External laser light introducing device
    53.
    发明授权
    External laser light introducing device 有权
    外部激光导入装置

    公开(公告)号:US07889428B2

    公开(公告)日:2011-02-15

    申请号:US11396595

    申请日:2006-04-04

    申请人: Shinichi Hayashi

    发明人: Shinichi Hayashi

    IPC分类号: G02B27/10

    摘要: An external laser light introducing device is constructed to introduce laser light from outside of an optical apparatus into inside so that the laser light is condensed on a target by a condenser lens located inside the optical apparatus. In this case, the external laser light introducing device comprises a pupil projection optical system for projecting the entrance pupil of the condenser lens on an external pupil located outside the optical apparatus and an optical axis aligning mechanism for practically aligning the optical axis of the laser light with that of the external pupil.

    摘要翻译: 构造外部激光导入装置,将来自光学装置的外部的激光引入到内部,使得激光通过位于光学装置内部的聚光透镜聚光在目标上。 在这种情况下,外部激光导入装置包括瞳孔投影光学系统,用于将聚光透镜的入射光瞳投射在位于光学装置外部的外部光瞳上,以及用于实际上对准激光的光轴的光轴对准机构 与外在的学生。

    Apparatus and method for heating substrate and coating and developing system
    54.
    发明授权
    Apparatus and method for heating substrate and coating and developing system 有权
    用于加热基材和涂层和显影系统的装置和方法

    公开(公告)号:US07812285B2

    公开(公告)日:2010-10-12

    申请号:US11205150

    申请日:2005-08-17

    IPC分类号: F27B5/14 C23C16/00

    摘要: A substrate heating apparatus includes a top plate arranged above a hot plate so that a vertical space is formed between the hot plate and the top plate. The top plate has an evacuated internal chamber serving as a vacuum insulating layer that suppresses heat transfer from a first surface of the top plate facing the hot plate to a second surface of the top plate opposite to the first surface. When heating the substrate, a gas flow flowing through the space between the hot plate and the top plate is generated.

    摘要翻译: 基板加热装置包括布置在热板上方的顶板,使得在热板和顶板之间形成垂直空间。 顶板具有用作真空绝热层的真空内部室,其抑制从面对热板的顶板的第一表面到与第一表面相对的顶板的第二表面的热传递。 当加热基板时,产生流过热板和顶板之间的空气的气流。

    Solution treatment apparatus and solution treatment method
    55.
    发明授权
    Solution treatment apparatus and solution treatment method 有权
    溶液处理装置和溶液处理方法

    公开(公告)号:US07547614B2

    公开(公告)日:2009-06-16

    申请号:US11139465

    申请日:2005-05-31

    IPC分类号: H01L21/20

    摘要: In the present invention, a plurality of exhaust paths connected to a plurality of cup bodies surrounding substrate holding portions respectively are joined together for common use, and the openings of exhaust rate adjustment sections provided on the exhaust paths are adjusted with reference to data in which combinations of the numbers of rotations of the substrate holding portions are associated with combinations of set exhaust rates of the exhaust paths when solution treatment is performed by rotating the substrate by the substrate holding portion. According to the present invention, the cup body can be exhausted at an intended exhaust rate at all times independently of the state where the substrate in which cup body is subjected to which process.

    摘要翻译: 在本发明中,将分别连接在基板保持部周围的多个杯体的多个排气通路连接在一起,共同使用,并且参照其中的数据来调整设置在排气路径上的排气速率调节部分的开口 当通过基板保持部旋转基板进行固溶处理时,基板保持部的旋转数的组合与排气路径的设定排气速度的组合相关联。 根据本发明,杯体可以一直以预定的排气速度排出,而与杯体受到哪个处理的基板的状态无关。

    VEHICLE ENVIRONMENTAL SERVICE SYSTEM
    56.
    发明申请
    VEHICLE ENVIRONMENTAL SERVICE SYSTEM 有权
    车辆环境服务体系

    公开(公告)号:US20090091439A1

    公开(公告)日:2009-04-09

    申请号:US12298171

    申请日:2007-04-24

    IPC分类号: B60Q1/00

    摘要: A vehicle environmental service system includes an in-vehicle information terminal mounted in a vehicle, a center server provided in a center, and a provider terminal managed by an affiliated service provider providing various services to users. The in-vehicle information terminal is capable of communicating with the provider terminal directly or through the center server. The in-vehicle information terminal or the center server has a point calculating unit for determining whether safety driving and/or ecological driving is being performed with respect to each of the users based on prescribed criteria and calculating the number of points to be awarded based on the result of the determination. The center server has a database for managing total number of points obtained by accumulating the number of points to be awarded with respect to each of the users. The provider terminal has a service providing unit for providing a prescribed service in exchange for a prescribed number of points in the database and an advertisement generating unit for generating advertisement information of the affiliated service provider. The in-vehicle information terminal has a unit enabling the in-vehicle information terminal to receive the advertisement information from the provider terminal directly or through the center server.

