公开(公告)号：US20120321417A1

公开(公告)日：2012-12-20

申请号：US13464923

申请日：2012-05-04

申请人： Anthony C. Bonora ,  Richard Garcia

发明人： Anthony C. Bonora ,  Richard Garcia

IPC分类号： H01L21/677

CPC分类号： H01L21/67775 ,  H01L21/67265 ,  H01L21/68707

摘要： A system and method of transporting substrates includes a loadport system including a frame, an articulating arm, a mini environment and a tower substantially centered in the frame. The tower includes multiple motors, a first motor mechanically coupled to the mini environment for moving the mini environment vertically. A second motors mechanically coupled to the articulating arm for moving the articulating arm vertically. A tower enclosure is also included. The tower enclosure enclosing the motors separate from the mini environment.

摘要翻译： 输送基材的系统和方法包括载荷输送系统，其包括框架，铰接臂，迷你环境和基本上位于框架中心的塔架。 该塔包括多个电动机，第一电动机机械耦合到迷你环境以垂直移动迷你环境。 机械地联接到铰接臂的第二马达用于垂直地移动铰接臂。 还包括一个塔架。 包围电机的塔架与迷你环境分开。

公开(公告)号：US20120125808A1

公开(公告)日：2012-05-24

申请号：US13337028

申请日：2011-12-23

申请人： Anthony C. Bonora

发明人： Anthony C. Bonora

IPC分类号： B65D85/00

CPC分类号： B25J15/0028 ,  B65G65/00 ,  H01L21/67383 ,  H01L21/68707

摘要： The present invention comprises a workpiece container for storing at least one workpiece having a bottom surface and a peripheral edge. In one embodiment, a workpiece support structure is located within the container enclosure, which forms multiple vertically stacked storage shelves within the enclosure. Each storage shelf includes, in one embodiment, a first tine and a second tine for supporting the workpiece in a substantially horizontal orientation. The bottom surface and peripheral edge of a workpiece seated on a storage shelf extends beyond the outer edge of both the first tine and the second tine. An end effector according to the present invention may engage these extended portions or “grip zones” of the workpiece.

摘要翻译： 本发明包括用于存储至少一个具有底表面和周边边缘的工件的工件容器。 在一个实施例中，工件支撑结构位于容器外壳内，其在外壳内形成多个垂直堆叠的存放货架。 在一个实施例中，每个储物架包括用于以基本上水平的方向支撑工件的第一齿和第二齿。 坐在储物架上的工件的底面和周边边缘延伸超过第一齿和第二齿的外边缘。 根据本发明的端部执行器可以接合工件的这些延伸部分或“抓握区域”。

公开(公告)号：US20120000816A1

公开(公告)日：2012-01-05

申请号：US12828236

申请日：2010-06-30

申请人： Anthony C. Bonora

发明人： Anthony C. Bonora

IPC分类号： B65D85/30 ,  E05F15/10 ,  E06B3/32 ,  E05F11/00

CPC分类号： H01L21/67772 ,  E06B3/50 ,  E06B3/5009 ,  E06B5/00 ,  E06B7/32 ,  H01L21/67763 ,  H01L21/67766 ,  Y10S414/135

摘要： A loadport has a port door and a frame with an opening through which the port door interfaces with a container door of a container for holding semiconductor workpieces. In one embodiment, a movable closure mechanism is connected to the port door and is defined to be movable in a controlled manner relative to both the port door and the frame. In this embodiment, a stationary closure mechanism is disposed on the frame proximate to the opening. In another embodiment, a stationary closure mechanism is connected to the port door, and a movable closure mechanism is disposed on the frame proximate to the opening. In both embodiments, the movable closure mechanism is defined to engage with the stationary closure mechanism such that movement of the movable closure mechanism to engage with the stationary closure mechanism applies a closing force between the port door and the container door.

摘要翻译： 装载端口具有端口门和具有开口的框架，端口门通过该开口与用于保持半导体工件的容器的容器门相连接。 在一个实施例中，可移动关闭机构连接​​到端口门并且被限定为可相对于端口门和框架以受控的方式移动。 在该实施例中，固定的封闭机构设置在靠近开口的框架上。 在另一个实施例中，固定的闭合机构连接到端口门，并且可移动的闭合机构设置在靠近开口的框架上。 在两个实施例中，可动闭合机构限定为与静止闭合机构接合，使得可动闭合机构与静止闭合机构接合的运动在端口门和容器门之间施加关闭力。

