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公开(公告)号：US20120080605A1
公开(公告)日：2012-04-05
申请号：US13231167
申请日：2011-09-13
申请人： Jun Kawanabe , Chiori Mochizuki , Minoru Watanabe , Takamasa Ishii , Kentaro Fujiyoshi , Hiroshi Wayama
发明人： Jun Kawanabe , Chiori Mochizuki , Minoru Watanabe , Takamasa Ishii , Kentaro Fujiyoshi , Hiroshi Wayama
IPC分类号： G01T1/24
CPC分类号： G01T1/243
摘要： A stacked-type detection apparatus includes a plurality of pixels arranged at small intervals in row and column directions and has small signal line capacitance that allows a high-speed driving operation. Each pixel includes a conversion element configured to convert radiation or light into an electric charge and a switch element disposed on an insulating substrate. A driving line is disposed on the insulating substrate and is connected to switch elements arranged in the row direction; and a signal line is connected to switch elements arranged in the column direction. Each conversion element is disposed above a corresponding switch element. The driving line is realized using a conductive layer embedded in an insulating layer located below an uppermost surface portion of the driving line located below an uppermost surface portion of a main electrode of the switch element located below the conversion element.
摘要翻译： 层叠型检测装置包括以行和列方向以小间隔排列的多个像素，并且具有允许高速驱动操作的小信号线电容。 每个像素包括被配置为将辐射或光转换成电荷的转换元件和设置在绝缘基板上的开关元件。 驱动线设置在绝缘基板上，并与行方向配置的开关元件连接， 并且信号线连接到沿列方向布置的开关元件。 每个转换元件设置在对应的开关元件上方。 利用位于位于位于转换元件下方的开关元件的主电极的最上表面部分下方的驱动线的最上表面部分下方的绝缘层中的导电层来实现驱动线。
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公开(公告)号：US07723695B2
公开(公告)日：2010-05-25
申请号：US11692671
申请日：2007-03-28
IPC分类号： G01T1/208
CPC分类号： H01L27/14659
摘要： This imaging apparatus has pixels arranged in a matrix shape on a substrate, each of which has a conversion element and the first TFT, wherein the first TFT is connected to the first gate wiring and signal wiring, and the conversion element is connected to bias wiring. The imaging apparatus has the second TFT 6 that is arranged outside a region in which the pixels are arranged. The signal wirings are mutually connected through the second TFT 6 outside a region in which the pixels are arranged. When the apparatus is driven, the second TFT is turned off.
摘要翻译： 该成像装置具有在基板上排列成矩阵状的像素，每个像素具有转换元件和第一TFT，其中第一TFT连接到第一栅极布线和信号布线，并且转换元件连接到偏置布线 。 成像装置具有布置在像素排列的区域的外侧的第二TFT 6。 信号布线通过第二TFT 6在像素排列的区域之外相互连接。 当该装置被驱动时，第二个TFT被关闭。
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公开(公告)号：US07638772B2
公开(公告)日：2009-12-29
申请号：US12034969
申请日：2008-02-21
IPC分类号： G01T1/24
CPC分类号： G01T1/2928 , H01L27/14658 , H01L27/14692
摘要： An imaging apparatus includes a plurality of pixels disposed on an insulation substrate. Each of the pixels includes a plurality of thin-film transistors, a conversion element disposed above the TFTs, and a plurality of insulating layers disposed between the conversion element and the plurality of TFTs. The plurality of TFTs includes a reading TFT having a gate electrode electrically connected to the conversion element and a first selecting TFT electrically connected to a source electrode or a drain electrode of the reading TFT. At least one of a signal wiring, to which a signal corresponding to an electric charge obtained by conversion of incident light or radiation performed by the conversion element is transferred, and a gate wiring that supplies a driving signal to a gate electrode of the first selecting thin-film transistor, is disposed between the plurality of insulating layers.
摘要翻译： 成像装置包括设置在绝缘基板上的多个像素。 每个像素包括多个薄膜晶体管，设置在TFT上方的转换元件以及设置在转换元件和多个TFT之间的多个绝缘层。 多个TFT包括具有与转换元件电连接的栅电极的读取TFT和与读取TFT的源电极或漏电极电连接的第一选择TFT。 信号布线中的至少一个传输与通过转换元件进行的入射光或辐射的转换获得的电荷相对应的信号的信号线以及向第一选择的栅电极提供驱动信号的栅极布线 薄膜晶体管，设置在多个绝缘层之间。
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公开(公告)号：US07550731B2
公开(公告)日：2009-06-23
申请号：US11750719
申请日：2007-05-18
IPC分类号： G01T1/24 , H01L27/146
CPC分类号： H01L27/14665
摘要： A conversion apparatus includes a pixel region, on a substrate, including a plurality of pixels arranged in a matrix, with each pixel having a conversion element that converts radiation into electric charges, and a switching element. The switching element has a structure having a gate electrode, a first insulating layer, a second insulating layer, and a semiconductor layer from the substrate side in this order. The conversion element has an MIS-type structure of a bottom electrode arranged on an insulating layer extending from the first insulating layer of the switching element and being vertically higher than the gate electrode of the switching element, an insulating layer which is formed of the same layer as the second insulating layer of the switching element, and a semiconductor layer which is formed of the same layer as the semiconductor layer of the switching element from the substrate side in this order.
