公开(公告)号：US07170604B2

公开(公告)日：2007-01-30

申请号：US10613378

申请日：2003-07-03

申请人： Abdurrahman Sezginer ,  Kenneth Johnson

发明人： Abdurrahman Sezginer ,  Kenneth Johnson

IPC分类号： G01B11/00 ,  G03F9/00 ,  G03C5/00 ,  H01L23/544 ,  H01L21/76

CPC分类号： H01L23/544 ,  G03F7/70633 ,  H01L22/24 ,  H01L2223/54453 ,  H01L2924/0002 ,  H01L2924/00

摘要： An overlay target includes two pairs of test patterns used to measure overlay in x and y directions, respectively. Each test pattern includes upper and lower grating layers. A single pitch (periodic spacing) is used for all gratings. Within each test pattern, the upper and lower grating layers are laterally offset from each other to define an offset bias. Each pair of test patterns has offset biases that differ by the grating pitch/4. This has the important result that the combined optical response of the test patterns is sensitive to overlay for all values of overlay. An algorithm obtains overlay and other physical properties of the two or more test patterns from their optical responses in one combined regression operation.

摘要翻译： 覆盖目标包括两对测试模式，分别用于测量x和y方向上的覆盖。 每个测试图案包括上和下光栅层。 所有光栅都使用单个间距（周期性间隔）。 在每个测试图案中，上和下光栅层彼此横向偏移以限定偏移偏移。 每对测试图案具有由光栅间距/ 4不同的偏移偏移。 这具有重要的结果，测试图案的组合光学响应对于所有覆盖值都对覆盖敏感。 在一个组合回归操作中，算法从它们的光学响应中获得两个或更多个测试模式的覆盖和其他物理特性。

公开(公告)号：US20060251994A1

公开(公告)日：2006-11-09

申请号：US11203331

申请日：2005-08-13

申请人： Hsu-Ting Huang ,  Abdurrahman Sezginer

发明人： Hsu-Ting Huang ,  Abdurrahman Sezginer

IPC分类号： G03C5/00

CPC分类号： G03F7/706

摘要： A system and method for characterizing an imaging system causes a diffraction image indicative of a test structure having a generalized line-grating to be formed and then extracts from a measurement of the diffraction image a lens transmittance function, a photoresist property or a defocus distance.

摘要翻译： 用于表征成像系统的系统和方法使得将形成指示具有广义线光栅的测试结构的衍射图像，然后从衍射图像的测量中提取透镜透射函数，光致抗蚀剂性质或散焦距离。

公开(公告)号：US20060248499A1

公开(公告)日：2006-11-02

申请号：US11203522

申请日：2005-08-13

申请人： Abdurrahman Sezginer ,  Roy Prasad

发明人： Abdurrahman Sezginer ,  Roy Prasad

IPC分类号： G06F17/50

CPC分类号： G06F17/5068 ,  G03F1/36 ,  G03F7/70291 ,  G03F7/70441

摘要： A method of modifying polygons in a data set mask-less or mask based optical projection lithography includes: 1) mapping the data set to a figure-of-demerit; 2) moving individual polygon edges to decrease the figure-of-demerit; and 3) disrupting the set of polygons to enable a further decrease in the figure-of-demerit, wherein disrupting polygons includes any of the following polygon disruptions: breaking up, merging, or deleting polygons.

公开(公告)号：US20060164632A1

公开(公告)日：2006-07-27

申请号：US11364312

申请日：2006-02-28

申请人： Abdurrahman Sezginer ,  Kenneth Johnson ,  Adam Norton ,  Holger Tuitje

发明人： Abdurrahman Sezginer ,  Kenneth Johnson ,  Adam Norton ,  Holger Tuitje

IPC分类号： G01N21/01

CPC分类号： G01N21/9501 ,  G01N21/274 ,  G01N21/278 ,  G01N21/93

摘要： A calibration method suitable for highly precise and highly accurate surface metrology measurements is described. In preferred embodiments, an optical inspection tool including a movable optics system is characterized in terms of position and wavelength dependent quantities over a range of motion. Once the position-dependant quantities are determined at various wavelengths and positions, they are stored and used to interpret data from test wafers having an unknown metrology. Free of position-dependent variations and other information pertaining to the measurement system, the accuracy of the resulting wafer measurement more closely matches the precision of the tool than existing techniques. In particular embodiments, a portion of the characterization of the optical system is accomplished by using tilted black glass to provide a non-reflective reference.

