公开(公告)号：US5570990A

公开(公告)日：1996-11-05

申请号：US147372

申请日：1993-11-05

申请人： Anthony C. Bonora ,  Bruce A. Richardson ,  Michael D. Brain ,  Edward J. Cortez ,  Barney H. Huang

发明人： Anthony C. Bonora ,  Bruce A. Richardson ,  Michael D. Brain ,  Edward J. Cortez ,  Barney H. Huang

IPC分类号： G03F7/20 ,  H01L21/677 ,  G06F15/50

CPC分类号： G03F7/70541 ,  G03F7/70741 ,  G03F7/7075 ,  H01L21/67775 ,  Y10S414/14

摘要： A human guided mobile loader stocker developed to mechanically assist in SMIF container movement. The assist includes a pushcart, a semi-motorized transport arm, a processor, and communication devices. A group of containers are placed on the cart using the arm. The cart is pushed to a semiconductor processing tool where the arm is used to transfer containers to and from the port of the processing tool. The processor and communication devices are used for inventory control and guiding the container to the port of the processing tool.

摘要翻译： 开发了用于机械协助SMIF集装箱运动的人造导向移动式装载机储料器。 辅助包括一个手推车，一个半电动运输臂，一个处理器和通讯装置。 使用手臂将一组容器放在购物车上。 推车被推到半导体处理工具，其中臂用于将容器运送到加工工具的端口和从处理工具的端口传送。 处理器和通信设备用于库存控制，并将容器引导到处理工具的端口。

公开(公告)号：US4739882A

公开(公告)日：1988-04-26

申请号：US829447

申请日：1986-02-13

申请人： Mihir Parikh ,  Anthony C. Bonora ,  W. George Faraco ,  Barney H. Huang

发明人： Mihir Parikh ,  Anthony C. Bonora ,  W. George Faraco ,  Barney H. Huang

IPC分类号： H01L21/673 ,  H01L21/677 ,  B65D1/04

CPC分类号： H01L21/67369 ,  H01L21/67373 ,  H01L21/67772 ,  Y10S414/14

摘要： The present invention is a transportable container for storing articles and maintaining a clean article, such as semiconductor wafers, clean. The container provides a box which defines an interior space for containing the articles. The box includes a box top and box base which supports the box top and includes a box door for opening and closing the container. The box door provide a region for supporting the articles in the interior space. A liner is insertable into the interior space and surrounds the region. The box door is retractable from the box space. The articles in the region are retractable with the box door.

摘要翻译： 本发明是用于储存物品并保持诸如半导体晶片的清洁物品的可运送的容器。 容器提供了一个盒子，它定义了用于容纳物品的内部空间。 箱子包括一个箱顶和盒底座，它支撑箱顶，并且包括用于打开和关闭容器的箱门。 箱门提供用于支撑内部空间中的物品的区域。 衬里可插入内部空间并围绕该区域。 箱门可从盒子空间伸缩。 该区域的物品可与箱门一起缩回。

公开(公告)号：US6138721A

公开(公告)日：2000-10-31

申请号：US145704

申请日：1998-09-02

申请人： Anthony C. Bonora ,  Edward J. Cortez ,  John D. Kyffin ,  Michael Ng

发明人： Anthony C. Bonora ,  Edward J. Cortez ,  John D. Kyffin ,  Michael Ng

IPC分类号： H01L21/677 ,  B65B1/04

CPC分类号： H01L21/67775 ,  Y10S414/135 ,  Y10S414/14

摘要： A tilt and go assembly included as part of a load port interface assembly is disclosed for providing quick and easy attachment and adjustment of the load port interface assembly to a BOLTS interface. When a load port interface assembly according to the present invention is positioned adjacent to a BOLTS interface, the assembly is tilted away from the BOLTS interface, so that a socket in the load port interface assembly may raise upward slightly and be seated on the ball joint. Thereafter, the upper portions of the load port interface assembly may be tilted upward so that the assembly is roughly parallel and adjacent to the BOLTS interface. Once the load port interface assembly is seated on the ball joint of the BOLTS interface, the vertical and lateral positions of the load port interface assembly may be adjusted as desired with respect to the BOLTS interface. Additionally, after the vertical and lateral positions of the load port interface assembly have been adjusted, the azimuth and roll angle of the load port interface assembly may be adjusted with respect to the BOLTS interface.

