公开(公告)号：US07746536B2

公开(公告)日：2010-06-29

申请号：US11230502

申请日：2005-09-21

Applicant: Soon-cheol Kweon ,  Hyung-jae Shin ,  Byung-hee Jeon ,  Seok-kwan Hong ,  Che-heung Kim ,  Sang-hun Lee

Inventor： Soon-cheol Kweon ,  Hyung-jae Shin ,  Byung-hee Jeon ,  Seok-kwan Hong ,  Che-heung Kim ,  Sang-hun Lee

IPC: G02B26/00 ,  H02N2/00

CPC classification number: H01H59/0009 ,  H01H1/0036

Abstract: A micro thin-film structure, a micro electro-mechanical system (MEMS) switch, and methods of fabricating them. The micro thin-film structure includes at least two thin-films having different properties and laminated in sequence to form an upper layer and a lower layer, wherein an interface between the upper and lower layers is formed to be oriented to at least two directions. The micro thin film structure, and method of forming, may be applied to a movable electrode of an MEMS switch. The thin-film structure may be formed by forming through-holes in the lower layer, and depositing the upper layer in the form of being engaged in the through-holes. Alternatively, the thin-film structure may be made by forming prominence and depression parts on the top side of the lower layer and then depositing the upper layer on the top side of the lower layer having the prominence and depression parts.

Abstract translation: 微型薄膜结构，微机电系统（MEMS）开关及其制造方法。 该微薄膜结构包括至少两层具有不同性质的薄膜并依次层叠以形成上层和下层，其中上层和下层之间的界面形成为至少朝两个方向取向。 微型薄膜结构和形成方法可以应用于MEMS开关的可动电极。 薄膜结构可以通过在下层中形成通孔而形成，并且以接合在通孔中的形式沉积上层。 或者，薄膜结构可以通过在下层的顶侧上形成突起和凹陷部分，然后将上层沉积在具有突出部分和凹陷部分的下层的顶侧上而制成。

公开(公告)号：US20100142024A1

公开(公告)日：2010-06-10

申请号：US12539255

申请日：2009-08-11

Applicant: Che-heung Kim

Inventor： Che-heung Kim

IPC: G02B26/02 ,  B05D5/06

CPC classification number: G02B26/02 ,  G02B6/353

Abstract: A micro shutter device and a method of manufacturing the micro shutter device are provided. A transparent substrate is provided. A barrier is formed on the substrate to partition a unit pixel. A pattern layer is formed with a transparent material to have a transparent first pattern portion on the substrate in the unit pixel. A movable plate is arranged to face the pattern layer, has an opaque second pattern layer corresponding to a shape of the first pattern portion, and is configured to transmit light therethrough except the second pattern portion. An actuator is for moving the movable plate. Therefore, light leakage due to diffraction can be prevented, resulting in increasing contrast ratio and improving light efficiency.

Abstract translation: 提供微型快门装置和制造微型快门装置的方法。 提供透明基板。 在基板上形成屏障以分隔单位像素。 图案层由透明材料形成，以在单位像素中的基板上具有透明的第一图案部分。 可移动板被布置为面对图案层，具有对应于第一图案部分的形状的不透明的第二图案层，并且被配置为透射除了第二图案部分之外的光。 致动器用于移动可动板。 因此，可以防止由于衍射引起的漏光，从而增加对比度并提高光效。

公开(公告)号：US20100118373A1

公开(公告)日：2010-05-13

申请号：US12537743

申请日：2009-08-07

Applicant: Che-heung Kim

Inventor： Che-heung Kim

IPC: G02B26/02 ,  B05D5/12

CPC classification number: G02B26/02

Abstract: A micro shutter device and a method of manufacturing the same are provided. A barrier is provided to define a unit pixel. Film actuators are formed within the unit pixel. The film actuators are configured to be bent in opposite directions to each other from a substrate so that light passing through the substrate from an external light source is blocked in a voltage non-applied state, and to be straightened perpendicularly to the substrate so that the light is transmitted upon voltage application. Accordingly, it is possible to increase the aperture ratio and thus improve the light efficiency. Furthermore, it is possible to reduce voltage necessary to drive the film actuators and thus increase the drive speed.

