摘要:
An anti-reflection coating-forming composition is provided. This composition includes a polymer and a solvent. The polymer has a structural unit represented by the formula (1): wherein R1 is a monovalent atom other than a hydrogen atom or a monovalent group, and n is an integer of 0-4, provided that when n is an integer of 2-4, a plural number of R1's are the same or different; R2 and R3 are each a monovalent atom or group; and X is a bivalent group. The anti-reflection coating formed from this composition has a high antireflective effect, does not generate intermixing with a resist film, and enables a good resist pattern profile excellent in resolution and precision in cooperation with a positive or negative resist.
摘要:
Controllers (PID1 to PIDn) perform control so that the controlled variables of first to n-th control loops may agree with their preset values. A step response progress calculating section (C_R1) calculates the progress &agr;1 of the step response of the first control loop where the variation of the controlled variable is the slowest. Control loop internal preset value calculating sections (C_S2 to C_Sn) correct the preset values of the second to n-th control loops according to the progress &agr;1 of the step response so that the controlled variables of the second to n-th control loops vary synchronously with the controlled variable of the first control loop and give the corrected preset values to the controllers (PID2 to PIDn).
摘要:
An electrophotographic photosensitive member is disclosed which has a support and a photosensitive layer and is exposed to semiconductor laser light having a wavelength of from 380 nm to 500 nm. The photosensitive layer contains a gallium phthalocyanine compound, or an oxytitanium phthalocyanine compound having a strong peak at 27.2° plus-minus 0.2° of the diffraction angle in CuK&agr; characteristic X-ray diffraction. Also, disclosed are a process cartridge and an electrophotographic apparatus making use of the photosensitive member.
摘要:
A recording and/or reproducing apparatus employs a magazine holding a number of small-size micro-cassettes retaining magnetic tape. The tape cassette has a pivotable lid that includes a cut-away portion that cooperates with an engagement portion of a tape cassette withdrawing member that is part of the recording and/or reproducing apparatus, so that any of the tape cassettes can be withdraw from the magazine.
摘要:
An electrophotographic system is constituted by an electrophotographic photosensitive member, a charger for charging the photosensitive member to a potential, and an illuminator for illuminating the charged photosensitive member with a light beam to form an electrostatic image thereon. The electrophotographic photosensitive member has a potential-exposure energy characteristic providing an induction energy and a gamma valve varying depending on an electric field intensity induced by the charged potential. The electrophotographic system further includes a controller for controlling the charged potential on the photosensitive member corresponding to resolution and gradation data of an original, so as to optimally reproduce the resolution and gradation, as desired, of the original.
摘要:
There is disclosed a method for producing polycarbosilanes, comprising polymerizing silane of the formula SiH.sub.4 with dienes in the presence of a rare earth metal complex. Polycarbosilanes useful as photoreactive materials and as raw material of silicon carbide-series ceramics can be obtained in a high yield from silane (SiH.sub.4) and dienes.
摘要:
The present invention provides a color developer composition characterized in that the composition contains a color developer comprising as its main component a nucleus-substituted salicylic acid salt represented by the formula (1) given below, and at least one amide compound selected from the group consisting of the compounds of represented by the formula (2) and formula (3) given below. ##STR1## wherein R.sub.1 to R.sub.10 are as defined in the specification.
摘要:
An apparatus for processing fuzzy information based on a membership function defining a fuzzy set, which generates the membership function with an elliptic, parabolic or rectangular, shape of equi-grade contour plane or line, incorporates the membership function at any position in a multi-dimensional space with a plurality of input variables and grade of compatibility as coordinates, and calculates and outputs a value of the grade of compatibility with respect to the incorporated membership function for given input variables.
摘要:
A wafer cleaning method and apparatus in which a cleaning solution is caused to evaporate at a temperature below its boiling point, and cleaning vapor thus produced is applied at a temperature above its dew point to a wafer such as a semiconductor wafer. The wafer is cleaned without formation of colloidal silica in the absence of aerosol, or etched uniformly free of impurities. The wafer cleaning apparatus comprises a cleaning solution storage, a vapor generating section, a wafer supporting position of a wafer supporting device and a vapor supply section. These components are arranged in a housing to overlap one another in plan view and to lie vertically close to one another. The apparatus has a compact overall construction with simplified seals for preventing leakage of the cleaning vapor.