Lithographic apparatus and device manufacturing method
    41.
    发明授权
    Lithographic apparatus and device manufacturing method 有权
    平版印刷设备和器件制造方法

    公开(公告)号:US08730485B2

    公开(公告)日:2014-05-20

    申请号:US12948533

    申请日:2010-11-17

    CPC分类号: G03F7/70775 G01D5/38

    摘要: A position measurements system to measure a position of a movable object with respect to another object includes two or more one dimensional (1D) encoder heads mounted on one of the movable object and the other object and each capable of emitting a measurement beam along a measurement direction, one or more reference targets mounted on the other of the movable object and the other object, each reference target including a planar surface with a grid or grating to cooperate with the two or more one dimensional (1D) encoder heads, and a processor to calculate a position of the object on the basis of outputs of the two or more 1D encoder heads, wherein the measurement direction of each of the two or more 1D encoder heads is non-perpendicular to the planar surface of the respective reference target.

    摘要翻译: 用于测量可移动物体相对于另一物体的位置的位置测量系统包括安装在可移动物体和另一物体之一上的两个或更多个一维(1D)编码器头,并且每个能够沿测量发射测量光束 方向,安装在可移动物体和另一物体另一个上的一个或多个参考目标,每个参考目标包括具有格栅或光栅的平面,以与两个或更多个一维(1D)编码器头配合,以及处理器 基于两个或更多个1D编码器头的输出来计算物体的位置,其中两个或更多个1D编码器头中的每一个的测量方向与相应参考目标的平面不垂直。

    Optical radiation concentrator
    42.
    发明授权
    Optical radiation concentrator 失效
    光学辐射集中器

    公开(公告)号:US08519325B1

    公开(公告)日:2013-08-27

    申请号:US12546277

    申请日:2009-08-24

    IPC分类号: G01D5/38

    摘要: The present invention provides a spectrally selective planar optical radiation concentrator, in which different spectral components of solar energy can be collected for different applications such as heat, illumination and electricity. The optical radiation concentrator has two basic components, an angle selective optical filter and a light redistribution reflector for collecting, trapping and concentrating radiant energy. It further comprises a light deflecting component and a fluorescent wavelength shifter to improve acceptance angle and concentration efficiency respectively. The planar optical radiation concentrator exhibits the potential for light weight, high concentration ratio and efficiency, and the ability for passive tracking.

    摘要翻译: 本发明提供了一种光谱选择性平面光辐射聚光器,其中可以针对诸如热,照明和电力的不同应用收集太阳能的不同光谱分量。 光学辐射集中器具有两个基本部件:角度选择性滤光器和用于收集,捕获和集中辐射能的光再分布反射器。 它还包括一个光偏转分量和一个荧光波长移位器,分别提高接收角和浓度效率。 平面光辐射集中器具有重量轻,高浓度比和效率的潜力,以及被动跟踪的能力。

    System for detecting motion of a body
    43.
    发明授权
    System for detecting motion of a body 失效
    用于检测身体运动的系统

    公开(公告)号:US07902494B2

    公开(公告)日:2011-03-08

    申请号:US12067358

    申请日:2006-09-13

    IPC分类号: G01D5/38 G03F9/00

    摘要: The invention relates to a system (1) for detecting motion of a body (2) comprising a first elongated grating strip (4) coupled to said body and a separate and substantially stationary second elongated grating strip (5) crossing said first elongated grating strip. The system further comprises optical detection means (6) arranged to receive one or more light beams diffracted at said first and second elongated grating strips to detect motion of said body. The invention further relates to a method for detecting motion of a body (2) and to a body processing or inspection system.

    摘要翻译: 本发明涉及一种用于检测主体(2)的运动的系统(1),其包括耦合到所述主体的第一细长光栅条(4)和与所述第一细长光栅条交叉的单独且基本上固定的第二细长光栅条(5) 。 该系统还包括光学检测装置(6),其布置成接收在所述第一和第二细长光栅条带处衍射的一个或多个光束以检测所述主体的运动。 本发明还涉及一种用于检测身体(2)和身体加工或检查系统的运动的方法。

    System for Detecting Motion of a Body
    45.
    发明申请
    System for Detecting Motion of a Body 失效
    用于检测身体运动的系统

    公开(公告)号:US20090001260A1

    公开(公告)日:2009-01-01

    申请号:US12067358

    申请日:2006-09-13

    IPC分类号: G01D5/38

    摘要: The invention relates to a system (1) for detecting motion of a body (2) comprising a first elongated grating strip (4) coupled to said body and a separate and substantially stationary second elongated grating strip (5) crossing said first elongated grating strip. The system further comprises optical detection means (6) arranged to receive one or more light beams diffracted at said first and second elongated grating strips to detect motion of said body. The invention further relates to a method for detecting motion of a body (2) and to a body processing or inspection system.