Abstract translation: 提供一种微型快门装置及其制造方法。 提供屏障来定义单位像素。 薄膜致动器形成在单位像素内。 膜致动器被配置为从基板彼此相反的方向弯曲，使得从外部光源穿过基板的光在未施加电压的状态下被阻挡，并且垂直于基板被拉直，使得 电压施加时发光。 因此，可以增加开口率，从而提高光效率。 此外，可以减少驱动膜致动器所需的电压，从而提高驱动速度。

公开(公告)号：US07683747B2

公开(公告)日：2010-03-23

申请号：US11179460

申请日：2005-07-13

Applicant: Il-jong Song ,  Dong-ha Shim ,  Hyung-jae Shin ,  Soon-cheol Kweon ,  Che-heung Kim ,  Sang-hun Lee ,  Young-tack Hong

Inventor： Il-jong Song ,  Dong-ha Shim ,  Hyung-jae Shin ,  Soon-cheol Kweon ,  Che-heung Kim ,  Sang-hun Lee ,  Young-tack Hong

IPC: H01H51/22

CPC classification number: H01H59/0009 ,  H01H2059/0018

Abstract: A MEMS RF-switch is provided for controlling switching on/off of transmission of AC signals. The MEMS RF-switch of the present invention includes: a first electrode coupled to one terminal of the power source; a semiconductor layer combined with an upper surface of the first electrode, and forming a potential barrier to become insulated when a bias signal is applied from the power source; and a second electrode disposed at a predetermined distance away from the semiconductor layer, and being coupled to the other terminal of the power source, wherein the second electrode contacts the semiconductor layer when a bias signal is applied from the power source. Therefore, although the bias signal may not be cut off, free electrons and holes are recombined in the semiconductor layer, whereby charge buildup and sticking can be prevented.

Abstract translation: 提供了用于控制AC信号的传输的接通/断开的MEMS RF开关。 本发明的MEMS RF开关包括：耦合到电源的一个端子的第一电极; 与所述第一电极的上表面组合的半导体层，并且当从所述电源施加偏置信号时，形成电位势垒以变得绝缘; 以及第二电极，设置在距离半导体层预定距离处，并且耦合到电源的另一个端子，其中当从电源施加偏置信号时，第二电极接触半导体层。 因此，尽管偏置信号可能不会被切断，但自由电子和空穴在半导体层中重新结合，从而可以防止电荷积累和粘附。

公开(公告)号：US07548144B2

公开(公告)日：2009-06-16

申请号：US11251804

申请日：2005-10-18

Applicant: Che-heung Kim ,  Hyung-jae Shin ,  Soon-cheol Kweon ,  Kyu-sik Kim ,  Sang-hun Lee

Inventor： Che-heung Kim ,  Hyung-jae Shin ,  Soon-cheol Kweon ,  Kyu-sik Kim ,  Sang-hun Lee

IPC: H01H51/22

CPC classification number: H01H59/0009 ,  H01H2059/0054

Abstract: A micro electro mechanical system switch and a method of fabricating the micro electro mechanical system switch. The micro electro mechanical system switch includes a substrate, a plurality of signal lines formed on the substrate and including switching contact points and a plurality of immovable electrodes formed among the signal lines on the substrate. A plurality of anchors protrude from the substrate to predetermined heights and support at least two actuating beams installed on an identical plane so as to move up and down. A connecting unit connects the at least two actuating beams. A support unit provided on the substrate supports the connecting unit and contacting plates are installed on lower surfaces of the at least two actuating beams so as to contact the switching contact points.