摘要翻译： 转换装置包括在基板上的像素区域，其包括以矩阵形式布置的多个像素，每个像素具有将辐射转换成电荷的转换元件和开关元件。 开关元件具有从基板侧依次具有栅电极，第一绝缘层，第二绝缘层和半导体层的结构。 转换元件具有底部电极的MIS型结构，该底部电极布置在从开关元件的第一绝缘层延伸并垂直于开关元件的栅电极的绝缘层上，由其形成的绝缘层 作为开关元件的第二绝缘层的层，以及从基板侧依次形成与开关元件的半导体层相同的层的半导体层。
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55.发明申请IMAGING APPARATUS, RADIATION IMAGING APPARATUS, AND MANUFACTURING METHODS THEREFOR 有权成像装置，放射成像装置及其制造方法公开(公告)号：US20090075405A1
公开(公告)日：2009-03-19
申请号：US12273602
申请日：2008-11-19
IPC分类号： H01L21/66
CPC分类号： H01L27/14603 , H01L27/1462 , H01L27/14632 , H01L27/14665 , H01L27/14685 , H01L27/14687 , H01L27/14692
摘要： An imaging apparatus is provided in which a plurality of pixels, each having a conversion element and a thin-film transistor, are arranged in a two-dimensional fashion on an insulating substrate; the photoelectric conversion element is arranged over the thin-film transistor, with an insulating film, which serves as an interlayer insulating film, inserted between the conversion element and the thin-film transistor; and by way of a contact hole portion provided in the insulating film, the source electrode or the drain electrode of the thin-film transistor and the photoelectric conversion element are connected with each other. The imaging apparatus has a pixel in which the contact hole portion is removed through a laser-beam irradiation so that the connection portion between the conversion element and a conductive layer, which serves as the source electrode or the drain electrode of the thin-film transistor, is discontinued.
摘要翻译： 提供了一种成像装置，其中具有转换元件和薄膜晶体管的多个像素以二维方式布置在绝缘基板上; 光电转换元件布置在薄膜晶体管的上方，并且插入在转换元件和薄膜晶体管之间的绝缘膜，其用作层间绝缘膜; 并且通过设置在绝缘膜中的接触孔部分，薄膜晶体管的源电极或漏电极和光电转换元件彼此连接。 成像装置具有像素，其中通过激光束照射去除接触孔部分，使得转换元件和用作薄膜晶体管的源电极或漏电极的导电层之间的连接部分 ，停产。
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公开(公告)号：US20090008533A1
公开(公告)日：2009-01-08
申请号：US12210839
申请日：2008-09-15
IPC分类号： H01L27/00
CPC分类号： H01L27/14643 , G01T1/2018 , G01T1/24 , H01L27/14603 , H01L27/14632 , H01L27/14663 , H01L27/14692 , H01L31/105
摘要： A radiation imaging apparatus has a pixel region arranged on a substrate. Arranged in a matrix pattern in the pixel region are pixels, each pixel including a conversion element which converts radiation to electrical charges, and a switching element which is connected to the conversion element therein. The radiation imaging apparatus has, in a region outside the pixel region of the substrate, an intersection at which a signal line connected to the switching element and a bias line connected to the conversion element intersects. At the intersection, a semiconductor layer is arranged between the signal line and the bias line, and a carrier blocking portion is arranged between the semiconductor layer and the signal line.
摘要翻译： 放射线成像装置具有布置在基板上的像素区域。 在像素区域中以矩阵图案排列的是像素，每个像素包括将辐射转换成电荷的转换元件，以及连接到转换元件的开关元件。 放射线摄像装置在基板的像素区域外的区域中具有与开关元件连接的信号线和与转换元件连接的偏置线交叉的交点。 在交叉点处，在信号线和偏置线之间设置半导体层，并且在半导体层和信号线之间配置载流子阻挡部。
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公开(公告)号：US20080203311A1
公开(公告)日：2008-08-28
申请号：US12034969
申请日：2008-02-21
IPC分类号： G01T1/24
CPC分类号： G01T1/2928 , H01L27/14658 , H01L27/14692
摘要： An imaging apparatus includes a plurality of pixels disposed on an insulation substrate. Each of the pixels includes a plurality of thin-film transistors, a conversion element disposed above the TFTs, and a plurality of insulating layers disposed between the conversion element and the plurality of TFTs. The plurality of TFTs includes a reading TFT having a gate electrode electrically connected to the conversion element and a first selecting TFT electrically connected to a source electrode or a drain electrode of the reading TFT. At least one of a signal wiring, to which a signal corresponding to an electric charge obtained by conversion of incident light or radiation performed by the conversion element is transferred, and a gate wiring that supplies a driving signal to a gate electrode of the first selecting thin-film transistor, is disposed between the plurality of insulating layers.
