摘要:
Provided is a display device including an imaging unit that captures a moving image in a predetermined range in an image display direction, a moving body detection unit that detects whether or not a moving body is present in a predetermined range in the image display direction, an image analysis unit that analyzes the moving image captured by the imaging unit to detect whether or not a face is present, and a power control unit that controls power consumption with different patterns according to a plurality of modes that are set by combining whether or not the face detected by the image analysis unit is present and whether or not the moving body detected by the detection unit is present.
摘要:
A coating and developing system includes processing blocks of the same construction each built by stacking up a plurality of unit blocks including a film forming unit block and a developing unit block in layers. The processing blocks are arranged longitudinally between a carrier block and an interface block. The number of processing blocks like the processing blocks arranged between the carrier block and the interface block is adjusted to adjust the throughput of the coating and developing system. Thus, a coating and developing system capable of achieving a desired throughput can be easily designed and manufactured.
摘要:
An external laser light introducing device is constructed to introduce laser light from outside of an optical apparatus into inside so that the laser light is condensed on a target by a condenser lens located inside the optical apparatus. In this case, the external laser light introducing device comprises a pupil projection optical system for projecting the entrance pupil of the condenser lens on an external pupil located outside the optical apparatus and an optical axis aligning mechanism for practically aligning the optical axis of the laser light with that of the external pupil.
摘要:
A substrate heating apparatus includes a top plate arranged above a hot plate so that a vertical space is formed between the hot plate and the top plate. The top plate has an evacuated internal chamber serving as a vacuum insulating layer that suppresses heat transfer from a first surface of the top plate facing the hot plate to a second surface of the top plate opposite to the first surface. When heating the substrate, a gas flow flowing through the space between the hot plate and the top plate is generated.
摘要:
In the present invention, a plurality of exhaust paths connected to a plurality of cup bodies surrounding substrate holding portions respectively are joined together for common use, and the openings of exhaust rate adjustment sections provided on the exhaust paths are adjusted with reference to data in which combinations of the numbers of rotations of the substrate holding portions are associated with combinations of set exhaust rates of the exhaust paths when solution treatment is performed by rotating the substrate by the substrate holding portion. According to the present invention, the cup body can be exhausted at an intended exhaust rate at all times independently of the state where the substrate in which cup body is subjected to which process.
摘要:
A vehicle environmental service system includes an in-vehicle information terminal mounted in a vehicle, a center server provided in a center, and a provider terminal managed by an affiliated service provider providing various services to users. The in-vehicle information terminal is capable of communicating with the provider terminal directly or through the center server. The in-vehicle information terminal or the center server has a point calculating unit for determining whether safety driving and/or ecological driving is being performed with respect to each of the users based on prescribed criteria and calculating the number of points to be awarded based on the result of the determination. The center server has a database for managing total number of points obtained by accumulating the number of points to be awarded with respect to each of the users. The provider terminal has a service providing unit for providing a prescribed service in exchange for a prescribed number of points in the database and an advertisement generating unit for generating advertisement information of the affiliated service provider. The in-vehicle information terminal has a unit enabling the in-vehicle information terminal to receive the advertisement information from the provider terminal directly or through the center server.
摘要:
In a complex pipe, a plurality of pipe members containing at least a pipe member for liquid and a pipe member for electricity are fixed in parallel arrangement. One end of the complex pipe is connected to a stationary equipment and the other end is connected to a movable member. The plurality of pipe members are integrally combined by a cover member having flexibility. A liquid supply pipe is inserted with a space in the pipe member for liquid. A fluid for temperature adjustment is supplied to the space between the pipe member for liquid and the liquid supply pipe.
摘要:
A coating and developing system has a first processing block, a second processing block, and a transfer block interposed between the first and the second processing block. A first direct carrying means carries substrates from a carrier block to the transfer block. The transfer block distributes the substrates to respective film forming unit blocks of the first and the second processing block. Substrates on which films have been formed by the first and the second processing block are collected temporarily in the transfer block. A second direct carrying means carries the substrate collected in the transfer block from the transfer block to an interface block. Use of the first and the second processing block can improve the throughput of the coating and developing system. Since a carrying route from the carrier block to the first processing block, and a carrying route from the carrier block to the second processing block are the same, a carrying program is easy to create.
摘要:
Disclosed is a substrate heating apparatus including a hot plate that heats a substrate, and a cooling plate that supports the substrate and moves between a first position (home position) and the second position above the hot plate to transfer wafers between the two positions. A heat-radiating fin structure is connected to the cooling plate to move together with the cooling plate. The fin structure is thermally connected to the cooling plate via heat pipes. A suction port is arranged so as to locate adjacent to the fin structure when the cooling plate is in the home position. The fin structure is cooled by a gas passing therethrough before flown into the suction port, whereby the cooling plate is cooled through heat transfer from the cooling plate to the fin structure through the heat pipes.
摘要:
In the present invention, a plurality of exhaust paths connected to a plurality of cup bodies surrounding substrate holding portions respectively are joined together for common use, and the openings of exhaust rate adjustment sections provided on the exhaust paths are adjusted with reference to data in which combinations of the numbers of rotations of the substrate holding portions are associated with combinations of set exhaust rates of the exhaust paths when solution treatment is performed by rotating the substrate by the substrate holding portion. According to the present invention, the cup body can be exhausted at an intended exhaust rate at all times independently of the state where the substrate in which cup body is subjected to which process.