Abstract translation: 微机电系统开关和微机电系统开关的制造方法。 微电子机械系统开关包括基板，形成在基板上的多个信号线，并且包括开关接触点和形成在基板上的信号线之间的多个不可移动电极。 多个锚固体从基板突出到预定高度，并且支撑安装在同一平面上以便上下移动的至少两个致动梁。 连接单元连接至少两个致动梁。 设置在基板上的支撑单元支撑连接单元，并且接触板安装在至少两个致动梁的下表面上，以便接触开关接触点。

公开(公告)号：US07420444B2

公开(公告)日：2008-09-02

申请号：US11385700

申请日：2006-03-22

Applicant: Jun-o Kim ,  Sang-wook Kwon ,  Che-heung Kim ,  Jong-seok Kim ,  Hee-moon Jeong ,  Young-tack Hong ,  Sang-hun Lee

Inventor： Jun-o Kim ,  Sang-wook Kwon ,  Che-heung Kim ,  Jong-seok Kim ,  Hee-moon Jeong ,  Young-tack Hong ,  Sang-hun Lee

IPC: H01P1/10

CPC classification number: H01P1/127 ,  B81B3/0013 ,  B81B2201/016 ,  H01H59/0009

Abstract: An RF MEMS switch having asymmetrical spring rigidity. The RF MEMS switch has supporting members spaced apart in a certain interval on a substrate, a membrane being a motion member suspended by plural spring members extended on both sides of the membrane, and a bottom electrode being a contact surface on an upper surface of the substrate facing a bottom surface of the membrane, wherein the plural spring members placed on opposite sides of the membrane have asymmetrical rigidity, and a portion of the membrane on a side of stronger spring rigidity is first separated from the contact surface when the RF MEMS switch is turned off. The present invention has an advantage of easy separation of the switch from the contact surface, when the switch is turned off, due to the different rigidity of the springs located on the sides of the membrane.

Abstract translation: 具有不对称弹簧刚度的RF MEMS开关。 RF MEMS开关具有在基板上以一定间隔隔开的支撑构件，膜是由在膜的两侧延伸的多个弹簧构件悬挂的运动构件，底电极是位于膜的上表面上的接触表面 衬底面向膜的底表面，其中放置在膜的相对侧上的多个弹簧构件具有不对称的刚性，并且当RF MEMS开关在膜的另一侧具有更强的弹簧刚度的一部分首先与接触表面分离 已关闭 本发明的优点在于，当开关断开时，由于位于膜侧面的弹簧的刚度不同，开关与接触表面容易分离。

公开(公告)号：US07251069B2

公开(公告)日：2007-07-31

申请号：US11258196

申请日：2005-10-26

Applicant: Che-heung Kim ,  Hyung-jae Shin ,  Soon-cheol Kweon ,  Kyu-sik Kim ,  Sang-hun Lee

Inventor： Che-heung Kim ,  Hyung-jae Shin ,  Soon-cheol Kweon ,  Kyu-sik Kim ,  Sang-hun Lee

IPC: G02B26/00 ,  H01P1/10

CPC classification number: H01H1/5822 ,  H01H59/0009 ,  H01H2059/0054 ,  H01H2059/0063

Abstract: A micro electro mechanical system switch and a method of fabricating the same. The micro electro mechanical system switch includes a substrate a plurality of signal lines formed at sides an upper surface of the substrate and including switching contact points and a plurality of immovable electrodes on the upper surface of the substrate and between the plurality of signal lines. An inner actuating member performs a seesaw based on a center of the substrate and together with an outer actuating member. Pushing rods are formed at ends of an upper surface of the inner actuating member with ends protruding from and overlapping with an upper portion of the outer actuating member. Contacting members are formed on a lower surface of the outer actuating member so as to be pushed by the pushing rods and contacting the switching contact points of the signal lines.

