Abstract:
A microvalve includes a first plate having a surface, a recessed region provided within the surface, a fluid port provided within the recessed region, and a sealing structure extending about the fluid port. A second plate defines a non-movable portion and a movable portion formed within the first opening and having an axis. A surface of the non-movable portion abuts the surface of the first plate, the non-movable portion having first and second openings formed therethrough. The first opening has a notch formed in each of two longitudinally extending side walls thereof. The movable portion defines a displaceable member connected to the non-movable portion by a convoluted spring formed in a second opening. The displaceable member has a tab extending outwardly from each of two longitudinally extending side walls thereof, each tab positioned within one of the notches. The displaceable member is slidingly and axially movable within the first opening between a closed position, wherein the displaceable member cooperates with the sealing structure to prevent fluid communication through the fluid port, and an opened position, wherein the displaceable member does not cooperate with at least a portion of the sealing structure to prevent fluid communication through the fluid port. The notches define stop surfaces that limit travel of the displaceable member between the closed position and the open position.
Abstract:
A method of controlling a Micro-Electro-Mechanical System (MEMS) valve includes defining a desired pressure output for the MEMS valve. The desired pressure output is related to a control reference value. The control reference value relates an output pressure of the MEMS valve to a measurable characteristic of the MEMS valve. The measurable characteristic may include a resistance, an electrical power, or an electrical current of the MEMS valve. The control reference value is converted to an initial Pulse Width Modulated (PWM) signal that is applied to the MEMS valve. The initial PWM signal may be adjusted to define an adjusted PWM signal based upon a difference between an actual value of the measurable characteristic at the initial PWM signal and the control reference value, until the actual value of the measurable characteristic at the adjusted PWM signal is within a pre-defined range of the control reference value.
Abstract:
A method of attaching a MEMS die to a surface includes centering and rotationally aligning a solder perform on a solder surface of a body, centering and rotationally aligning a MEMS die on the solder preform, and heating the solder perform in a reflow process until the solder is molten and surface tension of the molten solder moves the MEMS die to a position where the surface tensions balance, and the MEMS die is centered on, and rotationally aligned with, the solder surface of the body.
Abstract:
A two-stage fluid control valve includes a first stage electronically switchable, bi-stable two-port valve movable between an open position and a leak-free closed position, and a second stage microvalve configured to control the flow of fluid through a fluid outlet of the two-stage fluid control valve when the first stage electronically switchable, bi-stable two-port valve is in the open position. The electronically switchable, bi-stable two-port valve is disposed between the second stage microvalve and a fluid inlet of the two-stage fluid control valve.
Abstract:
A multi-layer, stress-isolation platform configured for attaching a MEMS die to a base includes a first platform, a first layer of attachment material between the base and the first platform and attaching the first platform to the base, a MEMS die, and a second layer of attachment material between the first platform and the MEMS die and attaching the MEMS die to the first platform.
Abstract:
An electronically switchable, bi-stable two-port valve includes a sleeve, a first pole piece having air flow passages formed therethrough and a first wire-wound coil mounted therein and connected to a source of electrical power, a second pole piece having air flow passages formed therethrough and a second wire-wound coil mounted therein and connected to the source of electrical power, and a permanent magnet defining an armature and movably mounted between the first and second pole pieces. The first pole piece is mounted in a first end of the sleeve and the second pole piece is mounted in a second end of the sleeve.
Abstract:
A method of attaching a MEMS die to a surface includes centering and rotationally aligning a solder perform on a solder surface of a body, centering and rotationally aligning a MEMS die on the solder preform, and heating the solder perform in a reflow process until the solder is molten and surface tension of the molten solder moves the MEMS die to a position where the surface tensions balance, and the MEMS die is centered on, and rotationally aligned with, the solder surface of the body.
Abstract:
A microvalve includes a first plate having a surface, a recessed area provided within the surface, a fluid port provided within the recessed area, and a sealing structure extending about the fluid port, the sealing structure having at least one divot formed therein. A second plate has a surface adjacent the surface of the first plate and including a displaceable member that is movable between a closed position, wherein the displaceable member cooperates with the sealing structure to prevent fluid communication through the fluid port, and an open position, wherein the displaceable member does not cooperate with at least a portion of the sealing structure to prevent fluid communication through the fluid port.
Abstract:
A method of attaching a MEMS die to a surface includes centering and rotationally aligning a solder perform on a solder surface of a body, centering and rotationally aligning a MEMS die on the solder preform, and heating the solder perform in a reflow process until the solder is molten and surface tension of the molten solder moves the MEMS die to a position where the surface tensions balance, and the MEMS die is centered on, and rotationally aligned with, the solder surface of the body.
Abstract:
The electronically switchable MEMS valve includes a housing formed from soft magnetic material and defining a fluid flow path therethrough. A magnetic field generating member is mounted within the housing and connected to a source of electrical power. A MEMS valve portion is mounted within the magnetic field generating member, has a valve closing member movably mounted therein, and defines a portion of the fluid flow path therethrough. The valve closing element is movable between a closed position wherein the fluid flow path is blocked, and an open position wherein the fluid flow path is not blocked. When an electric current is removed from the magnetic field generating member, the valve closing element is configured to move to and remain in the one of the closed position and the open position to which the valve closing element is the closest when the electric current is removed.