公开(公告)号：US20060072097A1

公开(公告)日：2006-04-06

申请号：US10960357

申请日：2004-10-06

申请人： Franz Zach ,  Bo Wu ,  Abdurrahman Sezginer

发明人： Franz Zach ,  Bo Wu ,  Abdurrahman Sezginer

IPC分类号： G03B27/72

CPC分类号： G03B27/72 ,  G03F7/70133

摘要： Pupil intensity distribution of an imaging system is measured by exposing an image field of a radiation detector with a bright feature, positioning the detector at a distance away from the image plane, and exposing the image field of the detector with a bright feature, resulting in a cumulative exposure of the image field of the detector from the two exposures. A characteristic of a spatial pattern in the cumulative exposure of the image field of the detector is then determined.

摘要翻译： 成像系统的瞳孔强度分布通过用具有明亮特征的放射线检测器的图像场曝光来测量，将检测器定位在远离图像平面的距离处，并且用明亮特征曝光检测器的图像场，导致 来自两次曝光的检测器的图像场的累积曝光。 然后确定检测器的图像场的累积曝光中的空间图案的特性。

公开(公告)号：US20050018190A1

公开(公告)日：2005-01-27

申请号：US10917219

申请日：2004-08-12

申请人： Abdurrahman Sezginer ,  Kenneth Johnson ,  Fred Stanke

发明人： Abdurrahman Sezginer ,  Kenneth Johnson ,  Fred Stanke

IPC分类号： G03F7/20 ,  H01L23/544 ,  G01B11/00

CPC分类号： G03F7/70633 ,  H01L22/34 ,  H01L2223/54453

摘要： Alignment accuracy between two or more patterned layers is measured using a metrology target comprising substantially overlapping diffraction gratings formed in a test area of the layers being tested. An optical instrument illuminates all or part of the target area and measures the optical response. The instrument can measure transmission, reflectance, and/or ellipsometric parameters as a function of wavelength, polar angle of incidence, azimuthal angle of incidence, and/or polarization of the illumination and detected light. Overlay error or offset between those layers containing the test gratings is determined by a processor programmed to calculate an optical response for a set of parameters that include overlay error, using a model that accounts for diffraction by the gratings and interaction of the gratings with each others' diffracted field. The model parameters might also take account of manufactured asymmetries. The calculation may involve interpolation of pre-computed entries from a database accessible to the processor. The calculated and measured responses are iteratively compared and the model parameters changed to minimize the difference.

摘要翻译： 使用包括在被测试层的测试区域中形成的基本上重叠的衍射光栅的测量目标来测量两个或更多个图案化层之间的对准精度。 光学仪器照亮目标区域的全部或部分，并测量光学响应。 仪器可以测量作为波长，极角入射角，入射方位角和/或照明和检测光的偏振的函数的透射率，反射率和/或椭偏参数。 包含测试光栅的那些层之间的叠加误差或偏移量被编程为使用考虑光栅衍射的模型和光栅与彼此的相互作用计算包括重叠误差的一组参数的光学响应的​​处理器来确定 '衍射场 模型参数也可能考虑到制造的不对称性。 该计算可以包括从处理器可访问的数据库插入预先计算的条目。 迭代比较计算和测量的响应，改变模型参数以最小化差异。

公开(公告)号：US06738136B2

公开(公告)日：2004-05-18

申请号：US10290730

申请日：2002-11-07

申请人： Adam Norton ,  Abdurrahman Sezginer ,  Fred E. Stanke ,  Rodney Smedt

发明人： Adam Norton ,  Abdurrahman Sezginer ,  Fred E. Stanke ,  Rodney Smedt

IPC分类号： G01J308

CPC分类号： G01J3/02 ,  G01J3/0218 ,  G01J3/08 ,  G01J3/42 ,  G01N21/55

摘要： The invention is a method and apparatus for determining characteristics of a sample. The system and method provide for detecting a monitor beam reflected off a mirror, where the monitor beam corresponds to the intensity of light incident upon the sample. The system and method also provide for detecting a measurement beam, where the measurement beam has been reflected off the sample being characterized. Both the monitor beam and the measurement beam are transmitted through the same transmission path, and detected by the same detector. Thus, potential sources of variations between the monitor beam and the measurement beam which are not due to the characteristics of the sample are minimized. Reflectivity information for the sample can be determined by comparing data corresponding to the measurement beam relative to data corresponding the monitor beam.