    摘要翻译: 本发明涉及一种用于检测主体(2)的运动的系统(1),其包括耦合到所述主体的第一细长光栅条(4)和与所述第一细长光栅条交叉的单独且基本上固定的第二细长光栅条(5) 。 该系统还包括光学检测装置(6),其布置成接收在所述第一和第二细长光栅条带处衍射的一个或多个光束以检测所述主体的运动。 本发明还涉及一种用于检测身体(2)和身体加工或检查系统的运动的方法。

    Position-measuring device and method for operating a position-measuring device
    46.
    发明授权
    Position-measuring device and method for operating a position-measuring device 有权
    位置测量装置和操作位置测量装置的方法

    公开(公告)号:US07389595B2

    公开(公告)日:2008-06-24

    申请号:US11591221

    申请日:2006-10-31

    IPC分类号: G01D5/38 G01D5/347

    CPC分类号: G01D5/34715

    摘要: A position-measuring device is for determining the position of two objects which are arranged displaceably with respect to each other in at least one measuring direction, and a method is for the operation of such a position-measuring device. The position-measuring device includes a measuring graduation as well as a scanning device having a light source and one or a plurality of optical and/or optoelectronic components for generating displacement-dependent position signals. A semiconductor laser having great coherence length is provided as the light source, which is operated pulsed in a single-mode operational-mode.

    摘要翻译: 位置测量装置用于确定在至少一个测量方向上相对于彼此可移位布置的两个物体的位置,并且用于操作这种位置测量装置的方法。 位置测量装置包括测量刻度以及具有光源和用于产生位移相关位置信号的一个或多个光学和/或光电子部件的扫描装置。 提供具有大相干长度的半导体激光器作为以单模操作模式脉冲操作的光源。

    Position-measuring device
    47.
    发明授权
    Position-measuring device 有权
    位置测量装置

    公开(公告)号:US07297935B2

    公开(公告)日:2007-11-20

    申请号:US11182410

    申请日:2005-07-15

    申请人: Walter Huber

    发明人: Walter Huber

    IPC分类号: G01D5/34 G01D5/38

    CPC分类号: G01D5/3473 G01D5/38

    摘要: A position-measuring device includes: a measuring graduation provided on a measuring standard device arranged around in ring-like fashion; a scanning unit for optically scanning the measuring graduation using electromagnetic radiation; a scanning plate with a scanning graduation, formed by a scanning grating, extending along a detection axis, which is arranged in the beam path of the electromagnetic radiation used for scanning the measuring graduation, so that the radiation interacts both with the scanning graduation and with the measuring graduation; and a detector of the scanning unit, whose detector surface is used for detecting the electromagnetic radiation after interaction with the scanning graduation and the measuring graduation and which is present as a stripe pattern, in order to record motions of the measuring standard device relative to the scanning unit. The grating constant of scanning graduation varies along the axis of extension of the scanning graduation such that the distances on which the phase of the stripe pattern present at the detector surface extends through a change by 2π, are constant.

    摘要翻译: 一种位置测量装置,包括:测量刻度,设置在以环状排列的测量标准装置上; 扫描单元,用于使用电磁辐射光学扫描测量刻度; 扫描平板由扫描光栅形成,沿着检测轴延伸,该检测轴被布置在用于扫描测量刻度的电磁辐射的光束路径中,使得辐射与扫描刻度和与 测量毕业; 以及扫描单元的检测器,其检测器表面用于在与扫描刻度和测量刻度相互作用之后检测电磁辐射,并且作为条纹图案存在,以便记录测量标准装置相对于 扫描单元。 扫描刻度的光栅常数沿着扫描刻度的延伸轴线变化,使得存在于检测器表面处的条纹图案的相位延伸通过改变2pi的距离是恒定的。

