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    Micromechanical oscillating device
    1.
    发明授权
    Micromechanical oscillating device 有权
    微机械振荡装置

    公开(公告)号：US06672732B1

    公开(公告)日：2004-01-06

    申请号：US10070054

    申请日：2002-07-17

    Applicant: Andreas Niendorf ,  Wilhelm Frey ,  Karsten Funk

    Inventor： Andreas Niendorf ,  Wilhelm Frey ,  Karsten Funk

    IPC: G02B7182

    CPC classification number: G02B26/0841

    Abstract: A vibrating microdevice, such as a vibrating micromirror, includes a vibrating structure which is connected to a supporting body via at least one spring structure in an at least a largely floating manner, the spring structure including at least one torsion-spring element defining a torsion axis and permitting a torsional vibration about the torsion axis to be induced in the vibrating structure, the spring structure also including at least one converter structure, which at least partially converts forces acting at least largely perpendicularly to the torsion axis on the torsion spring element into forces acting at least partially parallelly to the torsion axis on the torsion-spring element.

    Abstract translation: 振动微型装置，例如振动微镜，包括振动结构，所述振动结构经由至少一个弹簧结构以至少大体上浮动的方式连接到支撑体，所述弹簧结构包括至少一个限定扭转的扭簧元件 所述弹簧结构还包括至少一个转换器结构，所述至少一个转换器结构至少部分地将至少大部分地垂直于所述扭转轴线上的力作用力转换成所述扭转弹簧元件上的扭转轴线 至少部分地平行于扭转弹簧元件上的扭转轴线作用的力。

    Sensor, in particular thermal sensor, and method for manufacturing a largely self-supporting membrane
    2.
    发明授权
    Sensor, in particular thermal sensor, and method for manufacturing a largely self-supporting membrane 失效
    传感器，特别是热传感器，以及用于制造大部分自支撑膜的方法

    公开(公告)号：US06655834B1

    公开(公告)日：2003-12-02

    申请号：US09613131

    申请日：2000-07-10

    Applicant: Wilhelm Frey ,  Karsten Funk

    Inventor： Wilhelm Frey ,  Karsten Funk

    IPC: G01K702

    CPC classification number: H01L35/32 ,  B81B2201/0278 ,  B81B2203/0127 ,  B81B2207/07 ,  B81C1/00246 ,  B81C2203/0735 ,  G01J5/20

    Abstract: A sensor, in particular thermal sensor, having a silicon element and a largely self-supporting membrane layer equipped with at least one sensor element, is proposed. The membrane layer is furthermore spaced away from the silicon element by way of at least one contact column and is at least largely supported thereby. The contact column moreover makes electrical contact to the sensor element. Also proposed is a method for manufacturing a largely self-supporting membrane, a polymer layer first being deposited on a base element, patterned, and equipped with at least one cutout. The cutout is subsequently filled with a filler material, and a membrane layer is applied onto the polymer layer. Lastly, the polymer layer is removed again. The proposed method for manufacturing a largely self-supporting membrane layer is suitable in particular for constructing a sensor, in particular a thermal sensor or a thermal sensor array.

    Abstract translation: 提出了一种具有硅元件和大部分自支撑膜层的传感器，特别是热传感器，其具有至少一个传感器元件。 膜层还通过至少一个接触柱与硅元件隔开，并且至少大部分被支撑。 接触柱还与传感器元件电接触。 还提出了一种用于制造大部分自支撑膜的方法，首先沉积在基底元件上的聚合物层被图案化并且装备有至少一个切口。 切口随后填充有填充材料，并且将膜层施加到聚合物层上。 最后，再次除去聚合物层。 所提出的用于制造大部分自支撑膜层的方法特别适用于构造传感器，特别是热传感器或热传感器阵列。

    Filter for electric signals
    3.
    发明授权
    Filter for electric signals 失效
    过滤电信号

    公开(公告)号：US06489864B2

    公开(公告)日：2002-12-03

    申请号：US09805830

    申请日：2001-03-14

    Applicant: Wilhelm Frey ,  Karsten Funk

    Inventor： Wilhelm Frey ,  Karsten Funk

    IPC: H03H948

    CPC classification number: H03H9/02425 ,  H03H9/462 ,  H03H2009/02456 ,  H03H2009/02511

    Abstract: A filter for electric signals has a substrate, a vibrating body capable of vibrating with at least two antipodes deflected in phase opposition relative to the substrate and has electrodes connected to a signal input and a signal output for electric excitation and for detection of the vibration of the vibrating body. The electrodes for detecting the vibration, each assigned to antipodes deflected in phase opposition, are connected to two separate terminals of the signal output.

