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    PIEZOELECTRIC ELEMENT
    1.
    发明申请
    PIEZOELECTRIC ELEMENT 有权

    公开(公告)号：US20220173302A1

    公开(公告)日：2022-06-02

    申请号：US17672283

    申请日：2022-02-15

    申请人： ROHM CO., LTD.

    发明人： Koji NOMURA ,  Nobufumi MATSUO ,  Tomohiro DATE

    IPC分类号： H01L41/08 ,  H01L41/047 ,  H01L41/187 ,  H01L41/319

    摘要： A piezoelectric element 10 includes a lower electrode, constituted of a Pt/Ti laminated film, a PLT seed layer, formed on the lower electrode, a PZT piezoelectric film, formed on the PLT seed layer, and an upper electrode, formed on the PZT piezoelectric film. A curve Q1 is a curve drawn such as to pass through a plurality of plotted points, each expressing a PLT (100) peak intensity with respect to a Pt (111) peak intensity according to a substrate setting temperature during forming of the Pt/Ti laminated film. A relationship of the PLT (100) peak intensity with respect to the Pt (111) peak intensity is within a range in the curve Q1 until the PLT (100) peak intensity decreases by 5% from a peak point P, at which the PLT (100) peak intensity is the maximum, and a (100) orientation rate of PLT constituting the seed layer is not less than 85%.

    PIEZOELECTRIC ELEMENT
    2.
    发明申请
    PIEZOELECTRIC ELEMENT 审中-公开

    公开(公告)号：US20190081230A1

    公开(公告)日：2019-03-14

    申请号：US16122392

    申请日：2018-09-05

    申请人： ROHM CO., LTD.

    发明人： Koji NOMURA ,  Nobufumi MATSUO ,  Tomohiro DATE

    IPC分类号： H01L41/08 ,  H01L41/047 ,  H01L41/187

    摘要： A piezoelectric element 10 includes a lower electrode, constituted of a Pt/Ti laminated film, a PLT seed layer, formed on the lower electrode, a PZT piezoelectric film, formed on the PLT seed layer, and an upper electrode, formed on the PZT piezoelectric film. A curve Q1 is a curve drawn such as to pass through a plurality of plotted points, each expressing a PLT (100) peak intensity with respect to a Pt (111) peak intensity according to a substrate setting temperature during forming of the Pt/Ti laminated film. A relationship of the PLT (100) peak intensity with respect to the Pt (111) peak intensity is within a range in the curve Q1 until the PLT (100) peak intensity decreases by 5% from a peak point P, at which the PLT (100) peak intensity is the maximum, and a (100) orientation rate of PLT constituting the seed layer is not less than 85%.

    TRANSDUCER AND ELECTRONIC DEVICE
    3.
    发明申请
    TRANSDUCER AND ELECTRONIC DEVICE 有权

    公开(公告)号：US20220360871A1

    公开(公告)日：2022-11-10

    申请号：US17815009

    申请日：2022-07-26

    申请人： ROHM CO., LTD.

    发明人： Takashi NAIKI ,  Noriyuki SHIMOJI ,  Tomohiro DATE

    IPC分类号： H04R1/02 ,  H04R17/00 ,  H01L41/047 ,  H01L41/09

    摘要： A transducer includes: a film support portion having a hollow portion; a vibration film displaceable in a film thickness direction; a piezoelectric element, the piezoelectric element including a pair of electrodes and a piezoelectric film; and in regions overlapping the hollow portion, a plurality of first regions having a first total film thickness which is a sum of a film thickness of the vibration film and a film thickness of the piezoelectric element, and a plurality of second regions having a second total film thickness which is a sum of a film thickness of the vibration film and a film thickness of the piezoelectric element, the second total film thickness being different from the first total film thickness. The first regions and the second regions are alternately arranged, and one of the first regions is adjacent to a connection portion between the film support portion and the vibration film.

    TRANSDUCER AND DRIVING METHOD THEREOF, AND SYSTEM
    5.
    发明申请
    TRANSDUCER AND DRIVING METHOD THEREOF, AND SYSTEM 有权

    公开(公告)号：US20230051555A1

    公开(公告)日：2023-02-16

    申请号：US17979419

    申请日：2022-11-02

    申请人： ROHM CO., LTD.

    发明人： Takashi NAIKI ,  Tomohiro DATE ,  Noriyuki SHIMOJI

    IPC分类号： H04R17/10 ,  H04R7/10 ,  H04R7/18

    摘要： A transducer includes: a piezoelectric element; and a film body including a film support portion having a hollow portion, and a vibration film connected to the film support portion and displaceable in a film thickness direction, the film body having the piezoelectric element stacked over the vibration film. The piezoelectric element includes: a first stacked body having a first pair of electrodes and a first piezoelectric film sandwiched between the first pair of electrodes; and a second stacked body having a second pair of electrodes and a second piezoelectric film sandwiched between the second pair of electrodes, the second stacked body being separated from the first stacked body.

    TRANSDUCER AND ELECTRONIC DEVICE
    7.
    发明公开
    TRANSDUCER AND ELECTRONIC DEVICE 审中-公开

    公开(公告)号：US20240129673A1

    公开(公告)日：2024-04-18

    申请号：US18536551

    申请日：2023-12-12

    申请人： ROHM CO., LTD.

    发明人： Takashi NAIKI ,  Noriyuki SHIMOJI ,  Tomohiro DATE ,  Kenji GOUDA ,  Yurina AMAMOTO

    IPC分类号： H04R17/00 ,  H04R1/28

    CPC分类号： H04R17/005 ,  H04R1/2811

    摘要： A transducer includes: a film support portion; a vibration film that is connected to the film support portion and capable of displacing in a thickness direction; a base material having an opposed surface that is opposed to the vibration film; and a first piezoelectric element that is provided with a pair of electrodes and a piezoelectric film sandwiched between the pair of electrodes, and is arranged on the vibration film, in which the transducer maintains a pressure in a space between the base material and the vibration film so as to keep displacement of the vibration film within a certain range.