公开(公告)号：US07771151B2

公开(公告)日：2010-08-10

申请号：US11178072

申请日：2005-07-08

申请人： Anthony C. Bonora ,  Michael Krolak ,  Roger G. Hine

发明人： Anthony C. Bonora ,  Michael Krolak ,  Roger G. Hine

IPC分类号： H01L21/68

CPC分类号： H01L21/67766 ,  H01L21/67736 ,  H01L21/67769 ,  H01L21/67775 ,  Y10S414/14 ,  Y10T74/20305

摘要： The present invention generally comprises a tool load device for transferring a container between a container transport system and a processing tool. The tool load device may service a single load port or multiple load ports. Regardless, the tool load device is preferably located between the load port of the processing tool and the section of the container transport system passing the processing tool. The tool load device provides an improved method of moving containers between a conventional load port and, for example, a conveyor. In another embodiment, the tool load device is coupled with an x-drive assembly that moves the tool load device along a path that is substantially parallel to the container transport system passing in front of the load port—allowing the tool load device to service multiple load ports.

摘要翻译： 本发明通常包括用于在容器运输系统和加工工具之间转运容器的工具装载装置。 工具装载设备可以服务于单个装载端口或多个装载端口。 无论如何，工具装载装置优选地位于处理工具的装载端口和通过处理工具的容器运输系统的部分之间。 工具装载装置提供了一种在常规负载端口和例如输送机之间移动容器的改进方法。 在另一个实施例中，工具装载装置与x驱动组件联接，该x驱动组件沿着基本上平行于通过装载端口前方的集装箱运输系统的路径移动工具装载装置 - 允许工具装载装置服务多个 加载端口。

公开(公告)号：US20090101067A1

公开(公告)日：2009-04-23

申请号：US12253212

申请日：2008-10-16

申请人： Anthony C. Bonora

发明人： Anthony C. Bonora

IPC分类号： B05C13/02

CPC分类号： H01L21/67766 ,  H01L21/68707

摘要： An end effector having a first arm and a second arm extending from an end effector support body is provided. The first arm and the second arm each have support extensions for supporting a peripheral region of a substrate on opposing sides of a diameter of the substrate. The height of support contacts on opposing sides of the diameter is different relative to a horizontal datum plane. In one embodiment, the end effector includes additional arms extending from the end effector support body. A system for supporting a substrate is provided also.

摘要翻译： 提供具有从端部执行器支撑体延伸的第一臂和第二臂的端部执行器。 第一臂和第二臂各具有支撑延伸部，用于在衬底的直径的相对侧上支撑衬底的周边区域。 直径相对侧上的支撑触点的高度相对于水平基准平面是不同的。 在一个实施例中，末端执行器包括从末端执行器支撑体延伸的附加臂。 还提供了用于支撑衬底的系统。

公开(公告)号：US20090092470A1

公开(公告)日：2009-04-09

申请号：US12244693

申请日：2008-10-02

申请人： Anthony C. Bonora

发明人： Anthony C. Bonora

IPC分类号： H01L21/683

CPC分类号： H01L21/68707 ,  H01L21/67259

摘要： In one embodiment, an end effector having a first arm extending from an end effector support body, and a second arm extending from the end effector support body is provided. The first arm and the second arm have support extensions for supporting a peripheral region of a substrate, wherein the second arm and the first arm include sensors integrated thereon. The sensors are located at a distal end of the first and the second arms past the corresponding support extensions. The sensors are configured to indicate whether support arms for a container are within the travel path of the end effector in one embodiment. The end effector may be integrated into a system for transporting substrates.

摘要翻译： 在一个实施例中，提供具有从端部执行器支撑体延伸的第一臂的端部执行器和从端部执行器支撑体延伸的第二臂。 第一臂和第二臂具有用于支撑衬底的周边区域的支撑延伸部，其中第二臂和第一臂包括集成在其上的传感器。 传感器位于第一和第二臂的远端通过相应的支撑延伸部。 在一个实施例中，传感器被配置为指示用于容器的支撑臂是否在端部执行器的行进路径内。 端部执行器可以集成到用于输送基板的系统中。

公开(公告)号：US07410340B2

公开(公告)日：2008-08-12

申请号：US11064880

申请日：2005-02-24

申请人： Anthony C. Bonora ,  Michael Krolak ,  Roger G. Hine

发明人： Anthony C. Bonora ,  Michael Krolak ,  Roger G. Hine

IPC分类号： B65G1/133

CPC分类号： H01L21/67775 ,  H01L21/67736 ,  Y10S414/14

摘要： The present invention comprises a container transport and loading system. The system generally comprises a load port for presenting articles to a tool and a container transport system. In one embodiment, the load port includes a vertically movable FOUP advance plate assembly that is adapted to load and unload a FOUP from a conveyor that passes by the load port and move the FOUP horizontally. In another embodiment, the load port includes a vertically movable support structure that is adapted to load and unload a container from a shuttle that passes by the load port. The various embodiments of the load port and container transport system are improvements over conventional container transport systems. The present invention also includes a shuttle for simultaneously transporting multiple containers that a load port may load or unload a container from.