    摘要翻译: 车辆环境服务系统包括安装在车辆中的车载信息终端,设置在中心的中央服务器和由向用户提供各种服务的附属服务提供商管理的提供商终端。 车载信息终端能够直接或通过中心服务器与提供者终端进行通信。 车载信息终端或中央服务器具有点计算单元,用于基于规定的标准来确定是否正在针对每个用户进行安全驾驶和/或生态驾驶,并且基于规定的标准计算要被授予的点数 决定的结果。 中心服务器具有数据库,用于管理通过累积相对于每个用户被授予的点数获得的总点数。 提供者终端具有服务提供单元,用于提供规定的服务以交换数据库中的规定数量的点,以及广告生成单元,用于生成关联服务提供商的广告信息。 车载信息终端具有能够使车载信息终端直接或通过中心服务器从提供商终端接收广告信息的单元。

    Complex pipe and coating/development processing apparatus equipped with complex pipe
    57.
    发明申请
    Complex pipe and coating/development processing apparatus equipped with complex pipe 审中-公开
    复杂管道和涂层/开发加工设备配备复杂的管道

    公开(公告)号:US20080289715A1

    公开(公告)日:2008-11-27

    申请号:US11907391

    申请日:2007-10-11

    IPC分类号: F16L9/18 F16L3/00 B05C5/00

    CPC分类号: H01L21/6715

    摘要: In a complex pipe, a plurality of pipe members containing at least a pipe member for liquid and a pipe member for electricity are fixed in parallel arrangement. One end of the complex pipe is connected to a stationary equipment and the other end is connected to a movable member. The plurality of pipe members are integrally combined by a cover member having flexibility. A liquid supply pipe is inserted with a space in the pipe member for liquid. A fluid for temperature adjustment is supplied to the space between the pipe member for liquid and the liquid supply pipe.

    摘要翻译: 在复合管中,至少包含液体用管构件和电气用管构件的多个管构件并联配置。 复合管的一端连接到固定设备,另一端连接到可移动构件。 多个管构件通过具有柔性的盖构件一体地组合。 液体供给管在液体管构件中插入空间。 用于温度调节的流体被供应到用于液体的管件和液体供给管之间的空间。

    COATING AND DEVELOPING SYSTEM, COATING AND DEVELOPING METHOD AND STORAGE MEDIUM
    58.
    发明申请
    COATING AND DEVELOPING SYSTEM, COATING AND DEVELOPING METHOD AND STORAGE MEDIUM 有权
    涂料与开发系统,涂料和开发方法和储存介质

    公开(公告)号:US20080241403A1

    公开(公告)日:2008-10-02

    申请号:US12058252

    申请日:2008-03-28

    IPC分类号: B05D3/00 B05C13/00 B05C11/00

    CPC分类号: H01L21/67178 H01L21/67745

    摘要: A coating and developing system has a first processing block, a second processing block, and a transfer block interposed between the first and the second processing block. A first direct carrying means carries substrates from a carrier block to the transfer block. The transfer block distributes the substrates to respective film forming unit blocks of the first and the second processing block. Substrates on which films have been formed by the first and the second processing block are collected temporarily in the transfer block. A second direct carrying means carries the substrate collected in the transfer block from the transfer block to an interface block. Use of the first and the second processing block can improve the throughput of the coating and developing system. Since a carrying route from the carrier block to the first processing block, and a carrying route from the carrier block to the second processing block are the same, a carrying program is easy to create.

    摘要翻译: 涂覆和显影系统具有第一处理块,第二处理块和介于第一和第二处理块之间的传输块。 第一直接承载装置将衬底从承载块运送到转移块。 传送块将基板分配到第一和第二处理块的各个成膜单元块。 由第一处理块和第二处理块形成了膜的基板被临时收集在转印块中。 第二直接传送装置将从传送块收集的基板传送到接口块。 使用第一和第二处理块可以提高涂层和显影系统的生产量。 由于从承载块到第一处理块的承载路由和从承载块到第二处理块的承载路由相同,所以携带程序容易创建。

    Substrate heating apparatus and method and coating and developing system
    59.
    发明申请
    Substrate heating apparatus and method and coating and developing system 有权
    基板加热装置及方法及涂层开发系统

    公开(公告)号:US20060252000A1

    公开(公告)日:2006-11-09

    申请号:US11416094

    申请日:2006-05-03

    IPC分类号: F27D5/00 B05C11/02

    摘要: Disclosed is a substrate heating apparatus including a hot plate that heats a substrate, and a cooling plate that supports the substrate and moves between a first position (home position) and the second position above the hot plate to transfer wafers between the two positions. A heat-radiating fin structure is connected to the cooling plate to move together with the cooling plate. The fin structure is thermally connected to the cooling plate via heat pipes. A suction port is arranged so as to locate adjacent to the fin structure when the cooling plate is in the home position. The fin structure is cooled by a gas passing therethrough before flown into the suction port, whereby the cooling plate is cooled through heat transfer from the cooling plate to the fin structure through the heat pipes.

    摘要翻译: 公开了一种基板加热装置,其包括加热基板的加热板和支撑基板并在第一位置(原位置)和热板上方的第二位置之间移动以在两个位置之间转移晶片的冷却板。 散热片结构与冷却板连接,与冷却板一起移动。 翅片结构通过热管热连接到冷却板。 当冷却板处于初始位置时,设置一个吸入口以便邻近翅片结构定位。 在流入吸入口之前,翅片结构被通过​​的气体冷却,由冷却板通过热管从冷却板传递到翅片结构而被冷却。