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公开(公告)号：US07560817B2
公开(公告)日：2009-07-14
申请号：US11312061
申请日：2005-12-20
IPC分类号： H01L23/48
CPC分类号： H01L24/12 , B81B7/0006 , B82Y10/00 , H01L24/16 , H01L24/90 , H01L2224/13078 , H01L2224/13099 , H01L2224/1319 , H01L2224/16105 , H01L2224/81193 , H01L2224/81194 , H01L2224/81345 , H01L2224/81385 , H01L2924/01006 , H01L2924/01013 , H01L2924/01015 , H01L2924/01019 , H01L2924/01022 , H01L2924/01027 , H01L2924/01033 , H01L2924/01055 , H01L2924/01079 , H01L2924/014 , H01L2924/1461 , H01L2924/19043 , H01L2924/00
摘要： The present invention provides an interconnect. The interconnect comprises a pliable surface having a plurality of nanostructures disposed thereon, the pliable surface configured to allow the plurality of nanostructures to at least partially conform to a surface when the nanostructures come into contact therewith.
摘要翻译： 本发明提供一种互连。 互连包括柔性表面，其上设置有多个纳米结构，柔性表面构造成当纳米结构与其接触时允许多个纳米结构至少部分地与表面一致。
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公开(公告)号：US20090096999A1
公开(公告)日：2009-04-16
申请号：US11872751
申请日：2007-10-16
申请人： Robert E. Frahm , Omar D. Lopez
发明人： Robert E. Frahm , Omar D. Lopez
IPC分类号： G03B21/14
CPC分类号： G02B27/48 , B82Y20/00 , G02B3/14 , G02B26/005 , G02F1/01 , G02F1/0136 , G02F1/13 , G02F1/29 , G02F1/33 , G02F2001/294 , G02F2202/36 , G03B21/006 , H04N9/3129 , H04N9/3161
摘要： A representative embodiment of the invention provides a projection system having a laser source that incorporates a tunable liquid lens and a spatial light modulator adapted to modulate light generated by the laser source to project an image on a viewing screen. The tunable liquid lens is adapted to vary focal length, alignment or position with respect to an optical element that is external to the lens, ability to diffuse light, and/or polarization rotation angle.
摘要翻译： 本发明的代表性实施例提供一种具有激光源的投影系统，该激光源包括可调液体透镜和适于调制由激光源产生的光以在观看屏幕上投影图像的空间光调制器。 可调式液体透镜适于改变相对于透镜外部的光学元件的焦距，对准或位置，扩散光的能力和/或偏振旋转角度。
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公开(公告)号：US07502160B2
公开(公告)日：2009-03-10
申请号：US11681376
申请日：2007-03-02
申请人： Vladimir A. Aksyuk , Randy C. Giles , Omar D. Lopez , Roland Ryf
发明人： Vladimir A. Aksyuk , Randy C. Giles , Omar D. Lopez , Roland Ryf
CPC分类号： G02B26/0833 , G02B27/48
摘要： A laser projector having a configurable spatial light modulator (SLM) adapted to display various spatial modulation patterns and redirect illumination from a laser to form an image on the viewing screen. The laser projector drives the SLM to change spatial modulation patterns at a rate that causes the corresponding sequence of projected images to fuse to mitigate appearance of speckle in the resulting fused image. The SLM can be designed to redirect the illumination using either diffraction or specular reflection of light from the displayed spatial modulation pattern. In one embodiment, the SLM is a MEMS device having an array of individually addressable mirrors supported over a substrate and adapted to move (e.g., translate and/or rotate) with respect to the substrate.