Abstract translation: 一种微机电系统开关及其制造方法。 微电子机械系统开关包括基板，在基板的上表面的侧面形成多个信号线，并且包括开关接触点和在基板的上表面上和多个信号线之间的多个不可移动的电极。 内部致动构件基于衬底的中心并与外部致动构件一起执行跷跷板。 推杆形成在内致动构件的上表面的端部处，其端部从外致动构件的上部突出并与其重叠。 接触构件形成在外致动构件的下表面上，以被推杆推动并接触信号线的开关接触点。

公开(公告)号：US20070024390A1

公开(公告)日：2007-02-01

申请号：US11417242

申请日：2006-05-04

Applicant: Young-tack Hong ,  Seok-chul Yun ,  Seok-mo Chang ,  Sang-wook Kwon ,  Che-heung Kim ,  Jong-seok Kim ,  Hee-moon Jeong ,  Sang-hun Lee ,  Jun-o Kim ,  In-sang Song

Inventor： Young-tack Hong ,  Seok-chul Yun ,  Seok-mo Chang ,  Sang-wook Kwon ,  Che-heung Kim ,  Jong-seok Kim ,  Hee-moon Jeong ,  Sang-hun Lee ,  Jun-o Kim ,  In-sang Song

IPC: H01P1/10

CPC classification number: H01H59/0009

Abstract: A vertical comb actuator radio frequency (RF) micro-electro-mechanical system (MEMS) switch. The RF MEMS switch includes a substrate; first and second signal lines spaced at a predetermined interval from each other and deposited on an upper surface of the substrate; an actuator positioned over the first and second signal lines when viewed from the upper surface of the substrate and spaced at a predetermined interval from the first and second signal lines; and a fixing portion positioned over the actuator when viewed from the upper surface of the substrate, wherein the fixing portion permits the actuator to come in contact with the first and second signal lines when a predetermined driving voltage is applied. Thus, it is possible to prevent the actuator from sticking to the substrate. In addition, the RF MEMS switch can be operated with a low voltage and insertion loss and power loss can be reduced.

Abstract translation: 立式梳子致动器射频（RF）微机电系统（MEMS）开关。 RF MEMS开关包括基板; 第一和第二信号线以预定间隔彼此间隔开并沉积在基板的上表面上; 当从所述基板的上表面观察并且以与所述第一信号线和所述第二信号线预定的间隔隔开时，所述致动器位于所述第一和第二信号线上方; 以及当从基板的上表面观察时定位在致动器上方的固定部分，其中当施加预定的驱动电压时，固定部分允许致动器与第一和第二信号线接触。 因此，可以防止致动器粘附到基板。 此外，RF MEMS开关可以在低电压和插入损耗下工作，并且可以降低功率损耗。

公开(公告)号：US20070018760A1

公开(公告)日：2007-01-25

申请号：US11429364

申请日：2006-05-08

Applicant: Hee-moon Jeong ,  Sang-wook Kwon ,  Che-heung Kim ,  Jong-seok Kim ,  Jun-o Kim ,  Young-tack Hong ,  In-sang Song ,  Sang-hun Lee

Inventor： Hee-moon Jeong ,  Sang-wook Kwon ,  Che-heung Kim ,  Jong-seok Kim ,  Jun-o Kim ,  Young-tack Hong ,  In-sang Song ,  Sang-hun Lee

IPC: H01H51/22

CPC classification number: H01H59/0009 ,  H01H2059/0054

Abstract: A MEMS switch including a substrate at least one fixed electrode formed on top of the substrate and at least one restoring electrode formed on top of the substrate and formed at a lateral surface of the fixed electrode. At least one signal line is formed on top of the substrate and has a switching contact part. A movable electrode is distantly connected from the top of the substrate at a predetermined space via an elastic connector on the substrate and at least one contact member formed on a bottom surface of the movable electrode or on a bottom surface of the elastic connector for attachment to or detachment from the switching contact part. At least one pivot boss is formed on either the bottom surface of the movable electrode or on the top of the substrate.

Abstract translation: 一种MEMS开关，其包括形成在所述基板的顶部上的至少一个固定电极的基板和形成在所述基板的顶部上并形成在所述固定电极的侧表面上的至少一个恢复电极。 至少一个信号线形成在基板的顶部上并且具有开关接触部分。 可移动电极通过基板上的弹性连接器在预定空间处从基板的顶部远离连接，以及形成在可动电极的底表面上或弹性连接器的底表面上的至少一个接触件，用于附接到 或从开关接触部分拆卸。 至少一个枢转凸起形成在可动电极的底表面上或衬底的顶部上。