公开(公告)号：US07759591B2

公开(公告)日：2010-07-20

申请号：US11513036

申请日：2006-08-31

Applicant: Che-heung Kim ,  Hyung Choi ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Dong-kyun Kim ,  Young-tack Hong ,  Jong-seok Kim ,  Chang-seung Lee

Inventor： Che-heung Kim ,  Hyung Choi ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Dong-kyun Kim ,  Young-tack Hong ,  Jong-seok Kim ,  Chang-seung Lee

IPC: H01H57/00

CPC classification number: H01H59/0009 ,  H01H35/346 ,  H01H2221/02

Abstract: A pneumatic micro electro mechanical system switch includes a substrate, a pneumatic actuating unit disposed on the substrate; the pneumatic actuating unit having a plurality of variable air cavities communicating such that when one of the plurality of variable air cavities is compressed, the rest are expanded; a signal line having a plurality of switching lines, each of which passes through a corresponding one of the plurality of variable air cavities and has switching ends disposed in a spaced-apart relation with each other in the corresponding one of the plurality of variable air cavities; a movable switching unit to connect the first and the second switching ends of each of the plurality of switching lines if one of the plurality of variable air cavities is compressed; and a driving unit to drive the pneumatic actuating unit so as to selectively compress the plurality of variable air cavities.

Abstract translation: 气动微机电系统开关包括基板，设置在基板上的气动执行单元; 所述气动致动单元具有多个可变空气腔，所述多个可变空气腔连通，使得当所述多个可变空气腔中的一个被压缩时，其余部分被膨胀; 信号线具有多个切换线，每个切换线通过多个可变空气腔中的相应一个，并且具有相互间隔开的多个可变空气腔中相应的一个中的彼此间隔开的切换端 ; 如果多个可变空气腔中的一个被压缩，则可移动切换单元连接多个切换线中的每一个的第一和第二切换端; 以及驱动单元以驱动气动致动单元，以选择性地压缩多个可变空气腔。

公开(公告)号：US07446634B2

公开(公告)日：2008-11-04

申请号：US11429364

申请日：2006-05-08

Applicant: Hee-moon Jeong ,  Sang-wook Kwon ,  Che-heung Kim ,  Jong-seok Kim ,  Jun-o Kim ,  Young-tack Hong ,  In-sang Song ,  Sang-hun Lee

Inventor： Hee-moon Jeong ,  Sang-wook Kwon ,  Che-heung Kim ,  Jong-seok Kim ,  Jun-o Kim ,  Young-tack Hong ,  In-sang Song ,  Sang-hun Lee

IPC: H01H51/22

CPC classification number: H01H59/0009 ,  H01H2059/0054

Abstract: A MEMS switch including a substrate at least one fixed electrode formed on top of the substrate and at least one restoring electrode formed on top of the substrate and formed at a lateral surface of the fixed electrode. At least one signal line is formed on top of the substrate and has a switching contact part. A movable electrode is distantly connected from the top of the substrate at a predetermined space via an elastic connector on the substrate and at least one contact member formed on a bottom surface of the movable electrode or on a bottom surface of the elastic connector for attachment to or detachment from the switching contact part. At least one pivot boss is formed on either the bottom surface of the movable electrode or on the top of the substrate.

Abstract translation: 一种MEMS开关，其包括形成在所述基板的顶部上的至少一个固定电极的基板和形成在所述基板的顶部上并形成在所述固定电极的侧表面上的至少一个恢复电极。 至少一个信号线形成在基板的顶部上并且具有开关接触部分。 可移动电极通过基板上的弹性连接器在预定空间处从基板的顶部远离连接，以及形成在可动电极的底表面上或弹性连接器的底表面上的至少一个接触件，用于附接到 或从开关接触部分拆卸。 至少一个枢转凸起形成在可动电极的底表面上或衬底的顶部上。

公开(公告)号：US20070195464A1

公开(公告)日：2007-08-23

申请号：US11581435

申请日：2006-10-17

Applicant: Sang-wook Kwon ,  Jong-seok Kim ,  In-sang Song ,  Sang-hun Lee ,  Dong-kyun Kim ,  Jung-han Choi ,  Young-tack Houng ,  Che-heung Kim