    Abstract translation: 用于电信号的滤波器具有基板，振动体，其能够相对于基板相对于偏转的至少两个对映体振动，并且具有连接到信号输入端的电极和用于电激励的信号输出和用于检测振动的信号 振动体。 用于检测振动的电极分别连接到信号输出的两个独立的端子上，每个分配给相位相反偏转的对映体。

    Method for manufacturing a micromechanical device
    4.
    发明授权
    Method for manufacturing a micromechanical device 有权
    微机械装置制造方法

    公开(公告)号：US06369931B1

    公开(公告)日：2002-04-09

    申请号：US09367760

    申请日：1999-08-18

    Applicant: Karsten Funk ,  Wilhelm Frey

    Inventor： Karsten Funk ,  Wilhelm Frey

    IPC: G02B1700

    CPC classification number: B81B3/004 ,  B81B2201/0292 ,  B81B2201/042 ,  B81C1/00142 ,  B81C2201/019 ,  G02B26/0841

    Abstract: A method for manufacturing a micromechanical device, in particular a micromechanical vibrating-mirror device, having the following steps: making available a three-layer structure having a first layer, a second layer and a third layer, the second layer lying between the first and the third layers; etching through the first layer up to the second layer to produce an island region, lying on the second layer, which is joined to region of the first layer surrounding the island region by way of one or more connecting webs, and etching through a region of the third layer up to the second layer and removing a region of the second layer below the island region in such a way that the island region can perform movements, preferably torsional vibrations, about the one or more connecting webs, the torsional vibrations having such an amplitude that a part of the island region extends into the etched-through region of the third layer.

    Abstract translation: 一种用于制造微机械装置，特别是微机械振镜装置的方法，具有以下步骤：提供具有第一层，第二层和第三层的三层结构，所述第二层位于第一层和第二层之间， 第三层; 蚀刻通过第一层直到第二层，以产生位于第二层上的岛状区域，其通过一个或多个连接幅材连接到围绕岛状区域的第一层的区域，并且蚀刻通过 第三层直到第二层，并且以这样的方式去除岛状区域下面的第二层的区域，使得岛状区域可以围绕一个或多个连接幅材执行运动，优选扭转振动，扭转振动具有这样的 该区域的一部分延伸到第三层的蚀刻穿透区域的振幅。

    Decoupled multi-disk gyroscope
    6.
    发明授权
    Decoupled multi-disk gyroscope 有权
    去耦多盘陀螺仪

    公开(公告)号：US06443008B1

    公开(公告)日：2002-09-03

    申请号：US09507583

    申请日：2000-02-19

    Applicant: Karsten Funk ,  Markus Lutz ,  Wilhelm Frey

    Inventor： Karsten Funk ,  Markus Lutz ,  Wilhelm Frey

    IPC: G01P904

    CPC classification number: G01C19/5712

    Abstract: A gyroscope system including multiple rotating or oscillating disks filters out disturbance acceleration inputs such as vibrations or jarring while detecting and measuring external angular velocity. The gyroscope disks are decoupled from a substrate to decrease the impact of external vibrations on the gyroscope operation. The gyroscope disks are rotated in opposite directions or oscillated out of phase to decrease the impact of disturbance vibrations and jarring while more accurately measuring external angular velocities applied to the system.

