Assembly comprising a measuring scale attached to a substrate and method for holding a measuring scale against a substrate
    3.
    发明授权
    Assembly comprising a measuring scale attached to a substrate and method for holding a measuring scale against a substrate 有权
    包括附接到基板的测量刻度的组件和用于将测量刻度保持在基板上的方法

    公开(公告)号:US08650769B2

    公开(公告)日:2014-02-18

    申请号:US13260891

    申请日:2010-02-23

    IPC分类号: G01D5/347 G01D5/26 G01B11/02

    CPC分类号: G01D5/34707

    摘要: An assembly including a substrate and a scale held on the substrate, wherein the scale has a measuring graduation, and the scale is held on the substrate by pneumatic suction. The scale is braced on the substrate via two-dimensionally distributed, spaced-apart supports, which are disposed facing a measurement area defined by the measuring graduation and wherein adjacent ones of the supports are spaced apart from one another at a mutual period that is less than a thickness of the scale. In addition, the supports have a structure such that a connection by optical contact bonding between the supports and the scale and/or between the supports and the substrate is prevented at least in the measurement area. A space between the scale and the substrate is sealed off from surroundings by a sealing structure.

    摘要翻译: 包括保持在基板上的基板和刻度的组件,其中刻度尺具有测量刻度,并且通过气动抽吸将刻度保持在基板上。 尺寸通过二维分布的间隔开的支撑件支撑在基板上,该支撑件面向由测量刻度限定的测量区域,并且其中相邻支撑件之间的相邻周期间隔较小 比秤的厚度。 此外,支撑体具有这样的结构,使得至少在测量区域中防止了通过支撑件和标尺之间和/或支撑件和基板之间的光学接触接合的连接。 标尺和基板之间的空间通过密封结构与周围环境密封。

    Assembly Comprising a Measuring Scale Attached to a Substrate and Method for Holding a Measuring Scale Against a Substrate
    4.
    发明申请
    Assembly Comprising a Measuring Scale Attached to a Substrate and Method for Holding a Measuring Scale Against a Substrate 有权
    包括附着在基板上的测量刻度的组件以及用于将基板保持测量刻度的方法

    公开(公告)号:US20120023769A1

    公开(公告)日:2012-02-02

    申请号:US13260891

    申请日:2010-02-23

    IPC分类号: G01D5/347 B23P11/00

    CPC分类号: G01D5/34707

    摘要: An assembly including a substrate and a scale held on the substrate, wherein the scale has a measuring graduation, and the scale is held on the substrate by pneumatic suction. The scale is braced on the substrate via two-dimensionally distributed, spaced-apart supports, which are disposed facing a measurement area defined by the measuring graduation and wherein adjacent ones of the supports are spaced apart from one another at a mutual period that is less than a thickness of the scale. In addition, the supports have a structure such that a connection by optical contact bonding between the supports and the scale and/or between the supports and the substrate is prevented at least in the measurement area. A space between the scale and the substrate is sealed off from surroundings by a sealing structure.

    摘要翻译: 包括保持在基板上的基板和刻度的组件,其中刻度尺具有测量刻度,并且通过气动抽吸将刻度保持在基板上。 尺寸通过二维分布的间隔开的支撑件支撑在基板上,该支撑件面向由测量刻度限定的测量区域,并且其中相邻支撑件之间的相邻周期间隔较小 比秤的厚度。 此外,支撑体具有这样的结构,使得至少在测量区域中防止了通过支撑件和标尺之间和/或支撑件和基板之间的光学接触接合的连接。 标尺和基板之间的空间通过密封结构与周围环境密封。

    Material measure and position measuring device comprising such a material measure
    5.
    发明授权
    Material measure and position measuring device comprising such a material measure 失效
    包括这种材料测量的材料测量和位置测量装置

    公开(公告)号:US06844558B1

    公开(公告)日:2005-01-18

    申请号:US10130631

    申请日:2000-11-11

    CPC分类号: G01D5/34707 G01D5/26

    摘要: A material measure includes a carrier substrate having a surface that includes at least one track having first porous subsections and second subsections. The first porous subsections and the second subsections are arranged alternatingly in at least one direction and have different optical properties. The first porous subsections are formed so as to be photoluminescent and the second subsections are formed so as to be non-photoluminescent. A scanning unit may also be provided, wherein the scanning unit is movable relative to the material measure and includes at least one opto-electronic detector element and a light source. The light source applies radiation of a defined wavelength to the material measure, the radiation from the light source being suitable for exciting the photoluminescence in the first subsections of the material measure.