摘要翻译： 成像装置包括设置在绝缘基板上的多个像素。 每个像素包括多个薄膜晶体管，设置在TFT上方的转换元件以及设置在转换元件和多个TFT之间的多个绝缘层。 多个TFT包括具有与转换元件电连接的栅电极的读取TFT和与读取TFT的源电极或漏电极电连接的第一选择TFT。 信号布线中的至少一个传输与通过转换元件进行的入射光或辐射的转换获得的电荷相对应的信号的信号线以及向第一选择的栅电极提供驱动信号的栅极布线 薄膜晶体管，设置在多个绝缘层之间。
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公开(公告)号：US20070272870A1
公开(公告)日：2007-11-29
申请号：US11751702
申请日：2007-05-22
IPC分类号： G01T1/24 , H01L27/146 , H01L25/00 , H01L27/00
CPC分类号： H01L27/14643 , G01T1/2018 , G01T1/24 , H01L27/14603 , H01L27/14632 , H01L27/14663 , H01L27/14692 , H01L31/105
摘要： A radiation imaging apparatus has a pixel region arranged on a substrate. Arranged in a matrix pattern in the pixel region are pixels, each pixel including a conversion element which converts radiation to electrical charges, and a switching element which is connected to the conversion element therein. The radiation imaging apparatus has, in a region outside the pixel region of the substrate, an intersection at which a signal line connected to the switching element and a bias line connected to the conversion element intersects. At the intersection, a semiconductor layer is arranged between the signal line and the bias line, and a carrier blocking portion is arranged between the semiconductor layer and the signal line.
摘要翻译： 放射线成像装置具有布置在基板上的像素区域。 在像素区域中以矩阵图案排列的是像素，每个像素包括将辐射转换成电荷的转换元件，以及连接到转换元件的开关元件。 放射线摄像装置在基板的像素区域外的区域中具有与开关元件连接的信号线和与转换元件连接的偏置线交叉的交点。 在交叉点处，在信号线和偏置线之间设置半导体层，并且在半导体层和信号线之间配置载流子阻挡部。
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公开(公告)号：US20070228423A1
公开(公告)日：2007-10-04
申请号：US11692671
申请日：2007-03-28
IPC分类号： H01L27/148
CPC分类号： H01L27/14659
摘要： This imaging apparatus has pixels arranged in a matrix shape on a substrate, each of which has a conversion element and the first TFT, wherein the first TFT is connected to the first gate wiring and signal wiring, and the conversion element is connected to bias wiring. The imaging apparatus has the second TFT 6 that is arranged outside a region in which the pixels are arranged. The signal wirings are mutually connected through the second TFT 6 outside a region in which the pixels are arranged. When the apparatus is driven, the second TFT is turned off.
摘要翻译： 该成像装置具有在基板上排列成矩阵状的像素，每个像素具有转换元件和第一TFT，其中第一TFT连接到第一栅极布线和信号布线，并且转换元件连接到偏置布线 。 成像装置具有布置在像素排列的区域的外侧的第二TFT 6。 信号布线通过第二TFT 6在像素排列的区域之外相互连接。 当该装置被驱动时，第二个TFT被关闭。
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公开(公告)号：US08446495B2
公开(公告)日：2013-05-21
申请号：US12912690
申请日：2010-10-26
摘要： In an image pickup apparatus including a plurality of pixels arranged a matrix of rows and columns, a correction unit performs a correction process based on an electric signal output via a first switch element of a particular pixel and a correction electric signal output via a second switch element of the particular pixel. A correction image signal based on the correction electric signal output via the second switch element is acquired in a period that partially overlaps in time a period in which an image signal based on the electric signal output via the first switch element is acquired. When the electric signal associated with the image signal is output for the particular pixel, the second switch element of the particular pixel is controlled to be in an on-state over a period during which the first switch element of the particular pixel is in an off-state.
摘要翻译： 在包括排列成行和列的矩阵的多个像素的图像拾取装置中，校正单元基于经由特定像素的第一开关元件输出的电信号和经由第二开关输出的校正电信号来执行校正处理 特定像素的元素。 基于经由第二开关元件输出的校正电信号的校正图像信号在获取基于经由第一开关元件输出的电信号的图像信号的时间段的时间部分重叠的时段中被获取。 当针对特定像素输出与图像信号相关联的电信号时，特定像素的第二开关元件在特定像素的第一开关元件处于关闭状态的一段时间内被控制为导通状态 -州。
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