摘要:
An anti-reflection coating-forming composition is provided. This composition includes a polymer and a solvent. The polymer has a structural unit represented by the formula (1): wherein R1 is a monovalent atom other than a hydrogen atom or a monovalent group, and n is an integer of 0-4, provided that when n is an integer of 2-4, a plural number of R1's are the same or different; R2 and R3 are each a monovalent atom or group; and X is a bivalent group. The anti-reflection coating formed from this composition has a high antireflective effect, does not generate intermixing with a resist film, and enables a good resist pattern profile excellent in resolution and precision in cooperation with a positive or negative resist.
摘要:
A pattern forming method comprising forming a coating of a radiation-sensitive resin composition, which contains an acid-dissociable group-containing polysiloxane, alkali-insoluble or scarcely alkali-soluble but becoming alkali-soluble when the acid-dissociable group dissociates, on a film containing a polymer with a carbon content of 80 wt % or more and a polystyrene-reduced weight average molecular weight of 500-100,000, an applying radiation to the coating is provided. The method can form minute patterns with a high aspect ratio by suitably selecting a specific etching gas in the dry etching process, without being affected by standing waves.
摘要:
A pattern forming method comprising forming a coating of a radiation-sensitive resin composition, which contains an acid-dissociable group-containing polysiloxane, alkali-insoluble or scarcely alkali-soluble but becoming alkali-soluble when the acid-dissociable group dissociates, on a film containing a polymer with a carbon content of 80 wt % or more and a polystyrene-reduced weight average molecular weight of 500–100,000, an applying radiation to the coating is provided. The method can form minute patterns with a high aspect ratio by suitably selecting a specific etching gas in the dry etching process, without being affected by standing waves.
摘要:
A novel polysiloxane suitable as a resin component of a chemically-amplified resist exhibiting particularly excellent I-D bias, depth of focus (DOF), and the like, a novel silane compound useful as a raw material for synthesizing the polysiloxane, and a radiation-sensitive resin composition comprising the polysiloxane are provided.The silane compound is shown by the following formula (I), and the polysiloxane has a structural unit shown by the following formula (1), wherein R is an alkyl group, R1 and R2 individually represent a fluorine atom, lower alkyl group, or lower fluoroalkyl group, n is 0 or 1, k is 1 or 2, and i is an integer of 0 to 10.The radiation-sensitive resin composition comprises the polysiloxane and a photoacid generator.
摘要:
Novel compounds acetoxymethylacenaphthylene and hydroxymethylacenaphthyleneare disclosed. A polymer prepared from these novel compounds containing a structural unit of the formula (3), wherein R1 is a hydrogen atom and R2and R3 individually represent a monovalent atom or a monovalent organic group is also disclosed. The polymer is suitable as a component for an antireflection film-forming composition exhibiting a high antireflection effect and not causing intermixing with a resist film.
摘要:
An image forming apparatus including an image forming unit, a fixing device, and circuitry is provided. The image forming unit is configured to perform a special image forming operation that forms a color toner image and a special toner image with a color toner and a special toner, respectively, on a recording medium and a normal image forming operation that forms the color toner image without forming the special toner image on the recording medium. The fixing device is configured to fix the color toner image and the special toner image on the recording medium. The circuitry is configured to perform, in the special image forming operation, a toner amount suppression control that makes an amount of the color toner on the recording medium per unit area smaller than that in the normal image forming operation.
摘要:
An electrophotographic photosensitive member having a surface layer containing a polymeric product obtained by polymerizing a specific adamantane compound, a process cartridge and an electrophotographic apparatus which have the electrophotographic photosensitive member, and a process for producing the electrophotographic photosensitive member.
摘要:
An electrophotographic photosensitive member has a surface layer that contains a urea compound having two or more urea moieties. Each of the urea moieties has a carbonyl group and two nitrogen atoms. Each of the two nitrogen atoms connects to an alkyl group and a substituted or unsubstituted aryl group or a substituted or unsubstituted arylene group.
摘要:
An electrophotographic photosensitive member has a surface layer that contains a polymer produced by the polymerization of a charge transporting substance having two or more methacryloyloxy groups per molecule. The surface layer contains a quinone derivative at a concentration of 5 ppm or more and 1500 ppm or less of the total mass of the polymer. The quinone derivative is a compound represented by the following formula (1) or a compound represented by the following formula (2) or both.
摘要:
An outdoor air temperature information acquisition section acquires the outdoor air temperature, a room temperature information acquisition section that acquires room temperature, an air conditioner state information acquisition section that acquires information on the state of heat exchange type air conditioners and the outdoor air cooler, an estimated value calculating section for room temperature during outdoor air cooling calculating the estimated value for room temperature after switching to the complete outdoor air cooling mode that stops the heat exchange type air conditioner and carries out room temperature control by only increasing or decreasing the effect of the outdoor air cooler from the cooling mode mainly using the heat exchange type air conditioner. An estimated value display section for room temperature during outdoor air cooling, a switching instruction input section receiving the switching operation to complete outdoor air cooling from the occupant and a switching section carrying out switching to the complete outdoor air cooling mode according to the switching instruction.