公开(公告)号：US20080118334A1

公开(公告)日：2008-05-22

申请号：US11603714

申请日：2006-11-22

申请人： Anthony C. Bonora

发明人： Anthony C. Bonora

IPC分类号： B65H1/00

CPC分类号： B65G1/02

摘要： The present invention generally comprises a container storage system for efficiently storing large capacity and small capacity containers or FOUPs. In one embodiment, each storage location within the stocker comprises a pair of spaced apart supports. A large capacity container or a small capacity container may be seated in any storage location. The storage locations are arranged within the stocker to minimize the amount of empty space between the supports of a storage location and a container seated in an adjacent storage location. In one embodiment, the vertical pitch between supports of adjacent storage locations is less than the height of a large capacity FOUP container shell. Thus, when a FOUP is seated in a storage location, its container shell extends between the supports of the storage location located directly above.

摘要翻译： 本发明通常包括用于有效地存储大容量和小容量容器或FOUP的容器储存系统。 在一个实施例中，储盘器内的每个储存位置包括一对间隔开的支撑件。 大容量容器或小容量容器可以放置在任何存放位置。 存储位置被布置在储存器内，以最小化存储位置的支撑件和位于相邻存储位置的容器之间的空间空间的量。 在一个实施例中，相邻存储位置的支撑件之间的垂直间距小于大容量FOUP容器壳体的高度。 因此，当FOUP位于存储位置时，其容器壳体在位于直接位于上方的存储位置的支撑件之间延伸。

公开(公告)号：US06494308B2

公开(公告)日：2002-12-17

申请号：US09781060

申请日：2001-02-08

申请人： Anthony C. Bonora ,  Richard H. Gould

发明人： Anthony C. Bonora ,  Richard H. Gould

IPC分类号： B65G2500

CPC分类号： H01L21/67706 ,  B65G13/04 ,  B65G37/02 ,  H01L21/67727 ,  H01L21/6773 ,  Y10S414/14

摘要： A system for transporting articles. The transport system includes a conveyor system which includes a transport device for carrying articles between workstations and a drive rail and a support rail for supporting the transport device. The drive rail includes a drive system for propelling the transport device between workstations. At least one shoe carried by the transport device rides on the support rail for movably supporting the transport device on the support rail. The transport system also includes a protective container including a housing having an interior compartment for supporting a plurality of articles. The bottom surface of the housing is configured to engage the drive system such that actuation of the drive system propels the housing along the drive and support rails. At least one shoe carried by the housing is configured to ride on the support rail of the conveyor system to movably support the housing on the support rail. The transport system also includes the method of transporting articles including the steps of providing a transport device for holding at least one article and having at least one shoe, positioning the transport device with the base of the device supported on a drive rail and the shoe supported on a support rail, and actuating a drive system carried by the drive rail to propel the transport device along the drive rail and support rail.

摘要翻译： 运输物品的系统 输送系统包括输送系统，该输送机系统包括用于在工作站和驱动轨道之间运送物品的运送装置和用于支撑输送装置的支撑轨道。 驱动轨道包括用于在工作站之间推动运输装置的驱动系统。 由运送装置承载的至少一个鞋子可以在支撑轨道上移动地支撑在支撑轨道上的运送装置。 运输系统还包括保护容器，其包括具有用于支撑多个物品的内部隔室的壳体。 壳体的底表面构造成接合驱动系统，使得驱动系统的致动沿驱动器和支撑轨道推动壳体。 由壳体承载的至少一个鞋被构造成骑在输送机系统的支撑轨道上以将壳体可移动地支撑在支撑轨道上。 运输系统还包括输送物品的方法，包括提供用于保持至少一个物品并具有至少一个鞋的运输装置的步骤，将运送装置定位在装置的底座支撑在驱动轨道上，鞋支撑 并且驱动由驱动轨道承载的驱动系统，以沿着驱动轨道和支撑轨道推进输送装置。

公开(公告)号：US06220808B1

公开(公告)日：2001-04-24

申请号：US09115526

申请日：1998-07-13

申请人： Anthony C. Bonora ,  William J. Fosnight ,  Raymond S. Martin

发明人： Anthony C. Bonora ,  William J. Fosnight ,  Raymond S. Martin

IPC分类号： B65G4907

CPC分类号： H01L21/67772 ,  H01L21/67775 ,  Y10S414/139 ,  Y10S414/14

摘要： A system is described herein including a load port which allows various pod sizes, including 200 mm and 300 mm, add various configurations, including front opening and bottom opening, to operate with a BOLTS interface, or simply with a vertical port on the front end of a process tool in configurations not including the BOLTS interface.

