Method of manufacturing optical memory element
    52.
    发明授权
    Method of manufacturing optical memory element 失效
    光学存储元件的制造方法

    公开(公告)号:US4778747A

    公开(公告)日:1988-10-18

    申请号:US17456

    申请日:1987-02-24

    摘要: A method of manufacturing an optical memory element, which includes the steps of applying a first photo-resist layer onto a glass substrate for an optical memory element, laying a mask plate on the glass substrate applied with the first photo-resist layer, with the mask plate being prepared by covering a surface of a transparent substrate with metallic layers formed into a guide pattern configuration, irradiating ultraviolet rays onto the first photo-resist layer through the mask plate, transferring the guide patterns of the mask plate onto the first photo-resist layer, and engraving the guide patterns in the glass substrate by etching after developing the first photo-resist layer.

    摘要翻译: 一种制造光学存储元件的方法,包括以下步骤:将第一光致抗蚀剂层施加到用于光学存储元件的玻璃基板上,在施加有第一光致抗蚀剂层的玻璃基板上铺设掩模板, 通过用形成为引导图案构造的金属层覆盖透明基板的表面来制备掩模板,通过掩模板将紫外线照射到第一光致抗蚀剂层上,将掩模板的引导图案转印到第一光致抗蚀剂层上, 抗蚀剂层,并且在显影第一光致抗蚀剂层之后通过蚀刻在玻璃基板中雕刻引导图案。

    Method of fabricating a semiconductor thin film and semiconductor thin film fabrication apparatus
    53.
    发明申请
    Method of fabricating a semiconductor thin film and semiconductor thin film fabrication apparatus 审中-公开
    制造半导体薄膜的方法和半导体薄膜制造装置

    公开(公告)号:US20050272185A1

    公开(公告)日:2005-12-08

    申请号:US11147641

    申请日:2005-06-07

    摘要: A fabrication method of a semiconductor thin film including a polycrystalline semiconductor region by irradiating a precursor semiconductor thin film with at least two types of laser beams, and melting-recrystallizing the precursor semiconductor thin film, wherein the precursor semiconductor thin film is irradiated with a predetermined reference laser beam, and a radiation initiation time or power density of a laser beam is controlled according to change in reflectance of the site irradiated with the reference laser beam. A semiconductor thin film fabrication apparatus used in the fabrication method of present invention, wherein includes at least two light sources, a sensing unit, and a control unit. The crystals formed have no difference in the length of crystal caused by variation in the energy of each radiation.

    摘要翻译: 一种包含多晶半导体区域的半导体薄膜的制造方法,其通过用至少两种类型的激光束照射前体半导体薄膜,并对前体半导体薄膜进行熔融再结晶,其中前体半导体薄膜用预定的 参考激光束,并且根据用参考激光束照射的部位的反射率的变化来控制激光束的发射时间或功率密度。 一种在本发明的制造方法中使用的半导体薄膜制造装置,其包括至少两个光源,感测单元和控制单元。 形成的晶体由于每个辐射能量的变化引起的晶体长度没有差异。

    Exposure device and image forming device
    54.
    发明申请
    Exposure device and image forming device 失效
    曝光装置和成像装置

    公开(公告)号:US20050151824A1

    公开(公告)日:2005-07-14

    申请号:US10501509

    申请日:2003-01-09

    CPC分类号: B41J2/45

    摘要: An emissive element array of a plurality of organic EL elements is arranged linearly on a single-crystal silicon substrate or polycrystalline silicon substrate with a drive circuit including an element switching its respective emissive element. The organic EL emissive elements have an edge emitting structure utilizing light emitted in an edge direction perpendicular to the direction of deposition of electrode layers and organic compound layers, and is constructed such that the emitting area of one emissive element, S, as viewed in the direction of deposition, and the period of emissive elements disposed side by side, d, have the relationship of S>d2. In this way, organic EL techniques can be applied to provide the required amount of light exposure and to produce an exposure device that is small and inexpensive.

    摘要翻译: 多个有机EL元件的发射元件阵列线性地布置在单晶硅衬底或多晶硅衬底上,其中驱动电路包括切换其各自发射元件的元件。 有机EL发光元件具有利用沿垂直于电极层和有机化合物层的沉积方向的边缘方向发射的光的边缘发射结构,并且被构造成使得在一个发射元件S的发射面积 沉积方向和并排设置的发射元件的周期d具有S> d <2>的关系。 以这种方式,可以应用有机EL技术来​​提供所需量的曝光并且产生小而便宜的曝光装置。

    Deformable mirror
    58.
    发明授权
    Deformable mirror 失效
    变形镜

    公开(公告)号:US5880896A

    公开(公告)日:1999-03-09

    申请号:US905946

    申请日:1997-08-05

    CPC分类号: G02B26/0825

    摘要: A deformable mirror including: a flexible member including a reflective surface for reflecting light incident thereupon; and a reference surface substrate including a support portion for supporting a peripheral portion of the flexible member, and a curved portion provided inside the support portion, the curved portion providing a space for allowing for the flexible member to be elastically deformed. A height of a central portion of the curved portion of the reference surface substrate is set to be equal to or less than a height of the support portion of the reference surface substrate. The flexible member is elastically deformed by being drawn toward the curved portion of the reference surface substrate, thereby giving a predetermined aberration to light incident upon the reflective surface of the flexible member.

    摘要翻译: 一种可变形反射镜,包括:柔性构件,包括用于反射入射到其上的光的反射表面; 以及参考面基板,其具备支撑所述柔性部件的周边部分的支撑部分和设置在所述支撑部分内部的弯曲部分,所述弯曲部分提供允许所述柔性部件弹性变形的空间。 将基准面基板的弯曲部的中央部的高度设定为基准面基板的支承部的高度以下。 柔性构件通过朝向参考面基板的弯曲部分被拉伸而弹性变形,由此对入射到柔性构件的反射表面上的光给出预定的像差。