摘要翻译： 公开了作为装载端口接口组件的一部分的倾斜和拆卸组件，用于将加载端口接口组件快速和容易地附接和调整到BOLTS接口。 当根据本发明的负载端口接口组件定位成与BOLTS接口相邻时，组件倾斜离开BOLTS接口，使得负载端口接口组件中的插座稍微向上升起并且坐在球接头 。 此后，负载端口接口组件的上部可以向上倾斜，使得组件大致平行并且与BOLTS接口相邻。 一旦装载端口接口组件就位在BOLTS接口的球窝接头上，负载端口接口组件的垂直和横向位置就可以根据BOLTS接口的需要进行调整。 此外，在已经调整了负载端口接口组件的垂直和横向位置之后，可以相对于BOLTS接口调整负载端口接口组件的方位角和侧倾角。

公开(公告)号：US6135698A

公开(公告)日：2000-10-24

申请号：US346166

申请日：1999-07-01

申请人： Anthony C. Bonora ,  Edward J. Cortez ,  J. Mark DiPaola ,  Robert R. Netsch

发明人： Anthony C. Bonora ,  Edward J. Cortez ,  J. Mark DiPaola ,  Robert R. Netsch

IPC分类号： B65G49/07 ,  H01L21/673 ,  H01L21/677 ,  H01L21/00

CPC分类号： H01L21/67775 ,  Y10S414/137 ,  Y10S414/139 ,  Y10S414/14

摘要： A universal interface and transfer apparatus is disclosed which may be configured either as an indexer or a load port opener. In each configuration, the universal interface and transfer apparatus includes a port plate having a central opening, and a port door fitting within and sealing the central opening when no pod is present on the apparatus. The apparatus further includes a base and a frame mounted on and extending up from a front of the base. A modular drive assembly is mounted within an exterior side of the frame, which drive assembly includes a linear drive screw, and a motor and torque transmission mechanism for rotating the linear drive screw. A carriage is mounted on the linear drive screw such that rotation of the linear drive screw results in vertical translation of the carriage. In a first configuration, the port plate is mounted to the carriage via a bracket extending between the port plate and carriage so that rotation of the linear drive screw will vertically translate the port plate while the port door remains stationary. In a second configuration, the port door is mounted to the carriage via an arm extending between the port door and carriage, while the port plate is stationarily mounted to the frame so that rotation of the linear drive screw will vertically translate the port door while the port plate remains stationary.

摘要翻译： 公开了通用接口和传送装置，其可以被配置为索引器或负载端口开启器。 在每个配置中，通用接口和传送设备包括具有中心开口的端口板，并且当设备上没有容器时，端口门装配在中心开口内并密封中心开口。 该装置还包括安装在基座前部并从基座的前部向上延伸的基座和框架。 模块化驱动组件安装在框架的外侧，该驱动组件包括线性驱动螺钉，以及用于旋转线性驱动螺杆的马达和扭矩传递机构。 托架安装在线性驱动螺钉上，使得线性驱动螺杆的旋转导致托架的垂直平移。 在第一构造中，端口板通过在端口板和托架之间延伸的托架安装到托架上，使得线性驱动螺杆的旋转将在端口门保持静止的同时垂直平移端口板。 在第二种构造中，端口门通过在端口门和托架之间延伸的臂安装到托架上，同时端口板固定地安装到框架上，使得线性驱动螺杆的旋转将垂直地平移端口门，同时 端口板保持静止。

公开(公告)号：US5166884A

公开(公告)日：1992-11-24

申请号：US797714

申请日：1991-11-25

申请人： George A. Maney ,  Anthony C. Bonora ,  Mihir Parikh ,  Michael D. Brain

发明人： George A. Maney ,  Anthony C. Bonora ,  Mihir Parikh ,  Michael D. Brain

IPC分类号： G03F7/20 ,  H01L21/673

CPC分类号： H01L21/67294 ,  G03F7/70541 ,  G03F7/7075 ,  G03F7/70991

摘要： A system mounted with a transportable container for carrying articles such as semiconductor wafers which comprises a non-volatile memory used to store the identity, status and history of the articles in the container. Further, the system includes means for transmitting data from the memory to an information processor associated with a processing station which processes the articles in a carrier. In a preferred embodiment, the system includes data processing capability and both receives data from and transmits data to the processing station.