摘要翻译： 本文描述了一种系统，其包括允许各种荚尺寸（包括200mm和300mm）的加载端口，添加包括前开口和底部开口的各种构造，以使用BOLTS接口操作，或者简单地与前端上的垂直端口 在不包括BOLTS接口的配置中的过程工具。

公开(公告)号：US06188323B1

公开(公告)日：2001-02-13

申请号：US09173710

申请日：1998-10-15

申请人： Frederick T. Rosenquist ,  Bruce Richardson ,  William J. Fosnight ,  Anthony C. Bonora

发明人： Frederick T. Rosenquist ,  Bruce Richardson ,  William J. Fosnight ,  Anthony C. Bonora

IPC分类号： G08B2100

CPC分类号： H01L21/67265

摘要： A wafer mapping system is disclosed mounted to the port door of a process tool. As the port door is lowered away from the access port of the process tool in order to allow wafer transfer through the port, the wafer mapping system according to the present invention detects the presence and position of the various wafers in the pod shell, which information may then be stored in memory for later use. As such, wafer mapping according to this system occurs without additional processing steps or time. The port door is lowered by a servo drive which allows the precise position of the port door to be identified at any given time. As such, the position of a wafer within the pod shell may be precisely identified by the wafer mapping system mounted on the port door as the door is lowered.

摘要翻译： 公开了一种安装到处理工具的端口门的晶片映射系统。 当端口门从工艺工具的进入口下降，以允许晶片通过端口传送时，根据本发明的晶片映射系统检测在荚壳中各种晶片的存在和位置，哪些信息 然后可以存储在存储器中供以后使用。 因此，根据该系统的晶片映射没有附加的处理步骤或时间。 端口门通过伺服驱动器下降，允许在任何给定时间识别端口门的精确位置。 因此，当门降低时，可以通过安装在端口门上的晶片映射系统精确地识别晶片在荚壳内的位置。

公开(公告)号：US6138721A

公开(公告)日：2000-10-31

申请号：US145704

申请日：1998-09-02

申请人： Anthony C. Bonora ,  Edward J. Cortez ,  John D. Kyffin ,  Michael Ng

发明人： Anthony C. Bonora ,  Edward J. Cortez ,  John D. Kyffin ,  Michael Ng

IPC分类号： H01L21/677 ,  B65B1/04

CPC分类号： H01L21/67775 ,  Y10S414/135 ,  Y10S414/14

摘要： A tilt and go assembly included as part of a load port interface assembly is disclosed for providing quick and easy attachment and adjustment of the load port interface assembly to a BOLTS interface. When a load port interface assembly according to the present invention is positioned adjacent to a BOLTS interface, the assembly is tilted away from the BOLTS interface, so that a socket in the load port interface assembly may raise upward slightly and be seated on the ball joint. Thereafter, the upper portions of the load port interface assembly may be tilted upward so that the assembly is roughly parallel and adjacent to the BOLTS interface. Once the load port interface assembly is seated on the ball joint of the BOLTS interface, the vertical and lateral positions of the load port interface assembly may be adjusted as desired with respect to the BOLTS interface. Additionally, after the vertical and lateral positions of the load port interface assembly have been adjusted, the azimuth and roll angle of the load port interface assembly may be adjusted with respect to the BOLTS interface.

