Anti-reflection coating forming composition
    51.
    发明授权
    Anti-reflection coating forming composition 有权
    防反射涂层成型组合物

    公开(公告)号:US06852791B2

    公开(公告)日:2005-02-08

    申请号:US09987367

    申请日:2001-11-14

    IPC分类号: G03F7/004 G03F7/09 C08K3/00

    CPC分类号: G03F7/091

    摘要: An anti-reflection coating-forming composition is provided. This composition includes a polymer and a solvent. The polymer has a structural unit represented by the formula (1): wherein R1 is a monovalent atom other than a hydrogen atom or a monovalent group, and n is an integer of 0-4, provided that when n is an integer of 2-4, a plural number of R1's are the same or different; R2 and R3 are each a monovalent atom or group; and X is a bivalent group. The anti-reflection coating formed from this composition has a high antireflective effect, does not generate intermixing with a resist film, and enables a good resist pattern profile excellent in resolution and precision in cooperation with a positive or negative resist.

    摘要翻译: 提供了防反射涂层组合物。 该组合物包括聚合物和溶剂。 聚合物具有由式(1)表示的结构单元:其中R1是除氢原子或一价基团以外的一价原子,n为0-4的整数,条件是当n为2- 如图4所示,多个R1相同或不同; R2和R3各自为一价原子或基团; X为二价基团。 由该组合物形成的抗反射涂层具有高的抗反射效果,不会产生与抗蚀剂膜的混合,并且能够与正或负的抗蚀剂配合,分辨率和精度优异的抗蚀剂图案轮廓良好。

    Controlling device and controlling method
    52.
    发明授权
    Controlling device and controlling method 有权
    控制装置及控制方法

    公开(公告)号:US06684113B2

    公开(公告)日:2004-01-27

    申请号:US10343902

    申请日:2003-02-03

    申请人: Masato Tanaka

    发明人: Masato Tanaka

    IPC分类号: G05B1302

    CPC分类号: G05B11/42 G05B11/32

    摘要: Controllers (PID1 to PIDn) perform control so that the controlled variables of first to n-th control loops may agree with their preset values. A step response progress calculating section (C_R1) calculates the progress &agr;1 of the step response of the first control loop where the variation of the controlled variable is the slowest. Control loop internal preset value calculating sections (C_S2 to C_Sn) correct the preset values of the second to n-th control loops according to the progress &agr;1 of the step response so that the controlled variables of the second to n-th control loops vary synchronously with the controlled variable of the first control loop and give the corrected preset values to the controllers (PID2 to PIDn).

    摘要翻译: 控制器(PID1〜PIDn)进行控制,使第1〜第n控制回路的受控变量与其预设值一致。 阶跃响应进度计算部(C_R1)计算控制变量的变化最慢的第一控制回路的阶跃响应的进度α1。 控制回路内部预设值计算部(C_S2〜C_Sn)根据阶跃响应的进度α1来校正第二〜第n控制回路的预设值,使得第二〜第n控制回路的受控变量同步变化 与第一个控制回路的控制变量一起,并将修正后的预设值提供给控制器(PID2至PIDn)。

    Electrophotographic photosensitive member process cartridge and electrophotographic apparatus
    53.
    发明授权
    Electrophotographic photosensitive member process cartridge and electrophotographic apparatus 有权
    电子照相感光构件处理盒和电子照相设备

    公开(公告)号:US06190811B1

    公开(公告)日:2001-02-20

    申请号:US09363857

    申请日:1999-07-30

    IPC分类号: G03G506

    CPC分类号: G03G5/0696

    摘要: An electrophotographic photosensitive member is disclosed which has a support and a photosensitive layer and is exposed to semiconductor laser light having a wavelength of from 380 nm to 500 nm. The photosensitive layer contains a gallium phthalocyanine compound, or an oxytitanium phthalocyanine compound having a strong peak at 27.2° plus-minus 0.2° of the diffraction angle in CuK&agr; characteristic X-ray diffraction. Also, disclosed are a process cartridge and an electrophotographic apparatus making use of the photosensitive member.

    摘要翻译: 公开了一种电子照相感光构件,其具有支撑体和感光层,并暴露于波长为380nm至500nm的半导体激光。 感光层含有镓酞菁化合物或在CuKalpha特征X射线衍射中衍射角在27.2°±0.2°具有强峰的氧钛酞菁化合物。 此外,公开了使用感光构件的处理盒和电子照相设备。

    Magnetic tape cassette
    54.
    发明授权
    Magnetic tape cassette 失效
    磁带盒

    公开(公告)号:US5777819A

    公开(公告)日:1998-07-07

    申请号:US820704

    申请日:1997-03-18

    申请人: Masato Tanaka

    发明人: Masato Tanaka

    摘要: A recording and/or reproducing apparatus employs a magazine holding a number of small-size micro-cassettes retaining magnetic tape. The tape cassette has a pivotable lid that includes a cut-away portion that cooperates with an engagement portion of a tape cassette withdrawing member that is part of the recording and/or reproducing apparatus, so that any of the tape cassettes can be withdraw from the magazine.