摘要翻译： 一种具有可配置空间光调制器（SLM）的激光投影仪，其适于显示各种空间调制图案，并且从激光器重定向照明以在观看屏幕上形成图像。 激光投影机驱动SLM以以使得相应的投影图像序列融合的速率来改变空间调制图案，以减轻所得融合图像中斑点的外观。 SLM可以被设计成使用来自显示的空间调制图案的光的衍射或镜面反射来重定向照明。 在一个实施例中，SLM是具有支撑在衬底上并适于相对于衬底移动（例如平移和/或旋转）的单独可寻址镜的阵列的MEMS器件。
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54.发明授权Apparatus having a layer of material configured as a reservoir having an interior capable of holding a liquid 有权具有被配置为具有能够容纳液体的内部的储存器的材料层的装置公开(公告)号：US07659591B2
公开(公告)日：2010-02-09
申请号：US12199236
申请日：2008-08-27
IPC分类号： H01L29/788
CPC分类号： B81C1/00476 , B81B2201/038 , B81C1/00801
摘要： The present invention provides an apparatus. The apparatus, in one embodiment, includes an actuator located over a substrate, a movable feature located over and coupled to the actuator, and a layer of material located above the actuator and movable feature and not constituting part of a beam/spring associated with the movable feature, the layer of material configured as a reservoir having an interior capable of holding a liquid, the movable feature being exposed to the interior.
摘要翻译： 本发明提供一种装置。 在一个实施例中，该装置包括位于基板上方的致动器，位于致动器上方并联接到致动器的可移动特征，以及位于致动器和可移动特征上方的材料层，并且不构成与该致动器相关联的梁/弹簧的一部分 可移动特征，所述材料层被构造为具有能够保持液体的内部的储存器，所述可移动特征暴露于内部。
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55.发明申请公开(公告)号：US20070292981A1
公开(公告)日：2007-12-20
申请号：US11425100
申请日：2006-06-19
IPC分类号： H01L21/00
CPC分类号： B81C1/00476 , B81B2201/038 , B81C1/00801
摘要： The present invention provides a process and an apparatus. The process, in one embodiment, includes providing a micro-electro-mechanical system (MEMS) device, the micro-electro-mechanical system (MEMS) device including an actuator coupled to a movable feature, sacrificial material fixing the actuator and movable feature with respect to one another, and a layer of material located over the actuator, movable feature and sacrificial material. The process may further include removing only a portion of the layer of material to expose the sacrificial material, and subjecting the exposed sacrificial material to an etchant to release the movable feature.
摘要翻译： 本发明提供一种方法和装置。 在一个实施例中，该过程包括提供微机电系统（MEMS）装置，微机电系统（MEMS）装置包括耦合到可移动特征的致动器，将致动器和可移动特征固定的牺牲材料 相对于彼此，以及位于致动器上方的材料层，可移动特征和牺牲材料。 该方法还可以包括仅去除材料层的一部分以暴露牺牲材料，以及将暴露的牺牲材料经历蚀刻剂以释放可移动特征。
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公开(公告)号：US06781744B1
公开(公告)日：2004-08-24
申请号：US10459108
申请日：2003-06-11
IPC分类号： G02B2600
CPC分类号： G02B6/357 , B81B3/0062 , B81B2201/042 , G02B6/3518 , G02B26/0841
摘要： A MEMS device having a movable mirror and a movable actuator plate mechanically coupled together such that a relatively small displacement of the plate results in mirror rotation by a relatively large angle. In a representative embodiment, the mirror and actuator plate are supported on a substrate. The actuator plate moves in response to a voltage difference applied between the plate and an electrode located on the substrate beneath that plate. One or more springs attached to the plate provide a counteracting restoring force when they are stretched from their rest positions by the plate motion. A spring attached between the actuator plate and the mirror transfers the motion of the actuator plate to the mirror such that, when the actuator plate moves toward the substrate, the mirror moves away from the substrate. A representative MEMS device of the invention configured with a mirror that is about 100 &mgr;m in length is capable of producing the mirror rotation angle of about 15 degrees using an actuator voltage of only about 50 V.