摘要翻译： 公开了作为装载端口接口组件的一部分的倾斜和拆卸组件，用于将加载端口接口组件快速和容易地附接和调整到BOLTS接口。 当根据本发明的负载端口接口组件定位成与BOLTS接口相邻时，组件倾斜离开BOLTS接口，使得负载端口接口组件中的插座稍微向上升起并且坐在球接头 。 此后，负载端口接口组件的上部可以向上倾斜，使得组件大致平行并且与BOLTS接口相邻。 一旦装载端口接口组件就位在BOLTS接口的球窝接头上，负载端口接口组件的垂直和横向位置就可以根据BOLTS接口的需要进行调整。 此外，在已经调整了负载端口接口组件的垂直和横向位置之后，可以相对于BOLTS接口调整负载端口接口组件的方位角和侧倾角。

公开(公告)号：US5931631A

公开(公告)日：1999-08-03

申请号：US83834

申请日：1998-05-22

申请人： Anthony C. Bonora ,  Michael A. Neads ,  Joshua T. Oen

发明人： Anthony C. Bonora ,  Michael A. Neads ,  Joshua T. Oen

IPC分类号： B65G49/07 ,  H01L21/677

CPC分类号： H01L21/67772 ,  H01L21/67775 ,  Y10S414/137 ,  Y10S414/14

摘要： A method and apparatus for removing a semiconductor wafer cassette from a SMIF pod and for transferring the cassette along a vertical axis to a platform of a wafer processing station. The apparatus is comprised of a transfer device that includes a pair of gripping arms for gripping the wafer cassette from the sides of the cassette. Once gripped, the cassette moves with the transfer device upward along a vertical axis to make room for the platform to be extended from within the processing station to a position under the cassette. Thereafter, the direction of motion of the transfer device is reversed and the cassette is lowered onto the platform. Once seated on the platform, the gripping arms retract from the cassette, and the cassette is carried on the platform into the processing station.

摘要翻译： 一种用于从SMIF盒移除半导体晶片盒并将盒沿着垂直轴传送到晶片处理台的平台的方法和装置。 该装置包括一个转移装置，该转移装置包括一对用于从盒的侧面夹持晶片盒的夹持臂。 一旦被抓住，盒子沿着垂直轴向上移动传送装置，以使平台从处理站中延伸到盒下方的位置。 此后，转印装置的运动方向相反，并且盒子下降到平台上。 一旦坐在平台上，把持臂从盒子中退回，并且盒子被放在平台上进入处理站。

公开(公告)号：US5788458A

公开(公告)日：1998-08-04

申请号：US500219

申请日：1995-07-10

申请人： Anthony C. Bonora ,  Michael A. Neads ,  Joshua T. Oen

发明人： Anthony C. Bonora ,  Michael A. Neads ,  Joshua T. Oen

IPC分类号： B65G49/07 ,  H01L21/677

CPC分类号： H01L21/67772 ,  H01L21/67775 ,  Y10S414/137 ,  Y10S414/14

摘要： A method and apparatus for removing a semiconductor wafer cassette from a SMIF pod and for transferring the cassette along a vertical axis to a platform of a wafer processing station. The apparatus is comprised of a transfer device that includes a pair of gripping arms for gripping the wafer cassette from the sides of the cassette. Once gripped, the cassette moves with the transfer device upward along a vertical axis to make room for the platform to be extended from within the processing station to a position under the cassette. Thereafter, the direction of motion of the transfer device is reversed and the cassette is lowered onto the platform. Once seated on the platform, the gripping arms retract from the cassette, and the cassette is carried on the platform into the processing station.

公开(公告)号：US5570990A

公开(公告)日：1996-11-05

申请号：US147372

申请日：1993-11-05

申请人： Anthony C. Bonora ,  Bruce A. Richardson ,  Michael D. Brain ,  Edward J. Cortez ,  Barney H. Huang

发明人： Anthony C. Bonora ,  Bruce A. Richardson ,  Michael D. Brain ,  Edward J. Cortez ,  Barney H. Huang

IPC分类号： G03F7/20 ,  H01L21/677 ,  G06F15/50

CPC分类号： G03F7/70541 ,  G03F7/70741 ,  G03F7/7075 ,  H01L21/67775 ,  Y10S414/14

摘要： A human guided mobile loader stocker developed to mechanically assist in SMIF container movement. The assist includes a pushcart, a semi-motorized transport arm, a processor, and communication devices. A group of containers are placed on the cart using the arm. The cart is pushed to a semiconductor processing tool where the arm is used to transfer containers to and from the port of the processing tool. The processor and communication devices are used for inventory control and guiding the container to the port of the processing tool.