摘要翻译： 一种安装有用于携带诸如半导体晶片的物品的可移动容器的系统，其包括用于存储容器中物品的身份，状态和历史的非易失性存储器。 此外，该系统包括用于将数据从存储器传送到与处理载体中的物品的处理站相关联的信息处理器的装置。 在优选实施例中，该系统包括数据处理能力，并且都从数据处理站接收数据并传输数据。

公开(公告)号：US5097421A

公开(公告)日：1992-03-17

申请号：US54212

申请日：1987-05-18

申请人： George A. Maney ,  Anthony C. Bonora ,  Mihir Parikh ,  Michael D. Brain

发明人： George A. Maney ,  Anthony C. Bonora ,  Mihir Parikh ,  Michael D. Brain

IPC分类号： B65G43/00 ,  G03F7/20 ,  G05B15/02 ,  H01L21/02 ,  H01L21/027 ,  H01L21/304 ,  H01L21/673 ,  H01L21/677

CPC分类号： H01L21/67294 ,  G03F7/70541 ,  G03F7/7075 ,  G03F7/70991

摘要： Disclosed is a system mounted with a transportable container for carrying articles such as semiconductor wafers which comprises a non-volatile memory used to store the identity, status and history of the articles in the container. Further, the system includes means for transmitting data from the memory to an information processor associated with a processing station which processes the articles in a carrier. In a preferred embodiment, the system includes data processing capability and both receives data from and transmits data to the processing station.

摘要翻译： 公开了一种系统，其安装有用于承载诸如半导体晶片的物品的可运输容器，该系统包括用于存储容器中物品的身份，状态和历史的非易失性存储器。 此外，该系统包括用于将数据从存储器传送到与处理载体中的物品的处理站相关联的信息处理器的装置。 在优选实施例中，该系统包括数据处理能力，并且都从数据处理站接收数据并传输数据。

公开(公告)号：US4974166A

公开(公告)日：1990-11-27

申请号：US458767

申请日：1989-12-29

申请人： George A. Maney ,  Anthony C. Bonora ,  Mihir Parikh ,  Michael D. Brain

发明人： George A. Maney ,  Anthony C. Bonora ,  Mihir Parikh ,  Michael D. Brain

IPC分类号： B23Q41/00 ,  B23Q41/02 ,  B65G1/137 ,  B65G49/07 ,  B65G61/00 ,  G03F7/20 ,  G05B19/418 ,  G06Q50/00 ,  H01L21/00 ,  H01L21/02 ,  H01L21/673 ,  H01L21/677

CPC分类号： H01L21/67294 ,  G03F7/70525 ,  G03F7/70541 ,  G03F7/7075 ,  G03F7/70991 ,  G05B19/4183 ,  H01L21/67276 ,  G05B2219/31002 ,  G05B2219/31286 ,  G05B2219/31323 ,  G05B2219/31432 ,  Y02P90/08 ,  Y02P90/10 ,  Y02P90/24 ,  Y02P90/28 ,  Y02P90/285

摘要： A system for storing transporting and processing articles includes a plurality of transportable containers, each transportable container having an interior region adapted to receive a plurality of articles and data processing device provided on the transportable container for receiving, storing, transmitting and displaying information related to the articles received by the corresponding transportable container. A plurality of workstations are adapted to receive one of the transportable containers and to process selected ones of the articles. The workstation also verifies that at least one of the articles in the transportable container has arrived at the appropriate workstation and communicates with a central processing unit to receive and transmit status information and processing information, and to transmit information stored by the data processing device provided on the transportable container. The system may also include a storage station for receiving said transportable container, for providing communication between the data processing devices provided on the transportable container and the central processing unit, and for making a backup copy of the information stored by said data processing device.

摘要翻译： 用于存储运输和处理物品的系统包括多个可运输容器，每个可运输容器具有适于容纳多个物品的内部区域和设置在可运输容器上的数据处理装置，用于接收，存储，传送和显示与 由相应的运输容器收到的物品。 多个工作站适于接收可移动容器中的一个并处理所选物品中的一个。 工作站还验证可运输容器中的至少一个物品已经到达适当的工作站并与中央处理单元通信以接收和发送状态信息和处理信息，并且传送由提供的数据处理装置存储的信息 运输容器。 该系统还可以包括用于接收所述可移动容器的存储站，用于提供在可运输容器上提供的数据处理设备与中央处理单元之间的通信，以及用于制作由所述数据处理设备存储的信息的备份副本。

