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公开(公告)号：US06538399B1
公开(公告)日：2003-03-25
申请号：US09701282
申请日：2000-11-28
IPC分类号： G01T120
CPC分类号： H01J43/06
摘要： To prevent the deterioration in sensitivity of the photocathode (20) of an electron tube and maintain stable output for a long time, an ion confining electrode (22) and an ion trap electrode (23) are provided between the photocathode (20) and a first stage dynode (24a). The potential of the ion confining electrode (22) is set higher than that of the first stage dynode (24a), while the potential of the ion trap electrode (23) is set equal to or higher than that of the photocathode (20) and lower than that of the first stage dynode 24a. Since the feedback to the photocathode (20) of the positive ions generated in the vicinity of the first stage dynode can be effectively suppressed, the sensitivity of the photocathode (20) is prevented from decreasing, and stable output is maintained for a long time.
摘要翻译： 为了防止电子管的光电阴极（20）的灵敏度下降，并且长时间保持稳定的输出，在光电阴极（20）和光电阴极（20）之间设置离子限制电极（22）和离子阱电极（23） 第一级倍增器（24a）。 离子限制电极（22）的电位被设定为高于第一级倍增极（24a）的电位，而离子捕获电极（23）的电位被设定为等于或高于光电阴极（20）的电位， 低于第一级倍增极24a。 由于可以有效地抑制在第一级倍增电极附近产生的正离子对光电阴极（20）的反馈，防止光电阴极（20）的灵敏度降低，并且长时间保持稳定的输出。
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公开(公告)号：US5936348A
公开(公告)日：1999-08-10
申请号：US955462
申请日：1997-10-21
摘要： In the electron multiplier assembly 27, a dynode unit 10 is constructed from a plurality of dynodes 9 laminated one on another. Each dynode 9 is formed with multichannels 12 which are separated from one another by channel-separating portions 14. A focusing electrode plate 16 is formed with multichannels 18 which are separated from one another by channel-separating electrodes 20 which are located in correspondence with the channel-separating portions 14 of the first stage dynode 9a. A plurality of anodes 7 are provided for receiving electrons multiplied at the dynode unit 10 in their corresponding channels 18. Each channel-separating electrode 20 is formed with an opening 21, at a position confronting the channel-separating portion 14 of the first stage dynode 9a, for transmitting electrons therethrough.
摘要翻译： 在电子倍增器组件27中，倍增电极单元10由多个彼此层叠的倍增电极9构成。 每个倍增电极9形成有多通道12，其通过沟道分离部分14彼此分离。聚焦电极板16形成有多通道18，多通道18通过通道分离电极20彼此分开，通道分离电极20与 第一级倍增极9a的通道分离部分14。 多个阳极7用于接收在其相应的通道18中在倍增电极单元10处相乘的电子。每个通道分离电极20形成有开口21，位于与第一级倍增电极的沟道分离部分14相对的位置 9a，用于透过电子。
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公开(公告)号：US08961806B2
公开(公告)日：2015-02-24
申请号：US13388597
申请日：2011-07-19
申请人： Hideki Shimoi , Hiroyuki Kyushima , Keisuke Araki
发明人： Hideki Shimoi , Hiroyuki Kyushima , Keisuke Araki
IPC分类号： B44C1/22 , H01L21/306 , B23K26/00 , B23K26/06 , B23K26/08
CPC分类号： H01L23/147 , B23K26/0006 , B23K26/0622 , B23K26/0853 , B23K26/53 , B23K2101/40 , B23K2103/56 , H01L21/30608 , H01L21/486 , H01L21/76898 , H01L23/49827
摘要： In a method comprising a modified region forming step of converging a laser light at a sheet-like object to be processed made of silicon so as to form a plurality of modified spots within the object along a modified region forming line tilted in a first lateral direction with respect to a thickness direction of the object and the plurality of modified spots construct a modified region, and an etching step of anisotropically etching the object after the modified region forming step so as to advance the etching selectively along the modified region and form the object with a space extending obliquely with respect to the thickness direction, the modified region forming step forms the plurality of modified spots such that the modified spots adjacent to each other at least partly overlap each other when seen in the first lateral direction.
