公开(公告)号：US06654424B1

公开(公告)日：2003-11-25

申请号：US09520250

申请日：2000-03-07

Applicant: Andreas Thomae ,  Johannes Artzner ,  Reinhard Neul ,  Georg Bischopink ,  Karsten Funk ,  Markus Lutz

Inventor： Andreas Thomae ,  Johannes Artzner ,  Reinhard Neul ,  Georg Bischopink ,  Karsten Funk ,  Markus Lutz

IPC: H04L2500

CPC classification number: H03J7/02 ,  G01C19/56

Abstract: In the method and device for tuning a first oscillator with a second oscillator respective response signals of the first oscillator are produced from corresponding frequency-shifted and/or phase-shifted signals of the second oscillator. The first oscillator is tuned to the second oscillator according to the difference of the respective response signals. For amplitude correction a quotient is formed by dividing an output signal by the sum of the response signals. The method and device according to the invention are especially useful in a rotation rate sensor. The invention also includes a rotation rate sensor, which includes a device for determining rotation rate from the oscillations of a first and second oscillator and the device for tuning the first oscillator with the second oscillator.

Abstract translation: 在用第二振荡器调谐第一振荡器的方法和装置中，由第二振荡器的相应频移和/或相移信号产生第一振荡器的响应信号。 根据各个响应信号的差异，第一振荡器被调谐到第二振荡器。 对于幅度校正，通过将输出信号除以响应信号的和来形成商。 根据本发明的方法和装置在旋转速率传感器中特别有用。 本发明还包括旋转速率传感器，其包括用于从第一和第二振荡器的振荡确定转速的装置和用于利用第二振荡器调谐第一振荡器的装置。

公开(公告)号：US06648389B2

公开(公告)日：2003-11-18

申请号：US09550789

申请日：2000-04-17

Applicant: Wilhelm Frey ,  Karsten Funk

Inventor： Wilhelm Frey ,  Karsten Funk

IPC: B66C142

CPC classification number: B81C99/002 ,  B25J7/00 ,  B25J15/0206 ,  Y10S294/902

Abstract: A microtool for manipulating components is proposed. A component is held with the microtool by at least one gripper arm having a gripping surface, the gripper being movable by an actuator structure. Also provided is a device for releasing the held component from the gripping surface, whereby an acceleration is induced in the gripper arm for at least a time, and the force of inertia resulting from the inertial mass of the held component and the exerted acceleration will be greater than any force of adhesion acting between the held component and the gripping surface. A process is also proposed for producing a microtool or a microtool part, in particular a microgripper by micropatterning. For this purpose, the microtool or the microtool part to be manufactured is patterned out of a layered structure having a base layer, an intermediate layer, and a structuring layer, which is patterned using a masking layer in conformance with the geometry of the microtool to be manufactured; the microtool or the microtool part is patterned out of the structuring layer. Subsequently, the intermediate layer is then undercut (e.g., etched from underneath) in a second etching process.

Abstract translation: 提出了一种用于操纵部件的微型工具。 通过具有抓握表面的至少一个夹持臂将部件与微型工具一起保持，所述夹持器可通过致动器结构移动。 还提供了一种用于从抓握表面释放保持的部件的装置，由此在夹持臂中引起加速至少一段时间，并且由保持部件的惯性质量引起的惯性力和施加的加速度将是 大于在被保持部件和抓握表面之间作用的任何作用力。 还提出了用于通过微图案制造微型工具或微型工具部件，特别是微型夹具的方法。 为此，将要制造的微型工具或微型工具部件从具有基底层，中间层和结构层的层状结构图案化，其使用符合微型工具的几何形状的掩模层进行图案化， 制造; 将微型工具或微型工具部件图案化成结构化层。 随后，在第二蚀刻工艺中，中间层被切下（例如，从下面蚀刻）。

公开(公告)号：US06324910B1

公开(公告)日：2001-12-04

申请号：US09284907

申请日：1999-06-22

Applicant: Karsten Funk ,  Hans-Martin Kulcke ,  Franz Laermer ,  Andrea Schilp

Inventor： Karsten Funk ,  Hans-Martin Kulcke ,  Franz Laermer ,  Andrea Schilp

IPC: G01H1300

CPC classification number: G01P15/097 ,  G01C19/5726 ,  G01P2015/0814

Abstract: A method for measuring a physical variable in which a structure is put in resonant oscillations and a change in the oscillation frequency of the structure as a result of a change in the physical variable to be measured is detected, and a frequency-analog signal is provided. A structure oscillating with a resonance frequency receives an electrostatic force.

Abstract translation: 检测结构被置于共振振荡中的物理变量的测量方法以及由待测物理变化引起的结构振荡频率的变化的方法，并提供频率模拟信号 。 以共振频率振荡的结构接收静电力。

公开(公告)号：US06244111B1

公开(公告)日：2001-06-12

申请号：US09428618

申请日：1999-10-27

Applicant: Karsten Funk

Inventor： Karsten Funk

IPC: G01C1900

CPC classification number: G01C9/00

Abstract: A micromechanical gradient sensor having a substrate, a ring body which is mounted elastically above the substrate with the assistance of a first spring device, a driving device which is connected to the ring body for driving the ring body to rotary motions about the ring axis, and an acceleration sensing device which is secured to the ring body via a second spring device. The acceleration sensing device is designed in such a manner that, as a result of the centrifugal force acting due to the rotary motions, and as a result of the force acting against the spring tension of the two spring devices due to the gravitational acceleration, the acceleration sensing device is able to travel out along the sensor axis connecting it, and running through the ring axis. Also included is an evaluation unit for determining the excursion of the acceleration sensing device and for determining the angle of inclination of sensor axis relative to the perpendicular component.

Abstract translation: 一种具有基板的微机械梯度传感器，在第一弹簧装置的辅助下弹性地安装在基板上的环体;连接到环体的驱动装置，用于驱动环体绕环形轴的旋转运动; 以及加速度感测装置，其通过第二弹簧装置固定在所述环形体上。 加速度感测装置的设计方式是由于由于旋转运动而产生的离心力，并且由于由于重力加速而抵抗两个弹簧装置的弹簧张力的作用的结果， 加速度传感装置能够沿连接传感器轴线的方向移动，并穿过环轴。 还包括用于确定加速度感测装置的偏移并且用于确定传感器轴线相对于垂直分量的倾斜角的评估单元。