公开(公告)号：US20120321417A1

公开(公告)日：2012-12-20

申请号：US13464923

申请日：2012-05-04

申请人： Anthony C. Bonora ,  Richard Garcia

发明人： Anthony C. Bonora ,  Richard Garcia

IPC分类号： H01L21/677

CPC分类号： H01L21/67775 ,  H01L21/67265 ,  H01L21/68707

摘要： A system and method of transporting substrates includes a loadport system including a frame, an articulating arm, a mini environment and a tower substantially centered in the frame. The tower includes multiple motors, a first motor mechanically coupled to the mini environment for moving the mini environment vertically. A second motors mechanically coupled to the articulating arm for moving the articulating arm vertically. A tower enclosure is also included. The tower enclosure enclosing the motors separate from the mini environment.

摘要翻译： 输送基材的系统和方法包括载荷输送系统，其包括框架，铰接臂，迷你环境和基本上位于框架中心的塔架。 该塔包括多个电动机，第一电动机机械耦合到迷你环境以垂直移动迷你环境。 机械地联接到铰接臂的第二马达用于垂直地移动铰接臂。 还包括一个塔架。 包围电机的塔架与迷你环境分开。

公开(公告)号：US20120125808A1

公开(公告)日：2012-05-24

申请号：US13337028

申请日：2011-12-23

申请人： Anthony C. Bonora

发明人： Anthony C. Bonora

IPC分类号： B65D85/00

CPC分类号： B25J15/0028 ,  B65G65/00 ,  H01L21/67383 ,  H01L21/68707

摘要： The present invention comprises a workpiece container for storing at least one workpiece having a bottom surface and a peripheral edge. In one embodiment, a workpiece support structure is located within the container enclosure, which forms multiple vertically stacked storage shelves within the enclosure. Each storage shelf includes, in one embodiment, a first tine and a second tine for supporting the workpiece in a substantially horizontal orientation. The bottom surface and peripheral edge of a workpiece seated on a storage shelf extends beyond the outer edge of both the first tine and the second tine. An end effector according to the present invention may engage these extended portions or “grip zones” of the workpiece.

摘要翻译： 本发明包括用于存储至少一个具有底表面和周边边缘的工件的工件容器。 在一个实施例中，工件支撑结构位于容器外壳内，其在外壳内形成多个垂直堆叠的存放货架。 在一个实施例中，每个储物架包括用于以基本上水平的方向支撑工件的第一齿和第二齿。 坐在储物架上的工件的底面和周边边缘延伸超过第一齿和第二齿的外边缘。 根据本发明的端部执行器可以接合工件的这些延伸部分或“抓握区域”。

公开(公告)号：US20120000816A1

公开(公告)日：2012-01-05

申请号：US12828236

申请日：2010-06-30

申请人： Anthony C. Bonora

发明人： Anthony C. Bonora

IPC分类号： B65D85/30 ,  E05F15/10 ,  E06B3/32 ,  E05F11/00

CPC分类号： H01L21/67772 ,  E06B3/50 ,  E06B3/5009 ,  E06B5/00 ,  E06B7/32 ,  H01L21/67763 ,  H01L21/67766 ,  Y10S414/135

摘要： A loadport has a port door and a frame with an opening through which the port door interfaces with a container door of a container for holding semiconductor workpieces. In one embodiment, a movable closure mechanism is connected to the port door and is defined to be movable in a controlled manner relative to both the port door and the frame. In this embodiment, a stationary closure mechanism is disposed on the frame proximate to the opening. In another embodiment, a stationary closure mechanism is connected to the port door, and a movable closure mechanism is disposed on the frame proximate to the opening. In both embodiments, the movable closure mechanism is defined to engage with the stationary closure mechanism such that movement of the movable closure mechanism to engage with the stationary closure mechanism applies a closing force between the port door and the container door.

摘要翻译： 装载端口具有端口门和具有开口的框架，端口门通过该开口与用于保持半导体工件的容器的容器门相连接。 在一个实施例中，可移动关闭机构连接​​到端口门并且被限定为可相对于端口门和框架以受控的方式移动。 在该实施例中，固定的封闭机构设置在靠近开口的框架上。 在另一个实施例中，固定的闭合机构连接到端口门，并且可移动的闭合机构设置在靠近开口的框架上。 在两个实施例中，可动闭合机构限定为与静止闭合机构接合，使得可动闭合机构与静止闭合机构接合的运动在端口门和容器门之间施加关闭力。