摘要翻译： 本发明是用于确定样品特性的方法和装置。 该系统和方法提供用于检测从反射镜反射的监视光束，其中监视光束对应于入射在样本上的光的强度。 该系统和方法还提供了用于检测测量光束，其中测量光束已经从被表征的样品反射出来。 监测光束和测量光束都通过相同的传输路径传输，并由相同的检测器检测。 因此，监测光束和测量光束之间不是由于样品特性引起的变化的潜在来源被最小化。 可以通过将与测量光束相对应的数据相对于监视光束对应的数据进行比较来确定样本的反射率信息。

公开(公告)号：US06559639B2

公开(公告)日：2003-05-06

申请号：US09397581

申请日：1999-09-16

申请人： Chanh Cao Minh ,  Nicholas J. Heaton ,  Abdurrahman Sezginer

发明人： Chanh Cao Minh ,  Nicholas J. Heaton ,  Abdurrahman Sezginer

IPC分类号： G01V300

CPC分类号： G01N24/081 ,  G01R33/4625 ,  G01V3/32

摘要： A permeability estimation technique for use with spin echo signals that are received from a sample includes summing indications of the amplitudes of the spin echo signals. The results of the summing are used to determine an indication of a permeability of the sample, without using a distribution of relaxation times in the determination. The products of indications of the amplitudes of the spin echo signals may be summed, and the results of the summing may be used to determine an indication of a permeability of the sample, without using a distribution of relaxation times in the determination.

摘要翻译： 与从样本接收的自旋回波信号一起使用的磁导率估计技术包括自旋回波信号幅度的相加指示。 求和的结果用于确定样品的渗透性的指示，而不使用在测定中松弛时间的分布。 可以将自旋回波信号的振幅的指示的乘积相加，并且求和的结果可以用于确定样品的渗透性的指示，而不使用确定中的松弛时间的分布。

公开(公告)号：US6023163A

公开(公告)日：2000-02-08

申请号：US873582

申请日：1997-06-12

申请人： Charles Flaum ,  Abdurrahman Sezginer

发明人： Charles Flaum ,  Abdurrahman Sezginer

IPC分类号： G01V3/32 ,  G01V3/00

CPC分类号： G01V3/32

摘要： In a method for determining the presence of gas in a region of investigation of earth formations surrounding a borehole. A movable logging device is used to generate two sequences of magnetic field pulses having different pulse spacing times. Each of the pulse sequences elicits a corresponding sequence of nuclear magnetic resonance spin echoes. The presence of gas in the formation, is determined from ratios of signals derived from the two spin echoes sequences.

摘要翻译： 在用于确定在钻孔周围的地层的研究区域中气体的存在的方法中。 可动记录装置用于产生具有不同脉冲间隔时间的两个磁场脉冲序列。 每个脉冲序列引起相应的核磁共振自旋回波序列。 地层中气体的存在是根据从两个自旋回波序列得到的信号的比值确定的。

公开(公告)号：US5977768A

公开(公告)日：1999-11-02

申请号：US880343

申请日：1997-06-23

申请人： Abdurrahman Sezginer ,  Shu-Kong Chang

发明人： Abdurrahman Sezginer ,  Shu-Kong Chang

IPC分类号： G01V3/32 ,  G01V3/00

CPC分类号： G01V3/32

摘要： Apparatus and method are disclosed for determining a nuclear magnetic resonance property of formations surrounding a borehole while drilling the borehole with a rotating drill bit on a drill string. An embodiment of the method includes the following steps: providing a logging device in the drill string, the logging device being rotatable with the drill string or a portion of the drill string, the logging device having a rotational axis; producing a static magnetic field and an RF magnetic field at the logging device, the static and RF magnetic fields having mutually orthogonal components in an investigation region in the formations surrounding the logging device, the magnitudes of the static and RF magnetic fields in the investigation region being substantially rotationally invariant as the logging device rotates around its axis; receiving nuclear magnetic resonance spin echoes at at least one circumferential sector on the logging device; and determining a nuclear magnetic resonance property of the formations, for different portions of the investigation region, from the received nuclear magnetic resonance spin echoes.

摘要翻译： 公开的装置和方法用于确定钻孔周围的地层的核磁共振性质，同时用钻柱上的旋转钻头钻孔。 该方法的实施例包括以下步骤：在钻柱中提供测井装置，测井装置可与钻柱或钻柱的一部分一起旋转，测井装置具有旋转轴线; 在测井装置处产生静磁场和RF磁场，静态和RF磁场在测井装置周围的地层中的调查区域中具有相互正交的分量，在调查区域中的静态和RF磁场的大小 当测井装置围绕其轴线旋转时，其基本上是旋转不变的; 在测井装置上的至少一个圆周扇区处接收核磁共振自旋回波; 并且对于研究区域的不同部分，从接收到的核磁共振自旋回波确定地层的核磁共振特性。