Inventor： Sang-wook Kwon ,  Jong-seok Kim ,  In-sang Song ,  Sang-hun Lee ,  Dong-kyun Kim ,  Jung-han Choi ,  Young-tack Houng ,  Che-heung Kim

IPC: G11B5/48

CPC classification number: H01H1/0036 ,  H01H2057/006 ,  H01P1/127

Abstract: A downward type micro electro mechanical system (EMS) switch and a method of fabricating the same is provided. The downward type MEMS switch includes first and second cavities formed in a substrate, first and second actuators formed on upper portions of the first and second cavities, first and second fixing lines formed on an upper surface of the substrate and not overlapped with the first and second cavities, and a contact pad which is spaced apart at a predetermined distance from surfaces of the first fixing line and the second fixing line but which can be contacted with the first fixing line and the second fixing line when the first actuator and the second actuator are driven. The contact pad, which is actuated downward by piezoelectricity, is fabricated as it shares a layer with a RF signal line, after the RF signal line is fabricated.

Abstract translation: 提供了向下型的微机电系统（EMS）开关及其制造方法。 向下型MEMS开关包括形成在基板中的第一和第二空腔，形成在第一和第二空腔的上部的第一和第二致动器，形成在基板的上表面上的第一和第二固定线， 第二空腔和接触垫，其间距第一固定线和第二固定线的表面隔开预定距离，但是当第一致动器和第二致动器能够与第一固定线和第二固定线接触时 被驱动。 在RF信号线被制造之后，通过压电性向下致动的接触垫被制造成与RF信号线共享一层。

公开(公告)号：US20070140614A1

公开(公告)日：2007-06-21

申请号：US11513036

申请日：2006-08-31

Applicant: Che-heung Kim ,  Hyung Choi ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Dong-Kyun Kim ,  Young-tack Hong ,  Jong-seok Kim

Inventor： Che-heung Kim ,  Hyung Choi ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon ,  Dong-Kyun Kim ,  Young-tack Hong ,  Jong-seok Kim

IPC: G02B6/26

CPC classification number: H01H59/0009 ,  H01H35/346 ,  H01H2221/02

Abstract: A pneumatic micro electro mechanical system switch includes a substrate, a pneumatic actuating unit disposed on the substrate; the pneumatic actuating unit having a plurality of variable air cavities communicating such that when one of the plurality of variable air cavities is compressed, the rest are expanded; a signal line having a plurality of switching lines, each of which passes through a corresponding one of the plurality of variable air cavities and has switching ends disposed in a spaced-apart relation with each other in the corresponding one of the plurality of variable air cavities; a movable switching unit to connect the first and the second switching ends of each of the plurality of switching lines if one of the plurality of variable air cavities is compressed; and a driving unit to drive the pneumatic actuating unit so as to selectively compress the plurality of variable air cavities.

Abstract translation: 气动微机电系统开关包括基板，设置在基板上的气动执行单元; 所述气动致动单元具有多个可变空气腔，所述多个可变空气腔连通，使得当所述多个可变空气腔中的一个被压缩时，其余部分被膨胀; 信号线具有多个切换线，每个切换线通过多个可变空气腔中的相应一个，并且具有相互间隔开的多个可变空气腔中相应的一个中的彼此间隔开的切换端 ; 如果多个可变空气腔中的一个被压缩，则可移动切换单元连接多个切换线中的每一个的第一和第二切换端; 以及驱动单元以驱动气动致动单元，以选择性地压缩多个可变空气腔。

公开(公告)号：US20070122074A1

公开(公告)日：2007-05-31

申请号：US11471511

申请日：2006-06-21

Applicant: Che-heung Kim ,  Hyung Choi ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon

Inventor： Che-heung Kim ,  Hyung Choi ,  In-sang Song ,  Sang-hun Lee ,  Sang-wook Kwon

IPC: G02B6/26 ,  G02B6/42

CPC classification number: H01H59/0009 ,  H01H1/20

Abstract: A MEMS (micro electro mechanical system) switch, which includes a substrate; a fixed electrode formed on an upper side of the substrate; a signal line formed on both sides of the fixed electrode; a contact member formed on an upper side of the signal line at a distance from said fixed electrode and contacting an edging portion of the signal line; a supporting member supporting the contact member to be movable; and a moving electrode disposed on an upper side of the supporting member.