摘要翻译： 本发明包括容器运输和装载系统。 该系统通常包括用于将物品呈现给工具的装载端口和容器运输系统。 在一个实施例中，负载端口包括可垂直移动的FOUP提前板组件，其适于从通过负载端口的传送器加载和卸载FOUP并水平移动FOUP。 在另一个实施例中，负载端口包括可垂直移动的支撑结构，其适于从穿过负载端口的梭子加载和卸载容器。 负载端口和集装箱运输系统的各种实施例是相对于常规集装箱运输系统的改进。 本发明还包括用于同时运送多个容器的梭子，负载口可装载或卸载容器。

公开(公告)号：US20080152466A1

公开(公告)日：2008-06-26

申请号：US11644240

申请日：2006-12-22

申请人： Anthony C. Bonora ,  Roger G. Hine ,  Theodore W. Rogers

发明人： Anthony C. Bonora ,  Roger G. Hine ,  Theodore W. Rogers

IPC分类号： B65H5/08

CPC分类号： B65G1/0407 ,  B65G37/02 ,  B65G2201/0297

摘要： A system comprising a load port and a transfer module. In one embodiment, the load port includes a plate having a first opening and a second opening, a first workpiece access port, a second workpiece access port and at least one storage location. The storage location(s) may be located either beneath the second workpiece access port or above the first workpiece access port. The transfer mosule, which is located adjacent the load port, includes a load arm for moving the workpiece containers between the first workpiece access port, the second workpiece access port, any of the storage shelves and a material transport system.

摘要翻译： 一种包括负载端口和转移模块的系统。 在一个实施例中，负载端口包括具有第一开口和第二开口的板，第一工件接入端口，第二工件接入端口和至少一个存储位置。 存储位置可以位于第二工件访问端口下方或第一工件访问端口的上方。 位于负载端口附近的转移清除器包括用于在第一工件接入端口，第二工件接入端口，任何存储搁板和材料输送系统之间移动工件容器的负载臂。

公开(公告)号：US06704998B1

公开(公告)日：2004-03-16

申请号：US08998115

申请日：1997-12-24

申请人： Anthony C. Bonora ,  William J. Fosnight ,  Raymond S. Martin

发明人： Anthony C. Bonora ,  William J. Fosnight ,  Raymond S. Martin

IPC分类号： B65G4907

CPC分类号： H01L21/67766 ,  H01L21/67772 ,  Y10S414/135 ,  Y10S414/139 ,  Y10S414/141 ,  Y10T29/53 ,  Y10T29/53539

摘要： An I/O minienvirornent including a port door within an I/O port, and a system for removing the port door and pod door coupled thereto, and setting down the pod and port doors at a convenient location within the I/O minienvironment. After wafer processing has been completed and the wafers have been transferred back through the I/O port to the SMEF pod, the system may retrieve the port and pod doors, and return the port door to their sealing positions within the I/O port and cassette, respectively. In a preferred embodiment, the system for gripping and transporting the port and pod doors may be located on the back end of the end effector of the wafer handling robot within the I/O minienvironment. The back end of the end effector is the end of the end effector opposite that used to transport the wafers and/or cassette.

摘要翻译： I / O端口中包括端口门的I / O端口，以及用于卸下与其连接的端口门和荚门的系统，以及在I / O环境中方便的位置放置荚和端口门。 在晶片处理完成并且晶片已经通过I / O端口返回到SMEF盒之后，系统可以检索端口和端口门，并将端口门返回到I / O端口内的密封位置，并且 盒式录像带。 在优选实施例中，用于夹持和运输端口和荚门的系统可以位于I / O环境内的晶片处理机器人的端部执行器的后端。 末端执行器的后端是端部执行器的端部，其与用于输送晶片和/或盒的相反。

公开(公告)号：US06663148B2

公开(公告)日：2003-12-16

申请号：US10020761

申请日：2001-12-13

申请人： Anthony C. Bonora ,  Gary M. Gallagher ,  Michael Ng

发明人： Anthony C. Bonora ,  Gary M. Gallagher ,  Michael Ng

IPC分类号： E05C106

CPC分类号： H01L21/67373 ,  Y10S292/12 ,  Y10T292/0964

摘要： An apparatus for preventing improper engagement of a pod door and a pod. Specifically, misalignment of at least one latch finger connected t the pod door with latch engagement slots in the pod prevents a pod door from mechanically engaging a pod.