    摘要翻译: 材料测量包括具有表面的载体基底,该表面包括具有第一多孔子部分和第二子部分的至少一个轨道。 第一多孔子部分和第二子部分在至少一个方向上交替布置并具有不同的光学性质。 第一多孔子部分形成为光致发光,第二子部分形成为非光致发光。 还可以提供扫描单元,其中扫描单元相对于材料测量是可移动的,并且包括至少一个光电检测器元件和光源。 光源将限定波长的辐射施加到材料测量中,来自光源的辐射适合于激发材料测量的第一部分中的光致发光。

    Reflectometer and method for manufacturing a reflectometer
    6.
    发明授权
    Reflectometer and method for manufacturing a reflectometer 失效
    用于制造反射计的反射计和方法

    公开(公告)号:US06961174B1

    公开(公告)日:2005-11-01

    申请号:US10069086

    申请日:2000-07-15

    IPC分类号: G01D5/347 G02B27/32

    CPC分类号: G01D5/34707 G01D5/347

    摘要: A reflection-type graduation having a silicon substrate. The silicon substrate has first subsections formed thereon. Each of the first subsections has etched oblique surfaces. The surfaces are positioned so that light beams directed incident to the surfaces cause no retroreflection. The substrate also includes second subsections having relatively higher reflecting properties as compared to the first subsections. The first subsections and second subsections are alternatively disposed on the substrate in a first direction.

    摘要翻译: 具有硅衬底的反射型刻度。 硅衬底具有形成在其上的第一子部分。 每个第一部分具有蚀刻的倾斜表面。 这些表面被定位成使得定向入射到表面的光束不引起回射。 衬底还包括与第一子部分相比具有相对较高反射性质的第二子部分。 第一子部分和第二子部分可选地以第一方向设置在基板上。

    Scanning Head for Optical Position-Measuring Systems
    7.
    发明申请
    Scanning Head for Optical Position-Measuring Systems 有权
    光学位置测量系统扫描头

    公开(公告)号:US20070278486A1

    公开(公告)日:2007-12-06

    申请号:US10582661

    申请日:2004-07-29

    IPC分类号: H01L31/105

    CPC分类号: G01D5/34707 H01L31/1055

    摘要: A scanning head for an optical position-measuring system includes a receiver grating, formed of photosensitive areas, for the scanning of locally intensity-modulated light of differing wavelengths. The receiver grating is formed from a semiconductor layer stack of a doped p-layer, an intrinsic i-layer and a doped n-layer. The individual photosensitive areas have a first doped layer and at least a part of the intrinsic layer in common and are electrically separated from one another by interruptions in the second doped layer.

    摘要翻译: 用于光学位置测量系统的扫描头包括由感光区域形成的用于扫描不同波长的局部强度调制光的接收器光栅。 接收器光栅由掺杂p层,本征i层和掺杂n层的半导体层堆叠形成。 各个感光区域具有共同的第一掺杂层和本征层的至少一部分,并且通过第二掺杂层中的中断彼此电分离。

    Arrangement with a scale fastened on a support
    8.
    发明授权
    Arrangement with a scale fastened on a support 有权
    安置在紧固在支架上的刻度

    公开(公告)号:US08234793B2

    公开(公告)日:2012-08-07

    申请号:US12927488

    申请日:2010-11-16

    IPC分类号: G01D5/347 G01D5/00 G01D13/02

    CPC分类号: G01D5/34707

    摘要: An arrangement for a scale, the arrangement including a scale having a measurement graduation that defines a measurement range and a support arranged opposite to the measurement graduation. The arrangement further includes spheres two-dimensionally distributed on the support, wherein the spheres are immovably fixed on the support and to the scale.

    摘要翻译: 用于刻度的布置,该布置包括具有限定测量范围的测量刻度和与测量刻度相对布置的支撑的刻度。 该装置还包括在支撑件上二维分布的球体,其中球体不可移动地固定在支撑件上并且到刻度尺上。

    Scanning head for optical position-measuring systems
    9.
    发明授权
    Scanning head for optical position-measuring systems 有权
    光学位置测量系统的扫描头

    公开(公告)号:US07719075B2

    公开(公告)日:2010-05-18

    申请号:US10582661

    申请日:2004-07-29

    IPC分类号: H01L31/105 G01D5/34

    CPC分类号: G01D5/34707 H01L31/1055

    摘要: A scanning head for an optical position-measuring system includes a receiver grating, formed of photosensitive areas, for the scanning of locally intensity-modulated light of differing wavelengths. The receiver grating is formed from a semiconductor layer stack of a doped p-layer, an intrinsic i-layer and a doped n-layer. The individual photosensitive areas have a first doped layer and at least a part of the intrinsic layer in common and are electrically separated from one another by interruptions in the second doped layer.

    摘要翻译: 用于光学位置测量系统的扫描头包括由感光区域形成的用于扫描不同波长的局部强度调制光的接收器光栅。 接收器光栅由掺杂p层,本征i层和掺杂n层的半导体层堆叠形成。 各个感光区域具有共同的第一掺杂层和本征层的至少一部分,并且通过第二掺杂层中的中断彼此电分离。