公开(公告)号：US11069522B2

公开(公告)日：2021-07-20

申请号：US16540349

申请日：2019-08-14

申请人： ASM IP HOLDING B.V.

发明人： Antti J. Niskanen ,  Shang Chen ,  Viljami Pore ,  Atsuki Fukazawa ,  Hideaki Fukuda ,  Suvi P. Haukka

IPC分类号： H01L21/02 ,  H01L21/311 ,  H01L21/8234

摘要： Methods and precursors for depositing silicon nitride films by atomic layer deposition (ALD) are provided. In some embodiments the silicon precursors comprise an iodine ligand. The silicon nitride films may have a relatively uniform etch rate for both vertical and the horizontal portions when deposited onto three-dimensional structures such as FinFETS or other types of multiple gate FETs. In some embodiments, various silicon nitride films of the present disclosure have an etch rate of less than half the thermal oxide removal rate with diluted HF (0.5%).

公开(公告)号：US20210164101A1

公开(公告)日：2021-06-03

申请号：US17173467

申请日：2021-02-11

申请人： ASM IP HOLDING B.V.

发明人： Viljami Pore ,  Timo Hatanpää ,  Mikko Ritala ,  Markku Leskelä

IPC分类号： C23C16/455 ,  C23C16/30 ,  H01L21/02 ,  H01L45/00 ,  C23C16/18 ,  C23C16/44

摘要： Atomic layer deposition (ALD) processes for forming Group VA element containing thin films, such as Sb, Sb—Te, Ge—Sb and Ge—Sb—Te thin films are provided, along with related compositions and structures. Sb precursors of the formula Sb(SiR1R2R3)3 are preferably used, wherein R1, R2, and R3 are alkyl groups. As, Bi and P precursors are also described. Methods are also provided for synthesizing these Sb precursors. Methods are also provided for using the Sb thin films in phase change memory devices.

公开(公告)号：US10818489B2

公开(公告)日：2020-10-27

申请号：US16720863

申请日：2019-12-19

申请人： ASM IP HOLDING B.V.

发明人： Viljami Pore

IPC分类号： H01L21/02 ,  C23C16/455 ,  C23C16/30 ,  H01L21/311

摘要： A process for depositing a silicon carbon nitride film on a substrate can include a plurality of complete deposition cycles, each complete deposition cycle having a SiN sub-cycle and a SiCN sub-cycle. The SiN sub-cycle can include alternately and sequentially contacting the substrate with a silicon precursor and a SiN sub-cycle nitrogen precursor. The SiCN sub-cycle can include alternately and sequentially contacting the substrate with carbon-containing precursor and a SiCN sub-cycle nitrogen precursor. The SiN sub-cycle and the SiCN sub-cycle can include atomic layer deposition (ALD). The process for depositing the silicon carbon nitride film can include a plasma treatment. The plasma treatment can follow a completed plurality of complete deposition cycles.

公开(公告)号：US10790137B2

公开(公告)日：2020-09-29

申请号：US16549434

申请日：2019-08-23

申请人： ASM IP HOLDING B.V.

发明人： Viljami Pore

IPC分类号： H01L21/02 ,  C23C16/30 ,  C23C16/04 ,  C23C16/32 ,  C23C16/455 ,  H01L21/311

摘要： Methods of depositing boron and carbon containing films are provided. In some embodiments, methods of depositing B,C films with desirable properties, such as conformality and etch rate, are provided. One or more boron and/or carbon containing precursors can be decomposed on a substrate at a temperature of less than about 400° C. In some embodiments methods of depositing silicon nitride films comprising B and C are provided. A silicon nitride film can be deposited by a deposition process including an ALD cycle that forms SiN and a CVD cycle that contributes B and C to the growing film.

公开(公告)号：US20200013611A1

公开(公告)日：2020-01-09

申请号：US16574542

申请日：2019-09-18

申请人： ASM IP HOLDING B.V.

发明人： Antti J. Niskanen ,  Shang Chen ,  Viljami Pore

IPC分类号： H01L21/02 ,  C23C16/34 ,  C23C16/455 ,  H01L29/66

摘要： Methods and precursors for depositing silicon nitride films by atomic layer deposition (ALD) are provided. In some embodiments the silicon precursors comprise an iodine ligand. The silicon nitride films may have a relatively uniform etch rate for both vertical and the horizontal portions when deposited onto three-dimensional structures such as FinFETS or other types of multiple gate FETs. In some embodiments, various silicon nitride films of the present disclosure have an etch rate of less than half the thermal oxide removal rate with diluted HF (0.5%).

公开(公告)号：US10424477B2

公开(公告)日：2019-09-24

申请号：US15703241

申请日：2017-09-13

申请人： ASM IP HOLDING B.V.