公开(公告)号：US20060181377A1

公开(公告)日：2006-08-17

申请号：US11345379

申请日：2006-02-02

Applicant: Soon-cheol Kweon ,  Hyung-jae Shin ,  Che-heung Kim ,  Sang-hun Lee ,  Mark Da Silva ,  Siebe Bouwstra

Inventor： Soon-cheol Kweon ,  Hyung-jae Shin ,  Che-heung Kim ,  Sang-hun Lee ,  Mark Da Silva ,  Siebe Bouwstra

IPC: H01H51/22

CPC classification number: H01H59/0009 ,  H01H2059/0054 ,  H01H2059/0081

Abstract: A switch pad for switching signal flow and a micro-switch having the same. The switch pad comprises a body formed so that as approaching opposite end portions from a central portion of the body, the body is more remotely spaced from a horizontal plane containing a top surface of the electrostatic driving unit. With the body of the switch pad formed in this manner, the switch pad can be more stably driven.

Abstract translation: 用于切换信号流的开关板和具有该开关的微型开关。 开关板包括主体，其形成为使得当与主体的中心部分接近相对的端部部分时，主体与包含静电驱动单元的顶表面的水平平面更远离间隔。 以这种方式形成的开关垫的主体，可以更稳定地驱动开关垫。

公开(公告)号：US20060132891A1

公开(公告)日：2006-06-22

申请号：US11258196

申请日：2005-10-26

Applicant: Che-heung Kim ,  Hyung-jae Shin ,  Soon-cheol Kweon ,  Kyu-sik Kim ,  Sang-hun Lee

Inventor： Che-heung Kim ,  Hyung-jae Shin ,  Soon-cheol Kweon ,  Kyu-sik Kim ,  Sang-hun Lee

IPC: G02B26/00

CPC classification number: H01H1/5822 ,  H01H59/0009 ,  H01H2059/0054 ,  H01H2059/0063

Abstract: A micro electro mechanical system switch and a method of fabricating the same. The micro electro mechanical system switch includes a substrate a plurality of signal lines formed at sides an upper surface of the substrate and including switching contact points and a plurality of immovable electrodes on the upper surface of the substrate and between the plurality of signal lines. An inner actuating member performs a seesaw based on a center of the substrate and together with an outer actuating member. Pushing rods are formed at ends of an upper surface of the inner actuating member with ends protruding from and overlapping with an upper portion of the outer actuating member. Contacting members are formed on a lower surface of the outer actuating member so as to be pushed by the pushing rods and contacting the switching contact points of the signal lines.

Abstract translation: 一种微机电系统开关及其制造方法。 微电子机械系统开关包括基板，在基板的上表面的侧面形成多个信号线，并且包括开关接触点和在基板的上表面上和多个信号线之间的多个不可移动的电极。 内部致动构件基于衬底的中心并与外部致动构件一起执行跷跷板。 推杆形成在内致动构件的上表面的端部处，其端部从外致动构件的上部突出并与其重叠。 接触构件形成在外致动构件的下表面上，以被推杆推动并接触信号线的开关接触点。

公开(公告)号：US20060087716A1

公开(公告)日：2006-04-27

申请号：US11230502

申请日：2005-09-21

Applicant: Soon-cheol Kweon ,  Hyung-jae Shin ,  Byung-hee Jeon ,  Seok-kwan Hong ,  Che-heung Kim ,  Sang-hun Lee

Inventor： Soon-cheol Kweon ,  Hyung-jae Shin ,  Byung-hee Jeon ,  Seok-kwan Hong ,  Che-heung Kim ,  Sang-hun Lee

IPC: G02B26/00

CPC classification number: H01H59/0009 ,  H01H1/0036

Abstract: A micro thin-film structure, a micro electro-mechanical system (MEMS) switch, and methods of fabricating them. The micro thin-film structure includes at least two thin-films having different properties and laminated in sequence to form an upper layer and a lower layer, wherein an interface between the upper and lower layers is formed to be oriented to at least two directions. The micro thin film structure, and method of forming, may be applied to a movable electrode of an MEMS switch. The thin-film structure may be formed by forming through-holes in the lower layer, and depositing the upper layer in the form of being engaged in the through-holes. Alternatively, the thin-film structure may be made by forming prominence and depression parts on the top side of the lower layer and then depositing the upper layer on the top side of the lower layer having the prominence and depression parts.