    摘要翻译: 记录和/或再现装置使用保持多个保持磁带的小尺寸微型盒的存储盒。 带盒具有可枢转的盖,其包括与作为记录和/或再现装置的一部分的带盒退出构件的接合部分配合的切口部分,使得任何带盒可从 杂志。

    Method for producing polycarbosilanes
    56.
    发明授权
    Method for producing polycarbosilanes 失效
    生产聚碳硅烷的方法

    公开(公告)号:US5605998A

    公开(公告)日:1997-02-25

    申请号:US401913

    申请日:1995-03-09

    CPC分类号: C08G77/60 C08K5/0091

    摘要: There is disclosed a method for producing polycarbosilanes, comprising polymerizing silane of the formula SiH.sub.4 with dienes in the presence of a rare earth metal complex. Polycarbosilanes useful as photoreactive materials and as raw material of silicon carbide-series ceramics can be obtained in a high yield from silane (SiH.sub.4) and dienes.

    摘要翻译: 公开了一种生产聚碳硅烷的方法,其包括在稀土金属络合物的存在下将式SiH 4的硅烷与二烯聚合。 可以从硅烷(SiH4)和二烯以高产率获得用作光反应性材料的聚碳硅烷和碳化硅系陶瓷的原料。

    Pressure sensitive manifold sheet containing color developer composition
    57.
    发明授权
    Pressure sensitive manifold sheet containing color developer composition 失效
    含有彩色显影剂组合物的压敏歧管片

    公开(公告)号:US5328884A

    公开(公告)日:1994-07-12

    申请号:US27987

    申请日:1993-03-08

    IPC分类号: B41M5/155

    CPC分类号: B41M5/155

    摘要: The present invention provides a color developer composition characterized in that the composition contains a color developer comprising as its main component a nucleus-substituted salicylic acid salt represented by the formula (1) given below, and at least one amide compound selected from the group consisting of the compounds of represented by the formula (2) and formula (3) given below. ##STR1## wherein R.sub.1 to R.sub.10 are as defined in the specification.

    摘要翻译: 本发明提供了一种彩色显影剂组合物,其特征在于该组合物含有着色显影剂,其包含以下述式(1)表示的核取代的水杨酸盐作为其主要成分,以及至少一种选自以下的酰胺化合物: 的由下式给出的式(2)和式(3)表示的化合物。 式(1)式(2)其中R 1至R 10如说明书中所定义的式(3)。

    Apparatus for processing information based on fuzzy logic
    58.
    发明授权
    Apparatus for processing information based on fuzzy logic 失效
    基于模糊逻辑处理信息的装置

    公开(公告)号:US5307443A

    公开(公告)日:1994-04-26

    申请号:US775123

    申请日:1991-10-11

    申请人: Masato Tanaka

    发明人: Masato Tanaka

    IPC分类号: G06N7/02 G06F15/18

    CPC分类号: G06N7/026 Y10S706/90

    摘要: An apparatus for processing fuzzy information based on a membership function defining a fuzzy set, which generates the membership function with an elliptic, parabolic or rectangular, shape of equi-grade contour plane or line, incorporates the membership function at any position in a multi-dimensional space with a plurality of input variables and grade of compatibility as coordinates, and calculates and outputs a value of the grade of compatibility with respect to the incorporated membership function for given input variables.

    摘要翻译: 一种用于基于定义模糊集的隶属函数来处理模糊信息的装置,其产生具有椭圆,抛物线或矩形的等级轮廓平面或线的形状的隶属度函数, 具有多个输入变量和兼容性等级作为坐标的三维空间,并且针对给定的输入变量计算并输出与所合并的隶属函数的兼容性等级的值。

    Wafer cleaning method and apparatus therefore
    59.
    发明授权
    Wafer cleaning method and apparatus therefore 失效
    因此,晶片清洗方法和装置

    公开(公告)号:US5288333A

    公开(公告)日:1994-02-22

    申请号:US921565

    申请日:1992-07-29

    摘要: A wafer cleaning method and apparatus in which a cleaning solution is caused to evaporate at a temperature below its boiling point, and cleaning vapor thus produced is applied at a temperature above its dew point to a wafer such as a semiconductor wafer. The wafer is cleaned without formation of colloidal silica in the absence of aerosol, or etched uniformly free of impurities. The wafer cleaning apparatus comprises a cleaning solution storage, a vapor generating section, a wafer supporting position of a wafer supporting device and a vapor supply section. These components are arranged in a housing to overlap one another in plan view and to lie vertically close to one another. The apparatus has a compact overall construction with simplified seals for preventing leakage of the cleaning vapor.

    摘要翻译: 在低于其沸点的温度下使清洗溶液蒸发的晶片清洗方法和设备,并且将如此产生的清洗蒸汽在其露点以上的温度下施加到诸如半导体晶片的晶片上。 在不存在气溶胶的情况下,晶片被清洁而不形成胶体二氧化硅,或者均匀地蚀刻不含杂质。 晶片清洗装置包括清洗溶液储存器,蒸汽产生部分,晶片支撑装置的晶片支撑位置和蒸气供应部分。 这些部件布置在壳体中以在平面图中彼此重叠并且垂直地彼此靠近。 该装置具有紧凑的整体结构,具有简化的密封,用于防止清洁蒸气的泄漏。