摘要翻译： 在包括修改区域形成步骤的方法中，所述修改区域形成步骤将激光会聚在由硅制成的待加工的片状物体上，以沿着沿第一横向方向倾斜的改质区域形成线在物体内形成多个改质点 相对于物体的厚度方向，并且所述多个改质点构成改质区域，以及在所述改质区域形成工序之后对所述物体进行各向异性蚀刻的蚀刻工序，以沿着所述改质区域选择性地进行蚀刻，并形成所述物体 具有相对于厚度方向倾斜延伸的空间，所述改质区域形成步骤形成所述多个改质点，使得当在所述第一横向方向上观察时，彼此相邻的所述改性斑点彼此至少部分重叠。
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54.发明授权Photomultiplier tube having a plurality of stages of dynodes with recessed surfaces 有权光电倍增管具有多级具有凹陷表面的倍增极公开(公告)号：US08492694B2
公开(公告)日：2013-07-23
申请号：US12904650
申请日：2010-10-14
申请人： Hideki Shimoi , Hiroyuki Kyushima
发明人： Hideki Shimoi , Hiroyuki Kyushima
IPC分类号： H01J40/14
CPC分类号： H01J43/22
摘要： The photomultiplier tube 1 is provided with an electron multiplying part 33 having a plurality of stages of dynodes 33a to 33l arrayed along a direction at which electrons are multiplied on an inner surface 40a of a casing 5 and a photocathode 41 and an anode part 34 installed so as to be spaced away form the electron multiplying part 33 inside the casing 5. Each of the dynode 33c to 33e is provided with a plurality of columnar parts 51c to 51e where secondary electron emitting surfaces 53c to 53e are formed, thereby forming electron multiplying channels C between adjacent columnar parts. An opposing surface 54e which opposes a columnar part 51d which is a previous stage at a columnar part 51e which is a subsequent stage is formed in such a manner that both end parts 56e, 57e in a direction along the inner surface 40a of the opposing surface 54e project to the first end side from a site 55e which opposes the end part of the second end side on the secondary electron emitting surface 53d of the columnar part 51d.
摘要翻译： 光电倍增管1具有电子倍增部33，电子倍增部33具有多个级的倍增电极33a〜33l，沿电子倍增电极的方向排列在壳体5的内表面40a上，光电阴极41和阳极部34被安装 以从外壳5内的电子倍增部33隔开。倍增极33c〜33e中的每一个设有多个形成二次电子发射面53c〜53e的柱状部51c〜51e，形成电子倍增 相邻柱状部分之间的通道C. 在作为后续的柱状部51e的前一级的柱状部51d的对置面54e形成为使得两端部56e，57e沿着相对面的内表面40a的方向 54e从与柱状部51d的二次电子发射面53d上的第二端侧的端部相对的位置55e突出到第一端侧。
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公开(公告)号：US08330364B2
公开(公告)日：2012-12-11
申请号：US12388961
申请日：2009-02-19
IPC分类号： H01J43/18
摘要： The present invention relates to a photomultiplier that realizes a significant improvement of response time characteristics by a structure enabling mass production. The photomultiplier comprises a sealed container, and, in the sealed container, a photocathode, an electron multiplier section, and an anode are respectively disposed. The electron multiplier section includes multiple stages of dynode units, and each of the multiple stages of dynode units is fixed with one end of the associated dynode pin while being electrically connected thereto. In particular, the dynode pin, whose one ends are fixed to the multiple stages of dynode units, are held within an effective region of the electron multiplier section contributing to secondary electron multiplication, when the electron multiplier section is viewed from the photocathode side. By this configuration, a focusing distance from the photocathode to a first stage dynode unit can be shortened effectively and the effective region of the electron multiplier section can be enlarged to effectively reduce variations in transit time of photoelectrons propagating from the photocathode to the first stage dynode unit.