摘要翻译： MEMS器件具有可移动反射镜和机械耦合在一起的可移动致动器板，使得板的相对小的位移导致反射镜旋转相对较大的角度。 在代表性的实施例中，反射镜和致动器板被支撑在基板上。 致动器板响应于施加在板和位于该板下方的衬底上的电极之间的电压差而移动。 连接到板上的一个或多个弹簧当它们通过板运动从其静止位置拉伸时提供抵消恢复力。 附接在致动器板和反射镜之间的弹簧将致动器板的运动传递到反射镜，使得当致动器板向基板移动时，反射镜远离基板移动。 配置有长度大约为100微米的反射镜的本发明的代表性MEMS器件能够使用仅约50V的致动器电压产生约15度的反射镜旋转角度。
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公开(公告)号：US07862183B2
公开(公告)日：2011-01-04
申请号：US11872751
申请日：2007-10-16
申请人： Robert E. Frahm , Omar D. Lopez
发明人： Robert E. Frahm , Omar D. Lopez
IPC分类号： G03B21/14
CPC分类号： G02B27/48 , B82Y20/00 , G02B3/14 , G02B26/005 , G02F1/01 , G02F1/0136 , G02F1/13 , G02F1/29 , G02F1/33 , G02F2001/294 , G02F2202/36 , G03B21/006 , H04N9/3129 , H04N9/3161
摘要： A representative embodiment of the invention provides a projection system having a laser source that incorporates a tunable liquid lens and a spatial light modulator adapted to modulate light generated by the laser source to project an image on a viewing screen. The tunable liquid lens is adapted to vary focal length, alignment or position with respect to an optical element that is external to the lens, ability to diffuse light, and/or polarization rotation angle.
摘要翻译： 本发明的代表性实施例提供一种具有激光源的投影系统，该激光源包括可调液体透镜和适于调制由激光源产生的光以在观看屏幕上投影图像的空间光调制器。 可调式液体透镜适于改变相对于透镜外部的光学元件的焦距，对准或位置，扩散光的能力和/或偏振旋转角度。
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58.发明授权Process for manufacturing an apparatus that protects features during the removal of sacrificial materials 失效用于制造在去除牺牲材料期间保护特征的装置的方法公开(公告)号：US07452741B2
公开(公告)日：2008-11-18
申请号：US11425100
申请日：2006-06-19
IPC分类号： H01L21/00
CPC分类号： B81C1/00476 , B81B2201/038 , B81C1/00801
摘要： The present invention provides a process for manufacturing an apparatus. The process, in one embodiment, includes providing a micro-electro-mechanical system (MEMS) device, the micro-electro-mechanical system (MEMS) device including an actuator coupled to a movable feature, sacrificial material fixing the actuator and movable feature with respect to one another, and a layer of material located over the actuator, movable feature and sacrificial material. The process may further include removing only a portion of the layer of material to expose the sacrificial material, and subjecting the exposed sacrificial material to an etchant to release the movable feature.
摘要翻译： 本发明提供一种制造装置的方法。 在一个实施例中，该过程包括提供微机电系统（MEMS）装置，微机电系统（MEMS）装置包括耦合到可移动特征的致动器，将致动器和可移动特征固定的牺牲材料 相对于彼此，以及位于致动器上方的材料层，可移动特征和牺牲材料。 该方法还可以包括仅去除材料层的一部分以暴露牺牲材料，以及将暴露的牺牲材料经历蚀刻剂以释放可移动特征。
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59.发明授权公开(公告)号：US06998758B2
公开(公告)日：2006-02-14
申请号：US10455082
申请日：2003-06-05
CPC分类号： G02B26/06
摘要： A MEMS device having a deformable mirror. In a representative embodiment, the MEMS device includes a deformable membrane supporting a plurality of light-reflecting segments that form the deformable mirror. One or more actuators, at least one of which is configured to apply torque to a side of the membrane, are used to deform the membrane. Membrane deformation causes the segments to change orientation and thereby change the shape of the minor. A representative MEMS device of the invention enables segment displacements in two directions and thereby realizes effective mirror curvature values in the range from about −2 mm−1 to about +2 mm−1.
摘要翻译： 具有可变形反射镜的MEMS器件。 在代表性的实施例中，MEMS器件包括支撑形成可变形反射镜的多个光反射段的可变形膜。 用于使膜变形的一个或多个致动器（其中至少一个构造成向膜的一侧施加扭矩）。 膜变形导致片段改变取向，从而改变镜子的形状。 本发明的代表性的MEMS器件使得能够在两个方向上的段位移，从而实现在约-2mm -1至约+2mm -1的范围内的有效镜曲率值 >。
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