摘要:
A method and equipment which includes an illustrated-spot illumination-distribution data table for storing an illumination distribution within an illustrated spot and which calculates a coordinate position for a particle or a defect and the diameter of the particle on the basis of detection light intensity data about the particle or defect and the illustrated-spot illumination-distribution data table. Thus, even when the illumination distribution within the illustrated spot based on an actual illumination optical system is not a Gaussian distribution, the calculation of the particle diameter of the detected particle or defect and the calculation of a coordinate position on the surface of an object to be inspected can be attained with an increased accuracy.
摘要:
Based on a plurality of defects' position-coordinates and attribute detected by an inspecting apparatus, defects that are easily detectable by an observing apparatus are selected. With these selected defects employed as the indicator, the observing apparatus detects and observes the defects. Moreover, creating a coordinate transformation formula for representing a correlated relationship in the defects' position-coordinates between both the apparatuses, the observing apparatus transforms the defects' position-coordinates so as to observe the defects.
摘要:
A surface defect inspection apparatus is structured to add detection signals of multi-directionally detected scattered lights to detect a tiny defect and to individually process the respective detection signals to prevent an error failing to detect an anisotropic defect.
摘要:
In the conventional contaminant particle/defect inspection method, if the illuminance of the illumination beam is held at not more than a predetermined upper limit value not to give thermal damage to the sample, the detection sensitivity and the inspection speed being in the tradeoff relation with each other, it is very difficult to improve one of the detection sensitivity and the inspection speed without sacrificing the other or improve both at the same time. The invention provides an improved optical inspection method and an improved optical inspection apparatus, in which a pulse laser is used as a light source, and a laser beam flux is split into a plurality of laser beam fluxes which are given different time delay to form a plurality of illumination spots. The scattered light signal from each illumination spot is isolated and detected by using a light emission start timing signal for each illumination spot.
摘要:
Based on a plurality of defects' position-coordinates and attribute detected by an inspecting apparatus, defects that are easily detectable by an observing apparatus are selected. With these selected defects employed as the indicator, the observing apparatus detects and observes the defects. Moreover, creating a coordinate transformation formula for representing a correlated relationship in the defects' position-coordinates between both the apparatuses, the observing apparatus transforms the defects' position-coordinates so as to observe the defects.
摘要:
An object of the present invention is to provide a capillary electrophoresis apparatus in which simultaneity can be ensured between sensitivity and data acquisition to decrease a pull-up signal while spectral data acquisition is eliminated in each capillary exchange. The invention relates to a capillary electrophoresis apparatus characterized in that a multi-bandpass filter is provided in an optical detection system. In one aspect of the invention, a signal detection area of a two-dimensional detector is divided into plural regions corresponding to wavelength transmission regions of the multi-bandpass filter. An integrated value of the fluorescence spectrum signal is determined in the region including a fluorescence spectrum peak of an analysis sample in the plural regions. The analysis is performed with the integrated value.
摘要:
When a detected value of the signal processing speed from a frequency comparator is larger than a prescribed value input from an input terminal, the rotation control of a disk is switched from constant linear velocity control to constant angular velocity control using an error signal from an arithmetic unit. Alternatively, when a detected value of the rotational velocity from a frequency comparator is larger than a prescribed value input form an input terminal, the rotation control of the disk is switched from the constant angular velocity control into the constant linear velocity control.
摘要:
In order to suppress base line drift due to change in a light source and to start analysis with a short waiting time so as to improve quantitative accuracy of analysis, a detected signal in a measurement wavelength and a detected signal in a reference wavelength are measured at each of arbitrary light intensity points by varying light intensity of a light source, and the corresponding relationship between the wavelengths is stored. An incident light intensity of the measurement wavelength is estimated from a detected signal in the reference wavelength based on the stored data.
摘要:
In imaging methods represented by the echo-planar method, i.e., in a method including a step of measuring the spin echos while applying a fixed gradient magnetic field to an object and applying a gradient field G.sub.Y periodically inverted in sense to the object and a step of obtaining the spin distribution image in the spatial domain by applying two-dimensional Fourier transform to the measured data, measurement is repeated a plurality of times while altering the phase of the applied waveform of G.sub.X, and the spin density image is derived by applying two-dimensional Fourier transform to a plurality of sets of data groups thus obtained.
摘要:
An NMR imaging method using a rotating field gradient is disclosed in which transverse magnetization is prepared in a portion of an object to be inspected, by the 90.degree.-180.degree. RF pulse excitation, a rotating field gradient is generated to perform a sampling operation for an output signal in a state that the position of signal in a phase space is revolved, the intensity or rotational speed of the rotating field gradient is varied stepwise or continuously to obtain data arranged on concentric circles or a spiral in the phase space, and the data thus obtained undergoes Fourier transformation in each of a plurality of radial directions or two-dimensional Fourier transformation, to form an image of spin distribution.