摘要翻译： 本发明涉及光电倍增器，其通过能够批量生产的结构实现响应时间特性的显着改善。 光电倍增管包括密封容器，并且在密封容器中分别设置有光电阴极，电子倍增器部分和阳极。 电子倍增器部分包括多级倍增电极单元，并且多级倍增电极单元中的每一级在相关联的倍增极引脚的一端被电连接的同时被固定。 特别地，当从光电阴极侧观察电子倍增器部分时，其一端固定到倍增电极单元的多级的倍增极销被保持在有助于二次电子倍增的电子倍增器部分的有效区域内。 通过这种结构，可以有效地缩短从光电阴极到第一级倍增电极单元的聚焦距离，并且可以扩大电子倍增器部分的有效区域，从而有效地减少从光电阴极传播到第一级倍增电极的光电子的通过时间的变化 单元。
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公开(公告)号：US07919921B2
公开(公告)日：2011-04-05
申请号：US11921944
申请日：2006-06-01
申请人： Hiroyuki Kyushima , Hideki Shimoi , Hiroyuki Sugiyama , Hitoshi Kishita , Suenori Kimura , Yuji Masuda , Takayuki Ohmura
发明人： Hiroyuki Kyushima , Hideki Shimoi , Hiroyuki Sugiyama , Hitoshi Kishita , Suenori Kimura , Yuji Masuda , Takayuki Ohmura
IPC分类号： H01J43/18
CPC分类号： H01J43/18
摘要： The present invention relates to a photomultiplier having a fine structure capable of realizing high multiplication efficiency. The photomultiplier comprises a housing whose inside is maintained vacuum, and, on a device mounting surface which is a part of an inner wall surface defining an internal space of the housing, a photocathode serving as a reflection type photocathode, an electron-multiplier section, an anode, and a voltage distributing section are disposed integrally. In particular, the electron-multiplier section is constituted by dynodes at multiple stages cascade-multiplying photoelectrons from the photocathode, and the voltage distributing section, which applies corresponding voltages to the dynodes at the respective stages respectively, is on the same surface together with the electron-multiplier section.
摘要翻译： 本发明涉及具有能够实现高倍增效率的精细结构的光电倍增管。 光电倍增管包括其内部保持真空的壳体，并且在作为限定壳体的内部空间的内壁表面的一部分的装置安装表面上，用作反射型光电阴极的光电阴极，电子倍增器部分， 阳极和电压分配部一体地设置。 特别地，电子倍增器部分由多级级联倍增电倍增电极构成，光电阴极的级联倍增电极和分别对相应电平的倍增电极施加相应电压的电压分配部分与 电子倍增器部分。
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公开(公告)号：US07906725B2
公开(公告)日：2011-03-15
申请号：US11922029
申请日：2006-06-28
IPC分类号： H05K5/06
CPC分类号： H01J43/28 , H01J5/24 , H01L51/5243 , H01L51/5246
摘要： An object is to sufficiently keep the airtightness in a vacuum container even when it is made smaller. A photomultiplier tube 1 comprises a flat sheet-like lower substrate 4, a casing-like frame 3b erected on the lower substrate 4, an upper substrate 2 including a frame 3a airtightly joined to an opening part of the frame 3b while holding a low-melting metal therebetween, and a frame-like projection 25b arranged in parallel with the frame 3b on the inner side of the frame 3b on the lower substrate 4.