    Optical encoder
    48.
    发明申请
    Optical encoder 有权
    光学编码器

    公开(公告)号:US20070034786A1

    公开(公告)日:2007-02-15

    申请号:US10555101

    申请日:2004-08-23

    IPC分类号: G01D5/34 G01D5/38

    CPC分类号: G01D5/36 G01D5/34707

    摘要: In an optical encoder comprising an optical scale in which a light transmission portion and a light non-transparent portion are arranged and an output pattern obtained by emitting an incident light functions as an optical code, a light source portion and a light detecting portion, the light non-transparent portion is constituted of at least one pair of inclined surfaces which are opposed in such a manner as to become farther away from each other towards the side where the incident light enters and set so that an incident angle of the optical axis of the incident light from the light source should not be smaller than a critical angle of incidence, and the light non-transparent portion is constructed so that the incident light which enters one inclined surface should be totally reflected thereon to enter the other inclined surface and then at least part of the incident light should be reflected on the other inclined surface, and a reflected light which is reflected on the other inclined surface should not enter a light emitting portion of the light source and a reflecting portion around the light emitting portion.

    摘要翻译: 在包括其中布置有光透射部分和光不透明部分的光学标尺的光学编码器中,并且通过发射入射光获得的输出图案用作光学代码,光源部分和光检测部分, 光不透明部分由至少一对倾斜表面构成,所述至少一对倾斜表面以相对于彼此更远离入射光入射侧的方式相对的方式构成,使得入射光的入射角 来自光源的入射光不应小于临界入射角,并且光非透明部分被构造成使得入射到一个倾斜表面的入射光应该被全反射以进入另一个倾斜表面,然后 入射光的至少一部分应该在另一个倾斜表面上反射,并且在另一个倾斜表面上反射的反射光倾斜 表面不应该进入光源的发光部分和围绕发光部分的反射部分。

    Optical encoder
    49.
    发明授权
    Optical encoder 有权
    光学编码器

    公开(公告)号:US06940603B2

    公开(公告)日:2005-09-06

    申请号:US10277511

    申请日:2002-10-22

    申请人: Takeshi Ito

    发明人: Takeshi Ito

    CPC分类号: G01D5/34715

    摘要: A surface-emitting laser is disposed on a photodetector disposed in parallel with a scale, so that an optical pattern surface of the scale can be irradiated with a light beam having a desired shape. A major axis of the light beam emitted from the surface-emitting laser is vertical to the photodetector, and forms a beam spot on the optical pattern surface of the scale. A light emission portion of the light source is disposed in a 0-order diffracted light region from the scale and other than a region in which only a 0-order diffracted light and 1st-order diffracted light or a 0-order diffracted light and −1st-order diffracted light interfere. A light shield metal and/or a dummy light receiving portion are/is disposed to surround a light receiving portion outer periphery, and is disposed in a region between an inner periphery of the light receiving portion and the surface-emitting laser.

    摘要翻译: 表面发射激光器设置在与标尺平行设置的光电检测器上,使得可以用具有期望形状的光束照射标尺的光学图案表面。 从表面发射激光器发射的光束的长轴垂直于光电检测器,并且在刻度的光学图案表面上形成束斑。 光源的发光部分配置在除鳞片的0次衍射光区域中,而不是只有0级衍射光和1 次衍射光的区域,或 0级衍射光和-1级光衍射光干涉。 光屏蔽金属和/或虚拟光接收部分被设置为围绕光接收部分外周,并且设置在光接收部分的内周和表面发射激光器之间的区域中。

    Passive positioning sensors
    50.
    发明申请
    Passive positioning sensors 审中-公开
    被动定位传感器

    公开(公告)号:US20050190988A1

    公开(公告)日:2005-09-01

    申请号:US10790506

    申请日:2004-03-01

    申请人: Eric Feron

    发明人: Eric Feron

    摘要: Methods and systems for determining position relative to an interference pattern generator including capturing an image of an interference pattern from a known fringe pattern generator with a viewer. The phase of the interference pattern is then determined with a processor and the phase information is used to find the orientation of the viewer relative to the fringe pattern generator. The distance to the fringe pattern generator is also found based on the interference pattern and position data relative to the fringe pattern generator is derived.

    摘要翻译: 用于确定相对于干涉图案发生器的位置的方法和系统,包括从具有观看者的已知条纹图案发生器捕获干涉图案的图像。 然后用处理器确定干涉图案的相位,并且使用相位信息来找到观看者相对于边缘图案生成器的取向。 也可以基于干涉图案找到与条纹图案发生器的距离,并得出相对于边缘图案发生器的位置数据。