号：US20220158072A1

公开(公告)日：2022-05-19

申请号：US17506704

申请日：2021-10-21

申请人： Innolux Corporation

发明人： Jui-Jen Yueh ,  Kuan-Feng Lee

IPC分类号： H01L41/083 ,  H01L41/047 ,  H01L41/08

摘要： An acoustic wave transmitting structure and a display device are provided. The acoustic wave transmitting structure includes a first layer, a second layer, and an intermediate layer. The first layer has a first acoustic impedance Z1. The second layer has a second acoustic impedance Z2. The intermediate layer is disposed between the first layer and the second layer, and has a third acoustic impedance Z3. Z1, Z2, and Z3 satisfy a relation: (Z1+Z2)/6.8≤Z3≤(Z1+Z2)/0.6. The display device includes a display panel and an acoustic wave generator. The display panel has a substrate. A plurality of display elements are disposed on one side of the substrate. The acoustic wave generator is disposed on the other side of the substrate of the display panel through the acoustic wave transmitting structure. The other side of the substrate is opposite to the one side of the substrate.

公开(公告)号：US20220158071A1

公开(公告)日：2022-05-19

申请号：US17439504

申请日：2020-03-10

申请人： Nitto Denko Corporation

发明人： Daisuke NAKAMURA ,  Naoki NAGAOKA ,  Taketo ISHIKAWA ,  Hironobu MACHINAGA

IPC分类号： H01L41/047 ,  H01L41/08 ,  H01L41/187 ,  H01L41/29

摘要： A piezo electric device having a configuration that can suppress the formation of a leakage path between electrodes that sandwich a piezoelectric layer and also reduce deterioration in the piezoelectric characteristics, is provided. The piezoelectric device has a first electrode, a piezoelectric layer, and a second electrode stacked in this order on a substrate. The first electrode and the second electrode are arranged so as not to overlap each other in the stacking direction.

公开(公告)号：US11335847B2

公开(公告)日：2022-05-17

申请号：US16072587

申请日：2017-01-17

申请人： Soitec

发明人： Oleg Kononchuk ,  Eric Butaud ,  Eric Desbonnets

IPC分类号： H01L41/312 ,  H01L41/08 ,  H03H9/02 ,  H03H9/00 ,  H03H3/02

摘要： The disclosure relates to a hybrid structure for a surface-acoustic-wave device comprising a useful layer of piezoelectric material joined to a carrier substrate having a thermal expansion coefficient lower than that of the useful layer; the hybrid structure comprising an intermediate layer located between the useful layer and the carrier substrate, the intermediate layer being a structured layer formed from at least two different materials comprising a plurality of periodic motifs in the plane of the intermediate layer.

公开(公告)号：US11322679B2

公开(公告)日：2022-05-03

申请号：US16229996

申请日：2018-12-21

申请人： ROHM CO., LTD.

发明人： Kunio Iida ,  Kinya Ashikaga

IPC分类号： B41J2/14 ,  H01L41/332 ,  H01L41/047 ,  H01L41/187 ,  B41J2/16 ,  H01L41/08 ,  H01L41/314

摘要： An inkjet printing head 1 includes an actuator substrate 2 having pressure chambers (cavities) 7, a movable film formation layer 10 including movable films 10A disposed above the pressure chambers 7 and defining top surface portions of the pressure chambers 7, and piezoelectric elements 9 formed above the movable films 10A. Each piezoelectric element 9 includes a lower electrode 11 formed above a movable film 10A, a piezoelectric film 12 formed above the lower electrode 11, and an upper electrode 13 formed above the piezoelectric film 12. The piezoelectric film 12 includes an active portion 12A with an upper surface in contact with a lower surface of an upper electrode 13 and an inactive portion 12B led out in a direction along a front surface of the movable film formation layer 10 from an entire periphery of a side portion of the active portion 12A and having a thickness thinner than that of the active portion 12A.

公开(公告)号：US20220115582A1

公开(公告)日：2022-04-14

申请号：US17556950

申请日：2021-12-20

申请人： FUJIFILM Corporation

发明人： Takumi TSURUOKA

IPC分类号： H01L41/193 ,  C09D5/24 ,  C09D7/61 ,  C09D129/04 ,  C09D7/20 ,  H01L41/08 ,  H01L41/047

摘要： Provided are a polymer-based piezoelectric composite material and a piezoelectric film which have high productivity and are capable of suppressing degradation of piezoelectric conversion efficiency in an environment where the temperature and the humidity are severe. The polymer-based piezoelectric composite material is a polymer-based piezoelectric composite material including piezoelectric particles in a matrix containing a polymer material, in which the polymer-based piezoelectric composite material contains greater than 500 ppm and 10000 ppm or less of a substance on a mass basis which has an SP value of less than 12.5 (cal/cm3)1/2 and is in a liquid state at room temperature, voids are formed in the polymer-based piezoelectric composite material, and an area ratio of the voids in a cross section of the polymer-based piezoelectric composite material is 0.1% or greater and 20% or less.

公开(公告)号：US20220115581A1

公开(公告)日：2022-04-14

申请号：US17555530

申请日：2021-12-20

申请人： FUJIFILM Corporation

发明人： Wataru KIKUCHI

IPC分类号： H01L41/193 ,  H01L41/08 ,  H04R17/00 ,  G02F1/1333 ,  H01L51/00 ,  C08K3/22 ,  C08F20/42 ,  H01L41/45

摘要： The present invention provides a polymer-based piezoelectric composite material from which a piezoelectric film capable of outputting a higher sound pressure is obtained in a case of using a piezoelectric speaker, a piezoelectric film formed of the polymer-based piezoelectric composite material, and a piezoelectric speaker and a flexible display which are formed of the piezoelectric film. The polymer-based piezoelectric composite material of the present invention is a polymer-based piezoelectric composite material including a polymer matrix which contains a polymer containing a group represented by Formula (1), and piezoelectric particles. *-L1-CR1R2—CN  Formula (1) In Formula (1), L1 represents a divalent linking group excluding a divalent aliphatic hydrocarbon group. R1 and R2 each independently represent a hydrogen atom, an alkyl group, or an aryl group.

公开(公告)号：US20220093844A1

公开(公告)日：2022-03-24

申请号：US17539422

申请日：2021-12-01

申请人： FUJIFILM Corporation

发明人： Kenichi UMEDA ,  Yukihiro OKUNO ,  Takami ARAKAWA

IPC分类号： H01L41/08 ,  H01L41/319

摘要： A piezoelectric element includes, in sequence, a substrate, a lower electrode layer, a growth control layer, a piezoelectric layer including a perovskite-type oxide containing lead as a main component of an A site, and an upper electrode layer. The growth control layer includes a metal oxide represented by MdN1−dOe, where M is one or more metal elements capable of substituting for the A site of the perovskite-type oxide. When the electronegativity of M is X, 1.41X−1.05≤d≤A1·exp(−X/t1)+y0, where A1=1.68×1012, t1=0.0306, and y0=0.59958. The perovskite-type oxide is represented by (Pba1αa2)(Zrb1Tib2βb3)Oc, where 0.5