发明人： Antti J. Niskanen ,  Shang Chen ,  Viljami Pore

IPC分类号： H01L21/02 ,  C23C16/34 ,  C23C16/455 ,  H01L29/66

摘要： Methods and precursors for depositing silicon nitride films by atomic layer deposition (ALD) are provided. In some embodiments the silicon precursors comprise an iodine ligand. The silicon nitride films may have a relatively uniform etch rate for both vertical and the horizontal portions when deposited onto three-dimensional structures such as FinFETS or other types of multiple gate FETs. In some embodiments, various silicon nitride films of the present disclosure have an etch rate of less than half the thermal oxide removal rate with diluted HF (0.5%).

公开(公告)号：US10410856B2

公开(公告)日：2019-09-10

申请号：US15911645

申请日：2018-03-05

申请人： ASM IP HOLDING B.V.

发明人： Viljami Pore

IPC分类号： H01L21/02 ,  C23C16/04 ,  C23C16/30 ,  C23C16/32 ,  C23C16/455 ,  H01L21/311

摘要： Methods of depositing boron and carbon containing films are provided. In some embodiments, methods of depositing B,C films with desirable properties, such as conformality and etch rate, are provided. One or more boron and/or carbon containing precursors can be decomposed on a substrate at a temperature of less than about 400° C. In some embodiments methods of depositing silicon nitride films comprising B and C are provided. A silicon nitride film can be deposited by a deposition process including an ALD cycle that forms SiN and a CVD cycle that contributes B and C to the growing film.

公开(公告)号：US10395917B2

公开(公告)日：2019-08-27

申请号：US15902300

申请日：2018-02-22

申请人： ASM IP HOLDING B.V.

发明人： Antti J. Niskanen ,  Shang Chen ,  Viljami Pore ,  Atsuki Fukazawa ,  Hideaki Fukuda ,  Suvi P. Haukka

IPC分类号： H01L21/02 ,  H01L21/311 ,  H01L21/8234

摘要： Methods and precursors for depositing silicon nitride films by atomic layer deposition (ALD) are provided. In some embodiments the silicon precursors comprise an iodine ligand. The silicon nitride films may have a relatively uniform etch rate for both vertical and the horizontal portions when deposited onto three-dimensional structures such as FinFETS or other types of multiple gate FETs. In some embodiments, various silicon nitride films of the present disclosure have an etch rate of less than half the thermal oxide removal rate with diluted HF (0.5%).

公开(公告)号：US09837263B2

公开(公告)日：2017-12-05

申请号：US15196985

申请日：2016-06-29

申请人： ASM IP HOLDING B.V.

发明人： Viljami Pore

IPC分类号： H01L21/311 ,  H01L21/02

CPC分类号： H01L21/02167 ,  H01L21/02208 ,  H01L21/02211 ,  H01L21/0228 ,  H01L21/0234 ,  H01L21/31111

摘要： A process for depositing a silicon carbon nitride film on a substrate can include a plurality of complete deposition cycles, each complete deposition cycle having a SiN sub-cycle and a SiCN sub-cycle. The SiN sub-cycle can include alternately and sequentially contacting the substrate with a silicon precursor and a SiN sub-cycle nitrogen precursor. The SiCN sub-cycle can include alternately and sequentially contacting the substrate with carbon-containing precursor and a SiCN sub-cycle nitrogen precursor. The SiN sub-cycle and the SiCN sub-cycle can include atomic layer deposition (ALD). The process for depositing the silicon carbon nitride film can include a plasma treatment. The plasma treatment can follow a completed plurality of complete deposition cycles.

公开(公告)号：US09362109B2

公开(公告)日：2016-06-07

申请号：US14515395

申请日：2014-10-15

申请人： ASM IP HOLDING B.V.

发明人： Viljami Pore

IPC分类号： H01L21/02 ,  C23C16/30 ,  C23C16/04 ,  C23C16/32 ,  C23C16/455 ,  H01L21/311

CPC分类号： H01L21/0217 ,  C23C16/045 ,  C23C16/30 ,  C23C16/32 ,  C23C16/45523 ,  C23C16/45525 ,  H01L21/02112 ,  H01L21/02211 ,  H01L21/02271 ,  H01L21/0228 ,  H01L21/0234 ,  H01L21/31111

摘要： Methods of depositing boron and carbon containing films are provided. In some embodiments, methods of depositing B,C films with desirable properties, such as conformality and etch rate, are provided. One or more boron and/or carbon containing precursors can be decomposed on a substrate at a temperature of less than about 400° C. In some embodiments methods of depositing silicon nitride films comprising B and C are provided. A silicon nitride film can be deposited by a deposition process including an ALD cycle that forms SiN and a CVD cycle that contributes B and C to the growing film.

摘要翻译： 提供了沉积硼和碳的膜的方法。 在一些实施例中，提供了沉积具有所需性质（诸如保形性和蚀刻速率）的B，C膜的方法。 一种或多种含硼和/或碳的前体可以在小于约400℃的温度下在基材上分解。在一些实施方案中，提供了沉积包含B和C的氮化硅膜的方法。 可以通过包括形成SiN的ALD循环和对生长膜贡献B和C的CVD循环的沉积工艺来沉积氮化硅膜。