Abstract translation: 微型薄膜结构，微机电系统（MEMS）开关及其制造方法。 该微薄膜结构包括至少两层具有不同性质的薄膜并依次层叠以形成上层和下层，其中上层和下层之间的界面形成为至少朝两个方向取向。 微型薄膜结构和形成方法可以应用于MEMS开关的可动电极。 薄膜结构可以通过在下层中形成通孔而形成，并且以接合在通孔中的形式沉积上层。 或者，薄膜结构可以通过在下层的顶侧上形成突起和凹陷部分，然后将上层沉积在具有突出部分和凹陷部分的下层的顶侧上而制成。

公开(公告)号：US08730368B2

公开(公告)日：2014-05-20

申请号：US13397371

申请日：2012-02-15

Applicant: Jong-oh Kwon ,  Che-heung Kim

Inventor： Jong-oh Kwon ,  Che-heung Kim

IPC: H04N5/225 ,  G03B9/08 ,  G03B9/32 ,  H02N2/00

CPC classification number: G02B5/005 ,  G02B26/02 ,  G03B9/02 ,  G03B9/08 ,  G03B15/14 ,  H04N5/2254

Abstract: A light transmittance adjusting device is provided, including a first electrode, a second electrode, and a first elastomer layer disposed between the first and second electrodes. A light transmittance of the first elastomer layer is variable depending on a voltage applied thereto.

Abstract translation: 提供一种透光率调节装置，包括第一电极，第二电极和设置在第一和第二电极之间的第一弹性体层。 第一弹性体层的透光率根据施加到其上的电压而变化。

公开(公告)号：US08184356B2

公开(公告)日：2012-05-22

申请号：US12782386

申请日：2010-05-18

Applicant: Soon-cheol Kweon ,  Hyung-jae Shin ,  Byung-hee Jeon ,  Seok-kwan Hong ,  Che-heung Kim ,  Sang-hun Lee

Inventor： Soon-cheol Kweon ,  Hyung-jae Shin ,  Byung-hee Jeon ,  Seok-kwan Hong ,  Che-heung Kim ,  Sang-hun Lee

IPC: G02B26/00

CPC classification number: H01H59/0009 ,  H01H1/0036

Abstract: A micro thin-film structure, a micro electro-mechanical system (MEMS) switch, and methods of fabricating them. The micro thin-film structure includes at least two thin-films having different properties and laminated in sequence to form an upper layer and a lower layer, wherein an interface between the upper and lower layers is formed to be oriented to at least two directions. The micro thin film structure, and method of forming, may be applied to a movable electrode of an MEMS switch. The thin-film structure may be formed by forming through-holes in the lower layer, and depositing the upper layer in the form of being engaged in the through-holes. Alternatively, the thin-film structure may be made by forming prominence and depression parts on the top side of the lower layer and then depositing the upper layer on the top side of the lower layer having the prominence and depression parts.

Abstract translation: 微型薄膜结构，微机电系统（MEMS）开关及其制造方法。 该微薄膜结构包括至少两层具有不同性质的薄膜并依次层叠以形成上层和下层，其中上层和下层之间的界面形成为至少朝两个方向取向。 微型薄膜结构和形成方法可以应用于MEMS开关的可动电极。 薄膜结构可以通过在下层中形成通孔而形成，并且以接合在通孔中的形式沉积上层。 或者，薄膜结构可以通过在下层的顶侧上形成突起和凹陷部分，然后将上层沉积在具有突出部分和凹陷部分的下层的顶侧上而制成。