摘要翻译： 一个目的是在真空容器中充分保持气密，即使它变小。 光电倍增管1包括平板状下基板4，竖立在下基板4上的壳状框架3b，上基板2，其具有气密地接合到框架3b的开口部的框架3a， 熔融金属，以及在下基板4上的框架3b的内侧上与框架3b平行布置的框架状突起25b。
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58.发明授权公开(公告)号：US07880385B2
公开(公告)日：2011-02-01
申请号：US11921959
申请日：2006-06-01
申请人： Hiroyuki Kyushima , Hideki Shimoi , Hiroyuki Sugiyama , Hitoshi Kishita , Suenori Kimura , Yuji Masuda , Takayuki Ohmura
发明人： Hiroyuki Kyushima , Hideki Shimoi , Hiroyuki Sugiyama , Hitoshi Kishita , Suenori Kimura , Yuji Masuda , Takayuki Ohmura
CPC分类号： H01J43/24
摘要： The present invention relates to a photomultiplier having a fine structure capable of realizing high detection accuracy by effectively suppressing cross talk among electron-multiplier channels. The photomultiplier comprises a housing whose inside is maintained vacuum, and, in the housing, a photocathode, an electron-multiplier section, and anodes are disposed. The electron-multiplier section has groove portions for cascade-multiplying photoelectrons as electron-multiplier channels, and the anodes are constituted by channel electrodes corresponding to the groove portions respectively defined by wall parts. In particular, at least parts of the respective channel electrodes are located in spaces sandwiched between pairs of wall parts defining the corresponding groove portions.
摘要翻译： 本发明涉及具有能够通过有效地抑制电子倍增器通道之间的串扰来实现高检测精度的精细结构的光电倍增管。 光电倍增管包括其内部保持真空的壳体，并且在壳体中设置光电阴极，电子倍增器部分和阳极。 电子倍增器部分具有用于级联倍增光电子作为电子倍增器通道的槽部分，并且阳极由对应于分别由壁部分限定的槽部分的沟道电极构成。 特别地，各通道电极的至少一部分位于夹在形成相应凹槽部分的一对壁部分之间的空间中。
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公开(公告)号：US07867807B2
公开(公告)日：2011-01-11
申请号：US12161890
申请日：2007-02-28
IPC分类号： H01L21/00
CPC分类号： H01J40/02
摘要： The present invention relates to a manufacturing method of obtaining a photoelectric converting device which can sufficiently maintain airtightness of a housing space for photocathode without degradation of the characteristics of the photocathode. In accordance with the manufacturing method, on the side wall end face of a lower frame and a bonding portion of an upper frame forming an envelope of the photoelectric converting device, a multilayered metal film of chromium and nickel is formed. In a vacuum space decompressed to a predetermined degree of vacuum and having a temperature not more than the melting point of indium, these upper and lower frames introduced therein are brought into close contact with each other with a predetermined pressure while sandwiching indium wire members, and accordingly, an envelope having a housing space whose airtightness is sufficiently maintained is obtained.
摘要翻译： 本发明涉及一种获得光电转换装置的制造方法，该光电转换装置能够充分保持用于光电阴极的容纳空间的气密性，而不会降低光电阴极的特性。 根据制造方法，在下框架的侧壁端面和形成光电转换装置的外壳的上框架的接合部分形成铬和镍的多层金属膜。 在减压至预定真空度并且具有不高于铟的熔点的温度的真空空间中，引入其中的这些上下框架以预定压力彼此紧密接触，同时夹入铟线构件，并且 因此，获得具有充分保持气密性的收纳空间的信封。
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公开(公告)号：US20090283290A1
公开(公告)日：2009-11-19
申请号：US11922029
申请日：2006-06-28
IPC分类号： H05K5/06
CPC分类号： H01J43/28 , H01J5/24 , H01L51/5243 , H01L51/5246
摘要： An object is to sufficiently keep the airtightness in a vacuum container even when it is made smaller. A photomultiplier tube 1 comprises a flat sheet-like lower substrate 4, a casing-like frame 3b erected on the lower substrate 4, an upper substrate 2 including a frame 3a airtightly joined to an opening part of the frame 3b while holding a low-melting metal therebetween, and a frame-like projection 25b arranged in parallel with the frame 3b on the inner side of the frame 3b on the lower substrate 4.
摘要翻译： 一个目的是在真空容器中充分保持气密，即使它变小。 光电倍增管1包括平板状下基板4，竖立在下基板4上的壳状框架3b，上基板2，其具有气密地接合到框架3b的开口部的框架3a， 熔融金属，以及在下基板4上的框架3b的内侧上与框架3b平行布置的框架状突起25b。
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