摘要翻译： 开发了用于机械协助SMIF集装箱运动的人造导向移动式装载机储料器。 辅助包括一个手推车，一个半电动运输臂，一个处理器和通讯装置。 使用手臂将一组容器放在购物车上。 推车被推到半导体处理工具，其中臂用于将容器运送到加工工具的端口和从处理工具的端口传送。 处理器和通信设备用于库存控制，并将容器引导到处理工具的端口。

公开(公告)号：US5547328A

公开(公告)日：1996-08-20

申请号：US299900

申请日：1994-09-01

申请人： Anthony C. Bonora ,  Gilles Guerre ,  Mihir Parikh ,  Frederick T. Rosenquist, Jr. ,  Sudhir Jain

发明人： Anthony C. Bonora ,  Gilles Guerre ,  Mihir Parikh ,  Frederick T. Rosenquist, Jr. ,  Sudhir Jain

IPC分类号： B65G49/07 ,  G03F7/20 ,  H01L21/677

CPC分类号： H01L21/67757 ,  G03F7/7075 ,  H01L21/67772 ,  Y10S414/14

摘要： A method and apparatus for transferring articles from a transportable container, for example, a SMIF pod, to a second container, for example, a processing station having a port which provides access to the interior region of the processing station. A non-contact seal or an isolation cover or skirt seals the port so that the interior region of the container can be purged of contaminants prior to exposing the interior environment of the processing station to the environment within the container. The purging of the container may be a multi-step process in which the container door is moved between several intermediate positions so that the container door itself is purged prior to the purging of the environment within the container.

摘要翻译： 用于将物品从可运输的容器例如SMIF盒传送到第二容器的方法和装置，例如具有提供进入处理站的内部区域的端口的处理站。 非接触式密封件或隔离盖或裙部密封端口，使得在将处理站的内部环境暴露于容器内的环境之前，容器的内部区域可以被清除污染物。 容器的吹扫可以是多步骤过程，其中容器门在几个中间位置之间移动，使得容器门本身在清洁容器内的环境之前被清除。

公开(公告)号：US5370491A

公开(公告)日：1994-12-06

申请号：US948148

申请日：1992-09-21

申请人： Anthony C. Bonora ,  Gilles Guerre ,  Mihir Parikh ,  Frederick T. Rosenquist, Jr. ,  Sudhir Jain

发明人： Anthony C. Bonora ,  Gilles Guerre ,  Mihir Parikh ,  Frederick T. Rosenquist, Jr. ,  Sudhir Jain

IPC分类号： B65G49/07 ,  G03F7/20 ,  H01L21/677 ,  B65B1/04

CPC分类号： H01L21/67757 ,  G03F7/7075 ,  H01L21/67772 ,  Y10S414/14

摘要： A method and apparatus for transferring articles from a transportable container, for example, a SMIF pod, to a second container, for example, a processing station having a port which provides access to the interior region of the processing station. A non-contact seal or an isolation cover or skirt seals the port so that the interior region of the container can be purged of contaminants prior to exposing the interior environment of the processing station to the environment within the container. The purging of the container may be a multi-step process in which the container door is moved between several intermediate positions so that the container door itself is purged prior to the purging of the environment within the container.

摘要翻译： 用于将物品从可运输容器（例如SMIF吊舱）转移到第二容器的方法和装置，例如具有提供进入处理站的内部区域的端口的处理站。 非接触式密封件或隔离盖或裙部密封端口，使得在将处理站的内部环境暴露于容器内的环境之前，容器的内部区域可以被清除污染物。 容器的吹扫可以是多步骤过程，其中容器门在几个中间位置之间移动，使得容器门本身在清洁容器内的环境之前被清除。