    Abstract translation: 包括多个旋转或振荡盘的陀螺仪系统在检测和测量外部角速度的同时过滤出诸如振动或振动的扰动加速度输入。 陀螺仪盘与基板脱耦，以减少外部振动对陀螺仪操作的影响。 陀螺仪盘相反方向旋转或振荡异相以减少干扰振动和振动的冲击，同时更准确地测量施加到系统的外部角速度。

    Process for manipulating components, a microtool for implementing the process, and a process for manufacturing the microtool or microtool parts
    7.
    发明授权
    Process for manipulating components, a microtool for implementing the process, and a process for manufacturing the microtool or microtool parts 失效
    用于操作部件的工艺，用于实施该工艺的微型工具以及用于制造微型工具或微型工具零件的工艺

    公开(公告)号：US06648389B2

    公开(公告)日：2003-11-18

    申请号：US09550789

    申请日：2000-04-17

    Applicant: Wilhelm Frey ,  Karsten Funk

    Inventor： Wilhelm Frey ,  Karsten Funk

    IPC: B66C142

    CPC classification number: B81C99/002 ,  B25J7/00 ,  B25J15/0206 ,  Y10S294/902

    Abstract: A microtool for manipulating components is proposed. A component is held with the microtool by at least one gripper arm having a gripping surface, the gripper being movable by an actuator structure. Also provided is a device for releasing the held component from the gripping surface, whereby an acceleration is induced in the gripper arm for at least a time, and the force of inertia resulting from the inertial mass of the held component and the exerted acceleration will be greater than any force of adhesion acting between the held component and the gripping surface. A process is also proposed for producing a microtool or a microtool part, in particular a microgripper by micropatterning. For this purpose, the microtool or the microtool part to be manufactured is patterned out of a layered structure having a base layer, an intermediate layer, and a structuring layer, which is patterned using a masking layer in conformance with the geometry of the microtool to be manufactured; the microtool or the microtool part is patterned out of the structuring layer. Subsequently, the intermediate layer is then undercut (e.g., etched from underneath) in a second etching process.

    Abstract translation: 提出了一种用于操纵部件的微型工具。 通过具有抓握表面的至少一个夹持臂将部件与微型工具一起保持，所述夹持器可通过致动器结构移动。 还提供了一种用于从抓握表面释放保持的部件的装置，由此在夹持臂中引起加速至少一段时间，并且由保持部件的惯性质量引起的惯性力和施加的加速度将是 大于在被保持部件和抓握表面之间作用的任何作用力。 还提出了用于通过微图案制造微型工具或微型工具部件，特别是微型夹具的方法。 为此，将要制造的微型工具或微型工具部件从具有基底层，中间层和结构层的层状结构图案化，其使用符合微型工具的几何形状的掩模层进行图案化， 制造; 将微型工具或微型工具部件图案化成结构化层。 随后，在第二蚀刻工艺中，中间层被切下（例如，从下面蚀刻）。

    Magnetic field sensor having deformable conductor loop segment
    8.
    发明授权
    Magnetic field sensor having deformable conductor loop segment 失效
    磁场传感器具有可变形的导体环段

    公开(公告)号：US06486665B1

    公开(公告)日：2002-11-26

    申请号：US09623670

    申请日：2000-11-21

    Applicant: Karsten Funk ,  Wilhelm Frey

    Inventor： Karsten Funk ,  Wilhelm Frey

    IPC: G01N2772

    CPC classification number: G01R33/0283 ,  G01R33/0286

    Abstract: A magnetic field sensor that can be manufactured using the technology of surface micromechanics, having a conductor loop that has at least one deformable segment; a deformation device for deforming the deformable segment of the conductor loop with a predeterminable time dependence; a voltage sensing device for sensing the voltage induced at the ends of the conductor loop upon deformation in the presence of a magnetic field; and a magnetic field determining device for determining the present static and/or dynamic magnetic field in consideration of at least the time dependence of the deformation.

    Abstract translation: 可以使用表面微机械技术制造的磁场传感器，具有至少一个可变形段的导体回路; 变形装置，用于以可预定的时间依赖性使导体环的可变形段变形; 电压感测装置，用于在存在磁场的情况下感测在导体环的端部感应的变形; 以及磁场确定装置，用于至少考虑变形的时间依赖性来确定当前的静态和/或动态磁场。

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